Fabrication of oxide-nitride gradient structure to enhance energy conversion efficiency of photoelectrode
| Project/Area Number |
17H03427
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Material processing/Microstructural control engineering
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| Research Institution | Nagaoka University of Technology |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
土屋 哲男 国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 副研究センター長 (80357524)
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| Project Period (FY) |
2017-04-01 – 2021-03-31
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| Project Status |
Completed (Fiscal Year 2020)
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| Budget Amount *help |
¥15,080,000 (Direct Cost: ¥11,600,000、Indirect Cost: ¥3,480,000)
Fiscal Year 2020: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2019: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2018: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2017: ¥10,400,000 (Direct Cost: ¥8,000,000、Indirect Cost: ¥2,400,000)
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| Keywords | エキシマレーザ / 低温結晶化 / 窒素プラズマ / 窒素ドープ / 窒化 / レーザ / 薄膜 / 窒化物 / 低温 / エキシマレーザー / プラズマ / 光MOD法 / 光電極 / 材料加工・処理 / 再生エネルギー / エネルギー効率化 / レーザープロセス |
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| Outline of Final Research Achievements |
The combined effect of O2 and N2 plasma to the excimer-laser irradiation process was examined. Metal-organic precursor films were irradiated by the laser in O2 plasma, the films were crystalized to the metal-oxide with less oxygen vacancies than those prepared by the laser-irradiation in air. Then, the metal-organic precursor films were irradiated by the laser in N2 plasma, the films were also crystalized to the metal-oxide but included N. Metal films were irradiated by the laser in N2 plasma, especially in the case of Ti, N atoms were introduced into in Ti lattice. The introduction behaviors of N2 depended on the type of metal and it was concluded that the temperature of the film under laser irradiation and the melting point of the metal are dominant factor for introduction of N2.
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| Academic Significance and Societal Importance of the Research Achievements |
窒化物の作製や酸化物相への窒素導入は、一般的には、窒素雰囲気中もしくはアンモニア雰囲気中で、比較的高い熱処理プロセスを必要とする。そのため、窒化物もしくは酸化物相へ窒素導入する場合、周辺材料や下地材料の熱耐性を考慮する必要がある。エキシマレーザ照射法に窒素プラズマを融合したプロセスは、低温で窒素を導入することが可能であるため、窒素含有材料の応用範囲の拡大につながる。
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Report
(5 results)
Research Products
(11 results)
