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Fabrication of 3-dimensional metal structure with sub-100 nm resolution using optical potential

Research Project

Project/Area Number 17H04900
Research Category

Grant-in-Aid for Young Scientists (A)

Allocation TypeSingle-year Grants
Research Field Production engineering/Processing studies
Research InstitutionThe University of Tokyo

Principal Investigator

Michihata Masaki  東京大学, 大学院工学系研究科(工学部), 准教授 (70588855)

Project Period (FY) 2017-04-01 – 2020-03-31
Project Status Completed (Fiscal Year 2020)
Budget Amount *help
¥23,790,000 (Direct Cost: ¥18,300,000、Indirect Cost: ¥5,490,000)
Fiscal Year 2019: ¥6,890,000 (Direct Cost: ¥5,300,000、Indirect Cost: ¥1,590,000)
Fiscal Year 2018: ¥8,840,000 (Direct Cost: ¥6,800,000、Indirect Cost: ¥2,040,000)
Fiscal Year 2017: ¥8,060,000 (Direct Cost: ¥6,200,000、Indirect Cost: ¥1,860,000)
Keywords光圧 / 付加製造 / インプロセス / ベッセルビーム / 光ピンセット / 付加加工 / 光放射圧 / 金属ナノ粒子 / 光放射圧ポテンシャル / ナノ加工 / ハイスピードカメラ / レーザ加工 / 回折限界 / 金属微細構造
Outline of Final Research Achievements

In this study, we proposed a novel micro-scale additive manufacturing method based on the optical potential. The basic principle of the proposed method involves accumulating and stacking particles dispersed in air by using optical radiation pressure. In this project, the water droplet of several μm in diameter containing particles suspended in space were successfully trapped in the optical potential of Bessel beam and then the only particles were deposited on the substrate. As a result of processing experiment, the silica particles with a diameter of 1 μm could be three dimensionally structured on the axis of the Bessel beam. The trajectory of the accumulated particles was numerically estimated and experimentally observed. The numerical and experimental results agreed well; specifically, the background flow carried the particles to the optical axis of the Bessel beam, and then the particles were localized at the bottom of the optical potential valley on the substrate.

Academic Significance and Societal Importance of the Research Achievements

光放射圧を用いた集積加工技術はこれまでに提案されておらず、このような空気中でマイクロ/ナノスケールの複雑構造を加工できる技術が構築されれば、これまでにない機能を持った製品製造が期待できる。本研究では、その加工原理の検証を行うことができ、今後の新しい加工技術の発展に向け貢献が期待できる。

Report

(4 results)
  • 2020 Final Research Report ( PDF )
  • 2019 Annual Research Report
  • 2018 Annual Research Report
  • 2017 Annual Research Report
  • Research Products

    (14 results)

All 2020 2019 2018 Other

All Journal Article (3 results) (of which Peer Reviewed: 3 results) Presentation (10 results) (of which Int'l Joint Research: 3 results) Remarks (1 results)

  • [Journal Article] Micro-scale Additive Manufacturing Using the Optical Potential Generated by a Bessel Beam2020

    • Author(s)
      Michihata Masaki、Yokei Makoto、Kadoya Shotaro、Takahashi Satoru
    • Journal Title

      Nanomanufacturing and Metrology

      Volume: 3 Issue: 4 Pages: 292-298

    • DOI

      10.1007/s41871-020-00079-y

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fundamental study on micro-scaled additive manufacturing using optical potential induced by optical radiation pressure by Bessel beam2019

    • Author(s)
      MICHIHATA Masaki、HAYASHI Masahiro、YOKEI Makoto、TAKAMASU Kiyoshi、TAKAHASHI Satoru
    • Journal Title

      Transactions of the JSME (in Japanese)

      Volume: 85 Issue: 880 Pages: 19-00244-19-00244

    • DOI

      10.1299/transjsme.19-00244

    • NAID

      130007772974

    • ISSN
      2187-9761
    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Surface Imaging Technique by an Optically Trapped Microsphere in Air Condition2018

    • Author(s)
      Michihata Masaki、Kim Jonggang、Takahashi Satoru、Takamasu Kiyoshi、Mizutani Yasuhiro、Takaya Yasuhiro
    • Journal Title

      Nanomanufacturing and Metrology

      Volume: 1 Issue: 1 Pages: 32-38

    • DOI

      10.1007/s41871-018-0004-0

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Presentation] 光放射圧ポテンシャルに基づく3次元微細構造加工に関する基礎的研究(第4報) -ハイスピードカメラによる加工原理の検討-2020

    • Author(s)
      代慶 真,道畑正岐,高増 潔,高橋 哲
    • Organizer
      2020年度精密工学会学術講演会春季大会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 光放射圧ポテンシャルに基づく3次元微細構造加工に関する基礎的研究2020

    • Author(s)
      道畑正岐,代慶 真,門屋祥太郎,高増 潔,高橋 哲
    • Organizer
      日本機械学会 2020年度年次大会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Optical trapping of airborne droplet for laser fabrication of 3-dimensional structure based on optical trapping potential using radially polarized beam2019

    • Author(s)
      Yokei Makoto, Masahiro Hayashi, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      Optical Technology and Measurement for Industrial Applications Conference(OPTM)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Experimental investigation on laser additive processing method for nanostructures based on optical trapping potential2019

    • Author(s)
      Yokei Makoto, Masahiro Hayashi, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      8th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN),
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 光放射圧ポテンシャルに基づく3次元微細構造加工に関する基礎的研究(第2報) -ラジアル偏光ビームを用いた空気中ミスト粒子の光トラップ効率の向上-2019

    • Author(s)
      代慶 真,林 政洋,道畑正岐,高増 潔,高橋 哲
    • Organizer
      2019年度精密工学会学術講演会春季大会
    • Related Report
      2019 Annual Research Report 2018 Annual Research Report
  • [Presentation] 光放射圧ポテンシャルに基づく3次元微細構造加工に関する基礎的研究(第3報) -液滴を用いた構造化原理の実験的検討-2019

    • Author(s)
      代慶 真,林 政洋,道畑正岐,高増 潔,高橋 哲
    • Organizer
      2019年度精密工学会学術講演会秋季大会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Basic study on laser additive processing for nanostructures based on optical trapping potential2018

    • Author(s)
      Masahiro Hayashi, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ICPE2018
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 光放射圧ポテンシャルに基づく3次元微細構造加工に関する基礎的研究 -ナノ粒子の2次元局所化性能の評価-2018

    • Author(s)
      林 政洋,道畑正岐,高増 潔,高橋 哲
    • Organizer
      第12回日本機械学会生産加工・工作機械部門講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 光放射圧ポテンシャルに基づく3次元微細構造加工に関する基礎的研究 (第1報) -ベッセルビームによる加工原理検討に向けた装置開発-2018

    • Author(s)
      林 政洋,林 晃平,道畑正岐,高増 潔,高橋 哲
    • Organizer
      2018年度精密工学会学術講演会春季大会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 光放射圧ポテンシャルによる局所化を用いた金属三次元微細構造創成 - 金属ナノ粒子局所化の確率解析 -2018

    • Author(s)
      林 晃平,林 政洋,道畑正岐,高増 潔,高橋 哲
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Remarks]

    • URL

      https://sites.google.com/site/masakimichihata/

    • Related Report
      2017 Annual Research Report

URL: 

Published: 2017-04-28   Modified: 2022-01-27  

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