| Budget Amount *help |
¥24,310,000 (Direct Cost: ¥18,700,000、Indirect Cost: ¥5,610,000)
Fiscal Year 2019: ¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2018: ¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2017: ¥14,950,000 (Direct Cost: ¥11,500,000、Indirect Cost: ¥3,450,000)
|
|---|
| Outline of Final Research Achievements |
We developed an absolute surface profiler based on the local slope angle measurement of the specimen without using the reference surface, which is called the scanning deflectometric profiler (SDP). Measuring devices based on deflectometry have been developed by many laboratories as a highly accurate straightness profile measurement. On the other hand, a problem of deflectometric system was that the measurement was limited to a line (two-dimensional) profile. To solve this problem, we developed a novel method to measure the surface topography. The surface topography was calculated from radial lines obtained by rotating the specimen. We performed the comparison measurement between the SDP system and the Fizeau interferometer. Finally, the proposed method was validated through the comparison measurement.
|
