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Fundamental research on germanium-tin narrow wires for high-speed/low-power MOSFETs

Research Project

Project/Area Number 17H04919
Research Category

Grant-in-Aid for Young Scientists (A)

Allocation TypeSingle-year Grants
Research Field Electronic materials/Electric materials
Research InstitutionNagoya University

Principal Investigator

KUROSAWA Masashi  名古屋大学, 工学研究科, 講師 (40715439)

Project Period (FY) 2017-04-01 – 2020-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥24,310,000 (Direct Cost: ¥18,700,000、Indirect Cost: ¥5,610,000)
Fiscal Year 2019: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2018: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2017: ¥16,380,000 (Direct Cost: ¥12,600,000、Indirect Cost: ¥3,780,000)
Keywordsゲルマニウムスズ / 結晶成長 / n型ドーピング / MOSFET / 偏析溶融成長 / その場観察 / IV族混晶
Outline of Final Research Achievements

In this research, toward the creation of metal-oxide-semiconductor field-effect transistors (MOSFETs) using germanium-tin narrow wires, basic technologies required for the device fabrication were investigated: (1) Crystal growth of germanium-tin narrow wires on Si wafers covered with an insulating film and its evaluation of the electronic properties, (2) Heavy n-type doping, and (3) Demonstrations of device fabrications such as MOSFETs and thermoelectric generators. Through the research, we have obtained dependences of the Sn content and solidification rate on the electronic and thermophysical properties of the germanium-tin binary alloys.

Academic Significance and Societal Importance of the Research Achievements

本研究では、ゲルマニウムスズの基礎的な電子物性や熱物性を明らかにしたことに加え、ゲルマニウム系で困難とされてきた高濃度n型ドーピング手法の開発を行った。これらは、他の半導体デバイス(熱電素子や光学素子など)への応用が可能である。加えて、本研究がターゲットとするゲルマニウムスズは、デバイス応用、集積化の観点から最も有力視されているIV族元素で構成されているため、シリコン大規模集積回路などへの産業応用上の基盤になりうると期待できる。

Report

(4 results)
  • 2019 Annual Research Report   Final Research Report ( PDF )
  • 2018 Annual Research Report
  • 2017 Annual Research Report
  • Research Products

    (36 results)

All 2020 2019 2018 2017

All Journal Article (7 results) (of which Peer Reviewed: 7 results,  Open Access: 1 results) Presentation (29 results) (of which Int'l Joint Research: 13 results,  Invited: 9 results)

  • [Journal Article] Crystal growth and electronic properties of germanium-tin group-IV alloy semiconductor thin films2019

    • Author(s)
      中塚 理、黒澤 昌志
    • Journal Title

      Oyo Buturi

      Volume: 88 Issue: 9 Pages: 597-603

    • DOI

      10.11470/oubutsu.88.9_597

    • NAID

      130007709590

    • ISSN
      0369-8009, 2188-2290
    • Year and Date
      2019-09-10
    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Operation of thin-film thermoelectric generator of Ge-rich poly-Ge1-xSnx on SiO2 fabricated by a low thermal budget process2019

    • Author(s)
      K. Takahashi, H. Ikenoue, M. Sakashita, O. Nakatsuka, S. Zaima, and M. Kurosawa
    • Journal Title

      Appl. Phys. Express

      Volume: 12 Issue: 5 Pages: 051016-051016

    • DOI

      10.7567/1882-0786/ab1969

    • NAID

      210000155747

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] エネルギーハーベスティング応用に向けたIV族混晶(Ge1-xSnx)薄膜の結晶成長2018

    • Author(s)
      黒澤昌志
    • Journal Title

      日本熱電学会学会誌

      Volume: 15 Pages: 26-31

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A New Application of Ge1-xSnx: Thermoelectric Materials2018

    • Author(s)
      M. Kurosawa, Y. Imai, T. Iwahashi, K. Takahashi, M. Sakashita, O. Nakatsuka, and S. Zaima
    • Journal Title

      ECS Trans. 2018

      Volume: 86 Issue: 7 Pages: 321-328

    • DOI

      10.1149/08607.0321ecst

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Ultra-thin germanium-tin on insulator structure through direct bonding technique2018

    • Author(s)
      T. Maeda, W. H. Chang, T. Irisawa, H. Ishii, H. Oka, M. Kurosawa, Y. Imai, O. Nakatsuka and N. Uchida
    • Journal Title

      Semiconductor Science and Technology

      Volume: 33 Issue: 12 Pages: 124002-124002

    • DOI

      10.1088/1361-6641/aae620

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] High n-type Sb dopant activation in Ge-rich poly-Ge1-xSnx layers on SiO2 using pulsed laser annealing in flowing water2018

    • Author(s)
      K. Takahashi, M. Kurosawa, H. Ikenoue, M. Sakashita, O. Nakatsuka, and S. Zaima
    • Journal Title

      Appl. Phys. Lett.

      Volume: 112 Issue: 6 Pages: 062104-062104

    • DOI

      10.1063/1.4997369

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Dopant behavior in heavily doped polycrystalline Ge1-xSnx layers prepared with pulsed laser annealing in water2018

    • Author(s)
      K. Takahashi, M. Kurosawa, H. Ikenoue, M. Sakashita, O. Nakatsuka, and S. Zaima
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 57 Issue: 4S Pages: 04FJ02-04FJ02

    • DOI

      10.7567/jjap.57.04fj02

    • NAID

      210000148950

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Presentation] Ge1-xSnx細線の偏析溶融成長:冷却速度の影響2020

    • Author(s)
      中尾天哉, 西嶋泰樹, 清水智, 角田功, 中塚理, 黒澤昌志
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 絶縁膜上における極薄Ge1-xSnx薄膜の固相成長2020

    • Author(s)
      大石遼, 中塚理, 黒澤昌志
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 偏析溶融成長法により形成した絶縁膜上Ge1-xSnx細線の電気特性評価2019

    • Author(s)
      中尾天哉, 西嶋泰樹, 清水智, 角田功, 中塚理, 黒澤昌志
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Preparation of Ge1-xSnx-based Uni-leg Thermoelectric Generator2019

    • Author(s)
      M. Kurosawa, M. Tomita, and T. Watanabe
    • Organizer
      The 4th International Symposium on Creation of Life Innovation Materials for Interdisciplinary and International Researcher Development (iLIM-4)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Temperature dependence of thermoelectric properties of Ge1-xSnx layers grown by molecular beam epitaxy2019

    • Author(s)
      M. Kurosawa, M. Nakata, K. Ide, T. Katase, and T. Kamiya
    • Organizer
      The 4th International Symposium on Creation of Life Innovation Materials for Interdisciplinary and International Researcher Development (iLIM-4)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 革新的多機能センサモジュール実現に向けた新しいIV族混晶熱電物質の創製 ~ド素人が熱電の分野に飛び込んで~2018

    • Author(s)
      黒澤昌志
    • Organizer
      日本熱電学会 第23回研究会 「注目の熱電プロジェクト」
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] Ultra-thin GeSn on Insulator structure through the direct bonding technique2018

    • Author(s)
      T. Maeda, W. H. Chang, T. Irisawa, H. Ishii, H. Hattori, M. Kurosawa, Y. Imai, O. Nakatsuka, and N. Uchida
    • Organizer
      1st Joint ISTDM/ICSI 2018 Conference
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] GeSn-based thin film thermoelectric generators2018

    • Author(s)
      M. Kurosawa, M. Sakashita, O. Nakatsuka, and S. Zaima
    • Organizer
      International Conference on Processing & Manufacturing of Advanced Materials Processing, Fabrication, Properties, Applications (THERMEC'2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 多結晶Ge1-xSnx薄膜熱電素子の低温形成2018

    • Author(s)
      髙橋恒太, 池上浩, 坂下満男, 中塚理, 財満鎭明, 黒澤昌志
    • Organizer
      第2回フォノンエンジニアリング研究グループ研究会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 単結晶p型Ge0.95Sn0.05薄膜の熱電特性におけるドメインサイズの効果2018

    • Author(s)
      今井志明, 髙橋恒太, 内田紀行, 前田辰郎, 中塚理, 財満鎭明, 黒澤昌志
    • Organizer
      第2回フォノンエンジニアリング研究グループ研究会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Thin film growth and characterization of group-IV alloy semiconductors for future nanoelectronic applications2018

    • Author(s)
      O. Nakatsuka, M. Kurosawa, and S. Zaima
    • Organizer
      9th International Conference on Physics and Its Applications (ICOPIA)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] IV族混晶薄膜の結晶成長と熱電デバイスへの応用2018

    • Author(s)
      黒澤昌志
    • Organizer
      第68回フロンティア材料研究所学術講演会「革新的エナジーハーベスティングに向けた創エネルギー材料とデバイスの研究開発」
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] スマートウォッチを支える熱電デバイスについて考える2018

    • Author(s)
      黒澤昌志
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] 溶融成長法によるGe1-xSnx細線の形成と電気特性評価2018

    • Author(s)
      髙橋恒太, 今井祐太, 西嶋泰樹, 清水智, 黒澤昌志, 角田功, 中塚理, 財満鎭明
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Composition and Strain Engineering of New Group-IV Thermoelectric Materials2018

    • Author(s)
      M. Kurosawa, Y. Imai, T. Iwahashi, K. Takahashi, M. Sakashita, O. Nakatsuka, and S. Zaima
    • Organizer
      AiMES 2018 Meeting
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 次世代半導体デバイスに向けたIV族混晶薄膜の形成と物性制御2018

    • Author(s)
      高橋恒太, 黒澤昌志, 坂下満男, 中塚理, 財満鎭明
    • Organizer
      第10回半導体材料・デバイスフォーラム
    • Related Report
      2018 Annual Research Report
  • [Presentation] Low thermal budget fabrication of poly-Ge1-xSnx thin film thermoelectric generator2018

    • Author(s)
      K. Takahashi, H. Ikenoue, M. Sakashita, O. Nakatsuka, S. Zaima, and M. Kurosawa
    • Organizer
      2018 IEEE Electron Devices Technology and Manufacturing Conference (EDTM 2018)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Domain size effects on thermoelectric properties of p-type Ge0.95Sn0.05 layers grown on GaAs and Si substrates2018

    • Author(s)
      Y. Imai, K. Takahashi, N. Uchida, T. Maeda, O. Nakatsuka, S. Zaima, and M. Kurosawa
    • Organizer
      2018 IEEE Electron Devices Technology and Manufacturing Conference (EDTM 2018)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] ドーパント種が水中パルスレーザアニールによるGe1-xSnx薄膜への高濃度ドーピングに及ぼす効果2018

    • Author(s)
      髙橋恒太, 黒澤昌志, 池上浩, 坂下満男, 中塚理, 財満鎭明
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 新しいIV族多元混晶薄膜の結晶成長とデバイス応用2017

    • Author(s)
      黒澤昌志, 竹内和歌奈, 坂下満男, 中塚理, 財満鎭明
    • Organizer
      2017年真空・表面科学合同講演会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] 熱電材料応用を目指した新しい IV 族混晶(Ge1-xSnx, Si1-xSnx)の開発2017

    • Author(s)
      黒澤昌志, 中塚理, 財満鎭明
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 低温MBE法により形成したp型単結晶Ge1-xSnx薄膜の熱電特性2017

    • Author(s)
      今井志明, 髙橋恒太, 中塚理, 財満鎭明, 黒澤昌志
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 水中パルスレーザアニール法により形成した高濃度ドープp型/n型多結晶Ge1-xSnx薄膜の熱電特性2017

    • Author(s)
      髙橋恒太, 池上浩, 坂下満男, 中塚理, 財満鎭明, 黒澤昌志
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 新しいIV族混晶熱電材料:Ge1-xSnx2017

    • Author(s)
      黒澤昌志, 今井志明, 岩橋泰正, 髙橋恒太, 中塚理, 財満鎭明
    • Organizer
      第14回日本熱電学会学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Sb-doping effect on thermal and electrical properties of Ge-rich Ge1-xSnx layers2017

    • Author(s)
      T. Iwahashi, M. Kurosawa, N. Uchida, Y. Ohishi, T. Maeda, O. Nakatsuka, and S. Zaima
    • Organizer
      International Conference on Solid State Devices and Materials 2017 (SSDM2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Dopants behavior in polycrystallization of heavily doped Ge1-xSnx layer using pulsed laser annealing in water2017

    • Author(s)
      K. Takahashi, M. Kurosawa, H. Ikenoue, M. Sakashita, O. Nakatsuka, and S. Zaima
    • Organizer
      International Conference on Solid State Devices and Materials 2017 (SSDM2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Heavy n- and p-type doping for polycrystalline Ge1-xSnx layers using pulsed laser annealing in water2017

    • Author(s)
      K. Takahashi, M. Kurosawa, H. Ikenoue, M. Sakashita, O. Nakatsuka, and S. Zaima
    • Organizer
      The 2nd International Symposium on Creation of Life Innovation Materials for Interdisciplinary and International Researcher Development (iLIM-2)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Growth and Applications of Si1-xSnx Thin Films2017

    • Author(s)
      M. Kurosawa, O. Nakatsuka, and S. Zaima
    • Organizer
      232nd Electrochemical Society Meeting
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Crystal growth of GeSn-based materials and its application for thin-film thermoelectric generators2017

    • Author(s)
      M. Kurosawa, M. Sakashita, O. Nakatsuka, and S. Zaima
    • Organizer
      2017 Global Research Efforts on Energy and Nanomaterials (GREEN 2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited

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Published: 2017-04-28   Modified: 2021-02-19  

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