CMOS compatible chemical sensors based on control of surface reaction on metal oxides
| Project/Area Number |
17H04927
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| Research Category |
Grant-in-Aid for Young Scientists (A)
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| Allocation Type | Single-year Grants |
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| Research Field |
Electron device/Electronic equipment
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| Research Institution | Kyushu University |
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Principal Investigator |
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| Project Period (FY) |
2017-04-01 – 2020-03-31
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| Project Status |
Completed (Fiscal Year 2019)
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| Budget Amount *help |
¥23,790,000 (Direct Cost: ¥18,300,000、Indirect Cost: ¥5,490,000)
Fiscal Year 2019: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2018: ¥8,060,000 (Direct Cost: ¥6,200,000、Indirect Cost: ¥1,860,000)
Fiscal Year 2017: ¥11,310,000 (Direct Cost: ¥8,700,000、Indirect Cost: ¥2,610,000)
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| Keywords | 金属酸化物半導体 / 分子センサ / 単結晶金属酸化物ナノワイヤ / 界面抵抗 / 金属酸化物 / CMOS / シリコンナノワイヤ / センサ / 金属酸化物ナノワイヤ / シリコンCMOS |
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| Outline of Final Research Achievements |
In this research, we investigated fundamental challenges of chemical sensors based on nanoscale metal oxides, which are promising devices to electrically discriminate volatile molecules in ambient. Long-term stability of nanoscale metal oxide device properties, which is one of the most important requirements of these sensors, was intensively investigated via fabricating/evaluating metal oxide nanowire devices. By controlling surface or interface properties of the nanoscale metal oxides, the long-term stability of the electrical properties and sensor response of metal oxide nanowire devices were significantly improved.
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| Academic Significance and Societal Importance of the Research Achievements |
本研究の成果は，これまで病院で検査を行う必要があった健康状態のモニタリングをスマートフォン等に搭載されたSoC（ICチップ）で実現する基盤技術の確立につながり，今後ますますIoT（Internet of Things）化に向かう社会に与えるインパクトはきわめて大きい．また，本研究で開発したデバイス性能の長期安定化手法は，センサに限らず多様な機能物性を有する金属酸化物の幅広い応用展開に有用な知見である．
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Report
(4 results)
Research Products
(39 results)
