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CMOS compatible chemical sensors based on control of surface reaction on metal oxides

Research Project

Project/Area Number 17H04927
Research Category

Grant-in-Aid for Young Scientists (A)

Allocation TypeSingle-year Grants
Research Field Electron device/Electronic equipment
Research InstitutionKyushu University

Principal Investigator

Takahashi Tsunaki  九州大学, 先導物質化学研究所, 学術研究員 (60724838)

Project Period (FY) 2017-04-01 – 2020-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥23,790,000 (Direct Cost: ¥18,300,000、Indirect Cost: ¥5,490,000)
Fiscal Year 2019: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2018: ¥8,060,000 (Direct Cost: ¥6,200,000、Indirect Cost: ¥1,860,000)
Fiscal Year 2017: ¥11,310,000 (Direct Cost: ¥8,700,000、Indirect Cost: ¥2,610,000)
Keywords金属酸化物半導体 / 分子センサ / 単結晶金属酸化物ナノワイヤ / 界面抵抗 / 金属酸化物 / CMOS / シリコンナノワイヤ / センサ / 金属酸化物ナノワイヤ / シリコンCMOS
Outline of Final Research Achievements

In this research, we investigated fundamental challenges of chemical sensors based on nanoscale metal oxides, which are promising devices to electrically discriminate volatile molecules in ambient. Long-term stability of nanoscale metal oxide device properties, which is one of the most important requirements of these sensors, was intensively investigated via fabricating/evaluating metal oxide nanowire devices. By controlling surface or interface properties of the nanoscale metal oxides, the long-term stability of the electrical properties and sensor response of metal oxide nanowire devices were significantly improved.

Academic Significance and Societal Importance of the Research Achievements

本研究の成果は,これまで病院で検査を行う必要があった健康状態のモニタリングをスマートフォン等に搭載されたSoC(ICチップ)で実現する基盤技術の確立につながり,今後ますますIoT(Internet of Things)化に向かう社会に与えるインパクトはきわめて大きい.また,本研究で開発したデバイス性能の長期安定化手法は,センサに限らず多様な機能物性を有する金属酸化物の幅広い応用展開に有用な知見である.

Report

(4 results)
  • 2019 Annual Research Report   Final Research Report ( PDF )
  • 2018 Annual Research Report
  • 2017 Annual Research Report
  • Research Products

    (39 results)

All 2020 2019 2018 2017 Other

All Int'l Joint Research (1 results) Journal Article (6 results) (of which Int'l Joint Research: 2 results,  Peer Reviewed: 4 results,  Open Access: 1 results) Presentation (31 results) (of which Int'l Joint Research: 10 results,  Invited: 2 results) Remarks (1 results)

  • [Int'l Joint Research] Huazhong University(中国)

    • Related Report
      2018 Annual Research Report
  • [Journal Article] Redox-Inactive CO2 Determines Atmospheric Stability of Electrical Properties of ZnO Nanowire Devices through a Room-Temperature Surface Reaction2019

    • Author(s)
      Nakamura Kentaro、Takahashi Tsunaki、Hosomi Takuro、Seki Takehito、Kanai Masaki、Zhang Guozhu、Nagashima Kazuki、Shibata Naoya、Yanagida Takeshi
    • Journal Title

      ACS Applied Materials & Interfaces

      Volume: 11 Issue: 43 Pages: 40260-40266

    • DOI

      10.1021/acsami.9b13231

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Unusual Oxygen Partial Pressure Dependence of Electrical Transport of Single-Crystalline Metal Oxide Nanowires Grown by the Vapor?Liquid?Solid Process2019

    • Author(s)
      H. Anzai, T. Takahashi, M. Suzuki, M. Kanai, G. Zhang, T. Hosomi, T. Seki, K. Nagashima, N. Shibata and T. Yanagida
    • Journal Title

      Nano Letters

      Volume: 19 Issue: 3 Pages: 1675-1681

    • DOI

      10.1021/acs.nanolett.8b04668

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Thermal Conductivity of Si Nanowires with modulated Dopant Distribution by Self-heated 3w Method and Its Length Dependence "2018

    • Author(s)
      F. W. Zhuge, T. Takahashi, M. KanaiK. Nagashima, G. Meng, Y. He, N. Fukata, K. Uchida and *T. Yanagida
    • Journal Title

      Journal of Applied Physics

      Volume: 124 Issue: 6 Pages: 065105-065105

    • DOI

      10.1063/1.5039988

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] 結晶成長の空間選択性に基づいた単結晶金属酸化物ナノワイヤの創製とナノデバイス展開2018

    • Author(s)
      柳田剛,長島一樹,高橋 綱己
    • Journal Title

      応用物理

      Volume: 87 Pages: 29-33

    • NAID

      130007715556

    • Related Report
      2017 Annual Research Report
  • [Journal Article] Long-Term Stability of Oxide Nanowire Sensors via Heavily Doped Oxide Contact2017

    • Author(s)
      H. Zeng, T. Takahashi, M. Kanai, G. Zhang, H. Yong, K. Nagashima and T. Yanagida
    • Journal Title

      ACS Sensors

      Volume: 2 Issue: 12 Pages: 1854-1859

    • DOI

      10.1021/acssensors.7b00716

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] 単結晶金属酸化物ナノワイヤ分子センサ2017

    • Author(s)
      高橋綱己,長島一樹,柳田剛
    • Journal Title

      ケミカルエンジニヤリング

      Volume: 62 Pages: 798-803

    • Related Report
      2017 Annual Research Report
  • [Presentation] Nanoelectronics of single-crystalline metal oxide nanowires: Fundamentals and sensor applications2020

    • Author(s)
      T. Takahashi, H. Anzai, H. Zeng, M. Kanai, T. Hosomi, G. Zhang, K. Nagashima, and T. Yanagida
    • Organizer
      Seoul National University - Kyushu University Joint Symposium on Materials Chemistry and Engineering
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Electrical degradation of ITO contact electrodes on metal oxide nanowires2019

    • Author(s)
      H. Zeng, T. Takahashi, M. Kanai, G. Zhang, T. Hosomi, K. Nagashima, and T. Yanagida
    • Organizer
      International School and Symposium on Nanoscale Transport and phoTonics 2019 (ISNTT)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Sequential compensation effect of anion/cation vacancies on thermal stability of electric conductivity of Al-doped ZnO nanofilms2019

    • Author(s)
      R. Yan, T. Takahashi, M. Kanai, T. Hosomi, G. Zhang, K. Nagashima, and T. Yanagida
    • Organizer
      Materials Research Meeting 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 有機分子修飾による単結晶金属酸化物ナノワイヤ表面反応制御2019

    • Author(s)
      清水將博,高橋綱己,細見拓郎,張国柱,金井真樹,長島一樹,柳田剛
    • Organizer
      第10回分子アーキテクトニクス研究会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 単結晶酸化物ナノワイヤデバイスの界面設計2019

    • Author(s)
      高橋綱己
    • Organizer
      第8回酸化物研究の新機軸に向けた学際討論会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] 大気中分子-ZnOナノワイヤ/Pt界面間相互作用の解明に基づくデバイス特性の高信頼化2019

    • Author(s)
      中村健太郎,高橋綱己,金井真樹,Z. Guozhu,細見拓郎,長島一樹,柳田剛
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] VLS法ナノワイヤ結晶成長界面設計による単結晶金属酸化物ナノ構造体の表面特性制御2019

    • Author(s)
      安西宇宙,高橋綱己,細見 拓郎,金井真樹,Z. Guozhu,長島一樹,柳田剛
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Long-term stability of oxide nanowire sensors via heavily-doped oxide contact2018

    • Author(s)
      H. Zeng, T. Takahashi, M. Kanai, G. Zhang, Y. He, K. Nagashima and T. Yanagida
    • Organizer
      The First Int. Joint Symp. CEFMS-NCTU
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 水熱合成ZnOナノワイヤ/Pt界面電気抵抗の長期安定化2018

    • Author(s)
      中村健太郎,高橋綱己,安西宇宙,Z. Guozhu,金井真樹,長島一樹,柳田剛
    • Organizer
      分子・物質合成プラットフォーム平成30年度シンポジウム
    • Related Report
      2018 Annual Research Report
  • [Presentation] 酸化物ナノワイヤに対するITOコンタクト電極劣化特性の解明2018

    • Author(s)
      Zeng Hao,高橋綱己,金井真樹,Zhang Guozhu,細見拓郎,長島一樹,柳田剛
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 供給酸素分圧による単結晶金属酸化物ナノワイヤの導電性・結晶成長界面の変調効果2018

    • Author(s)
      安西宇宙,鈴木将,高橋綱己,金井真樹,Zhang Guozhu,細見拓郎,長島一樹,柳田剛
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Long-term stability of hydrothermal ZnO nanowire/Pt junctions2018

    • Author(s)
      K. Nakamura,T. Takahashi,M. Kanai,G. Zhang,T. Hosomi,K. Nagashima,T. Yanagida
    • Organizer
      第37回電子材料シンポジウム
    • Related Report
      2018 Annual Research Report
  • [Presentation] 大気中分子-ZnOナノワイヤ/Pt界面間相互作用の解明に基づくデバイス特性の高信頼化2018

    • Author(s)
      中村健太郎,高橋綱己,金井真樹,Z. Guozhu,細見拓郎,長島一樹,柳田剛
    • Organizer
      平成30年度応用物理学会九州支部学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Anomalous Oxygen Role at the Interface between ITO and Single Crystalline Metal Oxide Nanowires2018

    • Author(s)
      H. Zeng,T. Takahashi,M. Kanai,G. Zhang,T. Hosomi,K. Nagashima,T. Yanagida
    • Organizer
      平成30年度応用物理学会九州支部学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Systematic study on thermal stability of electrical characteristics of Al doped ZnO formed by pulsed laser deposition method2018

    • Author(s)
      R. Yan,T. Takahashi,M. Kanai,G. Zhang,T. Hosomi,K. Nagashima,T. Yanagida
    • Organizer
      平成30年度応用物理学会九州支部学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 大気中分子とZnOナノワイヤ表面の相互作用抑制によるデバイス特性の長期安定化2018

    • Author(s)
      中村健太郎,高橋綱己,金井真樹,Z. Guozhu,細見拓郎,長島一樹,柳田剛
    • Organizer
      第4回ナノ分析化学討論会
    • Related Report
      2018 Annual Research Report
  • [Presentation] SAM修飾ZnOナノワイヤ表面における分子吸着・反応の検証2018

    • Author(s)
      清水將博,高橋綱己,細見拓郎,金井真樹,Z. Guozhu,長島一樹,柳田剛
    • Organizer
      第4回ナノ分析化学討論会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Dopant incorporation at two crystal growth interfaces in vapor-liquid-solid process of metal oxide nanowires2018

    • Author(s)
      Z. Zhu, K. Nagashima, T. Takahashi, M. Kanai, H. Anzai, G. Zhang and T. Yanagida
    • Organizer
      2018 IMCE International Symposium
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Impacts of Thermal Annealing on Electrical Properties of Hydrothermally Grown ZnO Nanowires: Nanowire Resistivity, Contact Resistance and Their Long-term Stability2018

    • Author(s)
      K. Nakamura, T. Takahashi, H. Anzai, D. Sakai, Z. Guozhu, M. Kanai, K. Nagashima and T. Yanagida
    • Organizer
      IRCCS-JST CREST Joint Symp. “Chemical Sciences Facing Difficult Challenges” IRCCS The 1st Int. Symp., The 2nd Base Metal Catalysis Symp.
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 雰囲気制御熱処理によるZnOナノワイヤ物性および電気特性の長期安定化2018

    • Author(s)
      中村健太郎,高橋綱己,安西宇宙,Z. Guozhu,金井真樹,H. Yong,長島一樹,柳田剛
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 気液固法による単結晶金属酸化物ナノワイヤにおける電子輸送特性の結晶成長界面依存性2018

    • Author(s)
      安西宇宙,高橋綱己,Z. Guozhu,金井真樹,長島一樹,柳田剛
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] ナノ界面設計による酸化物ナノワイヤ分子センサの高信頼化2018

    • Author(s)
      高橋綱己,H. Zeng,中村健太郎,金井真樹,Z. Guozhu,長島一樹,柳田剛
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Improvements in Crystallinity and Long-term Stability of Hydrothermally Grown ZnO Nanowires via Atmosphere-controlled Annealing2017

    • Author(s)
      K. Nakamura, T. Takahashi, H. Anzai, D. Sakai, M. Kanai, K. Nagashima and T. Yanagida
    • Organizer
      The 19th Cross Straits Symp. on Energy and Environmental Science and Technology (CSS-EEST19)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Influence of Seed Layers on Crystallinity of Metal Oxide Nanowires Grown by Hydrothermal Synthesis2017

    • Author(s)
      K. Nakamura, T. Takahashi, H. Anzai, D. Sakai, M. Kanai, K. Nagashima and T. Yanagida
    • Organizer
      The 19th Cross Straits Symp. on Energy and Environmental Science and Technology (CSS-EEST19)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Long-term stability of oxide nanowire sensors via heavily-doped oxide contact2017

    • Author(s)
      H. Zeng, T. Takahashi, M. Kanai, G. Zhang, Y. He, K. Nagashima and T. Yanagida
    • Organizer
      The 19th Cross Straits Symp. on Energy and Environmental Science and Technology (CSS-EEST19)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Highly stable heavily-doped oxide contacts on oxide nanowires: Reliable low contact resistance and enhancement of long-term sensor response2017

    • Author(s)
      H. Zeng, T. Takahashi, K. Nagashima, and T. Yanagida
    • Organizer
      Int. Conf. Solid State Devices and Mater.
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Heavily-doped oxide contact toward highly reliable nanowire sensors2017

    • Author(s)
      H. Zeng,T. Takahashi,M. Kanai,G. Zhang,Y. He,K. Nagashima,T. Yanagida
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 単結晶金属酸化物ナノワイヤにおける結晶成長雰囲気が及ぼす電子輸送特性の結晶成長界面依存性2017

    • Author(s)
      安西宇宙,高橋綱己,Z. Guozhu,金井真樹,H. Yong,長島一樹,柳田剛
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 高不純物濃度酸化物コンタクトによるナノワイヤ分子センサの高信頼化2017

    • Author(s)
      高橋綱己,H. Zeng,金井真樹,Z. Guozhu,H. Yong,長島一樹,柳田剛
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 水熱合成法における核形成層制御による金属酸化物ナノワイヤの結晶性向上2017

    • Author(s)
      中村健太郎,高橋綱己,安西宇宙,酒井大樹,Z. Guozhu,金井真樹,H. Yong,長島一樹,柳田剛
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 金属酸化物ナノワイヤ表面吸着分子の静電ポテンシャル制御による脱離2017

    • Author(s)
      中林賢太郎,高橋綱己,安西宇宙,H. Yong,Z. Guozhu,金井真樹,長島一樹,柳田剛
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Remarks] 九州大学プレスリリース

    • URL

      https://www.kyushu-u.ac.jp/ja/researches/view/191

    • Related Report
      2017 Annual Research Report

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Published: 2017-04-28   Modified: 2022-12-28  

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