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AlGaN/Diamond DUV Light Sources Fabricated by Direct Wafer Bonding

Research Project

Project/Area Number 17H06762
Research Category

Grant-in-Aid for Research Activity Start-up

Allocation TypeSingle-year Grants
Research Field Electron device/Electronic equipment
Research InstitutionMie University

Principal Investigator

Hayashi Yusuke  三重大学, 地域イノベーション学研究科, 助教 (00800484)

Project Period (FY) 2017-08-25 – 2019-03-31
Project Status Completed (Fiscal Year 2018)
Budget Amount *help
¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
Fiscal Year 2018: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2017: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Keywordsダイヤモンド / AlGaN / AlN / 深紫外 / ウェハ接合 / 表面活性化接合
Outline of Final Research Achievements

In order to realize AlGaN / diamond wafer bonding, we developed a curvature control technology by double-sided sputtering. Thermal stress was suppressed by depositing AlN on the front and back surfaces of the sapphire substrate, leading to the successful control of curvature. Also in device application, it is possible to significantly suppress the amount of curvature on the AlGaN side including the LED structure. Furthermore, we performed wafer bonding using AlN / sapphire templates and succeeded in bonding with 2 inch wafers. Additionally, it is suggested that the light absorption due to band tailing is sufficiently suppressed because the transmittance spectrum is in good agreement with the numerical calculation.

Academic Significance and Societal Importance of the Research Achievements

紫外波長のレーザダイオードはフォトリソグラフィや医療用途への応用が期待されているが、UV-C波長(200~280 nm)では電流注入型のレーザダイオードは実現されていない。本成果はAlGaN系発光層上にp型ダイヤモンドを接合するための基盤技術であり、深紫外発光素子における課題解決に大きく貢献することが期待される。

Report

(3 results)
  • 2018 Annual Research Report   Final Research Report ( PDF )
  • 2017 Annual Research Report
  • Research Products

    (45 results)

All 2019 2018 2017 Other

All Journal Article (4 results) (of which Peer Reviewed: 4 results,  Open Access: 1 results) Presentation (35 results) (of which Int'l Joint Research: 19 results,  Invited: 7 results) Remarks (2 results) Patent(Industrial Property Rights) (4 results)

  • [Journal Article] Curvature-Controllable and Crack-Free AlN/Sapphire Templates Fabricated by Sputtering and High-Temperature Annealing2019

    • Author(s)
      Y. Hayashi, K. Tanigawa, K. Uesugi, K. Shojiki, and H. Miyake
    • Journal Title

      J. Cryst. Growth

      Volume: 512 Pages: 131-135

    • DOI

      10.1016/j.jcrysgro.2019.02.026

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Polarity inversion of aluminum nitride by direct wafer bonding2018

    • Author(s)
      Hayashi, Y; Katayama, R; Akiyama, T; Ito, T; Miyake, H
    • Journal Title

      APPLIED PHYSICS EXPRESS

      Volume: 11 Issue: 3 Pages: 31003-31003

    • DOI

      10.7567/apex.11.031003

    • NAID

      210000136117

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Analysis of Ultra Compact Plasmonic Modulator with Metal-Taper Structure Embedded in Furan-Thiophene Chromatophore Electro-Optic Polymer2017

    • Author(s)
      Naoya Hojo, Tomohiro Amemiya, Kazuto Itou, Zhichen Gu, Chiyumi Yamada, Toshiki Yamada, Junichi Suzuki, Yuusuke Hayashi, Nobuhiko Nishiyama, Akira Otomo, Shigehisa Arai
    • Journal Title

      Applied Optics

      Volume: vol.56 Issue: 8 Pages: 2053-2059

    • DOI

      10.1364/ao.56.002053

    • NAID

      40020992145

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Introduction of AlInAs-oxide Current Confinement Structure into GaInAsP/SOI Hybrid Fabry-Perot Laser2017

    • Author(s)
      Junichi Suzuki, Yusuke Hayashi, Satoshi Inoue, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56 Issue: 6 Pages: 62103-62103

    • DOI

      10.7567/jjap.56.062103

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Presentation] High-Temperature Annealing of Sputter-Deposited AlN on Diamond Substrate2019

    • Author(s)
      T. Shirato, Y. Hayashi, K. Uesugi, K. Shojiki, and H. Miyake,
    • Organizer
      Compound Semiconductor Week 2019 (CSW 2019)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of c-AlN/a-Sapphire Templates by Sputtering and High-Temperature Annealing2019

    • Author(s)
      Y. Hayashi, K. Fujikawa, K. Uesugi, K. Shojiki, and H. Miyake
    • Organizer
      Compound Semiconductor Week 2019 (CSW 2019)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Bowing Control of Sputtered AlN Caused by High Temperature Annealing2018

    • Author(s)
      Y. Hayashi, K. Tanigawa, K. Shojiki, and H. Miyake
    • Organizer
      19th International Conference on Metalorganic Vapor Phase Epitaxy (ICMOVPE XIX)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 高温アニールで生じるスパッタAlNの反り制御2018

    • Author(s)
      林侑介、谷川健太朗、正直花奈子、三宅秀人
    • Organizer
      第65回秋季応用物理学会学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 原子的に平坦なステップテラス構造を有するAlNホモエピタキシャル成長2018

    • Author(s)
      正直 花奈子、河合 祥也、林 侑介、三宅 秀人
    • Organizer
      第65回秋季応用物理学会学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 表面活性化接合と Si 基板剥離による GaN 極性反転構造の作製2018

    • Author(s)
      小野寺卓也、上向井正裕、髙橋一矢、岩谷素顕、赤﨑勇、林侑介、三宅秀人、久志本真希、鄭惠貞、本田善央、天野浩、片山竜二
    • Organizer
      第65回秋季応用物理学会学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] ZrO2/ AlN 積層導波路を用いた深紫外第二高調発生デバイスの設計2018

    • Author(s)
      山口修平、上向井 正裕、髙橋一矢、岩谷素顕、赤﨑勇、林侑介、三宅秀人、山田智也、藤原康文、片山竜二
    • Organizer
      第65回秋季応用物理学会学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] III-V/Si Low Temperature Direct Bonding Technology for Photonic Device Integration on SOI2017

    • Author(s)
      N. Nishiyama, Y. Hayashi, J. Suzuki, and S. Arai
    • Organizer
      Electron Devices Technology and Manufacturing Conference (EDTM2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] N2-Plasma Activated Bonding for GaInAsP/SOI Hybrid Lasers2017

    • Author(s)
      N. Nishiyama, Y. Hayashi, J. Suzuki, and S. Arai
    • Organizer
      The 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D 2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Fabrication of high-quality AlN template by high temperature annealing for UV devices2017

    • Author(s)
      H. Miyake, Y. Hayashi, S. Xiao, and K. Hiramatsu
    • Organizer
      The 8th Asia-Pacific Workshop on Widegap Semiconductors (APWS2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] High-Quality AlN films via Face-to-Face annealing and Its Applications for Second Harmonic Generation2017

    • Author(s)
      Y. Hayashi, and H. Miyake
    • Organizer
      The 4th International Conference on Advanced Electromaterials (ICAE 2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] サファイア基板上AlNテンプレートの高温アニール2017

    • Author(s)
      三宅秀人、林侑介、肖世玉
    • Organizer
      第46回日本結晶成長学会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] Fabrication of high-quality AlN template by high-temperature annealing for deep-ultraviolet optical devices2017

    • Author(s)
      H. Miyake, S. Xiao, Y. Hayashi, and K. Hiramatsu
    • Organizer
      2017 International Workshop on UV Materials and Devices (IWUMD2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] High-temperature annealing of AlN on sapphire using face-to-face method2017

    • Author(s)
      H. Miyake, Y. Hayashi, S. Xiao, and K. Hiramatsu
    • Organizer
      SPIE OPTO Gallium Nitride Materials and Devices XIII
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Double Taper-type Mode Convertor for Direct Bonded III-V/SOI Hybrid Photonic Devices2017

    • Author(s)
      S. Inoue, Y. Hayashi, J. Suzuki, K. Ito, K. Nagasaka, N. Nishiyama, and S. Arai
    • Organizer
      The 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D 2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Novel Optical-mode Converter between III-V/SOI Hybrid Devices2017

    • Author(s)
      J. Suzuki, K. Ito, Y. Hayashi, S. Inoue, K. Nagasaka, N. Nishiyama, and S. Arai
    • Organizer
      Int. Conf. on Indium Phosphide and Related Materials (IPRM 2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High temperature face-to-face annealing of AlN films grown by MOVPE2017

    • Author(s)
      S. Okada, S. Tanaka, Y. Hayashi, H. Miyake, and K. Hiramatsu
    • Organizer
      The 9th International Workshop on Regional Innovation Studies (IWRIS2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] reparation of high-quality a-plane AlN on r-plane sapphire using sputtering and annealing method2017

    • Author(s)
      R. Fukuta, Y. Yamaki, Y. Hayashi, H. Miyake, and K. Hiramatsu
    • Organizer
      The 9th International Workshop on Regional Innovation Studies (IWRIS2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of Surface-Activated Wafer Bonding Method of AlN, GaN and LiNbO32017

    • Author(s)
      T. Onodera, M. Uemukai, K. Takahashi, M. Iwaya, I. Akasaki, Y. Hayashi, H. Miyake, and R. Katayama
    • Organizer
      36th Electronic Materials Symposium (EMS-36)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Polarity inversion of AlN fabricated by wafer bonding and its atomic arrangement models2017

    • Author(s)
      Y. Hayashi, H. Miyake, K. Hiramatsu, T. Akiyama, T. Ito, R. Katayama
    • Organizer
      36th Electronic Materials Symposium (EMS-36)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Design of polarity-inverted multilayer AlN waveguide for deep UV second harmonic generation2017

    • Author(s)
      S. Yamaguchi, M. Uemukai, K. Takahashi, M. Iwaya, I. Akasaki, Y. Hayashi, H. Miyake, T. Yamada, Y. Fujiwara, and R. Katayama
    • Organizer
      36th Electronic Materials Symposium (EMS-36)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Compositional modulation for high AlN mole fraction AlxGa1-xN multiple quantum wells to enhance overlap integral of carrier wavefunctions2017

    • Author(s)
      K. Kojima, Y. Hayashi, K. Hiramatsu, H. Miyake, and S. F. Chichibu
    • Organizer
      2017 International Workshop on UV Materials and Devices (IWUMD2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Abrupt Polarity Inversion of AlN for Second Harmonics Generation in DUV Region2017

    • Author(s)
      Y. Hayashi, H. Miyake, K. Hiramatsu, T. Akiyama, T. Ito, R. Katayama
    • Organizer
      2017 International Workshop on UV Materials and Devices (IWUMD2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of Surface-Activated Wafer Bonding Method of AlN, GaN and LiNbO32017

    • Author(s)
      T. Onodera, M. Uemukai, K. Takahashi, M. Iwaya, I. Akasaki, Y. Hayashi, H. Miyake, and R. Katayama
    • Organizer
      2017 International Workshop on UV Materials and Devices (IWUMD2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Face to Face アニールによるAlN分極反転構造の作製と評価2017

    • Author(s)
      林侑介、三宅秀人、平松和政、片山竜二
    • Organizer
      第9回ナノ構造・エピタキシャル成長講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 二次組成変調によって電子・正孔波動関数の重なり積分を増強させたc面AlGaN多重量子井戸の発光特性評価2017

    • Author(s)
      小島一信、林侑介、三宅 秀人、平松和政、秩父重英
    • Organizer
      第78回秋季応用物理学会学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] スパッタ法で成膜したr面サファイア基板上a面AlNの高品質化2017

    • Author(s)
      福田涼、山木佑太、林侑介、三宅秀人、平松和政
    • Organizer
      第78回秋季応用物理学会学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 多層光回路に向けた曲線テーパ型層間結合器の設計2017

    • Author(s)
      伊東憲人、西山伸彦、林侑介、鈴木純一、雨宮智宏、荒井滋久
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] AlN・GaN・LiNbO3の表面活性化ウエハ接合技術の開発2017

    • Author(s)
      小野寺卓也、上向井正裕、髙橋一矢、岩谷素顕、赤﨑勇、林侑介、三宅秀人、片山竜二
    • Organizer
      第78回秋季応用物理学会学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 極性反転積層AlN光導波路を用いた波長変換デバイスの設計2017

    • Author(s)
      山口修平、上向井正裕、髙橋一矢、岩谷素顕、赤﨑勇、林侑介、三宅秀人、山田智也、藤原康文、片山竜二
    • Organizer
      第78回秋季応用物理学会学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 疑似位相整合SHGに向けたFace to FaceアニールによるAlN分極反転構造の作製2017

    • Author(s)
      林侑介、三宅秀人、平松和政、片山竜二
    • Organizer
      第78回秋季応用物理学会学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] MOVPE法によるAlN膜のface-to-faceアニール2017

    • Author(s)
      田中襲一、岡田俊祐、林侑介、三宅秀人、平松和政
    • Organizer
      第78回秋季応用物理学会学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] スパッタ法AlN基板へのMOVPE法によるホモ成長2017

    • Author(s)
      吉澤涼、林侑介、三宅秀人、平松和政
    • Organizer
      レーザ・量子エレクトロニクス研究会(LQE)
    • Related Report
      2017 Annual Research Report
  • [Presentation] Face to Face法アニールによる AlN極性反転構造の作製と疑似位相整合 SHGへの応用2017

    • Author(s)
      林侑介、三宅秀人、平松和政、秋山亨、伊藤智徳、片山竜二
    • Organizer
      レーザ・量子エレクトロニクス研究会(LQE)
    • Related Report
      2017 Annual Research Report
  • [Presentation] Face to Face 高温アニールで生じるAlN膜内歪みの定量的評価2017

    • Author(s)
      谷川健太朗、鈴木涼矢、岩山章、林侑介、三宅秀人、平松和政
    • Organizer
      第46回日本結晶成長学会
    • Related Report
      2017 Annual Research Report
  • [Remarks] 三重大学 オプトエレクトロニクス研究室 ホームページ

    • URL

      http://www.opt.elec.mie-u.ac.jp/index.html

    • Related Report
      2018 Annual Research Report
  • [Remarks] 三重大学 オプトエレクトロニクス研究室

    • URL

      http://www.opt.elec.mie-u.ac.jp/

    • Related Report
      2017 Annual Research Report
  • [Patent(Industrial Property Rights)] 窒化物半導体基板及び光半導体デバイス2019

    • Inventor(s)
      林侑介, 三宅秀人
    • Industrial Property Rights Holder
      林侑介, 三宅秀人
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2019-037838
    • Filing Date
      2019
    • Related Report
      2018 Annual Research Report
  • [Patent(Industrial Property Rights)] 窒化物半導体基板の製造方法および窒化物半導体基板2018

    • Inventor(s)
      林侑介, 三宅秀人
    • Industrial Property Rights Holder
      林侑介, 三宅秀人
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2018-164953
    • Filing Date
      2018
    • Related Report
      2018 Annual Research Report
  • [Patent(Industrial Property Rights)] 窒化物半導体基板、窒化物半導体基板の製造方法、窒化物半導体基板の製造装置及び窒化物半導体デバイス2017

    • Inventor(s)
      林侑介、三宅秀人、片山竜二
    • Industrial Property Rights Holder
      三重大学
    • Industrial Property Rights Type
      特許
    • Filing Date
      2017
    • Related Report
      2017 Annual Research Report
  • [Patent(Industrial Property Rights)] 基板および基板の製造方法2017

    • Inventor(s)
      林侑介、三宅秀人
    • Industrial Property Rights Holder
      三重大学
    • Industrial Property Rights Type
      特許
    • Filing Date
      2017
    • Related Report
      2017 Annual Research Report

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Published: 2017-08-25   Modified: 2021-02-19  

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