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Development of high intensity and high frequency focused ultrasonic transducers with piezoelectric films.

Research Project

Project/Area Number 17K01427
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Medical systems
Research InstitutionToin University of Yokohama

Principal Investigator

Ishikawa Mutsuo  桐蔭横浜大学, 医用工学部, 講師 (90451864)

Co-Investigator(Kenkyū-buntansha) 田原 麻梨江  東京工業大学, 科学技術創成研究院, 准教授 (60721884)
Project Period (FY) 2017-04-01 – 2021-03-31
Project Status Completed (Fiscal Year 2020)
Budget Amount *help
¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2019: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2018: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2017: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Keywords超音波 / 高周波 / 非線形音響 / 圧電体 / 圧電結晶膜 / 圧電 / 大振幅 / 強力超音波 / KNbO3 / エピタキシャル成長 / 集束 / 高出力 / 圧電縦効果 / 高周波超音波 / トランスデューサ / 圧電膜 / PbTiO3 / 超音波トランスデューサ / 薄膜 / 厚膜 / 水熱合成法 / 治療 / 圧電結晶 / 非線形
Outline of Final Research Achievements

The KNbO3 films were deposited by hydrothermal method. It is known that the hydrothermal method is able to fabricate high quality piezoelectric films. In this study, we measured sound pressures and acoustic radiation pressures at resonant frequency with prototype high-frequency ultrasonic transducer using thickness mode of hydrothermal KNbO3 films.
The resonance frequency and radiated sound pressure of the prototype KNbO3 ultrasonic transducers of focusing type was measured by hydrophone. And, the radiated sound pressure has a linearity relationship between the applied voltages until 3 MPa at 10MHz. And the maximum pressure was approximately 4MPa or more. This value is very high intensity at high frequency and enough value for several high intensity ultrasonic applications with nonlinear acoustics.

Academic Significance and Societal Importance of the Research Achievements

試作した圧電結晶膜超音波トランスデューサを用いて、水中にて5MHz~20MHzにて、マイクロストリーミング、マイクロバブル、ナノバブルの発生、キャビテーションの発生、衝撃波の観察とそれによる音響化学反応の観察を行った。10MHzを超える周波数帯では上記のような非線形音響の観察例の報告は非常に少ないのが現状であるが、本研究により高周波での非線形音響現象用超音波トランスデューサの提案がなされた。

Report

(5 results)
  • 2020 Annual Research Report   Final Research Report ( PDF )
  • 2019 Research-status Report
  • 2018 Research-status Report
  • 2017 Research-status Report
  • Research Products

    (15 results)

All 2021 2020 2019 2018 2017

All Journal Article (5 results) (of which Peer Reviewed: 4 results,  Open Access: 2 results) Presentation (10 results) (of which Int'l Joint Research: 6 results,  Invited: 3 results)

  • [Journal Article] Growth of epitaxial (K, Na)NbO3 films with various orientations by hydrothermalmethod and their properties2019

    • Author(s)
      Yoshiharu Ito, Akinori Tateyama, Yoshiko Nakamura, Takao Shimizu, Minoru Kurosawa, Hiroshi Uchida, Takahisa Shiraishi, Takanori Kiguchi, Toyohiko J. Konno, Mutsuo Ishikawa, Hiroshi Funakubo.
    • Journal Title

      Jpn. J. Appl. Puys.

      Volume: 58 Issue: SL Pages: SLLB14-SLLB14

    • DOI

      10.7567/1347-4065/ab3958

    • Related Report
      2019 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] 広指向性を有する球状凸面型高周波超音波トランスデューサの開発2019

    • Author(s)
      石河 睦生, 白石 円, 塚本 絢穂, 内田 庸助, 田原麻梨江, 黒澤 実, 舟窪 浩
    • Journal Title

      平成30年度生体医歯工学共同研究拠点成果報告会

      Volume: 3 Pages: 144-144

    • Related Report
      2018 Research-status Report
  • [Journal Article] Preparation of {001}<sub>c</sub>-oriented epitaxial (K, Na)NbO<sub>3</sub> thick films by repeated hydrothermal deposition technique2018

    • Author(s)
      Takahisa SHIRAISHI, Yoshiharu ITO, Mutsuo ISHIKAWA, Hiroshi UCHIDA, Takanori KIGUCHI, Minoru K. KUROSAWA, Hiroshi FUNAKUBO, Toyohiko J. KONNO
    • Journal Title

      Journal of the Ceramic Society of Japan

      Volume: 126 Issue: 5 Pages: 281-285

    • DOI

      10.2109/jcersj2.17251

    • NAID

      130006730898

    • ISSN
      1348-6535, 1882-0743
    • Year and Date
      2018-05-01
    • Related Report
      2017 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] Deposition of piezoelectric KNbO3/PbTiO3 films for ultra high frequency and high intensity ultrasonic transducers2018

    • Author(s)
      Mutsuo Ishikawa, Yosuke Uchida, Takahisa Shiraishi, Marie Tabaru, Hiroshi Funakubo, Minoru Kurosawa
    • Journal Title

      International Workshop on Piezoelectric Materials and Applications in Actuators(IWPMA2018)

      Volume: IWPMA2018 Pages: 113-113

    • Related Report
      2018 Research-status Report
    • Peer Reviewed
  • [Journal Article] Characterization of (111)-oriented epitaxial (K0.5Na0.5)NbO3 thick films deposited by hydrothermal method2017

    • Author(s)
      Takahisa Shiraishi1, Mutsuo Ishikawa2, Hiroshi Uchida3, Takanori Kiguchi1, Minoru K. Kurosawa4, Hiroshi Funakubo5 and Toyohiko J. Konno1
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56 Issue: 10S Pages: 10PF04-10PF04

    • DOI

      10.7567/jjap.56.10pf04

    • NAID

      210000148381

    • Related Report
      2017 Research-status Report
    • Peer Reviewed
  • [Presentation] 水熱合成法により製膜した圧電結晶膜の特徴とその応用2021

    • Author(s)
      石河睦生, 齋藤 直, 田原麻梨江, 黒澤 実
    • Organizer
      日本音響学会2021年春季研究発表会講演論文集
    • Related Report
      2020 Annual Research Report
  • [Presentation] 水熱合成法を用いたKNbO3圧電薄膜のアドミタンス特性評価2021

    • Author(s)
      村瀬 貴一, 藤井 健人, 田原麻梨江, 齋藤 直, 石河睦生
    • Organizer
      日本音響学会2021年春季研究発表会講演論文集
    • Related Report
      2020 Annual Research Report
  • [Presentation] Evaluation of ultrasonic spray coating using high intensity and high frequency ultrasonic transducer,2020

    • Author(s)
      Mutsuo Ishikawa, Ayaho Tsukamoto, Nao Saito, Shintaro Yasui, Marie Tabaru, HIROSHI FUNAKUBO, Minoru Kuribayashi Kurosawa.
    • Organizer
      USE2020 第41回超音波エレクトロニクスの基礎と応用に関するシンポジウム
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of high intensity and high frequency ultrasonic transducers using piezoelectric films,2019

    • Author(s)
      Mutsuo Ishikawa, Ayaho Tsukamoto, Nao Saito, Akito Endo, Shintaro Yasui, Marie Tabaru, Hiroshi Funakubo, Minoru Kurosawa.
    • Organizer
      Symposium on ultrasonic electronics 2019 (USE2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Deposition of epitaxial piezoelectric films for high intensity and high frequency ultrasonic transducers and their applications,2019

    • Author(s)
      Mutsuo ISHIKAWA, Ayaho TSUKAMOTO, Nao SAITO, Akito ENDO, Shintaro YASUI, Marie TABARU, Hiroshi FUNAKUBO, Minoru KUROSAWA
    • Organizer
      International Workshop on Piezoelectric Materials and Applications in Actuators
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] 高周波強力超音波トランスデューサ用圧電結晶膜の製膜 とその評価2019

    • Author(s)
      石河 睦生, 内田 庸助, 塚本 絢穂, 齋藤 直, 遠藤 聡人, 安井 伸太郎, 田原 麻梨江, 舟窪 浩, 黒澤 実.
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] 高周波強力超音波トランスデューサの開発と医療応用へ向けて2018

    • Author(s)
      石河 睦生, 内田 庸助, 田原麻梨江, 白石 貴久, 舟窪 浩, 黒澤 実
    • Organizer
      第 38 回エレクトロセラミックス研究討論会
    • Related Report
      2018 Research-status Report
    • Invited
  • [Presentation] Deposition of piezoelectric KNbO3/PbTiO3 films for ultra high frequency and high intensity ultrasonic transducers2018

    • Author(s)
      Mutsuo Ishikawa, Yosuke Uchida, Takahisa Shiraishi, Marie Tabaru, Hiroshi Funakubo, Minoru Kurosawa
    • Organizer
      International Workshop on Piezoelectric Materials and Applications in Actuators(IWPMA2018)
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] Characteristics of high intensity and high frequency ultrasonic transducers using hydrothermal epitaxial piezoelectric &#64257;lms2017

    • Author(s)
      Mutsuo Ishikawa, Yosuke Uchida, Takahisa Shiraishi, Marie Tabaru, Hiroshi Funakubo, Minoru Kurosawa
    • Organizer
      International Congress on Ultrasonics
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] Characteristics of High Frequency and High Intensity Ultrasonic Transducers using Thickness Vibration Mode of Epitaxial Piezoelectric Films2017

    • Author(s)
      Mutsuo Ishikawa, Yosuke Uchida, Nobuaki Kosuge, Takahisa Shiraishi, Marie Tabaru, Hiroshi Funakubo
    • Organizer
      the 4th International Conference on Advanced Electromaterials
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research / Invited

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Published: 2017-04-28   Modified: 2022-01-27  

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