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Micro fabrication technology for the new type tactile sensor having high sensitivity and high resolution as a fingertip

Research Project

Project/Area Number 17K01565
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Rehabilitation science/Welfare engineering
Research InstitutionWakayama University

Principal Investigator

Miki Hirofumi  和歌山大学, システム工学部, 講師 (20403363)

Co-Investigator(Kenkyū-buntansha) 土谷 茂樹  和歌山大学, システム工学部, 教授 (30283956)
Project Period (FY) 2017-04-01 – 2020-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2019: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2018: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Fiscal Year 2017: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
KeywordsMEMS / 微細加工 / マイクロ触覚センサ / 圧電PVDF / 触覚センサ / 機能性材料 / 圧電PVDF フィルム / 人工皮膚センサ / パターンエッチング / アレイセンサ / 医療応用機器 / 異方性エッチング / a 触覚センサ / b 圧電樹脂フィルム / c 人工皮膚センサ / 高分解能・高感度 / アレイ / 医療応用
Outline of Final Research Achievements

In order to provide a soft and high sensitive & high resolution micro tactile sensor device for the minimally invasive surgery application, we used piezoelectric thin PVDF film as the target material. We investigated the relationship between arrayed sensing structure and the cross-talk problem by analysis, and developed fabrication process by means of dry and wet etching technology. Through this research, we proposed some useful design criteria for the arrayed sensor structures. By using this research results, it is possible to realize high sensitive and high resolution array sensor maintaining its flexibility and high piezoelectric property of PVDF film.

Academic Significance and Societal Importance of the Research Achievements

機能性PVDFの3次元微小構造体アレイを用いた柔らかく高感度・高解像度マイクロ触覚センサに関する研究報告はほかになく,PVDFの高い機能性を上手に利用することによって触感・圧感,滑り・振動以外に温感の情報検出も可能なことから,人間の皮膚感覚や指先触感に最も近い高度の触覚分布情報のデータ化が期待できる。また,低侵襲手術の応用に限らず,介護・福祉などの生活支援用ロボットの全身皮膚型センサとしても応用可能であり,食品や繊維などの工業製品の手触り感・触感をデータ化し定量的に評価することによって,職人の代わりに製品の品質管理が可能になるなど,学術面に限らず社会・経済・産業面での波及効果が予想される。

Report

(4 results)
  • 2019 Annual Research Report   Final Research Report ( PDF )
  • 2018 Research-status Report
  • 2017 Research-status Report
  • Research Products

    (5 results)

All 2020 2019 2018 2017

All Journal Article (2 results) (of which Peer Reviewed: 2 results,  Open Access: 1 results) Presentation (3 results) (of which Int'l Joint Research: 3 results)

  • [Journal Article] Anisotropic wet etching on the β-phase poly(vinylidene fluoride) film2020

    • Author(s)
      Hirofumi Miki ; Shigeki Tsuchitani ; Ryota Sugii ; Taisuke Tominaga
    • Journal Title

      Micro & Nano Letters

      Volume: 採択済・印刷中 Issue: 10 Pages: 666-669

    • DOI

      10.1049/mnl.2019.0304

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Lithographic Micropatterning on the β-PVDF Film Using Reactive Ion Etching Aim for High-Resolution Skin Sensors2019

    • Author(s)
      Hirofumi Miki, Ryota Sugii, Yutoku Kawabata and Shigeki Tsuchitani
    • Journal Title

      IEEJ Transactions on Electrical and Electronic Engineering

      Volume: 14(10) Issue: 10 Pages: 1575-1577

    • DOI

      10.1002/tee.22978

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Presentation] Etching properties of piezoelectric β-phase poly (vinylidene fluoride) film2018

    • Author(s)
      幹 浩文,杉井 亮太,土谷 茂樹
    • Organizer
      4th World Congress on Materials Science & Engineering
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] PVDF Micro Machining for the High Resolution Skin-like Tactile Sensors2017

    • Author(s)
      Hirofumi Miki, R. Sugii, T. Kawabata, S. Tsuchitani
    • Organizer
      ICST 2017: The 11th International Conference on Sensing Technology
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] Effect of Intermitted RIE Etching on the Beta-PVDF Film Micro Patterning2017

    • Author(s)
      Sugii Ryota, Hirofumi Miki, Shigeki Tsuchitani
    • Organizer
      MHS2017: 28th 2017 International Symposium on Micro-Nano Mechatronics and Human Science (From Micro & Nano Scale Systems to Robotics & Mechatronics Systems)
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research

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Published: 2017-04-28   Modified: 2021-02-19  

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