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Development of variable capacitors based on nanoscale ion movement

Research Project

Project/Area Number 17K05065
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionNational Institute for Materials Science

Principal Investigator

TSURUOKA Tohru  国立研究開発法人物質・材料研究機構, 国際ナノアーキテクトニクス研究拠点, 主席研究員 (20271992)

Project Period (FY) 2017-04-01 – 2022-03-31
Project Status Completed (Fiscal Year 2021)
Budget Amount *help
¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000)
Fiscal Year 2019: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2018: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2017: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Keywords可変容量素子 / 電気化学二重層 / リチウム固体電解質 / 電圧制御型発振器 / ナノイオニクス / 電圧制御型発振回路 / 酸化物 / 高分子 / 固体電解質
Outline of Final Research Achievements

Variable capacitance functions were demonstrated utilizing the transport of Li ions in a Pt/lithium phosphorous oxynitride (LiPON)/Pt structure. The capacitance originates mainly from the formation of an electrochemical double layer (EDL) at the interfaces between LiPON and Pt. Voltage applications drive Li ions from the positively biased electrode to the negatively biased one, and the EDL capacitance at cathode decreases significantly at higher voltages. As a result, the LiPON capacitor exhibits decreased capacitance as the voltage bias is increased. A voltage-controlled oscillator (VCO) operation was also demonstrated by incorporating the variable capacitors into an oscillator circuit. The VCO clearly shows that the oscillation frequency of the output waveforms is exponentially increased with an increase in the input direct current voltage. This result suggests the usefulness of the ionic variable capacitor.

Academic Significance and Societal Importance of the Research Achievements

本研究は酸化物固体電解質中のイオン(と電子)の移動により、誘電率や実効膜厚の変化などヘテロ界面の特性を劇的に変える「ナノイオニクス」の概念に基づく融合的な研究領域の開拓を狙ったものであり、従来の半導体の電子伝導を利用する「ナノエレクトロニクス」との対比という観点から学術的意義は大きい。その一例としてイオン移動型可変容量素子の実証を行い、当初想定していなかった電圧制御型発振器への組み込みにも成功した。固体電池応用に注目が集まるリチウム固体電解質のエレクトロニクス応用への有用性を示したことは社会的な意義も大きいと考える。

Report

(6 results)
  • 2021 Annual Research Report   Final Research Report ( PDF )
  • 2020 Research-status Report
  • 2019 Research-status Report
  • 2018 Research-status Report
  • 2017 Research-status Report
  • Research Products

    (15 results)

All 2021 2020 2019 2018 2017

All Journal Article (9 results) (of which Int'l Joint Research: 2 results,  Peer Reviewed: 9 results) Presentation (5 results) (of which Int'l Joint Research: 1 results,  Invited: 1 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Impact of moisture absorption on the resistive switching characteristics of a polyethylene oxide-based atomic switch2021

    • Author(s)
      K. Karthik, A. Gubicza, M. Aono, K. Terabe, I. Valov, T. Tsuruoka
    • Journal Title

      Journal of Materials Chemistry C

      Volume: 9 Issue: 34 Pages: 11198-11198

    • DOI

      10.1039/d1tc01654g

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] A voltage-controlled oscillator using variable capacitors with a thin dielectric electrolyte film2020

    • Author(s)
      Tohru Tsuruoka, Jin Su, Kazuya Terabe
    • Journal Title

      ACS Applied Electronic Materials

      Volume: 2 Issue: 9 Pages: 2788-2797

    • DOI

      10.1021/acsaelm.0c00481

    • Related Report
      2020 Research-status Report
    • Peer Reviewed
  • [Journal Article] Changes in the temperature dependence of Ag/Ta2O5/Pt gapless-type atomic switches caused by desorption/adsorption of water molecules from/into the Ta2O5 matrix2020

    • Author(s)
      Maiko Mikami, Naoya Tanahashi, Tohru Tsuruoka, Tsuyoshi Hasegawa
    • Journal Title

      Japanese Journal fo Applied Physics

      Volume: 60 Issue: SC Pages: SCCF05-SCCF05

    • DOI

      10.35848/1347-4065/abe7d5

    • Related Report
      2020 Research-status Report
    • Peer Reviewed
  • [Journal Article] Significant roles of the polymer matrix in the resistive switching behavior of polymer-based atomic switches2019

    • Author(s)
      Krishnan Karthik、Aono Masakazu、Terabe Kazuya、Tsuruoka Tohru
    • Journal Title

      Journal of Physics D: Applied Physics

      Volume: 52 Issue: 44 Pages: 445301-445301

    • DOI

      10.1088/1361-6463/ab35bf

    • Related Report
      2019 Research-status Report
    • Peer Reviewed
  • [Journal Article] Atomic Layer Deposition of a Magnesium Phosphate Solid Electrolyte2019

    • Author(s)
      Su Jin、Tsuruoka Tohru、Tsujita Takuji、Nishitani Yu、Nakura Kensuke、Terabe Kazuya
    • Journal Title

      Chemistry of Materials

      Volume: 31 Issue: 15 Pages: 5566-5575

    • DOI

      10.1021/acs.chemmater.9b01299

    • Related Report
      2019 Research-status Report
    • Peer Reviewed
  • [Journal Article] Effects of moisture and redox reactions in VCM and ECM resistive switching memories2018

    • Author(s)
      I. Valov and T. Tsuruoka
    • Journal Title

      Journal of Physics D: Applied Physics

      Volume: 51 Pages: 413001-413001

    • Related Report
      2018 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Thermally stable resistive switching of a polyvinyl alcohol-based atomic switch2018

    • Author(s)
      K. Krishnan, M. Aono, and T. Tsuruoka
    • Journal Title

      Journal of Materials Chemistry C

      Volume: 6 Issue: 24 Pages: 6460-6464

    • DOI

      10.1039/c8tc01809j

    • Related Report
      2018 Research-status Report
    • Peer Reviewed
  • [Journal Article] The rate limiting process and its activation energy in the forming process of a Cu/Ta2O5/Pt gapless-type atomic switch2018

    • Author(s)
      Y. Shigeoka, T. Tsuruoka, T. Hasegawa
    • Journal Title

      Japanese Journal fo Applied Physics

      Volume: 57 Issue: 3 Pages: 035202-035202

    • DOI

      10.7567/jjap.57.035202

    • NAID

      210000148716

    • Related Report
      2017 Research-status Report
    • Peer Reviewed
  • [Journal Article] Operating mechanism and resistive switching characteristics of two- and three-terminal atomic switches using a thin metal oxide layer2017

    • Author(s)
      T. Tsuruoka, T. Hasegwa, K. Terabe, M. Aono
    • Journal Title

      Journal of Electroceramics

      Volume: 39 Issue: 1-4 Pages: 143-156

    • DOI

      10.1007/s10832-016-0063-9

    • Related Report
      2017 Research-status Report
    • Peer Reviewed
  • [Presentation] 原子層堆積法によるリン酸マグネシウム固体電解質膜の作製2019

    • Author(s)
      鶴岡 徹, 蘇 進, 辻田卓司, 西谷雄, 濱村朋史, 稲富友, 名倉健祐, 寺部 一弥
    • Organizer
      2019年第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] Fabrication of a Magnesium Phosphate Electrolyte Film using Atomic Layer Deposition2019

    • Author(s)
      SU, Jin, TSURUOKA, Tohru, Takuji Tsujita, Yu Nishitani, Tomofumi Hamamura, Yuu Inatomi, Kensuke Nakura, Kazuya Terabe
    • Organizer
      32nd International Microprocesses and Nanotechnology Conference. 2019
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] ナノスケールのイオン伝導と酸化還元反応を利用した原子スイッチの開発2019

    • Author(s)
      鶴岡徹
    • Organizer
      群馬先端材料シンポジウム2019
    • Related Report
      2018 Research-status Report
    • Invited
  • [Presentation] 原子スイッチ型ReRAMの動作機構とシナプス機能2018

    • Author(s)
      鶴岡徹,寺部一弥
    • Organizer
      電気化学会第85回大会
    • Related Report
      2017 Research-status Report
  • [Presentation] Quantized conductance and synaptic functions realized by oxide nanoionics devices2017

    • Author(s)
      T. Tsuruoka
    • Organizer
      応用物理学会関西支部セミナー
    • Related Report
      2017 Research-status Report
  • [Patent(Industrial Property Rights)] 可変容量素子、共振器および可変容量素子の使用方法2019

    • Inventor(s)
      鶴岡徹、寺部一弥
    • Industrial Property Rights Holder
      国立研究開発法人物質・材料研究機構
    • Industrial Property Rights Type
      特許
    • Filing Date
      2019
    • Related Report
      2019 Research-status Report

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Published: 2017-04-28   Modified: 2023-01-30  

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