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Development of the laser processing simulation method

Research Project

Project/Area Number 17K05089
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Optical engineering, Photon science
Research InstitutionNational Institutes for Quantum and Radiological Science and Technology

Principal Investigator

Otobe Tomohito  国立研究開発法人量子科学技術研究開発機構, 関西光科学研究所 光量子科学研究部, 主幹研究員(定常) (60421442)

Co-Investigator(Kenkyū-buntansha) 小林 亮  名古屋工業大学, 工学(系)研究科(研究院), 助教 (70560126)
Project Period (FY) 2017-04-01 – 2020-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2019: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2018: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2017: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Keywordsフェムト秒レーザー加工 / 時間依存密度汎関数法 / レーザー加工 / 第一原理計算 / 電子励起確率 / 分子動力学計算 / 時間依存密度汎関数理論 / 材料加工・処理
Outline of Final Research Achievements

From the distribution of electronic states obtained by SALMON, the density of excited electrons and internal energies were calculated. We made the program to determine the temperature and chemical potential so as to reproduce them in a Fermi-Dirac distribution. Since the energy relaxation between the valence and conduction bands is slower in semiconductors than in each band, the temperatures of electron and hole were treated separately. Using this method, we were able to fit electron and hole with their respective temperatures and chemical potentials to reproduce the results of the principle calculation. We also found that the temperature of electron and hole depend on the excitation process.

Academic Significance and Societal Importance of the Research Achievements

モデル計算が主であったフェムト秒レーザー加工の初期過程の解析を,第一原理計算手法と言われる時間依存密度汎関数法とマックスウェル方程式を用いて行った.特に,より疎視的計算手法である確率過程モデルや分子動力学計算と上記手法を繋ぐための温度評価方法を提案した.これら解析手法を用いて,電場強度と電子温度,レーザー波長と加工深さ,バンド構造と電子温度といった様々なパラメータ間の関係性を明らかにすることができた.得られた知見と手法によりフェムト秒レーザー加工の理解及び予測に大きく寄与したものと思われる.

Report

(4 results)
  • 2019 Annual Research Report   Final Research Report ( PDF )
  • 2018 Research-status Report
  • 2017 Research-status Report
  • Research Products

    (22 results)

All 2020 2019 2018 2017 Other

All Int'l Joint Research (2 results) Journal Article (9 results) (of which Int'l Joint Research: 2 results,  Peer Reviewed: 9 results,  Open Access: 4 results) Presentation (10 results) (of which Int'l Joint Research: 5 results,  Invited: 3 results) Remarks (1 results)

  • [Int'l Joint Research] Charles University(チェコ)

    • Related Report
      2018 Research-status Report
  • [Int'l Joint Research] Max Planck Institute(ドイツ)

    • Related Report
      2018 Research-status Report
  • [Journal Article] Wavelength Dependence of the Laser-Excitation Process on a Silicon Surface2020

    • Author(s)
      Otobe T.
    • Journal Title

      Physical Review Applied

      Volume: 13 Issue: 2

    • DOI

      10.1103/physrevapplied.13.024062

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Macroscopic electron-hole distribution in silicon and cubic silicon carbide by the intense femtosecond laser pulse2019

    • Author(s)
      Otobe T.
    • Journal Title

      Journal of Applied Physics

      Volume: 126 Issue: 20 Pages: 203101-203101

    • DOI

      10.1063/1.5124424

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Attosecond electro-optic effect in zinc sulfide induced by a laser field2019

    • Author(s)
      Otobe T.
    • Journal Title

      Physical Review A

      Volume: 100 Issue: 3

    • DOI

      10.1103/physreva.100.033401

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] High-order harmonic generation from hybrid organic-inorganic perovskite thin films2019

    • Author(s)
      Hirori Hideki、Xia Peiyu、Shinohara Yasushi、Otobe Tomohito、Sanari Yasuyuki、Tahara Hirokazu、Ishii Nobuhisa、Itatani Jiro、Ishikawa Kenichi L.、Aharen Tomoko、Ozaki Masashi、Wakamiya Atsushi、Kanemitsu Yoshihiko
    • Journal Title

      APL Materials

      Volume: 7 Issue: 4 Pages: 041107-041107

    • DOI

      10.1063/1.5090935

    • NAID

      120006712768

    • Related Report
      2018 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] Anisotropy and polarization dependence of multiphoton charge carrier generation rate in diamond2019

    • Author(s)
      M. Kozak, T. Otobe, M. Zukerstein, F. Trojanek, and P. Maly
    • Journal Title

      Physical Review B

      Volume: 99 Issue: 10 Pages: 104305-104305

    • DOI

      10.1103/physrevb.99.104305

    • Related Report
      2018 Research-status Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Theory for Electron Excitation in Dielectrics under an Intense Linear and Circularly Polarized Laser Fields2019

    • Author(s)
      Otobe Tomohito、Shinohara Yasushi、Sato Shunsuke A.、Yabana Kazuhiro
    • Journal Title

      Journal of the Physical Society of Japan

      Volume: 88 Issue: 2 Pages: 024706-024706

    • DOI

      10.7566/jpsj.88.024706

    • NAID

      40021810324

    • Related Report
      2018 Research-status Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Analytical formulation for modulation of time-resolved dynamical Franz-Keldysh effect by electron excitation in dielectrics2017

    • Author(s)
      T. Otobe
    • Journal Title

      Physical Review B

      Volume: 96

    • Related Report
      2017 Research-status Report
    • Peer Reviewed
  • [Journal Article] Effect of plasma formation on the double pulse laser excitation of cubic silicon carbide2017

    • Author(s)
      Otobe T.、Hayashi T.、Nishikino M.
    • Journal Title

      Applied Physics Letters

      Volume: 111 Issue: 17 Pages: 171107-171107

    • DOI

      10.1063/1.4997363

    • Related Report
      2017 Research-status Report
    • Peer Reviewed
  • [Journal Article] レーザー場中にある誘電体における時間分解動的Franz-Keldysh効果によるサブサイクル応答2017

    • Author(s)
      乙部智仁
    • Journal Title

      レーザー研究

      Volume: 45 Pages: 226-230

    • NAID

      130007957288

    • Related Report
      2017 Research-status Report
    • Peer Reviewed
  • [Presentation] First-principles calculation for the attosecond electro-optic effect in zinc sulfide induced by a laser field2019

    • Author(s)
      Tomohito Otobe
    • Organizer
      ICPEAC 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Macroscopic electron-hole distribution calculated by the time-dependent density functional theory and Maxwell equation2019

    • Author(s)
      Tomohito Otobe
    • Organizer
      CLEO EURO
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Construction of efficient machine-learning potential for W-H system2019

    • Author(s)
      Ryo KOBAYASHI
    • Organizer
      4th International Workshop on Models and Data for Plasma-Materials Interaction in Fusion Devices
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Molecular dynamics simulation of laser ablation using electronic-temperature dependent force-field2019

    • Author(s)
      Ryo KOBAYASHI
    • Organizer
      Materials Research Society Japan (MRSJ)
    • Related Report
      2019 Annual Research Report
  • [Presentation] 電子温度依存型力場を用いたレーザーアブレーション分子動力学シミュレーション”2019

    • Author(s)
      小林亮
    • Organizer
      第36回プラズマ・核融合学会年会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 電子温度依存型力場を用いたレーザーアブレーション分子動力学シミュレーション2019

    • Author(s)
      小林亮
    • Organizer
      第33回分子シミュレーション討論会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Molecular dynamics simulation of laser ablation using electron-temperature dependent force-field2019

    • Author(s)
      Ryo KOBAYASHI
    • Organizer
      2019 Global Research Efforts on Energy and Nanomaterials (GREEN2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Effect of plasma formation on the double pulse laser excitation of cubic silicon carbide2018

    • Author(s)
      Tomohito Otobe
    • Organizer
      SPIE Photonic West LASE
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] レーザー場中にある固体のアト秒光学応答理論2018

    • Author(s)
      乙部智仁
    • Organizer
      一般社団法人 日本物理学会 第73回年次大会
    • Related Report
      2017 Research-status Report
    • Invited
  • [Presentation] 3C-SiCの2パルス励起におけるプラズマ形成の影響2017

    • Author(s)
      乙部智仁
    • Organizer
      第78回応用物理学会秋季講演会
    • Related Report
      2017 Research-status Report
  • [Remarks] 超高速光物性研究グループ 業績リスト

    • URL

      http://www.kansai.qst.go.jp/organization-1-3.html

    • Related Report
      2017 Research-status Report

URL: 

Published: 2017-04-28   Modified: 2021-02-19  

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