Development of Electric Field-assisted Slicing (EFS) that realizes innovative cutting processing for next-generation wide gap semiconductors
| Project/Area Number |
17K06106
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Akita Industrial Technology Center |
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Principal Investigator |
KUSUMI Takayuki 秋田県産業技術センター, 先進プロセス開発部, 主任研究員 (40370233)
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| Co-Investigator(Kenkyū-buntansha) |
赤上 陽一 秋田県産業技術センター, 企画事業部, 専門員 (00373217)
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| Project Period (FY) |
2017-04-01 – 2020-03-31
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| Project Status |
Completed (Fiscal Year 2019)
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| Budget Amount *help |
¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000)
Fiscal Year 2019: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2018: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2017: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
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| Keywords | ワイヤーソー / スラリー / 電界 / 砥粒 / 遊離砥粒 / ワイヤー切断 / 精密加工 |
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| Outline of Final Research Achievements |
Next generation semiconductor materials such as silicon carbide are high hardness and chemically stable materials. Thus, it takes a lot of time to manufacture wafers using these materials. In particular, the process of slicing from ingots to wafers accounts for 60 to 70% of the total manufacturing time. Therefore, there is a high demand for high speed slicing process. A wire saw is used for the slicing process. In order to improve the efficiency of this wire sawing, we propose the novel slicing technology, “Electric field-assisted Slicing (EFS)”. In this report, we describe the result of cutting efficiency improvement of 110-130% in fundamental study by principle experiments.
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| Academic Significance and Societal Importance of the Research Achievements |
本研究で対象としているワイドギャップ半導体用基板は，省エネに寄与するパワーデバイスとして発展が期待される素子の基板であり、市場規模が現在進行形で拡大している。本研究は、上記基板の加工効率向上・低コスト化に向けた技術を確立することを目的とし、このことは、産業界の基盤となる電気エネルギーの効率向上を図るもので大きな意義を有する。
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Report
(4 results)
Research Products
(23 results)
