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Ultra-precise machine system based on 6-dof motion measurement with laser interferometry-based trackers

Research Project

Project/Area Number 17K06116
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Design engineering/Machine functional elements/Tribology
Research InstitutionShizuoka University

Principal Investigator

Oiwa Takaaki  静岡大学, 工学部, 教授 (00223727)

Project Period (FY) 2017-04-01 – 2020-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000)
Fiscal Year 2019: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2018: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2017: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
Keywords精密機械システム / レーザトラッカ / 三次元座標計測 / 2自由度パラレルメカニズム / レーザ干渉測長器 / 2自由度パラレルマニピュレータ / レーザ干渉測長 / パラレルメカニズム / 6自由度運動誤差 / 2自由度回転機構 / 6自由度運動計測 / レーザトラッカー
Outline of Final Research Achievements

This study deals with a feedback-controlled precision machine system based on six laser-interferometric length measurement laser trackers for six-degree-of-freedom relative motions between the tool and work piece. This research developed a two-degree-of-freedom spatial parallel manipulator for tilting a set of a laser light source and a detector around two axes. Two sets of slider-crank mechanisms driven by voice coil linear motors rotate a moving platform of the manipulator around x and y axes. Experiments with a PID controller based on slider-displacement feedback demonstrated that frequency response of the manipulator was up to 10 Hz. Furthermore, the manipulator was driven so that reflected beam position errors on a QPD were minimized for tracking a target retroreflector mirror. Then, the position error was less than ±0.2 mm. Moreover, displacement measurement error was approximately ±1 micrometer p-p when the target traveled 10 mm in Z direction.

Academic Significance and Societal Importance of the Research Achievements

機械設計は学術的に体系化されず従来は経験的に行われてきた.精密機械では「アッベの原理」や「計測フレーム」などの設計規範があったが,それらの思想に忠実に沿った例はほとんどない.本研究は前述の二つの設計原理を同時に満足し,高い学術的重要性を持つ.
本研究により,内外乱によって熱的および力学的な誤差が生じても能動的な補正が可能になり,運動精度は飛躍的に向上する.また極端な高剛性化や精密な恒温環境が不要で著しい省エネ効果がある.さらにさまざまな精密機械に適用でき産業的な波及効果が高い.さらに精密工作機械等の空間精度の校正作業等にも利用でき,精密機械産業全体へ貢献できる.

Report

(4 results)
  • 2019 Annual Research Report   Final Research Report ( PDF )
  • 2018 Research-status Report
  • 2017 Research-status Report
  • Research Products

    (9 results)

All 2020 2019 2018 2017 Other

All Presentation (8 results) (of which Int'l Joint Research: 3 results) Remarks (1 results)

  • [Presentation] Estimation of Frequency Response of Laser-Interferometric Displacement Measurement Tracking System2020

    • Author(s)
      Shivagurumoorthy.S.S, Takaaki Oiwa
    • Organizer
      The 6th International Symposium toward the Future of Advanced Researches in Shizuoka University (ISFAR-SU2020)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 2自由度空間パラレルメカニズムを用いたレーザ干渉測長追尾システム2019

    • Author(s)
      大岩孝彰,チェリク バリシュ,朝間淳一
    • Organizer
      2019年度精密工学会春季大会学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 2自由度空間パラレルメカニズムを用いたレーザ干渉測長追尾システム2019

    • Author(s)
      大岩孝彰,チェリク バリシュ, 朝間淳一
    • Organizer
      2019年度精密工学会春季大会学術講演会
    • Related Report
      2018 Research-status Report
  • [Presentation] レーザトラッカ用のVCM駆動される2自由度回転パラレルマニピュレータ2018

    • Author(s)
      大岩孝彰,Baris Celik, 朝間淳一
    • Organizer
      日本機械学会第18回機素潤滑設計部門講演会
    • Related Report
      2018 Research-status Report
  • [Presentation] Design and Development of Two-degree-of-freedom Parallel Manipulator for Tilting Laser Interferometry Tracking System2017

    • Author(s)
      Baris Celik, Takaaki Oiwa and Junichi Asama
    • Organizer
      The 7th International Conference of Asian Society for Precision Engineering and Nanotechnology(ASPEN2017)
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] Two-degree-of-freedom special parallel manipulator for laser interferometry-based tracker2017

    • Author(s)
      Baris Celik, Takaaki Oiwa, Kenji.Terabayashi1 and Junichi Asama
    • Organizer
      The Fourth Conference on Mechanisms, Transmissions and Applications(MeTrApp2017)
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] ワーク・ツール間の6自由度相対運動計測と補正に基づく精密機械システム―レーザ干渉計を内蔵した長さ計測用受動連結連鎖―2017

    • Author(s)
      大岩孝彰,中澤行雄,寺林賢司,朝間淳一
    • Organizer
      2017年度精密工学会秋季大会学術講演会
    • Related Report
      2017 Research-status Report
  • [Presentation] パラレルメカニズムを用いた高速・高精度3次元座標計測システム(第29報)(校正点の配置が機構パラメータの推定精度に及ぼす影響)2017

    • Author(s)
      肥田拓也,大岩孝彰,寺林賢司,朝間淳一
    • Organizer
      日本機械学会2017年度年次大会
    • Related Report
      2017 Research-status Report
  • [Remarks] Laser-interferometric Tracking System

    • URL

      http://ars.eng.shizuoka.ac.jp/~oiwa/field/tracker/tracker_e.htm

    • Related Report
      2019 Annual Research Report

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Published: 2017-04-28   Modified: 2021-02-19  

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