| Budget Amount *help |
¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2019: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2018: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2017: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
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| Outline of Final Research Achievements |
Vacuum breakdown characteristics under uniform and non-uniform electric field condition were investigated. Sample electrodes have different surface conditions which are contaminated by a cutting oil. These electrode surfaces are analyzed by the XPS (X-ray Photoelectron Spectroscopy).
To investigate an influence of the contamination distribution on the electrode surface on the breakdown characteristics in vacuum, we conducted repetition breakdown tests in vacuum and X-ray photoelectron spectroscopy to analyze the chemical state of the electrode surface. From the experimental results, it is suggested that the contamination around the outside of the electrode surface deteriorates the breakdown voltage at the final stage of conditioning process.
We obtained the influence of the surface contaminated condition on the vacuum breakdown characteristics for the uniform and non-uniform electrode gap.
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