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In-situ observation technique of Schottky barriers around interface between metallic electrode and semiconductor

Research Project

Project/Area Number 17K06782
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Physical properties of metals/Metal-base materials
Research InstitutionJapan Fine Ceramics Center

Principal Investigator

KATO Takeharu  一般財団法人ファインセラミックスセンター, その他部局等, 主任研究員 (90399600)

Co-Investigator(Kenkyū-buntansha) 横江 大作  一般財団法人ファインセラミックスセンター, その他部局等, 技師 (20590079)
吉田 竜視  一般財団法人ファインセラミックスセンター, その他部局等, 技師 (50595725)
Project Period (FY) 2017-04-01 – 2020-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2019: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2018: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2017: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Keywordsショットキー障壁 / 金属/半導体界面 / 電子線ホログラフィー / 電位分布 / 集束イオンビーム / 界面構造解析 / 半導体 / 界面構造 / 空乏層 / その場観察
Outline of Final Research Achievements

We fabricated TEM specimen supports, which could apply voltage to a TEM specimen without leak current, to observe Schottky barriers around interfaces between metallic electrodes and semiconductors. TEM specimen with the interface between metallic electrode and semiconductor was fixed on the support. The TEM specimen was thinned with uniform thickness and no damage, in which current-voltage character could be measured applying the forward bias or reversed bias to the interfaces. In addition, crystal orientations of the metallic electrode and semiconductors were identified using electron back scattering diffraction. The relationships between the applying voltages and the thickness of depletion layers in the semiconductor at the vicinity of the metallic electrode interface could be characterized using electron holography, which could reveal the potential distribution in the semiconductor during applying voltage to the interface.

Academic Significance and Societal Importance of the Research Achievements

将来のパワーデバイス分野で必要とされる炭化ケイ素(SiC)や窒化ガリウム(GaN)素子の電極開発に役立つ技術である。これらの材料は現状のシリコン(Si)半導体素子と比較し低抵抗特性と耐電圧特性を有しており、エレクトロニクス製品の作動時に発生するエネルギーロス減らし、消費電力の削減に大きく貢献することが見込まれ、省エネ化に必要な素子である。パワーデバイス素子は、家電、コンピューター、自動車(電気自動車を含む)、大型の鉄道設備や、携帯電話・スマートフォン、携帯電話基地局の高周波増幅器等に広く使われており、現代人の生活基盤を支えている。

Report

(4 results)
  • 2019 Annual Research Report   Final Research Report ( PDF )
  • 2018 Research-status Report
  • 2017 Research-status Report
  • Research Products

    (17 results)

All 2020 2019 2018 2017

All Journal Article (6 results) (of which Int'l Joint Research: 3 results,  Peer Reviewed: 6 results,  Open Access: 3 results) Presentation (11 results) (of which Int'l Joint Research: 4 results,  Invited: 3 results)

  • [Journal Article] Scaling, rotation, and channeling behavior of helical and skyrmion spin textures in thin films of Te-doped Cu2OSeO32020

    • Author(s)
      M. G. Han, J. A. Garlow, Y. Kharkov, L. Camacho, R. Rov, J. Sauceda, G. Vats, K. Kisslinger, T. Kato, O. Sushkov, Y. Zhu, C. Ulrich, T. Sohnel, J. Seidel
    • Journal Title

      Science Advances

      Volume: 6 Issue: 13

    • DOI

      10.1126/sciadv.aax2138

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Specimen Preparation Techniques Using Focused Ion Beam Systems2019

    • Author(s)
      加藤丈晴
    • Journal Title

      KENBIKYO

      Volume: 54 Issue: 3 Pages: 138-143

    • DOI

      10.11410/kenbikyo.54.3_138

    • NAID

      130007783747

    • ISSN
      1349-0958, 2434-2386
    • Year and Date
      2019-12-30
    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Stabilizing the metastable superhard material wurtzite boron nitride by three-dimensional networks of planar defects2019

    • Author(s)
      C. Chen, D. Yin, T. Kato, T. Taniguchi, K. Watanabe, X. Ma, H. Ye, Y. Ikuhara
    • Journal Title

      Proceedings of the National Academy of Sciences of the United States of America (PANS)

      Volume: 116 Pages: 11181-11186

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Nanodomain Structures in a Strained BaTiO3 Film Detected Using Picoscale Cation Displacement Measurements2019

    • Author(s)
      S. Kobayashi, K. Inoue, T. Kato, Y. Ikuhara, T. Yamamoto
    • Journal Title

      AMTC Letters

      Volume: 6 Pages: 10-11

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Mass Transfer in Yb Silicates under Oxygen Potential Gradients at High Temperatures2019

    • Author(s)
      S. Kitaoka, T. Matsudaira, M. Wada, T. Yokoi, N. Yamaguchi, N. Kawashima, T. Ogawa, D. Yokoe, T. Kato
    • Journal Title

      AMTC Letters

      Volume: 6 Pages: 150-151

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Multiphase nanodomains in a strained BaTiO3 film on a GdScO3 substrate2018

    • Author(s)
      Kobayashi Shunsuke、Inoue Kazutoshi、Kato Takeharu、Ikuhara Yuichi、Yamamoto Takahisa
    • Journal Title

      Journal of Applied Physics

      Volume: 123 Issue: 6 Pages: 064102-064102

    • DOI

      10.1063/1.5012545

    • Related Report
      2017 Research-status Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Presentation] Nanodomain Structures in a Strained BaTiO3 Film Detected Using Picoscale Cation Displacement Measurements2019

    • Author(s)
      S. Kobayashi, K. Inoue, T. Kato, Y. Ikuhara, T. Yamamoto
    • Organizer
      6th International Symposium on Advanced Microscopy and Theoretical Calculations (AMTC6)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Mass Transfer in Yb Silicates under Oxygen Potential Gradients at High Temperatures2019

    • Author(s)
      S. Kitaoka, T. Matsudaira, M. Wada, T. Yokoi, N. Yamaguchi, N. Kawashima, T. Ogawa, D. Yokoe, T. Kato
    • Organizer
      6th International Symposium on Advanced Microscopy and Theoretical Calculations (AMTC6)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 電子線トモグラフィーの非線型透過率補正におけるノイズ問題の解決法2019

    • Author(s)
      照屋海登、山﨑 順、加藤丈晴、藤田直弘、馬場則男
    • Organizer
      日本顕微鏡学会第75回学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 有機修飾型リン酸八カルシウムの水熱処理によるヒドロキシアパタイトの合成2019

    • Author(s)
      横井太史、後藤知代、加藤丈晴、高橋誠治
    • Organizer
      第58回東海若セラ手セラミスト懇話会2019年夏季セミナー
    • Related Report
      2019 Annual Research Report
  • [Presentation] TVノルム最小化を用いた密度定量トモグラフィにおけるノイズ問題解決法2019

    • Author(s)
      照屋海登、山﨑 順、加藤丈晴、藤田直弘、馬場則男
    • Organizer
      物理学会2019年秋季大会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 有機修飾型リン酸八カルシウムの水熱処理によるアパタイトメソクリスタルの生成2019

    • Author(s)
      横井太史、後藤知代、中村仁、大槻主税、加藤丈晴、高橋誠治
    • Organizer
      第28回無機リン化学討論会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Formation of Nanodomains in a BaTiO3 Film Induced by Anisotropic Strain from an Orthorhombic GdScO3 Substrate2019

    • Author(s)
      S. Kobayashi, K. Inoue, T. Kato, Y. Ikuhara, T. Yamamoto
    • Organizer
      The 13th Pacific Rim Conference of Ceramic Societies (PACRIM13)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Hydroxyapatite Mesocrystal Formation by Hydrothermal Treatment of Octacalcium Phosphate with Incorporated Dicarboxylate Ions2019

    • Author(s)
      T. Yokoi, T. Goto, J. Nakamura, C. Ohtsuki, T. Kato, S. Takahashi
    • Organizer
      The 13th Pacific Rim Conference of Ceramic Societies (PACRIM13)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] FIB-SEM複合機による無機材料の解析例2018

    • Author(s)
      加藤丈晴
    • Organizer
      第74回日本顕微鏡学会 電子顕微鏡 基礎技術チュートリアル
    • Related Report
      2018 Research-status Report
    • Invited
  • [Presentation] Three dimensional study of EuBa2Cu3Oy coated conductors using focused ion beam-scanning electron microscopy/FIB-SEM複合装置を用いたEuBa2Cu3Oy超電導層の3次元構築2018

    • Author(s)
      加藤丈晴
    • Organizer
      日本顕微鏡学会 第61回シンポジウム
    • Related Report
      2018 Research-status Report
    • Invited
  • [Presentation] FIB-SEM装置による無機材料の解析例2017

    • Author(s)
      加藤丈晴
    • Organizer
      SCAN TECH 2017
    • Related Report
      2017 Research-status Report
    • Invited

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Published: 2017-04-28   Modified: 2021-02-19  

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