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A new fabrication technique of AlN/sapphire template

Research Project

Project/Area Number 17K06795
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Inorganic materials/Physical properties
Research InstitutionKyushu University

Principal Investigator

Kangawa Yoshihiro  九州大学, 応用力学研究所, 教授 (90327320)

Project Period (FY) 2017-04-01 – 2020-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000)
Fiscal Year 2019: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2018: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2017: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Keywords窒化アルミニウム / 溶液成長 / 窒化物半導体 / テンプレート基板 / 結晶成長 / 結晶工学
Outline of Final Research Achievements

In the present research, a new solution growth technique to make AlN/sapphire template was studied. Specifically, the following growth process was examined: (1) Al sputtering on sapphire substrate, (2) filling of Li3N particles on the Al/sapphire template, and (3) annealing of the material to make AlN/sapphire template. The results suggest that (A) the source material should be Al and Li3N complex instead of a simple Li3N, and (B) annealing temperature should be around 1250 degree C are necessary to make AlN/sapphire template by this technique.

Academic Significance and Societal Importance of the Research Achievements

深紫外の高輝度光源、特に発光波長260nm以下の光源は細菌のDNA破壊に有効なため殺菌・浄水用光源として利用されている。現状では水銀灯タイプの光源が用いられているが、環境負荷の低減および小型化の観点から代替となるAlGaN深紫外LED(Light Emitting Diode)の開発が進められている。しかし、AlGaN深紫外LED素子の基板材料には昇華法あるいはHVPE法により作製された高価なAlN結晶または厚膜が用いられているため、低コスト化が困難である。本研究では、素子の低コスト化に資するAlN/サファイアテンプレートの新規作製方法を提案した。

Report

(4 results)
  • 2019 Annual Research Report   Final Research Report ( PDF )
  • 2018 Research-status Report
  • 2017 Research-status Report
  • Research Products

    (9 results)

All 2019 Other

All Int'l Joint Research (6 results) Presentation (3 results) (of which Invited: 1 results)

  • [Int'l Joint Research] Institute of High Pressure Physics(ポーランド)

    • Related Report
      2019 Annual Research Report
  • [Int'l Joint Research] Fraunhofer IISB(ドイツ)

    • Related Report
      2019 Annual Research Report
  • [Int'l Joint Research] Institute of High Pressure Physics, PAS(ポーランド)

    • Related Report
      2018 Research-status Report
  • [Int'l Joint Research] Fraunhofer IISB(ドイツ)

    • Related Report
      2018 Research-status Report
  • [Int'l Joint Research] Institute of High Pressure Physics, PAS(Poland)

    • Related Report
      2017 Research-status Report
  • [Int'l Joint Research] Fraunhofer IISB(Germany)

    • Related Report
      2017 Research-status Report
  • [Presentation] 未来材料開拓に向けた相界面制御2019

    • Author(s)
      寒川義裕
    • Organizer
      第48回結晶成長国内会議
    • Related Report
      2019 Annual Research Report
    • Invited
  • [Presentation] 窒化物半導体におけるステップバンチング発生機構の解明2019

    • Author(s)
      稲富悠也、寒川義裕
    • Organizer
      第48回結晶成長国内会議
    • Related Report
      2019 Annual Research Report
  • [Presentation] 吸着原子の拡散距離が表面モフォロジーに与える影響2019

    • Author(s)
      稲富悠也、寒川義裕
    • Organizer
      第42回結晶成長討論会
    • Related Report
      2019 Annual Research Report

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Published: 2017-04-28   Modified: 2021-02-19  

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