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Evaluation of nanopore size distribution by grazing-incidence small-angle X-ray scattering

Research Project

Project/Area Number 17K14092
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Nanomaterials engineering
Research InstitutionNational Institute of Advanced Industrial Science and Technology

Principal Investigator

Hori Yasuaki  国立研究開発法人産業技術総合研究所, 計量標準総合センター, 主任研究員 (50443221)

Project Period (FY) 2017-04-01 – 2020-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2018: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2017: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000)
KeywordsGI-SAXS / X線回折 / 1次元回折格子 / ナノポア / X線微小角散乱法 / 微小周期構造 / ナノ材料 / X線
Outline of Final Research Achievements

We have applied GI-SAXS method as inspection tool to investigate the geometrical information of the nanopore or dot structures and discussed the validity of these results. At first, we developed the GI-SAXS instruments that establishes the traceability to the SI. In the validation measurement, we have measured the pitch of 1-dimensional grating and compared the result with its reference value measured by AFM. Next, we have obtained the scattering intensity distribution from Tungsten Dot-array and considered the method to analyze the dot structures.

Academic Significance and Societal Importance of the Research Achievements

GI-SAXSは半導体産業界で複雑な表面形状を測定する手法として広く用いられており、その計測の信頼性に対する関心と需要が増している。本研究ではGI-SAXSの応用を目指してその信頼性の評価を実施し、妥当な結果が得られたことは関連業界にとって大きな進展である。また、ドット構造の情報抽出に関する今回の結果及び課題は、次世代DNAセンサのキーデバイスとなるナノポア製造の効率化や安全性向上に貢献できると考えられる。

Report

(4 results)
  • 2019 Annual Research Report   Final Research Report ( PDF )
  • 2018 Research-status Report
  • 2017 Research-status Report

Research Products

(4 results)

All 2018 2017 Other

All Journal Article (2 results) (of which Peer Reviewed: 2 results) Presentation (1 results) (of which Int'l Joint Research: 1 results,  Invited: 1 results) Remarks (1 results)

  • [Journal Article] A heterodyne interferometer constructed in an integrated optics and its metrological evaluation of a picometre-order periodic error2018

    • Author(s)
      Shuko Yokoyama, Yasuaki Hori, Toshiyuki Yokoyama, Akiko Hirai
    • Journal Title

      Precision Engineering

      Volume: 54 Pages: 206-211

    • DOI

      10.1016/j.precisioneng.2018.04.020

    • Related Report
      2018 Research-status Report
    • Peer Reviewed
  • [Journal Article] Periodic error evaluation system for linear encoders using a homodyne laser interferometer with 10 picometer uncertainty2018

    • Author(s)
      Hori Yasuaki、Gonda Satoshi、Bitou Youichi、Watanabe Akihiro、Nakamura Koutaro
    • Journal Title

      Precision Engineering

      Volume: 51 Pages: 388-392

    • DOI

      10.1016/j.precisioneng.2017.09.009

    • Related Report
      2017 Research-status Report
    • Peer Reviewed
  • [Presentation] Nonlinearity evaluation system for displacement sensors using a homodyne interferometer2017

    • Author(s)
      Yasuaki Hori
    • Organizer
      2017 Optics & Photonics Congress
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research / Invited
  • [Remarks] ナノスケール標準研究グループホームページ

    • URL

      https://unit.aist.go.jp/riem/ns-std/

    • Related Report
      2017 Research-status Report

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Published: 2017-04-28   Modified: 2021-02-19  

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