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Development of superconducting-tunnel-junction X-ray detectors with superconducting coils

Research Project

Project/Area Number 17K14141
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Quantum beam science
Research InstitutionNational Institute of Advanced Industrial Science and Technology

Principal Investigator

Fujii Go  国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 主任研究員 (30709598)

Project Period (FY) 2017-04-01 – 2020-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2019: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2018: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2017: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
KeywordsX線検出器 / 超伝導 / 軟X線 / 超伝導トンネル接合 / X線 / コイル / 有限要素法 / X線
Outline of Final Research Achievements

We have developed a 4096-pixel superconducting-tunnel-junction (STJ) array X-ray detector with detection area of 40 mm2 combining embedded superconducting wirings. The STJs have good current-voltage characteristics with a leak current of several nA, and achieved high energy resolution of about 11 eV for K line of carbon and oxygen. The developed detector has realized X-ray detection efficiency of several 100 mSr, which is about the same as that of semiconductor X-ray detectors. Therefore, the superconducting X-ray detector can achieve the high energy resolution of wavelength dispersive X-ray spectrometers and the high efficiency of semiconductor X-ray detectors.

Academic Significance and Societal Importance of the Research Achievements

超伝導X線検出器が、従来の半導体X線検出器の性能を大幅に上回ることを実証した。実際に、今回開発した超伝導X線検出器が各種X線分析装置に適応されれば、最低でも10倍以上の高速化や1/10以下の濃度の分析も可能になり、従来分析出来なかった各種革新的材料中の微量軽元素分析が可能になり、次世代半導体の高性能化、構造材料の耐熱温度向上や軽量化などの実現に貢献できる。

Report

(4 results)
  • 2019 Annual Research Report   Final Research Report ( PDF )
  • 2018 Research-status Report
  • 2017 Research-status Report
  • Research Products

    (7 results)

All 2020 2019 2018 2017

All Journal Article (2 results) Presentation (5 results) (of which Int'l Joint Research: 5 results,  Invited: 2 results)

  • [Journal Article] Development and Application of SEM-EDS Analyzer Utilizing Superconducting X-ray Detector2020

    • Author(s)
      FUJII Go、UKIBE Masahiro、SHIKI Shigetomo、OHKUBO Masataka
    • Journal Title

      Journal of the JapanSociety for Precision Engineering

      Volume: 86 Pages: 197-200

    • NAID

      130007805858

    • Related Report
      2019 Annual Research Report
  • [Journal Article] Development of Large-scale Superconducting-tunnel-junction Array X-ray Detectors for Nanoscale Elemental Mapping2019

    • Author(s)
      FUJII Go、UKIBE Masahiro、SHIKI Shigetomo、OHKUBO Masataka
    • Journal Title

      TEION KOGAKU (Journal of Cryogenics and Superconductivity Society of Japan)

      Volume: 54 Issue: 3 Pages: 181-186

    • DOI

      10.2221/jcsj.54.181

    • NAID

      130007674412

    • ISSN
      0389-2441, 1880-0408
    • Year and Date
      2019-05-20
    • Related Report
      2019 Annual Research Report
  • [Presentation] Development of X-ray emission spectroscopy analyzer with low voltage SEM and STJ array X-ray detector for nanometer-scale chemical state imaging2019

    • Author(s)
      Go Fujii, Masahiro Ukibe, Shigetomo Shiki, kiyoka Takagi and Masataka Ohkubo
    • Organizer
      18th International Workshop on Low Temperature Detectors
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Fabrication of 4096-pixel superconducting-tunnel-junction array X-ray detectors toward high throughput SEM-EDX analyses2018

    • Author(s)
      藤井剛、浮辺雅宏、志岐成友、大久保雅隆
    • Organizer
      International Workshop for Superconducting Sensors and Detectors 2018
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] Development of 4096-pixel superconducting-tunnel-junction array X-ray detectors for analytical sciences2018

    • Author(s)
      藤井剛、浮辺雅宏、志岐成友、大久保雅隆
    • Organizer
      13th Workshop on Low Temperature Electronics
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Elemental Analyses of Heat Resistant Steels by High-Energy Resolution EDS Analyzer Based on Superconducting-Tunnel-Junction Array2017

    • Author(s)
      藤井剛、浮辺雅宏、志岐成友、大久保雅隆
    • Organizer
      M&M 2017 Microscopy & MicroAnalysis
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] Development of high energy resolution and high throughput SEM-EDS analyzer utilizing 100-pixel superconducting-tunnel-junction array toward nanometer scale elemental mapping2017

    • Author(s)
      藤井剛、浮辺雅宏、志岐成友、大久保雅隆
    • Organizer
      17th international workshop on Low Temperature Detectors (LTD17)
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research

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Published: 2017-04-28   Modified: 2021-02-19  

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