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Thermal phonon spectroscopy of phononic crystals by using a MEMS thermometer

Research Project

Project/Area Number 17K14654
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Electronic materials/Electric materials
Research InstitutionTokyo University of Agriculture and Technology (2018)
The University of Tokyo (2017)

Principal Investigator

Zhang Ya  東京農工大学, 工学(系)研究科(研究院), 准教授 (80779637)

Research Collaborator Hirakawa Kazuhiko  
Nomura Masahiro  
Project Period (FY) 2017-04-01 – 2019-03-31
Project Status Completed (Fiscal Year 2018)
Budget Amount *help
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2018: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2017: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Keywordsフォノン分光法 / フォノニック結晶 / 熱輸送 / MEMS / 半導体 / マイクロ/ナノ構造 / phonon spectroscopy / thermal phonon / thermal sensor / Phononic crystal / thermoelectrics / phononic crystal
Outline of Final Research Achievements

We have utilized a novel MEMS thermometer as a powerful tool for studying the thermal transport in phononic crystals(PnC). We fabricated two-dimensional PnCs on GaAs MEMS beam. By measuring the thermal decay time of the beams with and without PnCs, we obtained the change in thermal conductance of MEMS beams by PnCs. When the hole diameters in PnCs were decreased to ~300 nm, the PnCs gave notably larger drops in thermal conductance than the theoretical expection, suggesting that the phononic effect changed the thermal conductivity of the GaAs material.
Furthermore, we sent two light pulses from a femtosecond laser with a modulated time delay to heat up the MEMS beam, and we measured its temperature rise as a function of the time delay between two pulses, which gives a phonon interference pattern owing to the coherent phonon transport in the GaAs beam. By performing Fourier transform, we determined the phonon spectrum through the GaAs beam.

Academic Significance and Societal Importance of the Research Achievements

本研究は、超高速フォノン分光法を実施するための強力な方法を提供し、半導体マイクロ/ナノ構造における熱輸送プロセスに対する理解を大きく深化させるものである。さらに、その知見が、マイクロ/ナノ材料の熱特性における多くの研究に広く応用できるため、基礎研究と社会の両方に大きなインパクトを与える。従って、本研究に基づき、更なる研究の開拓が期待できる。将来的には、フォノンの波動性による熱輸送の制御を可能にし、半導体デバイスに対する理想的な熱制御につながり、エネルギー効率の高い社会の構築にも役立つと期待できる。

Report

(3 results)
  • 2018 Annual Research Report   Final Research Report ( PDF )
  • 2017 Research-status Report
  • Research Products

    (15 results)

All 2019 2018 2017 Other

All Journal Article (3 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 2 results) Presentation (11 results) (of which Int'l Joint Research: 9 results,  Invited: 6 results) Remarks (1 results)

  • [Journal Article] Fast and sensitive bolometric terahertz detection at room temperature through thermomechanical transduction2019

    • Author(s)
      Zhang Ya、Hosono Suguru、Nagai Naomi、Song Sang-Hun、Hirakawa Kazuhiko
    • Journal Title

      Journal of Applied Physics

      Volume: 125 Issue: 15 Pages: 151602-151602

    • DOI

      10.1063/1.5045256

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] MEMS共振器を用いた室温動作・高速・高感度テラヘルツボロメータの開発2019

    • Author(s)
      平川一彦、張 亜
    • Journal Title

      次世代センサー

      Volume: 28(2) Pages: 6-9

    • Related Report
      2018 Annual Research Report
  • [Journal Article] Effect of buckling on the thermal response of microelectromechanical beam resonators2017

    • Author(s)
      Zhang Y.、Hosono S.、Nagai N.、Hirakawa K.
    • Journal Title

      Applied Physics Letters

      Volume: 111 Issue: 2 Pages: 023504-023504

    • DOI

      10.1063/1.4993740

    • Related Report
      2017 Research-status Report
    • Peer Reviewed
  • [Presentation] Heat transport in GaAs membranes studied by using a GaAs MEMS thermal sensor2019

    • Author(s)
      Y. Zhang, B. Qiu, S.Q. Du, N. Nagai and K. Hirakawa
    • Organizer
      Compound Semiconductor Week 2019
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Detecting sub-terahertz mechanical oscillations by a GaAs MEMS thermal sensor2019

    • Author(s)
      Y. Zhang, B. Qiu, S.Q. Du, N. Nagai and K. Hirakawa
    • Organizer
      2019年第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Novel bolometric THz detection by MEMS resonators2018

    • Author(s)
      Y. Zhang, K. Hirakawa
    • Organizer
      43rd International Conference on Infrared, Millimeter and Terahertz Waves(IRMMW-THz2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Novel thermomechanical terahertz detection by using fundamental and coupled modes in doubly clamped MEMS beam resonators2018

    • Author(s)
      Y. Zhang, K. Hirakawa
    • Organizer
      The 13th Pacific Rim Conference on Lasers and Electro-Optics
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Novel thermomechanical terahertz detection by using fundamental and coupled modes in doubly clamped MEMS beam resonators2018

    • Author(s)
      Y. Zhang, and K. Hirakawa
    • Organizer
      The 13th Pacific Rim Conference on Lasers and Electro-Optics (CLEO-PR 2018)
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Novel bolometric THz detection by MEMS resonators2018

    • Author(s)
      Y. Zhang, and K. Hirakawa
    • Organizer
      43rd International Conference on Infrared, Millimeter and Terahertz Waves(IRMMW-THz2018)
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Enhanced sensitivity of MEMS-based terahertz bolometers by introducing two-dimensional phononic crystal structures2017

    • Author(s)
      Y. Zhang, B. Qiu, N. Nagai, M. Nomura,and K. Hirakawa
    • Organizer
      2017 Workshop on Innovative Nanoscale Devices and Systems (WINDS)
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] Enhanced sensitivity of MEMS-based terahertz bolometers by introducing two-dimensional phononic crystal structures2017

    • Author(s)
      Y. Zhang, B. Qiu , N. Nagai , M. Nomura, and K. Hirakawa
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Research-status Report
  • [Presentation] Enhanced sensitivity of MEMS-based terahertz bolometers by introducing two-dimensional phononic crystal structures2017

    • Author(s)
      Y. Zhang, B. Qiu , N. Nagai , M. Nomura, and K. Hirakawa
    • Organizer
      International Symposium on Hybrid Quantum Systems 2017
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] Novel bolometric THz detection by MEMS resonators2017

    • Author(s)
      Y. Zhang, and K. Hirakawa
    • Organizer
      14th International Conference on Intersubband Transitions in Quantum Wells (ITQW-2017)
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Room temperature, very sensitive bolometer using a doubly clamped microelectromechanical beam resonator2017

    • Author(s)
      Y. Zhang, and K. Hirakawa
    • Organizer
      2ed International Conference on Terahertz Emission, Metamaterials and Nanophotonics (Terametanano-2
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research / Invited
  • [Remarks] Novel phonon spectroscopy

    • URL

      http://web.tuat.ac.jp/~zhang/researche.html

    • Related Report
      2018 Annual Research Report

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Published: 2017-04-28   Modified: 2020-03-30  

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