Two Dimensional Inorganic/Organic Hetero Interface for Normally Off MoS2 FET
Project/Area Number |
17K14662
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Research Category |
Grant-in-Aid for Young Scientists (B)
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Allocation Type | Multi-year Fund |
Research Field |
Electron device/Electronic equipment
|
Research Institution | Tokyo Institute of Technology |
Principal Investigator |
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Project Period (FY) |
2017-04-01 – 2021-03-31
|
Project Status |
Discontinued (Fiscal Year 2020)
|
Budget Amount *help |
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2020: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2019: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2018: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2017: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
|
Keywords | TMDC / FET / 自己組織化 / 先端機能デバイス / マイクロ・ナノデバイス / 表面・界面物性 / ナノ材料 |
Outline of Final Research Achievements |
Object of this study is to demonstrate the control of threshold voltage (Vth) by engineering a gate metal electrode in molybdenum disulfide (MoS2) field-effect transistors (FETs). The fabrication process for gate stacks involves the deposition of aluminum oxides (AlOx) on a high-work-function metal and the subsequent formation of a self-assembled monolayer (SAM) by an immersion method. A positive Vth of 0.15V was demonstrated using a platinum (Pt) metal as a gate electrode accompanied by a low density of traps at the interface owing to the close-packed SAM. The Pt gate electrode exhibits a Vth shift of about 1V in the positive direction compared with the aluminum (Al) gate electrode. This Vth shift is consistent with the difference in the work function of Pt and Al gate metal electrodes.
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Academic Significance and Societal Importance of the Research Achievements |
2次元半導体材料の二硫化モリブデン(MoS2)は移動度が高く、未結合手が無いため化学的、電気的に安定な材料である事から次世代低消費電力エレクトロニクスに向けたFETのチャネル材料として期待されている。本研究によって素子特性で最も重要な閾値電圧制御をMoS2 FETで確立し、正の閾値電圧を実証できた事は次世代低消費電力エレクトロニクスに向けた大きな一歩となり2次元半導体材料の可能性を示す事ができた考えている。
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Report
(4 results)
Research Products
(26 results)