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Development of Ge-based mid-infrared waveguide platform with strong optical confinement for on-chip gas sensing

Research Project

Project/Area Number 17K14670
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Electron device/Electronic equipment
Research InstitutionNTT Basic Research Laboratories (2018)
Tokyo City University (2017)

Principal Investigator

Xu Xuejun  日本電信電話株式会社NTT物性科学基礎研究所, 量子光物性研究部, 主任研究員 (80593334)

Research Collaborator Osako Rikito  
Project Period (FY) 2017-04-01 – 2019-03-31
Project Status Completed (Fiscal Year 2018)
Budget Amount *help
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2018: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2017: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
KeywordsMid-infrared photonics / Silicon photonics / Gas sensing / Germanium / Microresonator / Optical resonators / Mid-infrared / Waveguide / Grating coupler / 光デバイス / ゲルマニウム / 中赤外 / ガスセンシング
Outline of Final Research Achievements

In this research, silicon-based mid-infrared (MIR) photonic platform has been developed for ultra-sensitive on-chip gas sensing. Ge-on-Si films with ultralow MIR absorption of less than 10 cm-1 have been grown by molecular beam epitaxy and post annealing. Fundamental building blocks, including optical waveguides, fiber-to-waveguide grating couplers, and microdisk resonators, have been realized on Ge-on-Si and silicon-on-insulator substrates. A MIR waveguide transmission measurement system has been established and high coupling efficiency over 10% between fiber and waveguide has been realized. Based on these device components, sensitivity analysis indicates that ultra-long effective optical absorption length on the order of meter can be readily achieved on-chip within device footprint of less than 0.04 mm2.

Academic Significance and Societal Importance of the Research Achievements

The research indicates that the proposed MIR photonic platform is very promising for high sensitivity on-chip trace gas sensing, and represents a new direction for group-IV photonics. It thus pave the way to low-cost, practical, portable, and smart gas monitoring tools in industry and daily life.

Report

(3 results)
  • 2018 Annual Research Report   Final Research Report ( PDF )
  • 2017 Research-status Report
  • Research Products

    (19 results)

All 2018 2017

All Journal Article (4 results) (of which Peer Reviewed: 2 results) Presentation (15 results) (of which Int'l Joint Research: 7 results,  Invited: 2 results)

  • [Journal Article] Effects of post annealing on in-situ n-doped Ge-on-Si2018

    • Author(s)
      Kumazawa Yuta、Xu Xuejun、Maruizumi Takuya、Sawano Kentarou
    • Journal Title

      Semiconductor Science and Technology

      Volume: 33 Issue: 12 Pages: 124006-124006

    • DOI

      10.1088/1361-6641/aae62e

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Resonant light emission from uniaxially tensile-strained Ge microbridges2018

    • Author(s)
      Zhou Peiji、Xu Xuejun、Matsushita Sho、Sawano Kentarou、Maruizumi Takuya
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 57 Issue: 4S Pages: 04FH10-04FH10

    • DOI

      10.7567/jjap.57.04fh10

    • NAID

      210000148948

    • Related Report
      2018 Annual Research Report 2017 Research-status Report
    • Peer Reviewed
  • [Journal Article] シリコンフォトニクス光配線に向けたゲルマニウム発光素子2018

    • Author(s)
      徐 学俊・澤野憲太郎
    • Journal Title

      光アライアンス

      Volume: 29 Pages: 19-25

    • Related Report
      2018 Annual Research Report 2017 Research-status Report
  • [Journal Article] 絶縁膜上ゲルマニウム基板上に円型分布ブラッグ反射鏡で高性能光共振器を開発2018

    • Author(s)
      徐学俊、澤野憲太郎、丸泉琢也
    • Journal Title

      レーザ加工学会誌

      Volume: 25 Pages: 43-45

    • NAID

      130007999637

    • Related Report
      2018 Annual Research Report 2017 Research-status Report
  • [Presentation] CMOS-compatible germanium light sources2018

    • Author(s)
      Kentarou Sawano, Xuejun Xu, Takuya Maruizumi
    • Organizer
      233rd ECS Meeting
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Effects of post annealing on in-situ n-doped Ge-on-Si2018

    • Author(s)
      Yuta Kumazawa, Xuejun Xu, Kentarou Sawano, and Takuya Maruizumi
    • Organizer
      9th International SiGe Technology and Device Meeting (ISTDM) and 11th International Conference on Silicon Epitaxy and Heterostructures (ICSI)
    • Related Report
      2018 Annual Research Report 2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] Ge量子ドットを有する円形DBR微小共振器構造の発光特性2018

    • Author(s)
      石井 大介、水谷 昂平、原田 波子、徐 学俊、丸泉 琢也、澤野 憲太郎
    • Organizer
      2018年第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] ウェットエッチングによる歪みGeマイクロブリッジの作製2018

    • Author(s)
      田村 亮貴、大久保 亮太、徐 学俊、丸泉 琢也、澤野 憲太郎
    • Organizer
      2018年第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] In-situ n型ドープGe-on-Siにおけるポストアニールの影響2018

    • Author(s)
      熊澤祐太,徐学俊,澤野憲太郎,丸泉琢也
    • Organizer
      2018年第65回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Ge中赤外光グレーティングカプラ2018

    • Author(s)
      大迫力人,徐学俊,澤野憲太郎,丸泉琢也
    • Organizer
      2018年第65回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] CMOS-compatible germanium light sources2018

    • Author(s)
      K. Sawano, X. Xu, and T. Maruizumi
    • Organizer
      223rd ECS Meeting
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] In-situ n型ドープGe-on-Siにおけるポストアニールの影響2018

    • Author(s)
      熊澤祐太,徐学俊,澤野憲太郎,丸泉琢也
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Research-status Report
  • [Presentation] Ge中赤外光グレーティングカプラ2018

    • Author(s)
      大迫力人,徐学俊,澤野憲太郎,丸泉琢也
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Research-status Report
  • [Presentation] The Resonant Phenomenon in the PL Spectra Measured in the Tensile-Strained Ge Microbridges2017

    • Author(s)
      Peiji Zhou, Xuejun Xu, Yuta Kanda, Sho Matsushita, Kentarou Sawano, and Takuya Maruizumi
    • Organizer
      2017 International Conference on Solid State Devices and Materials (SSDM)
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] Resonant light emission from highly n-doped germanium-on-insulator microdisks with circular Bragg grating2017

    • Author(s)
      Xuejun Xu, Hideaki Hashimoto, Kentarou Sawano, and Takuya Maruizumi
    • Organizer
      2017 Conference on Lasers and Electro-Optics (CLEO: 2017)
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] Circular distributed Bragg reflector resonators on highly n-doped Ge-on-insulator2017

    • Author(s)
      Hideaki Hashimoto, Yuta Kumazawa, Xuejun Xu, Kentarou Sawano
    • Organizer
      The 10th International Conference On Silicon Epitaxy And Heterostructures (ICSI-10)
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] Resonant light emission from uniaxial tensile-strained Ge microbridges2017

    • Author(s)
      Sho Matsushita, Yuta Kanda, Xuejun Xu, Kentarou Sawano
    • Organizer
      The 10th International Conference On Silicon Epitaxy And Heterostructures (ICSI-10)
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] Spin-on-dopant 拡散による Ge ダイオードの電流注入での発光2017

    • Author(s)
      岡重柊汰,徐学俊,澤野憲太郎,丸泉琢也
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Research-status Report
  • [Presentation] Ge 量子ドットへの P-Spin-on-Doping が発光特性に与える効果2017

    • Author(s)
      原田波子,徐学俊,澤野憲太郎,丸泉琢也
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Research-status Report

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Published: 2017-04-28   Modified: 2020-03-30  

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