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Development of room temperature operation InAs-based THz wave detectors

Research Project

Project/Area Number 17K14673
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Electron device/Electronic equipment
Research InstitutionOsaka Institute of Technology

Principal Investigator

Masatoshi Koyama  大阪工業大学, 工学部, 講師 (30758636)

Project Period (FY) 2017-04-01 – 2021-03-31
Project Status Completed (Fiscal Year 2020)
Budget Amount *help
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2019: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2018: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2017: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Keywords非線形電流電圧特性 / InAs / 極微構造 / 2乗検波 / InAs薄膜 / 非対称極微メサ構造 / 微細構造デバイス / 非線形電子輸送 / 砒化インジウム / センシングデバイス / テラヘルツ検出 / ボウタイダイオード / 電子デバイス・機器
Outline of Final Research Achievements

This research was carried out with the aim of developing a terahertz wave detection device with high sensitivity, wide operating frequency, fast response speed, zero bias, and room temperature operation. Focusing on a micro-mesa structure with an asymmetric bowtie-shaped antenna that has non-linear current-voltage characteristics, we made this on an InAs thin film and evaluated a non-linear current-voltage characteristic that are required for square-law detection. As a result, we obtained nonlinear current-voltage characteristics that were caused by the rise of electron temperature due to electric field concentration in a neck structure in which the electric field strength is strong. Although we could not carry out a detection experiment under terahertz wave irradiation, we believe that detection can be expected from the non-linear current-voltage characteristics obtained with the prototype device.

Academic Significance and Societal Importance of the Research Achievements

テラヘルツ波は、空港のセキュリティーゲートでの金属探知、美術品の修復作業での非破壊検査、癌細胞の検知など多方面で応用が期待されている。しかしながら、テラヘルツ波の検出方法の選択肢はそれほど多くないことから、新たな検出デバイスを探索することは、学術的・社会的な意義が大きい。本研究では、これまで報告例が少ない非対称なボウタイ形状アンテナを持つ極微メサ構造に注目し、これまで検討されてこなかったInAs薄膜にこの特異な構造を作製し、検出に必要な非線形な電流電圧特性が得られることを示した。

Report

(5 results)
  • 2020 Annual Research Report   Final Research Report ( PDF )
  • 2019 Research-status Report
  • 2018 Research-status Report
  • 2017 Research-status Report
  • Research Products

    (25 results)

All 2021 2020 2019 2018 2017

All Journal Article (5 results) (of which Peer Reviewed: 5 results,  Open Access: 2 results) Presentation (20 results) (of which Int'l Joint Research: 9 results)

  • [Journal Article] Impact of optical absorption for THz radiation in GaSb/InAs heterostructures2021

    • Author(s)
      R. Ohashi; D. Shimada; M. Koyama; T. Maemoto; S. Sasa; F. Murakami; H. Murakami; M. Tonouchi
    • Journal Title

      IEEE Xplore

      Volume: - Pages: 1-2

    • DOI

      10.1109/irmmw-thz46771.2020.9371009

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development of terahertz optical sources for an excitation wavelength of 1.56 μm2021

    • Author(s)
      Daichi Shimada; Ryota Ohashi; Masatoshi Koyama; Toshihiko Maemoto; Shigehiko Sasa; Kosuke Okada; Hironaru Murakami; Masayoshi Tonouchi
    • Journal Title

      IEEE Xplore

      Volume: - Pages: 1-2

    • DOI

      10.1109/irmmw-thz46771.2020.9370373

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Characteristics of the Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> Thin Films Grown by a Chemical Solution Deposition Method2019

    • Author(s)
      矢野 満明, 井上 泰一, 大田 宗司, 河本 泰輝, 広藤 裕一, 小山 政俊, 小池 一歩
    • Journal Title

      Journal of the Society of Materials Science, Japan

      Volume: 68 Issue: 10 Pages: 745-750

    • DOI

      10.2472/jsms.68.745

    • NAID

      130007731500

    • ISSN
      0514-5163, 1880-7488
    • Year and Date
      2019-10-15
    • Related Report
      2019 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] The Thermal Stability of ε-Ga2O3 Thin Films Grown on (111) 3C-SiC Template Substrates2019

    • Author(s)
      Masatoshi Koyama, Toyokazu Kaneko, Sodai Fujiwara, Toshihiko Maemoto, and Shigehiko Sasa
    • Journal Title

      IEEE Xplore, Compound Semiconductor Week 2019

      Volume: - Pages: 1-2

    • DOI

      10.1109/iciprm.2019.8819218

    • Related Report
      2019 Research-status Report
    • Peer Reviewed
  • [Journal Article] Study for Enhancement of Terahertz Radiation Using GaSb/InAs Heterostructures2017

    • Author(s)
      S Sasa, Y Kinoshita, M Tatsumi, M Koyama, T Maemoto, S Hamauchi, I Kawayama, M Tonouchi
    • Journal Title

      Journal of Physics: Conference Series

      Volume: 906 Pages: 012015-012018

    • Related Report
      2017 Research-status Report
    • Peer Reviewed / Open Access
  • [Presentation] Impact of optical absorption for THz radiation in GaSb/InAs heterostructures2020

    • Author(s)
      R. Ohashi, D. Shimada, M. Koyama, T. Maemoto, S. Sasa, F. Murakami, H. Murakami, M. Tonouchi
    • Organizer
      2020 45th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of terahertz optical sources for an excitation wavelength of 1.56 μm2020

    • Author(s)
      D. Shimada, R. Ohashi, M. Koyama, T. Maemoto, S. Sasa, F. Murakami, H. Murakami, M. Tonouchi
    • Organizer
      2020 45th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Nonuniform Carrier Heating Induced Nonlinear Electron Transport Properties in Asymmetrically Necked InAs Mesa Structures2020

    • Author(s)
      Ryota Ohashi, Daichi Shimada, Masatoshi Koyama, Toshihiko Maemoto, Shigehiko Sasa
    • Organizer
      Pacific RIM Meeting on Electrochemical and Solid State Science 2020
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] InGaSb/InAsヘテロ接合を用いた1.55um励起高強度THz放射素子の開発2020

    • Author(s)
      島田乃地,大橋亮太,小山政俊,前元利彦,佐々誠彦,村上史和,村上博成,斗内政吉
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] (In)GaSb/InAsヘテロ接合を用いた高強度テラヘルツ放射素子の研究2020

    • Author(s)
      大橋亮太,島田乃地,小山政俊,前元利彦,佐々誠彦,村上史和,村上博成,斗内政吉
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] The Thermal Stability of ε-Ga2O3 Thin Films Grown on (111) 3C-SiC Template Substrates2019

    • Author(s)
      Masatoshi Koyama, Toyokazu Kaneko, Sodai Fujiwara, Toshihiko Maemoto and Shigehiko Sasa
    • Organizer
      Compound Semiconductor Week 2019
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Terahertz Radiation Using GaSb/InAs Heterostructures excited by 1.55 um laser2019

    • Author(s)
      Shigehiko Sasa, Daichi Shimada, Ryota Ohashi, Masatoshi Koyama, Toshihiko Maemoto, Iwao Kawayama and Masayoshi Tonouchi
    • Organizer
      The 21th International Conference on Electron Dynamics in Semiconductors, Optoelectronics and Nanostructures (EDISON 21)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Characteristics of the Hf0.5Zr0.5O2 Thin Films Grown by a Chemical Solution Deposition Method2019

    • Author(s)
      Mitsuaki Yano, Taichi Inoue, Sohji Ota, Yuichi Hirofuji, Masatoshi Koyama, Kazuto Koike
    • Organizer
      European Material Research Society Fall Meeting
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] 溶液塗布熱分解法によるHf0.5Zr0.5O2薄膜の作製2019

    • Author(s)
      井上泰一,大田宗司,中村領太,広藤裕一,小山政俊,小池一歩,矢野満明
    • Organizer
      応用物理学会秋季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] (111) 3C-SiC テンプレート基板上 ε-Ga2O3薄膜のミスト CVD 成長2019

    • Author(s)
      藤原壮大,金子豊和,小山 政俊,前元 利彦,佐々 誠彦
    • Organizer
      電気関係学会関西連合大会
    • Related Report
      2019 Research-status Report
  • [Presentation] ガスセンサ応用に向けたMoS2トランジスタの作製と電気特性2019

    • Author(s)
      前田 翔児,Perini Christopher,金子 豊和,寺澤 大樹,福田 昭,小山 政俊,藤元 章, 原田 義之,小池 一歩,矢野 満明,Vogel Eric
    • Organizer
      2019年 第66回応用物理学会春季学術講演会
    • Related Report
      2018 Research-status Report
  • [Presentation] Enhanced Terahertz Radiation From GaSb/InAs Heterostructures2018

    • Author(s)
      S. Sasa, M. Tatsumi, M. Koyama, T. Maemoto, I. Kawayama, and M. Tonouchi
    • Organizer
      43rd International Conference on Infrared Millimeter and Terahertz Waves
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] Heteroepitaxial growth of ε-Ga2O3 thin films on (111) 3C-SiC templates by mist chemical vapor deposition2018

    • Author(s)
      Toyokazu Kaneko, Sodai Fujiwara, Masatoshi Koyama, Toshihiko Maemoto and Shigehiko Sasa
    • Organizer
      Transparent Conductive Materials 2018
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] ミストCVD法による 3C -SiC(111)テンプレート基板への ε-Ga2O3ヘテロエピタキシャル成長2018

    • Author(s)
      金子豊和,藤原壮大,小山 政俊,前元 利彦,佐々 誠彦
    • Organizer
      応用物理学会秋季学術講演会
    • Related Report
      2018 Research-status Report
  • [Presentation] ミストCVD 法によって成長した(111) 3C -SiCテンプレート基板上 ε-Ga2O3薄膜の熱的安定性2018

    • Author(s)
      金子豊和,藤原壮大,小山 政俊,前元 利彦,佐々 誠彦
    • Organizer
      電気関係学会関西連合大会
    • Related Report
      2018 Research-status Report
  • [Presentation] GaSb/InAsヘテロ接合を用いたテラヘルツ波の放射強度増強の検討2018

    • Author(s)
      大橋亮太,島田乃地,巽雅史,小山政俊,前元利彦,佐々誠彦
    • Organizer
      電気関係学会関西連合大会
    • Related Report
      2018 Research-status Report
  • [Presentation] GaSb/InAsヘテロ接合に1.55umを用いたテラヘルツ波の放射素子の開発2018

    • Author(s)
      島田乃地,大橋亮太,巽雅史,小山政俊,前元利彦,佐々誠彦
    • Organizer
      電気関係学会関西連合大会
    • Related Report
      2018 Research-status Report
  • [Presentation] ミストCVD法によるWO3薄膜の成長2018

    • Author(s)
      亀井龍真,井上泰一,小山政俊,小池一歩,矢野満明
    • Organizer
      日本材料学会半導体エレクトロニクス部門委員会第1回講演会・見学会
    • Related Report
      2018 Research-status Report
  • [Presentation] Study for Enhancement of Terahertz Radiation Using GaSb/InAs Heterostructures2017

    • Author(s)
      M. Koyama, Y. Kinoshita, M. Tatsumi, T. Maemoto, S. Sasa, S. Hamauchi, I. Kawayama and M. Tonouchi
    • Organizer
      The 20th International Conference on Electron Dynamics in Semiconductors, Optoelectronics and Nanostructures
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] GaSb/InAsヘテロ接合を用いたテラヘルツ波の放射強度増強の検討2017

    • Author(s)
      木下耀平,巽 雅史,小山政俊,前元利彦,佐々誠彦,寶田智哉,川山 巌,斗内政吉
    • Organizer
      日本材料学会半導体エレクトロニクス部門委員会・ナノ材料部門委員会 合同研究会
    • Related Report
      2017 Research-status Report

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Published: 2017-04-28   Modified: 2022-01-27  

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