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The control of PDMS deformability in high-resolution printing for multilayered electronic devices

Research Project

Project/Area Number 17K18410
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Properties in chemical engineering process/Transfer operation/Unit operation
Electron device/Electronic equipment
Research InstitutionNational Institute of Advanced Industrial Science and Technology

Principal Investigator

Kusaka Yasuyuki  国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 主任研究員 (00738057)

Project Period (FY) 2017-04-01 – 2019-03-31
Project Status Completed (Fiscal Year 2018)
Budget Amount *help
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2018: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2017: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
Keywords接触力学 / 層間接続 / 寸法忠実性 / 配線 / パターニング / 印刷エレクトロニクス / 反転オフセット印刷 / 印刷 / ゴム / ガス透過 / ずり / 寸法インテグリティ / 接触変形 / 微細パターニング
Outline of Final Research Achievements

The present study investigated processing rules of reverse offset printing. Mechanical aspects of silicone rubber (PDMS) were focused to (i) develop a vertical interconnection formation technique using a vertical deformation of PDMS and to (ii) understand the pattern fidelity of reverse offset printing. The topic (i) was solved successfully by considering contact mechanics of elastic materials with a finite thickness. In the topic (ii), it was revealed that the slippage owning to the horizontal deformation of PDMS during the printing worsened the pattern integrity (proximity deformation effect). As an additional topic, (iii) an initial contact between PDMS and substrate or cliche was directly observed and analyzed in relation to high-speed reverse offset printing.

Academic Significance and Societal Importance of the Research Achievements

印刷技術はこれまでもエレクトロニクス分野で広く応用されてきた。また真空プロセスに比べて簡便で省資源であること、IoT等で安価なデバイスが求められる状況、ナノ材料の発展を背景として、印刷プロセスの応用範囲はさらに広がりつつある。それに伴い印刷パターン解像度だけでなく、配線積層化技術や生産性の向上などプロセス高度化が求められる局面も多くなっている。本研究は、高度印刷プロセスを構築を目指して接触力学の観点から解析を行ったものであり、しばしば経験に頼りがちな印刷エレクトロニクスを産業応用する上で有用な指針を提示するものである。

Report

(4 results)
  • 2018 Annual Research Report   Final Research Report ( PDF )
  • 2017 Research-status Report
  • Products Report
  • Research Products

    (28 results)

All 2022 2019 2018 2017 Other

All Int'l Joint Research (1 results) Journal Article (8 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 3 results,  Open Access: 1 results) Presentation (13 results) (of which Int'l Joint Research: 4 results,  Invited: 6 results) Book (2 results) Remarks (1 results) Patent(Industrial Property Rights) (3 results) (of which Overseas: 1 results)

  • [Int'l Joint Research] VTT Finland(フィンランド)

    • Related Report
      2018 Annual Research Report
  • [Journal Article] Patterning defects in high-speed reverse offset printing: lessons from contact dynamics2019

    • Author(s)
      Kusaka Yasuyuki、Mizukami Makoto、Yamaguchi Tetsuo、Fukuda Nobuko、Ushijima Hirobumi
    • Journal Title

      Journal of Micromechanics and Microengineering

      Volume: 29 Issue: 4 Pages: 045001-045001

    • DOI

      10.1088/1361-6439/ab024b

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Development of Manufacturing Processes for Novel Electronics by Print Technology2018

    • Author(s)
      Ushijima Hirobumi、Nomura Ken-ichi、Kusaka Yasuyuki、Kanazawa Shusuke、Horii Yoshinori、Fujita Mariko、Yamamoto Noritaka
    • Journal Title

      Journal of The Japan Institute of Electronics Packaging

      Volume: 21 Issue: 6 Pages: 567-572

    • DOI

      10.5104/jiep.21.567

    • NAID

      130007479925

    • ISSN
      1343-9677, 1884-121X
    • Year and Date
      2018-09-01
    • Related Report
      2018 Annual Research Report
  • [Journal Article] Reverse Offset Printing of Semidried Metal Acetylacetonate Layers and Its Application to a Solution-Processed IGZO TFT Fabrication2018

    • Author(s)
      Yasuyuki Kusaka; Naoki Shirakawa; Shintaro Ogura; Jaakko Leppaniemi; Asko Sneck; Ari Alastalo; Hirobumi Ushijima; and Nobuko Fukuda
    • Journal Title

      ACS Appl. Mater. Interfaces

      Volume: 10(29) Issue: 29 Pages: 24339-24343

    • DOI

      10.1021/acsami.8b07465

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Direct adhesion contrast patterning on PDMS substrate by ArF excimer laser scanning for on-demand printing of functional layers2018

    • Author(s)
      Kusaka Yasuyuki、Hirata Atsushi、Ushijima Hirobumi
    • Journal Title

      The International Journal of Advanced Manufacturing Technology

      Volume: 99 Issue: 1-4 Pages: 859-865

    • DOI

      10.1007/s00170-018-2384-0

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Design rules for vertical interconnections by reverse offset printing2018

    • Author(s)
      Kusaka Yasuyuki、Kanazawa Shusuke、Ushijima Hirobumi
    • Journal Title

      Journal of Micromechanics and Microengineering

      Volume: 28 Issue: 3 Pages: 035003-035003

    • DOI

      10.1088/1361-6439/aaa1d6

    • Related Report
      2017 Research-status Report
  • [Journal Article] Fully-printed vertical interconnections with tapered contact holes formed by vapor-annealing technique2018

    • Author(s)
      Kusaka Yasuyuki、Kanazawa Shusuke、Ushijima Hirobumi
    • Journal Title

      2018 International Conference on Electronics Packaging (ICEP)

      Volume: -

    • Related Report
      2017 Research-status Report
  • [Journal Article] Pattern size tolerance of reverse offset printing: a proximity deformation effect related to local PDMS slipping2017

    • Author(s)
      Kusaka Yasuyuki、Kanazawa Shusuke、Koutake Masayoshi、Ushijima Hirobumi
    • Journal Title

      Journal of Micromechanics and Microengineering

      Volume: 27 Issue: 10 Pages: 105018-105018

    • DOI

      10.1088/1361-6439/aa8924

    • Related Report
      2017 Research-status Report
  • [Journal Article] インク膜の凝集力を制御した印刷エレクトロニクス向け微細構造形成プロセス2017

    • Author(s)
      日下靖之、金澤周介、牛島洋史
    • Journal Title

      ケミカルエンジニヤリング

      Volume: 62 Pages: 40-46

    • Related Report
      2017 Research-status Report
  • [Presentation] High-resolution printing techniques2019

    • Author(s)
      Yasuyuki Kusaka
    • Organizer
      LOPEC 2019
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 付着力差による一桁ミクロン微細印刷2019

    • Author(s)
      日下靖之
    • Organizer
      JFlex 2019
    • Related Report
      2018 Annual Research Report
  • [Presentation] 反転オフセット印刷における歪近接効果2019

    • Author(s)
      日下靖之、牛島 洋史
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Reverse offset printing of metal acetylacetonate inks and its applications to a solu-tion-processed IGZO-TFT2018

    • Author(s)
      Yasuyuki Kusaka, Jaakko Leppaniemi, Asko Sneck, Ari Alastalo, Naoki Shirakawa, Hirobumi Ushi-jima, Nobuko Fukuda
    • Organizer
      SSDM 2018
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 金属錯体の微細印刷パターニングと酸化物デバイス応用2018

    • Author(s)
      日下靖之、Sneck Asko、Leppaniemi Jaakko、Alastalo Ari、牛島 洋史、福田 伸子
    • Organizer
      第69回コロイドおよび界面化学討論会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Fully-printed vertical interconnections with tapered contact holes formed by vapor-annealing technique2018

    • Author(s)
      Yasuyuki Kusaka, Shusuke Kanazawa, Hirobumi Ushijima
    • Organizer
      2018 International Conference on Electronics Packaging (ICEP)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 印刷技術を用いた酸化物デバイスの形成に向けた材料・プロセス開発2018

    • Author(s)
      福田 伸子、日下 靖之、白川 直樹
    • Organizer
      第79回応用物理学会秋季講演会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] 微細印刷エレクトロニクスにおける半乾燥膜と付着力制御の重要性2017

    • Author(s)
      日下靖之、牛島洋史
    • Organizer
      化学工学会 第49回秋季大会
    • Related Report
      2017 Research-status Report
    • Invited
  • [Presentation] Interfacial phenomena in printed electronics2017

    • Author(s)
      Yasuyuki Kusaka
    • Organizer
      TGSW2017
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] エレクトロニクス製造のための、印刷を越えた印刷技術2017

    • Author(s)
      日下靖之
    • Organizer
      プリンテッド・ エレクトロニクスが拓く社会と産業の将来
    • Related Report
      2017 Research-status Report
    • Invited
  • [Presentation] 印刷と凝集:次世代エレクロトニクスのための微細パターニングの肝と応用2017

    • Author(s)
      日下靖之
    • Organizer
      第7回CSJ化学フェスタ2017
    • Related Report
      2017 Research-status Report
    • Invited
  • [Presentation] 半乾燥インク膜の再湿潤化とゴム変形予測による全印刷層間接続技術2017

    • Author(s)
      日下靖之、牛島洋史
    • Organizer
      第68回コロイドおよび界面化学討論会
    • Related Report
      2017 Research-status Report
  • [Presentation] 一桁ミクロン配線を可能にする新規平版印刷プロセス2017

    • Author(s)
      日下靖之
    • Organizer
      エレクトロニクス実装学会 2017ワークショップ
    • Related Report
      2017 Research-status Report
  • [Book] プリンテッドエレクトロニクス実用化最前線2018

    • Author(s)
      日下靖之
    • Total Pages
      288
    • Publisher
      シーエムシー出版
    • Related Report
      2018 Annual Research Report
  • [Book] 第 4 版 現代界面コロイド化学の基礎 - 原理・応用・測定ソリューション2018

    • Author(s)
      日下靖之、牛島洋史
    • Total Pages
      544
    • Publisher
      丸善出版
    • Related Report
      2018 Annual Research Report
  • [Remarks] Research Home, Yasuyuki Kusaka

    • URL

      https://unit.aist.go.jp/flec/asp/member/Kusaka/index.html

    • Related Report
      2018 Annual Research Report
  • [Patent(Industrial Property Rights)] 機能性パターン薄膜の形成方法2022

    • Inventor(s)
      日下 靖之, 福田 伸子, 藤田 真理子, 白川 直樹, 牛島 洋史
    • Industrial Property Rights Holder
      産業技術総合研究所
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2018-084274
    • Acquisition Date
      2022
    • Related Report
      Products Report
    • Overseas
  • [Patent(Industrial Property Rights)] 機能性パターン薄膜の形成方法2018

    • Inventor(s)
      日下靖之、福田伸子、藤田真理子、白川直樹、牛島洋史
    • Industrial Property Rights Holder
      産業技術総合研究所
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2018-084274
    • Filing Date
      2018
    • Related Report
      2018 Annual Research Report
  • [Patent(Industrial Property Rights)] 電子デバイスの製造方法2017

    • Inventor(s)
      日下靖之、牛島洋史、藤田真理子
    • Industrial Property Rights Holder
      日下靖之、牛島洋史、藤田真理子
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2017-167501
    • Filing Date
      2017
    • Related Report
      2017 Research-status Report

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Published: 2017-04-28   Modified: 2023-03-30  

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