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Studies on negative oxygen ions for applying nano processing and uniform cluster at room temperature

Research Project

Project/Area Number 17K18769
Research Category

Grant-in-Aid for Challenging Research (Exploratory)

Allocation TypeMulti-year Fund
Research Field Plasma science and related fields
Research InstitutionKyoto Institute of Technology

Principal Investigator

Himura Haruhiko  京都工芸繊維大学, 電気電子工学系, 教授 (30311632)

Co-Investigator(Kenkyū-buntansha) 蓮池 紀幸  京都工芸繊維大学, 電気電子工学系, 助教 (40452370)
三瓶 明希夫  京都工芸繊維大学, 電気電子工学系, 准教授 (90379066)
Project Period (FY) 2017-06-30 – 2020-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥6,240,000 (Direct Cost: ¥4,800,000、Indirect Cost: ¥1,440,000)
Fiscal Year 2019: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2018: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2017: ¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Keywords負イオンナノドライプロセス / 負イオンドライプロセス / 酸素アニオンラジカル / 酸化力 / 酸化物プロセス / 酸素負イオンプラズマ / 特定粒子種別プロセス / プラズマ科学 / プラズマエレクトロニクス / 酸素負イオン / 原子層
Outline of Final Research Achievements

This study proposed a method using reactive negative ions that has better controllability and uniform energy compared to the direct plasma method. A machine for verifying the principle of the new method was designed and constructed based on our own simulations. In a planar-type of plasma source in the machine, the electromagnetic fields were optimized for generating oxygen negative ions. Also, an appropriate spatial distribution of electron temperature (Te) was realized in which Te was measured by a double probe. Values of other plasma parameters for extracting the negative ions with a uniform energy were investigated by simulation. This simulation considered the self-electric field of the negative ions. In addition, the operating mode of the machine necessary for the experiments to produce atomic layer deposition (ALD) films have been experimentally established. With these, the preparation for verifying the atomic layer deposition film by the negative ions was completed.

Academic Significance and Societal Importance of the Research Achievements

IoTデバイス等に用いられる最先端半導体デバイスの製造過程において、微細化と複雑化が進んできている。加工寸法の微細化により得られる恩恵は、1チップ当たりのトランジスタの高集積化・高性能化、チップの低消費電力化・低コスト化などが挙げられる。この微細化による半導体デバイス高性能化により、例えばスマートフォンやPCの高性能化、データサーバーの小型化や大容量化、ビッグデータ解析を背景とした人工知能の普及など、日常生活における利便性の更なる向上が期待できる。微細加工を可能にするため、原子層プロセスが用いられている。本研究により、このための新方式の開発をスタートできたことが最大の学術的・社会的意義である。

Report

(4 results)
  • 2019 Annual Research Report   Final Research Report ( PDF )
  • 2018 Research-status Report
  • 2017 Research-status Report
  • Research Products

    (25 results)

All 2020 2019 2018 2017 Other

All Journal Article (8 results) (of which Peer Reviewed: 8 results,  Open Access: 3 results) Presentation (13 results) (of which Int'l Joint Research: 11 results,  Invited: 2 results) Remarks (2 results) Patent(Industrial Property Rights) (2 results) (of which Overseas: 1 results)

  • [Journal Article] Simulations of negative ion extraction and transport for developing novel remote reactive ion processing system2020

    • Author(s)
      Kanki Takashi、Himura Haruhiko、Tsumori Katsuyoshi、Nakano Haruhisa
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 59 Issue: SJ Pages: SJJE01-SJJE01

    • DOI

      10.35848/1347-4065/ab7ba8

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Controlling the Diameter of a Pure Electron Plasma to Produce an Exact Two-Fluid Plasma State in a Nested Trap2019

    • Author(s)
      KATO Toshiki、HIMURA Haruhiko、SOWA Shinji、SANPEI Akio
    • Journal Title

      Plasma and Fusion Research

      Volume: 14 Issue: 0 Pages: 1201039-1201039

    • DOI

      10.1585/pfr.14.1201039

    • NAID

      130007649947

    • ISSN
      1880-6821
    • Year and Date
      2019-02-25
    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Effect of a magnetic filter across the exit hole of a flat oxygen plasma source2019

    • Author(s)
      N. Kodama, H. Himura, K. Azuma, K.Tsumori, H. Nakano
    • Journal Title

      Plasma and Fusion Research

      Volume: 14 Issue: 0 Pages: 1206088-1206088

    • DOI

      10.1585/pfr.14.1206088

    • NAID

      130007663757

    • Related Report
      2019 Annual Research Report 2018 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] Recent experiments with lithium ion and electron plasmas in the BX-U linear trap2018

    • Author(s)
      Haruhiko Himura
    • Journal Title

      AIP Conference Proceedings

      Volume: 1928 Pages: 020005-020005

    • DOI

      10.1063/1.5021570

    • Related Report
      2017 Research-status Report
    • Peer Reviewed
  • [Journal Article] Two-dimensional macroscopic shapes of lithium ion and electron plasmas after elapse of two-fluid plasma state2018

    • Author(s)
      Shohei Yamada, Haruhiko Himura, Toshiki Kato, Shigehumi Okada, Akio Sanpei, and Sadao Masamune
    • Journal Title

      AIP Conference Proceedings

      Volume: 1928 Pages: 020016-020016

    • DOI

      10.1063/1.5021581

    • Related Report
      2017 Research-status Report
    • Peer Reviewed
  • [Journal Article] Observation of macroscopic stability of weakly magnetized Li+ ion beams near the Brillouin density limit2018

    • Author(s)
      Kosuke Furukawa, Haruhiko Himura, Shigefumi Okada, Akio Sanpei, and Sadao Masamune
    • Journal Title

      AIP Conference Proceedings

      Volume: 1928 Pages: 020002-020002

    • DOI

      10.1063/1.5021567

    • Related Report
      2017 Research-status Report
    • Peer Reviewed
  • [Journal Article] Intermittent ion leakage from a Penning trap during potential barrier closure2017

    • Author(s)
      H. Himura, S. Kawai, K. Akaike, S. Okada, J. Aoki, and S. Masamune
    • Journal Title

      Physics of Plasmas

      Volume: 24 Issue: 10

    • DOI

      10.1063/1.4997493

    • Related Report
      2017 Research-status Report
    • Peer Reviewed
  • [Journal Article] First Observation of Independent Ion and Electron Plasmas after Elapse of Two-Fluid Plasma State2017

    • Author(s)
      Haruhiko HIMURA, Shohei YAMADA, Toshiki KATO and Sadao MASAMUNE
    • Journal Title

      Plasma and Fusion Research

      Volume: 12

    • NAID

      130006191011

    • Related Report
      2017 Research-status Report
    • Peer Reviewed / Open Access
  • [Presentation] ドライプロセス中の特定粒子種の役割を解明する実験装置での研究計画2019

    • Author(s)
      比村治彦 他
    • Organizer
      電気学会放電・プラズマ・パルスパワー研究会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 偏向収束型負イオン照射装置の開発2019

    • Author(s)
      比村治彦
    • Organizer
      負イオン研究会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Trajectory simulations of negative ions for developing novel plasma processing2019

    • Author(s)
      T. Kanki, H. Himura et al.
    • Organizer
      The 3rd Asia-Pacific conference on Plasma Physics
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Measurement of drop in electron temperature in a flat plasma s source with magnetic filter2019

    • Author(s)
      T. Morioka, H. Himura et al.
    • Organizer
      41st international symposium on dry process
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of remote negative ion plasma processing system2019

    • Author(s)
      D. Liu, H. Himura et al.
    • Organizer
      41st international symposium on dry process
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Pulsed oxygen negative ion plasmas produced by RF discharge2018

    • Author(s)
      T. Morioka, H. Himura et al.
    • Organizer
      2nd Asia-Pacific Conference on Plasma Physics, 12-17,11.2018, Kanazawa, Japan
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] Characteristic of oxygen plasmas for developing new plasma processing2018

    • Author(s)
      D. Liu, H. Himura et al.
    • Organizer
      2nd Asia-Pacific Conference on Plasma Physics, 12-17,11.2018, Kanazawa, Japan
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] Remote deflecting plasma source for novel plasma processing2018

    • Author(s)
      N. Kodama, H. Himura et al.
    • Organizer
      Gaseous Electornics Conference
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] Pulsed gas injection for effectively producing negative oxygen ion plasmas2018

    • Author(s)
      T. Morioka, H. Himura et al.
    • Organizer
      Dry Process Symposium
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] Effect of longitudinal magnetic field on plasma discharge with spiral antennas2018

    • Author(s)
      D. Liu, H. Himura et al.
    • Organizer
      Dry Process Symposium
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] Recent experiments with lithium ion and electron plasmas in the BX-U linear trap2017

    • Author(s)
      H. Himura
    • Organizer
      International workshop on nonneutral plasmas
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Properties of ZnO thin film produced by intermittent RF oxygen plasma source2017

    • Author(s)
      H. Himura
    • Organizer
      International Symposium on Dry Process
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] 異なる流体運動を行うイオンプラズマと電子プラズマを用いた2流体プラズマ系の実験的開拓2017

    • Author(s)
      比村治彦
    • Organizer
      Plasma Conference 2017
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research / Invited
  • [Remarks] http://nuclear.es.kit.ac.jp/

    • Related Report
      2019 Annual Research Report
  • [Remarks] 京都工芸繊維大学・プラズマ基礎工学研究室

    • URL

      http://nuclear.es.kit.ac.jp/

    • Related Report
      2018 Research-status Report
  • [Patent(Industrial Property Rights)] 特定種イオン源およびプラズマ成膜装置2019

    • Inventor(s)
      比村治彦
    • Industrial Property Rights Holder
      京都工芸繊維大学
    • Industrial Property Rights Type
      特許
    • Filing Date
      2019
    • Acquisition Date
      2020
    • Related Report
      2019 Annual Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] 特定種イオン源およびプラズマ成膜装置2018

    • Inventor(s)
      比村治彦
    • Industrial Property Rights Holder
      比村治彦
    • Industrial Property Rights Type
      特許
    • Filing Date
      2018
    • Related Report
      2018 Research-status Report

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Published: 2017-07-21   Modified: 2021-02-19  

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