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Establishing doping technique for semi-conducting nano-polycrystalline diamond

Research Project

Project/Area Number 17K18883
Research Category

Grant-in-Aid for Challenging Research (Exploratory)

Allocation TypeMulti-year Fund
Research Field Electrical and electronic engineering and related fields
Research InstitutionEhime University

Principal Investigator

Ishikawa Fumitaro  愛媛大学, 理工学研究科(工学系), 准教授 (60456994)

Project Period (FY) 2017-06-30 – 2020-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥6,500,000 (Direct Cost: ¥5,000,000、Indirect Cost: ¥1,500,000)
Fiscal Year 2018: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
Fiscal Year 2017: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Keywordsダイヤモンド / 高温・高圧合成 / ドーピング / 半導体 / 光特性 / 高温・高圧 / ナノ多結晶 / 不純物 / レーザー
Outline of Final Research Achievements

Nano-polycrystalline diamond could be synthesized in the sample in which P was ion-implanted into the starting material graphite and converted directly into diamond. When P was ion-implanted into a commercially available CVD diamond and a high temperature and high pressure was applied, the crystallinity of the sample surface, which was lost during the ion implantation, was recovered and epitaxial growth was progressed. At that time, the Pyramidal hillock, commonly observed around the defect by the other methods, also appears by this method. By using appropriate ion implantation and high-temperature/high-pressure treatment, we obtained a diamond with P as the dominant impurity. When Sn doping was attempted by the same method, luminescence that seems to originate from Sn-V defects was obtained.

Academic Significance and Societal Importance of the Research Achievements

Pをイオン注入したグラファイトから直接変換でダイヤモンドが得られたことは、新しいドーピングダイヤモンドの合成手法となり得る。CVDダイヤモンドへのイオン注入と高温・高圧処理による特性改質・制御が可能になれば、既存のダイヤモンド半導体の機能を同手法で拡張できる可能性がある。発生したエピタキシャル成長は、欠陥部位のPyramidal Hillock発現による欠陥部位の同定や、イオン注入ダメージの抑制による表面改質手法となり得る。高純度のイオン注入と高温・高圧処理でSnドーピングも可能であったことから、ダイヤモンドの導電性だけでなく、光機能の制御も可能であることが示された。

Report

(4 results)
  • 2019 Annual Research Report   Final Research Report ( PDF )
  • 2018 Research-status Report
  • 2017 Research-status Report
  • Research Products

    (34 results)

All 2019 2018 2017

All Journal Article (3 results) (of which Peer Reviewed: 3 results) Presentation (31 results) (of which Int'l Joint Research: 12 results,  Invited: 1 results)

  • [Journal Article] Synthesis of nano-polycrystalline diamond from glassy carbon at pressures up to 25 GPa2019

    • Author(s)
      Irifune, T., Ueda, C., Ohshita, S., Ohfuji, H., Kunimoto, T. and Shinmei, T.
    • Journal Title

      High Pressure Research

      Volume: 40 Issue: 1 Pages: 96-106

    • DOI

      10.1080/08957959.2019.1702658

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Pulsed laser irradiation as a process of conductive surface formation on nanopolycrystalline diamond2018

    • Author(s)
      Rei Fukuta, Naoya Yamamoto, Fumitaro Ishikawa, Masafumi Matsushita, Tsuyoshi Yoshitake, Hiroshi Ikenoue, Hiroaki Ohfuji, Toru Shinmei, Tetsuo Irifune
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 57 Issue: 11 Pages: 118004-118004

    • DOI

      10.7567/jjap.57.118004

    • NAID

      210000149780

    • Related Report
      2018 Research-status Report
    • Peer Reviewed
  • [Journal Article] Electronic properties of nano-polycrystalline diamond synthesised by high-pressure and high-temperature technique2018

    • Author(s)
      Rei Fukuta, Fumitaro Ishikawa, Akihiro Ishikawa, Kohsuke Hamada, Masafumi Matsushita, Hiroaki Ohfuji, Toru Shinmei, Tetsuo Irifune
    • Journal Title

      Diamond and Related Materials

      Volume: 84 Pages: 3-3

    • DOI

      10.1016/j.diamond.2018.03.007

    • Related Report
      2017 Research-status Report
    • Peer Reviewed
  • [Presentation] High pressure and high temperature treatment for ion implanted diamonds2019

    • Author(s)
      R. Fukuta, Y. Murakami, F. Ishikawa, M. Matsushita, T. Shinmei, H. Ohfuji, T. Irifune
    • Organizer
      MRS FALL MEETING & EXHIBIT
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Pyramid formation by high pressure and high temperature processing of diamond2019

    • Author(s)
      Rei Fukuta, Yohei Murakami, Ken Otsuyama, Fumitaro Ishikawa, Masafumi Matsushita, Toru Shinmei, Hiroaki Ohfuji and Tetsuo Irifune
    • Organizer
      The 9th Asia-Pacifi Workshop on Widegap Semiconductors
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Controlling Diamond Properties by Ion Implantation and High Pressure and High Temperature Treatment2019

    • Author(s)
      Rei Fukuta, Yohei Murakami, Fumitaro Ishikawa, Masafumi Matsushita, Toru Shinmei, Hiroaki Ohfuji, Tetsuo Irifune
    • Organizer
      7th International Workshop on Epitaxial Growth and Fundamental Properties of Semiconductor Nanostructures
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High temperature and high pressure processing on phosphorous ion implanted diamond2019

    • Author(s)
      R. Fukuta, Y. Murakami, F. Ishikawa, M. Matsushita, T. Shinmei, H. Ohfuji, T. Irifune
    • Organizer
      30th international conference on Diamond and carbon materials
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Tin-implanted diamond treated by high pressure and high temperature2019

    • Author(s)
      Y. Murakami, R. Fukuta, F. Ishikawa, M. Matsushita, H. Ohfuji, T. Irifune
    • Organizer
      30th international conference on Diamond and carbon materials
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Direct conversion of diamond from P ion implanted graphite by high pressure and high temperature technique2019

    • Author(s)
      K. Otsuyama, R. Fukuta, Y. Murakami, F. Ishikawa, M. Matsushita, H. Ohfuji, T. Shinmei, T. Irifune
    • Organizer
      30th international conference on Diamond and carbon materials
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Snイオン注入した高温高圧処理ダイヤモンドのフォトルミネッセンス2019

    • Author(s)
      福田 玲, 村上 洋平, 石川 史太郎, 松下 正史, 新名 亨, 大藤 弘明, 入舩 徹男
    • Organizer
      第33回ダイヤモンドシンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] Pイオンを注入したナノ多結晶ダイアモンド合成2019

    • Author(s)
      福田 玲, 村上 洋平, 石川 史太郎, 松下 正史, 新名 亨, 大藤 弘明, 入舩 徹男
    • Organizer
      第60回高圧討論会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Pイオン注入した高温高圧処理ダイヤモンドの表面近傍元素分布2019

    • Author(s)
      東浦 健人, 福田 玲, 村上 洋平, 石川 史太郎, 松下 正史, 新名 亨, 大藤 弘明, 入舩 徹男
    • Organizer
      2019年度 応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] InP封入して合成したナノ多結晶ダイヤモンドの特性2019

    • Author(s)
      福田 玲, 村上 洋平, 石川 史太郎, 松下 正史, 新名 亨, 大藤 弘明, 入舩 徹男
    • Organizer
      2019年度 応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 高温高圧処理を施したスズ注入ダイヤモンドのフォトルミネッセンス2019

    • Author(s)
      村上 洋平, 福田 玲, 石川 史太郎, 松下 正史, 新名 亨, 大藤 弘明, 入舩 徹男
    • Organizer
      2019年度 応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 高温高圧法によるPイオン注入グラファイトからダイヤモンドの直接変換2019

    • Author(s)
      大津山健, 福田玲, 村上洋平, 石川史太郎, 松下正史, 大藤弘明, 新名亨, 入舩徹男
    • Organizer
      2019年度 応用物理・物理系学会 中国四国支部 合同学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 高温高圧法によるP不純物を導入したグラファイトを出発物質としたダイヤモンド合成2019

    • Author(s)
      大津山健, 福田玲, 村上洋平, 石川史太郎, 松下正史, 大藤弘明, 新名亨, 入舩徹男
    • Organizer
      2019年度 応用物理学会中国四国支部 若手半導体研究会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Impurity doping for electronic carrier control of diamond using high pressure and high temperature technique2019

    • Author(s)
      F. Ishikawa
    • Organizer
      Science and Technology of Nano-Polycrystalline Diamond 2019 (STNPD-2019)
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Epitaxial formation of pyramidal structure on CVD diamond by high pressure and high temperature treatment2019

    • Author(s)
      Rei Fukuta, Naoya Yamamoto, Fumitaro Ishikawa, Masafumi Matsushita, Hiroaki Ohfuji, Toru Shinmei, Tetsuo Irifune
    • Organizer
      Science and Technology of Nano-Polycrystalline Diamond 2019 (STNPD-2019)
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] イオン注入したダイヤモンドの高温高圧処理2019

    • Author(s)
      福田 玲, 山本 直也, 村上 洋平, 石川 史太郎, 松下 正史, 新名 亨, 大藤 弘明, 入舩 徹男
    • Organizer
      第66回 応用物理学会 春季学術講演会
    • Related Report
      2018 Research-status Report
  • [Presentation] イオン注入後に高温高圧処理を施したダイヤモンドの面内元素分布2019

    • Author(s)
      村上洋平, 福田玲, 山本直也, 石川史太郎, 松下正史, 新名亨, 大藤弘明, 入舩徹男
    • Organizer
      第66回 応用物理学会 春季学術講演会
    • Related Report
      2018 Research-status Report
  • [Presentation] 高温高圧処理によるCVDダイヤモンド表面の特性改質2018

    • Author(s)
      福田玲, 山本直也, 石川史太郎, 松下正史, 大藤弘明, 新名亨, 入舩徹男
    • Organizer
      第32回ダイヤモンドシンポジウム
    • Related Report
      2018 Research-status Report
  • [Presentation] InP封入によるナノ多結晶ダイヤモンドへの影響2018

    • Author(s)
      福田玲,村上洋平, 山本直也,石川史太郎,松下正史,新名亨,大藤弘明,入舩徹男
    • Organizer
      第59回高圧討論会
    • Related Report
      2018 Research-status Report
  • [Presentation] ナノ多結晶ダイヤモンド高温・高圧合成時InP封入の影響2018

    • Author(s)
      福田 玲,村上洋平,山本 直也,石川 史太郎,松下 正史,大藤弘明,新名亨,入舩徹男
    • Organizer
      第79回 応用物理学会秋季学術講演会
    • Related Report
      2018 Research-status Report
  • [Presentation] Impurity introduction at the synthesis of nano-polycrystalline diamond by high-pressure and high-temperature2018

    • Author(s)
      N. Yamamoto, Y. Murakami, R. Fukuta, F. Ishikawa, M. Matsushita, H. Ohfuji, T. Shinmei, T. Irifune
    • Organizer
      29th International Conference on Diamond and Carbon Materials
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] Epitaxial formed pyramidal diamond by high temperature and high pressure treatment2018

    • Author(s)
      R. Fukuta, N. Yamamoto, F. Ishikawa, M. Matsushita, H. Ohfuji, T. Shinmei, T. Irifune
    • Organizer
      29th International Conference on Diamond and Carbon Materials
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] Conductive surface formation on nano-polycrystalline diamond by laser irradiation2018

    • Author(s)
      R. Fukuta, N. Yamamoto, F. Ishikawa, T. Yoshitake, H. Ikenoue, M. Matsushita, H. Ohfuji, T. Shinmei, T. Irifune
    • Organizer
      29th International Conference on Diamond and Carbon Materials
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] Microstructural Characteristics of Nano-polycrystalline Diamond by the Introduction of Indium and Phosphorous Synthesized by High Pressure and High Temperature Technique2018

    • Author(s)
      Yohei Murakami, Rei Fukuta, Naoya Yamamoto, Fumitaro Ishikawa, Masafumi Matsushita, Toru Shinmei, Hiroaki Ohfuji, Tetsuo Irifune
    • Organizer
      第37回電子材料シンポジウム
    • Related Report
      2018 Research-status Report
  • [Presentation] ダイヤモンド高温・高圧合成時のInP封入効果2018

    • Author(s)
      山本 直也、福田 玲、石川 史太郎、松下 正史、新名 享、大藤 弘明、入舩 徹男
    • Organizer
      第65回 応用物理学会春季学術講演会
    • Related Report
      2017 Research-status Report
  • [Presentation] ダイヤモンド表面に形成された微細ピラミッド構造の観察2018

    • Author(s)
      福田 玲、山本 直也、石川 史太郎、松下 正史、新名 享、大藤 弘明、入舩 徹男
    • Organizer
      第65回 応用物理学会春季学術講演会
    • Related Report
      2017 Research-status Report
  • [Presentation] Pyramid diamond synthesised with high pressure and high temperature technique2017

    • Author(s)
      R. Fukuta, N. Yamamoto, F. Ishikawa, M. Matsushita, H. Ohfuji, T. Shinmei, T. Irifune
    • Organizer
      28th International Conference on Diamond and Carbon Materials
    • Related Report
      2017 Research-status Report
    • Int'l Joint Research
  • [Presentation] ダイヤモンド表面処理によるピラミッド型微細構造形成2017

    • Author(s)
      福田玲, 山本直也, 石川史太郎, 松下正史, 大藤弘明, 新名亨, 入舩 徹男
    • Organizer
      第58回高圧討論会
    • Related Report
      2017 Research-status Report
  • [Presentation] Pyramidal diamond formation by high pressure and high temperature technique2017

    • Author(s)
      R. Fukuta, N. Yamamoto, F. Ishikawa, M. Matsushita, H. Ohfuji, T. Shinmei and T. Irifune
    • Organizer
      第36回電子材料シンポジウム
    • Related Report
      2017 Research-status Report
  • [Presentation] レーザー照射によるナノ多結晶ダイヤモンドの表面処理2017

    • Author(s)
      福田 玲、山本 直也、石川 史太郎、松下 正史、大藤 弘明、新名 亨、入舩 徹男、吉武 剛、池上 浩
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Research-status Report
  • [Presentation] 高温・高圧処理によるダイヤモンド表面での微細ピラミッド形成2017

    • Author(s)
      福田 玲、山本 直也、石川 史太郎、松下 正史、大藤 弘明、新名 亨、入舩 徹男
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Research-status Report

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Published: 2017-07-21   Modified: 2021-02-19  

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