| Co-Investigator(Renkei-kenkyūsha) |
YAMAMURA Kazuya 大阪大学, 大学院・工学研究科, 准教授 (60240074)
SANO Yasuhisa 大阪大学, 大学院・工学研究科, 准教授 (40252598)
TAKAHASHI Yukio 大阪大学, 大学院・工学研究科, 准教授 (00415217)
INAGAKI Kouji 大阪大学, 大学院・工学研究科, 助教 (50273579)
MATSUYAMA Satoshi 大阪大学, 大学院・工学研究科, 助教 (10423196)
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| Budget Amount *help |
¥262,860,000 (Direct Cost: ¥202,200,000、Indirect Cost: ¥60,660,000)
Fiscal Year 2010: ¥27,560,000 (Direct Cost: ¥21,200,000、Indirect Cost: ¥6,360,000)
Fiscal Year 2009: ¥83,070,000 (Direct Cost: ¥63,900,000、Indirect Cost: ¥19,170,000)
Fiscal Year 2008: ¥44,330,000 (Direct Cost: ¥34,100,000、Indirect Cost: ¥10,230,000)
Fiscal Year 2007: ¥61,100,000 (Direct Cost: ¥47,000,000、Indirect Cost: ¥14,100,000)
Fiscal Year 2006: ¥46,800,000 (Direct Cost: ¥36,000,000、Indirect Cost: ¥10,800,000)
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| Research Abstract |
In order to further improve the spatial resolution in X-ray microscopy, a sub-10nm hard X-ray focusing system was developed. In situ hard X-ray wavefront error measurement and error compensation methods were completed, following wave-optical theory. The world-first sub-10nm beam was realized at SPring-8. Then, the focusing system was upgraded to X-ray nanoscopy/spectroscopy. A nanometer-thickness films made of Pt was successfully observed with better than 10nm spatial resolution.
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