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Channel Structure Engineering using low-dimensional carbon nano- materials

Research Project

Project/Area Number 18063011
Research Category

Grant-in-Aid for Scientific Research on Priority Areas

Allocation TypeSingle-year Grants
Review Section Science and Engineering
Research InstitutionNagoya University

Principal Investigator

HORI Masaru  Nagoya University, 大学院・工学研究科, 教授 (80242824)

Co-Investigator(Kenkyū-buntansha) TAKASHIMA Seigo  名古屋大学, 大学院・工学研究科, 研究員 (80397471)
Co-Investigator(Renkei-kenkyūsha) TAKEDA Keigo  名古屋大学, 大学院・工学研究科, 助教 (00377863)
TAKEUCHI Wakana  名古屋大学, 大学院・工学研究科, 研究員 (90569386)
Project Period (FY) 2006 – 2009
Project Status Completed (Fiscal Year 2009)
Budget Amount *help
¥174,600,000 (Direct Cost: ¥174,600,000)
Fiscal Year 2009: ¥30,000,000 (Direct Cost: ¥30,000,000)
Fiscal Year 2008: ¥42,200,000 (Direct Cost: ¥42,200,000)
Fiscal Year 2007: ¥50,700,000 (Direct Cost: ¥50,700,000)
Fiscal Year 2006: ¥51,700,000 (Direct Cost: ¥51,700,000)
Keywords自己組織化 / カーボンナノ構造体 / グラフェンシート / 半導体物性 / プラズマプロセス / カーボンナノウォール / 電気特性 / チャネルエンジニアリング / ラジカル注入型プラズマCVD装置 / 形状制御 / 抵抗値 / n型ドープ / ラジカル注入型プラズマCVD / 赤外吸収スペクトル測定 / n型伝導カーボンナノウォール / 界面構造 / 接触抵抗 / トランスミッションライン法 / ラピッドサーマルアニール / 単一架橋カーボンナノウォール / 電子ビーム励起プラズマ / ドーピング / 先端機能デバイス
Research Abstract

Carbon nanowalls (CNWs), consisting of graphene sheets vertically-standing on substrates, are one of promising carbon nanomaterials. The future functional devices are expected to be realized using the CNWs, because of their unique morphologies and excellent electrical properties deriving from graphene structures. In this study, we have developed controlled synthesis techniques of CNWs realizing controls of their morphologies, growth orientations and electrical properties. Such the control techniques of CNWs growth are based on plasma nanoscience, including precise monitoring and independent control of reactive species, such as radicals and ions. Not only their composition ratios but also energies and fluxes of ions are essential factors of the CNWs growth.

Report

(6 results)
  • 2009 Annual Research Report   Final Research Report ( PDF )
  • 2008 Annual Research Report   Self-evaluation Report ( PDF )
  • 2007 Annual Research Report
  • 2006 Annual Research Report
  • Research Products

    (159 results)

All 2010 2009 2008 2007 2006 Other

All Journal Article (30 results) (of which Peer Reviewed: 23 results) Presentation (121 results) Book (3 results) Remarks (3 results) Patent(Industrial Property Rights) (2 results)

  • [Journal Article] Monolithic self-sustaining nanographene sheet grown using plasma-enhanced chemical vapor deposition2010

    • Author(s)
      W. Takeuchi, K. Takeda, M. Hiramatsu, Y. Tokuda, H. Kano, S. Kimura, O. Sakata, H. Tajiri, M. Hori
    • Journal Title

      Physical Status Solidi A Vol.207

      Pages: 139-143

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Critical Factors for Nucleation and Vertical Growth of Two Dimensional Nano-Graphene Sheets Employing a Novel Ar+ Beam with Hydrogen and Fluorocarbon Radical Injection2010

    • Author(s)
      S. Kondo, H. Kondo, M. Hiramatsu, M. Sekine, M. Hori
    • Journal Title

      Applied Physics Express Vol.3

    • NAID

      10027014359

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] プラズマCVD法を用いたカーボンナノウォールの形成2010

    • Author(s)
      平松美根男, 堀勝
    • Journal Title

      表面科学 Vol.31

      Pages: 144-149

    • NAID

      10026319615

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Monolithic self-sustaining nanographene sheet grown using plasma-enhanced chemical vapor deposition2010

    • Author(s)
      W.Takeuchi, K.Takeda, M.Hiramatsu, Y.Tokuda, H.Kano, S.Kimura, 0.Sakata, H.Tajiri, M.Hori
    • Journal Title

      Physical Status Solidi A 207

      Pages: 139-143

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Critical Factors for Nucleation and Vertical Growth of Two Dimensional Nano-Graphene Sheets Employing a Novel Ar^+ Beam with Hydrogen and Fluorocarbon Radical Injection2010

    • Author(s)
      S.Kondo, H.Kondo, M.Hiramatsu, M.Sekine, M.Hori
    • Journal Title

      Applied Physics Express 3

    • NAID

      10027014359

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] プラズマCVD法を用いたカーボンナノウォールの形成2010

    • Author(s)
      平松美根男、堀勝
    • Journal Title

      表面科学 31

      Pages: 144-149

    • NAID

      10026319615

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Initial growth process of carbon nanowalls synthesized by radical injection plasma-enhanced chemical vapor deposition2009

    • Author(s)
      S. Kondo, S. Kawai, W. Takeuchi, K. Yamakawa, S. Den, H. Kano, M. Hiramatsu, M. Hori
    • Journal Title

      Journal of Applied Physics Vol.106

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Initial growth process of carbon nanowalls synthesized by radical injection plasma-enhanced chemical vapor deposition2009

    • Author(s)
      S.Kondo, S.Kawai, W.Takeuchi, K.Yamakawa, S.Den, H.Kano, M.Hiramatsu, M.Hori
    • Journal Title

      Journal of Applied Physics 106

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Highly Reliable Growth Process of Carbon Nanowalls using Radical Injection Plasma-Enhanced Chemical Vapor Deposition2008

    • Author(s)
      W. Takeuchi, M. Ura, M. Hiramatsu, Y. Tokuda, H. Kano, M. Hori
    • Journal Title

      Journal of Vacuum Science & Technology B Vol.26

      Pages: 1294-1300

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of Carbon Nanowalls using Electron Beam Excited Plasma-Enhanced Chemical Vapor Deposition2008

    • Author(s)
      T. Mori, M. Hiramatsu, K. Yamakawa, K. Takeda, M. Hori
    • Journal Title

      Diamond & Related Materials Vol.17

      Pages: 1513-1517

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] 半導体特性を持つカーボンナノウォールの合成及びその電気伝導特性の制御に世界で初めて成功2008

    • Author(s)
      堀勝
    • Journal Title

      科研費NEWS Vol.2

      Pages: 7-7

    • Related Report
      2009 Final Research Report
  • [Journal Article] グラファイト(黒鉛)から半導体を創る-カーボンナノウォールの電気伝導制御に成功-2008

    • Author(s)
      堀勝
    • Journal Title

      名大トピックス Vol.182

      Pages: 12-13

    • Related Report
      2009 Final Research Report
  • [Journal Article] Fabrication of Carbon Nanowalls using Electron Beam Excited Plasma-Enhanced Chemical Vapor Deposition2008

    • Author(s)
      T.Mori, M.Hiramatsu, K.Yamakawa, K.Takeda, M.Hori
    • Journal Title

      Diamond & Related Materials Vol.17

      Pages: 1513-1517

    • Related Report
      2008 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Highly Reliable Growth Process of Carbon Nanowalls using Radical Injection Plasma-Enhanced Chemical Vapor Deposition2008

    • Author(s)
      S.Kondo, K.Yamakawa, S.Den, H.Kano, M.Hiramatsu, M.Hori
    • Journal Title

      J.Vac.Sci.Technol.B 26

      Pages: 1294-1300

    • Related Report
      2008 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Electrical Conduction Control of Carbon Nanowalls2008

    • Author(s)
      W.Takeuchi, M.Ura, M.Hiramatsu, Y.Tokuda, H.Kano, M.Hori
    • Journal Title

      Appl.Phys.Lett. Vol.92

    • Related Report
      2008 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Electrical Conduction Control of Carbon Nanowalls2008

    • Author(s)
      W. Takeuchi, M. Ura, M. Hiramatsu, Y. Tokuda, H. Kano, M. Hori
    • Journal Title

      Applied Physics Letter 92

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Highly Reliable Growth Process of Carbon Nanowalls using Radical Injection Plasma-Enhanced Chemical Vapor Deposition2008

    • Author(s)
      S. Kondo, K. Yamakawa, S. Den, H. Kano, M. Hiramatsu, M. Hori
    • Journal Title

      Journal of Vacuum Science & Technology B 26

      Pages: 1294-4300

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of Carbon Nanowalls using Electron Beam Excited Plasma-Enhanced Chemical Vapor Deposition2008

    • Author(s)
      T. Mori, M. Hiramatsu, K. Yamakawa. K. Takeda. M. Hori
    • Journal Title

      Diamond & Related Materials 17

      Pages: 1513-1517

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 半導体特性を持つカーボンナノウォールの合成及びその電気伝導特性の制御に世界で初めて成功2008

    • Author(s)
      堀勝
    • Journal Title

      科研費NEWS 2

      Pages: 7-7

    • Related Report
      2008 Annual Research Report
  • [Journal Article] グラファイト(黒鉛)から半導体を創る-カーボンナノウォールの電気伝導制御に成功-2008

    • Author(s)
      堀勝
    • Journal Title

      名大トピックス 182

      Pages: 12-13

    • Related Report
      2008 Annual Research Report
  • [Journal Article] Area-Selective Growth of Aligned Single-Walled Carbon Nanotube Films Using Microwave Plasma-Enhanced CVD2007

    • Author(s)
      M. Hiramatsu, T. Deguchi, H. Nagao,, M. Hori
    • Journal Title

      Diamond & Related Materials Vol.16

      Pages: 1126-1130

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Aligned Growth of Single-Walled and Double-Walled Carbon Nanotube Films by Control of Catalyst Preparation2007

    • Author(s)
      M. Hiramatsu, T. Deguchi, H. Nagao, M. Hori
    • Journal Title

      Jpn. J. Appl. Phys. Vol.46,No.13

    • NAID

      210000063909

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of Carbon Nanowalls Using Novel Plasma Processing2006

    • Author(s)
      M. Hiramatsu, M. Hori
    • Journal Title

      Jpn. J. Appl. Phys. Vol.45

      Pages: 5522-5527

    • NAID

      10017998920

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] プラズマ化学気相堆積法を用いたカーボンナノウォールの作製2006

    • Author(s)
      平松美根男, 堀勝
    • Journal Title

      真空 Vol.49

      Pages: 368-372

    • NAID

      10017598592

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Carbon Nanowalls Formation by Raadical Controlled Plasma Process2006

    • Author(s)
      M. Hori, M. Hiramatsu
    • Journal Title

      Advanced in Science and Technology Vol.48

      Pages: 119-126

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Carbon Nanowalls Formation by Raadical Controlled Plasma Process2006

    • Author(s)
      M.Hori, M.Hiramatsu
    • Journal Title

      Advanced in Science and Technology Vol.48

      Pages: 119-119

    • Related Report
      2008 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Fabrication of Carbon Nanowalls Using Novel Plasma Processing2006

    • Author(s)
      M.Hiramatsu, M.Hori
    • Journal Title

      Jpn.J.Appl.Phys. Vol.45, No.6B

      Pages: 5522-5527

    • NAID

      10017998920

    • Related Report
      2008 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Fabrication of Carbon Nanowalls Using Novel Plasma Processing2006

    • Author(s)
      M.Hiramatsu, M.Hori
    • Journal Title

      Jpn. J. Appl. Phys Vol. 45,No. 6B

      Pages: 5522-5522

    • NAID

      10017998920

    • Related Report
      2006 Annual Research Report
  • [Journal Article] プラズマ化学気相堆積法を用いたカーボンナノウォールの作製2006

    • Author(s)
      平松美根男, 堀 勝
    • Journal Title

      真空 Vol. 49,No. 9

      Pages: 368-368

    • NAID

      10017598592

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Carbon Nanowalls Formation by Raadical Controlled Plasma Process2006

    • Author(s)
      M.Hori, M.Hiramatsu
    • Journal Title

      Advanced in Science and Technology Vol. 48

      Pages: 119-119

    • Related Report
      2006 Annual Research Report
  • [Presentation] Controlled synthesis of carbon nanowalls based on plasma nanoscience2010

    • Author(s)
      M. Hori
    • Organizer
      The 3rd International Leader Workshop on Plasma Nanoscience and Nanotechnology
    • Place of Presentation
      LINDFIELD NSW 2070 AUSTRALIA
    • Year and Date
      2010-03-23
    • Related Report
      2009 Final Research Report
  • [Presentation] Controlled synthesis of carbon nanowalls based on plasma nanoscience2010

    • Author(s)
      M.Hori
    • Organizer
      The 3rd International Leader Workshop on Plasma Nanoscience and Nanotechnology
    • Place of Presentation
      LINDFIELD NSW 2070 AUSTRALIA, Australia((Invited))
    • Year and Date
      2010-03-23
    • Related Report
      2009 Annual Research Report
  • [Presentation] Fundamental Research on Plasma Nanoprocessing2010

    • Author(s)
      M. Hori
    • Organizer
      2nd International Symposium on Advance Plasma Science and its Application (ISPlasma2010)
    • Place of Presentation
      名城大学(愛知県)
    • Related Report
      2009 Final Research Report
  • [Presentation] Plasma innovation towards next generation Green Technology2010

    • Author(s)
      M. Hori, M. Sekine, H. Toyoda
    • Organizer
      The 10th International Workshop of Advanced Plasma Processing and Diagnostics Joint Workshop
    • Place of Presentation
      長崎大学(長崎県)
    • Related Report
      2009 Annual Research Report 2009 Final Research Report
  • [Presentation] Synthesis of carbon film employing radical injection PECVD2010

    • Author(s)
      T.Kino, H.Kondo, M.Sekine M.Hori
    • Organizer
      The 10^<th> International Workshop of Advanced Plasma Processing and Diagnostics Joint Workshop
    • Place of Presentation
      長崎大学(長崎県)
    • Related Report
      2009 Annual Research Report
  • [Presentation] Fabrication of carbon nanomaterials synthesized by plasma enhanced chemical vapor deposition for solar cell applications2010

    • Author(s)
      T.Kino, S.Kondo, W.Takeuchi, H.Kondo, K.Ishikawa, M.Sekine, M.Hori
    • Organizer
      2^<nd> International Symposium on Advance Plasma Science and its Application (ISPlasma2010)
    • Place of Presentation
      名城大学(愛知県)
    • Related Report
      2009 Annual Research Report
  • [Presentation] Initial Nucleation in Carbon Nnowalls Growth on Si and SiO2 Surface2010

    • Author(s)
      H.Mikuni, T.Kanda, S.Kondo, W.Takeuchi, K.Yamakawa, K.Takeda, K.Ishikawa, H.Kondo, M.Hiramastu, M.Sekine, M.Hori
    • Organizer
      2^<nd> International Symposium on Advance Plasma Science and its Application (ISPlasma2010)
    • Place of Presentation
      名城大学(愛知県)
    • Related Report
      2009 Annual Research Report
  • [Presentation] Effect of Ion Irradiation on Carbon Nanowalls Growth2010

    • Author(s)
      S.Kondo, K.Yasuda, H.Kondo, K.Ishikawa, M.Hiramatsu, M.Sekine, M.Hori
    • Organizer
      2^<nd> International Symposium on Advance Plasma Science and its Application (ISPlasma2010)
    • Place of Presentation
      名城大学(愛知県)
    • Related Report
      2009 Annual Research Report
  • [Presentation] Fundamental Research on Plasma Nanoprocessing2010

    • Author(s)
      M.Hori
    • Organizer
      2nd International Symposium on Advance Plasma Science and its Application (ISPlasma2010)
    • Place of Presentation
      名城大学(愛知県)((Invited))
    • Related Report
      2009 Annual Research Report
  • [Presentation] In-situ observations of growth processes of carbon nanowalls using spectroscopic ellipsometry2010

    • Author(s)
      K.Yasuda, S.Kondo, K.Yamakawa, H.Kondo, M.Hiramatsu, M.Sekine, M.Hori
    • Organizer
      The 3rd International Conference on PLAsma-Nano Technology & Science (IC-PLANTS2010)
    • Place of Presentation
      名城大学(愛知県)
    • Related Report
      2009 Annual Research Report
  • [Presentation] Investigation of influence of Single Carbon Nano Wall structure on Field Effect Transistor electrical parameters and characteristics2010

    • Author(s)
      A.Malinowski, M.Hori, M.Sekine, H.Kondo, L.Lukasiak, A.Jakubowski, D.Tomaszewski
    • Organizer
      The 3rd International Conference on PLAsma-Nano Technology & Science (IC-PLANTS2010)
    • Place of Presentation
      名城大学(愛知県)
    • Related Report
      2009 Annual Research Report
  • [Presentation] Synchrotron X-ray diffraction anlysis of carbon nanowalls synthesized by radical-injection plasma-enhanced chemical vapor deposition system2010

    • Author(s)
      H.Kondo, W.Takeuchi, S.Kondo, K.Yamakawa, M.Hiramatsu, M.Sekine, M.Hori
    • Organizer
      The 3rd International Conference on PLAsma-Nano Technology & Science (IC-PLANTS2010)
    • Place of Presentation
      名城大学(愛知県)
    • Related Report
      2009 Annual Research Report
  • [Presentation] ラジカル注入型PECVDを用いたカーボン膜のバイアス依存性2010

    • Author(s)
      木野徳重、近藤真悟、近藤博基、関根誠、堀勝
    • Organizer
      2010年春季 第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学(神奈川県)
    • Related Report
      2009 Annual Research Report
  • [Presentation] 分光エリプソメトリによるカーボンナノウォール成長のその場観察2010

    • Author(s)
      安田幸司, 近藤真悟, 山川晃司, 近藤博基, 平松美根男, 関根誠, 堀勝
    • Organizer
      2010年春季 第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学(神奈川県)
    • Related Report
      2009 Annual Research Report
  • [Presentation] シンクロトロンX線回折によるカーボンナノウオールの結晶構造解析2010

    • Author(s)
      近藤博基, 竹内和歌奈, 坂田修身, 田尻寛男, 木村滋, 平松美根男, 堀勝
    • Organizer
      2010年春季 第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学(神奈川県)
    • Related Report
      2009 Annual Research Report
  • [Presentation] 先進プラズマプロセスによるグラフェンマテリアルの開発2009

    • Author(s)
      堀勝, 竹内和歌奈, 近藤博基, 平松美根男
    • Organizer
      平成21年度日本真空協会12月研究例会
    • Place of Presentation
      名古屋大学(愛知県)
    • Year and Date
      2009-12-17
    • Related Report
      2009 Final Research Report
  • [Presentation] 先進プラズマプロセスによるグラフェンマテリアルの開発2009

    • Author(s)
      堀勝、竹内和歌奈、近藤博基、平松美根男
    • Organizer
      平成21年度日本真空協会12月研究例会
    • Place of Presentation
      名古屋大学(愛知県)((招待講演))
    • Year and Date
      2009-12-17
    • Related Report
      2009 Annual Research Report
  • [Presentation] Electronic Structure of Carbon Nanowalls using Resonant Soft-X-Ray Emission Spectroscopy2009

    • Author(s)
      W.Takeuchi, M.Hiramatsu, Y.Tokuda, H.Kano, T.Kinoshita, Y.Kato, T.Muro, S.Kimura, M.Hori
    • Organizer
      International Conference on Solid State Devices and Materials
    • Place of Presentation
      仙台国際ホテル(宮城県)
    • Year and Date
      2009-10-07
    • Related Report
      2009 Annual Research Report
  • [Presentation] Self-organization Growth of Monolithic Carbon Nanowalls Employing Low-temperture Plasmas2009

    • Author(s)
      M.Hori, M.Horamatsu
    • Organizer
      2nd International Conference on Advanced Plasma Technologies with lst International Plasma Nanoscience Symposium (ICAPT2009)
    • Place of Presentation
      Hotel Barbara, Plan, Slovenia
    • Year and Date
      2009-10-01
    • Related Report
      2009 Annual Research Report
  • [Presentation] Self-organized growth of monolithic carbon nano-graphene sheets and controlling of their semiconductor like behavior2009

    • Author(s)
      M. Hiramatsu, M. Hori
    • Organizer
      IUVSTA (International Union for Vacuum Science, Technique and Applications) Workshop (Surface Engineering & Thin Film Divisions)
    • Place of Presentation
      Novotel Ambassador Busan (韓国)
    • Year and Date
      2009-09-17
    • Related Report
      2009 Final Research Report
  • [Presentation] Self-organized growth of monolithic carbon nano-graphene sheets and controlling of their semiconductor like behavior2009

    • Author(s)
      M.Hiramatsu, M.Hori
    • Organizer
      IUVSTA (International Union for Vacuum Science, Technique and Applications) Workshop (Surface Engineering & Thin Film Divisions)
    • Place of Presentation
      Novotel Ambassador Busan, Busan, Kore((Invited))
    • Year and Date
      2009-09-17
    • Related Report
      2009 Annual Research Report
  • [Presentation] Growth mechanism of graphene sheets in initial phase2009

    • Author(s)
      M.Hiramatsu, S.Kondo, K.Yamakawa, K.Takeda, M.Hori
    • Organizer
      International Symposium on Plasma Chemistry 19
    • Place of Presentation
      Ruhr-University Bochum, Bochum, Germany
    • Year and Date
      2009-07-27
    • Related Report
      2009 Annual Research Report
  • [Presentation] Plasma processes for flexible electronics2009

    • Author(s)
      M. Hori
    • Organizer
      Summer International Graduate School
    • Place of Presentation
      Sungkyunkwan University (韓国)
    • Year and Date
      2009-07-02
    • Related Report
      2009 Final Research Report
  • [Presentation] Plasma processes for flexible electronics2009

    • Author(s)
      M.Hori
    • Organizer
      Summer International Graduate School
    • Place of Presentation
      Sungkyunkwan University, Seoul, Korea((Invited))
    • Year and Date
      2009-07-02
    • Related Report
      2009 Annual Research Report
  • [Presentation] Initial Growth Process of Carbon Nanowalls2009

    • Author(s)
      S.Kondo, Y.Itani, M.Hiramatsu, M.Sekine, M.Hori
    • Organizer
      New Diamond and Nano Carbons Conference 2009
    • Place of Presentation
      Grand Traverse Resort And Spa, Michigan, USA
    • Year and Date
      2009-06-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] Semiconductor Behavior of Carbon Nanowalls Grown by Plasma-Enhanced Chemical Vapor Deposition2009

    • Author(s)
      W.Takeuchi, M.Hiramatsu, Y.Tokuda, H.Kano, M.Hori
    • Organizer
      New Diamond and Nano Carbons Conference 2009
    • Place of Presentation
      Grand Traverse Resort And Spa, Michigan, USA
    • Year and Date
      2009-06-08
    • Related Report
      2009 Annual Research Report
  • [Presentation] 「微量窒素添加ガスを用いて作製したカーボンナノウォールのドープ効果による電子状態変化」低次元カーボン系チャネルエンジニアリング2009

    • Author(s)
      近藤真悟、伊谷佳泰、山川晃司、田昭治、平松美根男、関根誠、堀勝
    • Organizer
      2009年春季第56回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学、茨城県
    • Year and Date
      2009-03-31
    • Related Report
      2008 Annual Research Report
  • [Presentation] カーボンナノウォールの構造及び電子状態におけるフッ素不純物の影響2009

    • Author(s)
      竹内和歌奈、柏原雅好、三国裕之、池本夕佳、森脇太郎、加藤有香子、室隆桂之、木下豊彦、木村滋、平松美根男、加納浩之、徳田豊、関根誠、堀勝
    • Organizer
      2009年春季第56回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学、茨城県
    • Year and Date
      2009-03-30
    • Related Report
      2008 Annual Research Report
  • [Presentation] 単一橋架けカーボンナノウォールの作製制御2009

    • Author(s)
      三國裕之、竹内和歌奈、竹田圭吾、平松美根男、加納浩之、徳田豊、堀勝
    • Organizer
      2009年春季第56回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学、茨城県
    • Year and Date
      2009-03-30
    • Related Report
      2008 Annual Research Report
  • [Presentation] カーボンナノウォールの電気化学評価に関する研究2009

    • Author(s)
      渡邊均、平松美根男、堀勝
    • Organizer
      2009年春季第56回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学、茨城県
    • Year and Date
      2009-03-30
    • Related Report
      2008 Annual Research Report
  • [Presentation] カーボンナノウオールの電気特性評価(I)2009

    • Author(s)
      下枝弘尚、竹内和歌奈、徳田豊、平松美根男、加納浩之、関根誠、堀勝
    • Organizer
      2009年春季第56回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学、茨城県
    • Year and Date
      2009-03-30
    • Related Report
      2008 Annual Research Report
  • [Presentation] 新規カーボンナノ構造体カーボンナノウォールと種々の基板界面の構造解析2009

    • Author(s)
      竹内和歌奈, 堀勝, 木村滋, 坂田修身, 田尻寛男、竹田圭吾, 高島成剛
    • Organizer
      重点ナノテクノロジー支援課題研究成果報告会
    • Place of Presentation
      SPring-8放射光普及棟大講堂(兵庫県)
    • Year and Date
      2009-03-12
    • Related Report
      2009 Final Research Report
  • [Presentation] 新規カーボンナノ構造体カーボンナノウォールと種々の基板界面の構造解析2009

    • Author(s)
      竹内和歌奈、堀勝、木村滋、坂修身、田尻寛男、竹田圭吾、高成剛(招待講演)
    • Organizer
      重点ナノテクノロジー支援課題研究成果報告会
    • Place of Presentation
      SPring-8放射光普及棟大講堂、兵庫県佐用郡
    • Year and Date
      2009-03-12
    • Related Report
      2008 Annual Research Report
  • [Presentation] Next Generation Plasma Nano Processing by Integrated Radical Control2009

    • Author(s)
      M. Hori
    • Organizer
      International Conference on Plasma Surface Engineering (AEPSE2009)
    • Place of Presentation
      BEXCO Convention Center (韓国)
    • Related Report
      2009 Final Research Report
  • [Presentation] 低次元カーボン系チャネルエンジニアリング, 科学研究費補助金特定領域研究「シリコンナのエレクトロニクスの新展開」2009

    • Author(s)
      堀勝、竹田圭吾、竹内和歌奈、近藤真悟、柏原雅好、三国裕之、下枝弘尚
    • Organizer
      ポストスケーリングテクノロジー第5回全体会議
    • Place of Presentation
      名古屋大学(愛知県)
    • Related Report
      2009 Final Research Report
  • [Presentation] Next Generation Plasma Nano Processing by Integrated Radical Control2009

    • Author(s)
      M.Hori
    • Organizer
      International Conference on Plasma Surface Engineering (AEPSE2009)
    • Place of Presentation
      BEXCO Convention Center, Busan, Korea((Invited))
    • Related Report
      2009 Annual Research Report
  • [Presentation] 高輝度放射光を用いたカーボンナノウォールのバンド構造解析2009

    • Author(s)
      竹内和歌奈, 木下豊彦, 加藤有香子, 室隆桂之, 池本夕佳, 森脇太郎, 木村滋, 平松美根男, 加納浩之, 徳田豊, 堀勝
    • Organizer
      2009年秋季 第70回応用物理学関係連合講演会
    • Place of Presentation
      富山大学(富山県)
    • Related Report
      2009 Annual Research Report
  • [Presentation] カーボンナノウォール成長におけるイオン照射の効果2009

    • Author(s)
      近藤真悟、山川晃司、田昭治、平松美根男、関根誠、堀勝
    • Organizer
      2009年秋季 第70回応用物理学関係連合講演会
    • Place of Presentation
      富山大学(富山県)
    • Related Report
      2009 Annual Research Report
  • [Presentation] カーボンナノウォール成長における基板組成効果2009

    • Author(s)
      三国裕之、竹内和歌奈、山川晃司、竹田圭吾、平松美根男、加納浩之、関根誠、堀勝
    • Organizer
      2009年秋季 第70回応用物理学関係連合講演会
    • Place of Presentation
      富山大学(富山県)
    • Related Report
      2009 Annual Research Report
  • [Presentation] a : C-Hを用いたカーボン系太陽電池作製に関する研究2009

    • Author(s)
      木野徳重、竹内和歌奈、石川健治、近藤博基、加納裕之、関根誠、堀勝
    • Organizer
      第3回プラズマエレクトロニクスインキュベーションホール
    • Place of Presentation
      国立中央青少年交流の家(静岡県)
    • Related Report
      2009 Annual Research Report
  • [Presentation] Effects of initial nuclei on carbon nanowalls density2009

    • Author(s)
      三國裕之, 近藤真悟, 竹内和歌奈, 山川晃司, 竹田圭吾, 近藤博基, 平松美根男, 関根誠, 堀勝
    • Organizer
      第19回日本MRS学術シンポジウム
    • Place of Presentation
      横浜市開港記念会館(神奈川県)
    • Related Report
      2009 Annual Research Report
  • [Presentation] Fabrication of Single Wall Carbon Nanowall Employing Electron Beam Excited Plasma2009

    • Author(s)
      H. Mikuni, W. Takeuchi, K. Takeda, M. Hiramatsu, H. Kano, Y. Tokuda, M. Hori
    • Organizer
      The 8^<th> International Workshop of Advanced Plasma Processing and Diagnostics Joint Workshop with Plasma Application Monodzukuri
    • Place of Presentation
      Techno Plaza, Gifu
    • Related Report
      2008 Annual Research Report
  • [Presentation] Synthesis of Carbon Nanowalls and Their Applications to Electrical Devices2009

    • Author(s)
      M. Kashihara, W. Takeuchi, Y. Tokuda, H. Kano, M. Hiramatsu, M. Hori
    • Organizer
      The 8^<th> International Workshop of Advanced Plasma Processing and Diagnostics Joint Workshop with Plasma Application Monodzukuri
    • Place of Presentation
      Techno Plaza, Gifu
    • Related Report
      2008 Annual Research Report
  • [Presentation] Fabrication of Single Carbon Nanowall Using Electron Beam Excited Plasma Enhanced CVD2009

    • Author(s)
      H. Mikuni, W. Takeuchi, K. Takeda, M. Hiramatsu, H. Kano, Y. Tokuda, M. Hori
    • Organizer
      The 2 nd International Conference on Plasma-Nano Technology & Science
    • Place of Presentation
      IB Building, Nagoya University, Nagoya
    • Related Report
      2008 Annual Research Report
  • [Presentation] Formation of Carbon Nanowall by using Radical Injection Plasma Enhanced Chemical Vapor Deposition and Its Electrochemical Evaluation2009

    • Author(s)
      H. Watanabe, M. Hiramatsu, M. Hori
    • Organizer
      The 2 nd International Conference on Plasma-Nano Technology & Science
    • Place of Presentation
      IB Building, Nagoya University, Nagoya
    • Related Report
      2008 Annual Research Report
  • [Presentation] Effects of H Radical Irradiation on Synthesis of Carbon Nanowalls2009

    • Author(s)
      S. Kondo, Y. Itani, K. Yamakawa, S. Den, M. Hiramatsu, M. Sekine, M. Hori
    • Organizer
      The 2 nd International Conference on Plasma-Nano Technology & Science
    • Place of Presentation
      IB Building, Nagoya University, Nagoya
    • Related Report
      2008 Annual Research Report
  • [Presentation] Growth of Carbon Nanowalls of High Graphitization Employing PECVD2009

    • Author(s)
      W. Takeuchi, M. Hiramatsu, H. Kano, Y. Tokuda, M. Hori
    • Organizer
      1 st International Symposium on Advanced Plasma Science and its Applications (ISPlasma 2009)
    • Place of Presentation
      Nagoya University, Nagoya
    • Related Report
      2008 Annual Research Report
  • [Presentation] Fabrication of Carbon Nanostructure using Radical Injection Plasma Enhanced Chemical Vapor Deposition and its Electrochemical Evaluation2009

    • Author(s)
      H. Watanabe, M. Hiramatsu, M. Hori
    • Organizer
      1 st International Symposium on Advanced Plasma Science and its Applications (ISPlasma 2009)
    • Place of Presentation
      Nagoya University, Nagoya
    • Related Report
      2008 Annual Research Report
  • [Presentation] Fabrication of Bridge-shaped Carbon Nanowall on Trench Substrates using Electron Beam Excited Plasma Enhanced CVD2009

    • Author(s)
      H. Mikuni, W. Takeuchi, M. Hiramatsu, H. Kano, Y. Tokuda, K. Takeda, M. Hori
    • Organizer
      1 st International Symposium on Advanced Plasma Science and its Applications (ISPlasma 2009)
    • Place of Presentation
      Nagoya University, Nagoya
    • Related Report
      2008 Annual Research Report
  • [Presentation] 低次元カーボン系チャネルエンジニアリング2009

    • Author(s)
      堀勝、竹田圭吾、竹内和歌奈、近藤真悟、柏原雅好、三国裕之、下枝弘尚(招待講演)
    • Organizer
      科学研究費補助金特定領域研究「シリコンナのエレクトロニクスの新展開」-ポストスケーリングテクノロジー第5回全体会議
    • Place of Presentation
      Nagoya University, Nagoya
    • Related Report
      2008 Annual Research Report
  • [Presentation] ラジカル注入型プラズマCVD法によるカーボンナノウォールの作製と電気化学評価2009

    • Author(s)
      渡邊均, 平松美根男, 堀勝
    • Organizer
      2008年秋季第69回応用物理学会学術講演会
    • Place of Presentation
      中部大学、愛知県
    • Related Report
      2008 Annual Research Report
  • [Presentation] Fabrication of Bridge-shaped Carbon Nanowall by Using Patterned Template2009

    • Author(s)
      三國裕之、竹内和歌奈、平松美根男、加納浩之、徳田豊、竹田圭吾、堀勝
    • Organizer
      プラズマ科学シンポジウム2009/第26回プラズマプロセシング研究会
    • Place of Presentation
      古屋大学豊田講堂・シンポジオン、名古屋
    • Related Report
      2008 Annual Research Report
  • [Presentation] Synthesis of Carbon Nanowalls by Ions and Radicals Controlled CVD2009

    • Author(s)
      近藤真悟、伊谷佳泰、山川晃司、田昭治、平松美根男、関根誠、堀勝
    • Organizer
      プラズマ科学シンポジウム2009/第26回プラズマプロセシング研究会
    • Place of Presentation
      古屋大学豊田講堂・シンポジオン、名古屋
    • Related Report
      2008 Annual Research Report
  • [Presentation] On the Growth Mechanism of Carbon Nanowalls using Plasma Enhanced Chemical Vapor Deposition2008

    • Author(s)
      M. Hori, W. Takeuchi, S. Kondo, M. Hiramatsu
    • Organizer
      11th International Conference on Plasma Surface Engineering
    • Place of Presentation
      Kongresshaus(Congress Center) (ドイツ)
    • Year and Date
      2008-09-15
    • Related Report
      2009 Final Research Report
  • [Presentation] Control of the Structures and the Electrical Conduction of Carbon Nanowalls using Additional Gas2008

    • Author(s)
      W. Takeuchi
    • Organizer
      先進プラズマナノ科学ワークショップ
    • Place of Presentation
      名古屋大学(愛知県)
    • Year and Date
      2008-05-08
    • Related Report
      2009 Final Research Report
  • [Presentation] Control of the Structures and the Electrical Conduction of Carbon Nanowalls using Additional Gas2008

    • Author(s)
      W. Takeuchi (Invited)
    • Organizer
      先進プラズマナノ科学ワークショップ
    • Place of Presentation
      名古屋大学、名古屋
    • Year and Date
      2008-05-08
    • Related Report
      2008 Annual Research Report
  • [Presentation] カーボンナノウォールのバイオテクノロジーへの応用2008

    • Author(s)
      堀勝
    • Organizer
      第12回VBLシンポジウム「未来医療創成に向けたナノテクノロジー」
    • Place of Presentation
      名古屋大学ベンチャー・ビジネス・ラボラトリー(愛知県
    • Related Report
      2009 Final Research Report
  • [Presentation] Control of Structure of Carbon Nanowalls Synthesized by Fluorocarbon Plasma Enhanced Chemical Vapor Deposition2008

    • Author(s)
      M. Hori, W. Takeuchi, M. Hiramatsu, Y. Tokuda, H. Kano
    • Organizer
      ICPP2008 Satellite Meeting on Plasma Physics and Advanced Applications in ASO
    • Place of Presentation
      阿蘇憩いの村(熊本県)
    • Related Report
      2009 Final Research Report
  • [Presentation] 垂直成長グラフェンナノシートによる新機能デバイス2008

    • Author(s)
      堀勝, 平松美根男
    • Organizer
      2008年秋季第69回応用物理学会学術講演会
    • Place of Presentation
      中部大学(愛知県)
    • Related Report
      2009 Final Research Report
  • [Presentation] Carbon Nano Material Processing on the Basis of Plasma Nano Science2008

    • Author(s)
      M. Hiramatsu, M. Hori
    • Organizer
      BK21 International Symposium on Prospects for Physics and Chemistry in the Next Decade
    • Place of Presentation
      Natural Science Campus, Sungkyunkwan University (韓国)
    • Related Report
      2009 Final Research Report
  • [Presentation] On the Growth Mechanism of Carbon Nanowalls using Plasma Enhanced Chemical Vapor Deposition2008

    • Author(s)
      M.Hori, W.Takeuchi, S.Kondo, M.Hiramatsu (Invited)
    • Organizer
      11th International Conference on Plasma Surface Engineering
    • Place of Presentation
      Kongresshaus (Congress Center), Garmisch-Partenkirchen, Germany
    • Related Report
      2008 Self-evaluation Report
  • [Presentation] Control of Structure of Carbon Nanowalls Synthesized by Fluorocarbon Plasma Enhanced Chemical Vapor Deposition2008

    • Author(s)
      M. Hori, W. Takeuchi, M. Hiramatsu, Y. Tokuda, H. Kano (Invited)
    • Organizer
      ICPP 2008 Satellite Meeting on Plasma Physics and Advanced Applications in ASO
    • Place of Presentation
      阿蘇憩いの村、阿蘇
    • Related Report
      2008 Annual Research Report
  • [Presentation] On the Growth Mechanism of Carbon Nanowalls using Plasma Enhanced Chemical Vapor Deposition2008

    • Author(s)
      M. Hori, W. Takeuchi, S. Kondo, M. Hiramatsu (Invited)
    • Organizer
      11 th International Conference on Plasma Surface Engineering
    • Place of Presentation
      Kongresshaus (Congress Center), Garmisch-Partenkirchen, Germany
    • Related Report
      2008 Annual Research Report
  • [Presentation] Effect of Oxygen Gas Addition to C_2F_6/H_2 Plasma on the Structure of Carbon Nanowalls2008

    • Author(s)
      W. Takeuchi, M. Hiramatsu, Y. Tokuda, H. Kano, M. Hori
    • Organizer
      4 th International Nanotechnology Conference on Communication and Cooperation
    • Place of Presentation
      Hitotsubashi Memorial Hall, Tokyo
    • Related Report
      2008 Annual Research Report
  • [Presentation] Effects of High Energy Ar Ions on Synthesis of Carbon Nanowalls2008

    • Author(s)
      S. Kondo, O. Stepanovic, K. Yamakawa, S. Den, M. Hiramatsu, Hori
    • Organizer
      61 st Annual Gaseous Electronics Conference
    • Place of Presentation
      Marriott Dallas / Addison Quorum, Dallas, Texas, USA
    • Related Report
      2008 Annual Research Report
  • [Presentation] Initial Formation of Carbon Nanowalls Synthesized by Ar Ions and CFx/H Radicals2008

    • Author(s)
      S. Kondo, O. Stepanovic, K. Yamakawa, S. Den, M. Hiramatsu, M. Hori
    • Organizer
      61 st Annual Gaseous Electronics Conference
    • Place of Presentation
      Marriott Dallas / Addison Quorum, Dallas, Texas, USA
    • Related Report
      2008 Annual Research Report
  • [Presentation] Control of Structures and Electrical Properties of Carbon Nanowalls Using Plasma Enhanced CVD Employing N_2/O_2 Addition to C_2F_6/H_2 Gases2008

    • Author(s)
      W. Takeuchi, M. Hiramatsu, Y. Tokuda, H. Kano, M. Hori
    • Organizer
      AVS 55^<th> International Symposium & Exhibition
    • Place of Presentation
      Hynes Convention Center, Boston, MA, USA
    • Related Report
      2008 Annual Research Report
  • [Presentation] Growth Mechanism of Carbon Nanowalls Synthesized by Irradiation of Independently Controlled Ar Ions and CFx/H Radicals2008

    • Author(s)
      S. Kondo, O. Stepanovic, K. Yamakawa, S. Den, M. Hiramatsu, M. Hori
    • Organizer
      AVS 55^<th> International Symposium & Exhibition
    • Place of Presentation
      Hynes Convention Center, Boston, MA, USA
    • Related Report
      2008 Annual Research Report
  • [Presentation] Structural Control of N-doped Carbon Nanowalls using O_2 Effect2008

    • Author(s)
      W. Takeuchi, M. Hiramatsu, Y. Tokuda, H. Kano, M, Hori
    • Organizer
      2 nd International Conference on New Diamond and Nano Carbons
    • Place of Presentation
      Grand Hotel, Taipei, Taiwan
    • Related Report
      2008 Annual Research Report
  • [Presentation] Carbon Nanowall Formation by Controlled Irradiation of Radicals and Ions2008

    • Author(s)
      S. Kondo, O. Stepanovic, K. Yamakawa, M. Hiramatsu, M. Hori
    • Organizer
      2 nd International Conference on New Diamond and Nano Carbons
    • Place of Presentation
      Grand Hotel, Taipei, Taiwan
    • Related Report
      2008 Annual Research Report
  • [Presentation] Fabrication of Nanowall Using Radical Injection Plasma Enhanced Chemical Vapor Deposition and its Electrochemical Evaluation2008

    • Author(s)
      H. Watanabe, M. Hiramatsu, M. Hori
    • Organizer
      7 th Korea-Japan Workshop on Plasma Technology
    • Place of Presentation
      Sungkyunkwan University, Suwon, Korea
    • Related Report
      2008 Annual Research Report
  • [Presentation] Control of Graphene Sheet Structure Using Oxygen Gas Addition to C_2F_6/H_2 Plasma2008

    • Author(s)
      W. Takeuchi, M. Hiramatsu, Y. Tokuda, H. Kano, M. Hori
    • Organizer
      7 th Korea-Japan Workshop on Plasma Technology
    • Place of Presentation
      Sungkyunkwan University, Suwon, Korea
    • Related Report
      2008 Annual Research Report
  • [Presentation] Growth Mechanism of Carbon Nanowalls Synthesized by Irradiations of Ions and Radicals2008

    • Author(s)
      S. Kondo, O. Stepanovic, K. Yarnakawa, S, Den, M. Hiramatsu, M. Hori
    • Organizer
      7 th Korea-Japan Workshop on Plasma Technology
    • Place of Presentation
      Sungkyunkwan University, Suwon, Korea
    • Related Report
      2008 Annual Research Report
  • [Presentation] Shape Change of Carbon Nanowalls Grown using Inductively Coupled Plasma-Enhanced Chemical Vapor Deposition2008

    • Author(s)
      M. Ohira, M. Hiramatsu, M. Hori
    • Organizer
      7 th Korea-Japan Workshop on Plasma Technology
    • Place of Presentation
      Sungkyunkwan University, Suwon. Korea
    • Related Report
      2008 Annual Research Report
  • [Presentation] Initial Growth Phase of Carbon Nanowalls Synthesized by Irradiation of Ions and Radicals2008

    • Author(s)
      S. Kondo, M. Hiramatsu, M. Hori
    • Organizer
      International Congress on Plasma Physics 2008
    • Place of Presentation
      Fukuoka International Congress Center
    • Related Report
      2008 Annual Research Report
  • [Presentation] Control of Structure and Electrical Properties of Carbon Nanowalls : Effect of N_2/O_2 Addition to Fluorocarbon Plasma CVD with H Radical Injection2008

    • Author(s)
      W. Takeuchi, M. Hiramatsu, Y. Tokuda, H. Kano, M. Hori
    • Organizer
      2008 International Conference on Solid State Device and Materials
    • Place of Presentation
      Tsukuba International Congress Center, Tsukuba
    • Related Report
      2008 Annual Research Report
  • [Presentation] 垂直成長グラフェンナノシートによる新機能デバイス2008

    • Author(s)
      堀勝, 平松美根男(招待講演)
    • Organizer
      2008年秋季第69回応用物理学会学術講演会
    • Place of Presentation
      中部大学、愛知県
    • Related Report
      2008 Annual Research Report
  • [Presentation] カーボンナノウォールのバイオテクノロジーへの応用2008

    • Author(s)
      堀勝(招待講演)
    • Organizer
      第12回VBLシンポジウム「未来医療創成に向けたナノテクノロジー」
    • Place of Presentation
      名古屋大学ベンチャー・ビジネス・ラボラトリー、名古屋
    • Related Report
      2008 Annual Research Report
  • [Presentation] カーボンナノウォール/Si接合における電気特性評価2008

    • Author(s)
      竹内和歌奈, 徳田豊, 加納浩之, 平松美根男, 堀勝
    • Organizer
      2008年秋季第69回応用物理学会学術講演会
    • Place of Presentation
      中部大学、愛知県
    • Related Report
      2008 Annual Research Report
  • [Presentation] イオン・ラジカル独立制御によるカーボンナノウォールの作製(II)2008

    • Author(s)
      近藤真悟, 山川晃司, 田昭治, 平松美根男, 関根誠, 堀勝
    • Organizer
      2008年秋季第69回応用物理学会学術講演会
    • Place of Presentation
      中部大学、愛知県
    • Related Report
      2008 Annual Research Report
  • [Presentation] 単一橋架けカーボンナノウォールの作製D2008

    • Author(s)
      三國裕之, 竹内和歌奈, 平松美根男, 加納浩之, 徳田豊, 堀勝
    • Organizer
      第2回プラズマエレクトロニクスインキュベーションホール
    • Place of Presentation
      マキノパークホテル&セミナーハウス、滋賀
    • Related Report
      2008 Annual Research Report
  • [Presentation] Synthesis of Graphene Sheet by Radical Controlled Plasma2008

    • Author(s)
      Shingo Kondo
    • Organizer
      6th International Workshop on Advanced Plasma Processing and Diagnostics
    • Place of Presentation
      Nagoya, Japan
    • Related Report
      2007 Annual Research Report
  • [Presentation] Investigation of early phase of carbon nanowall formation process in anewly developed three-plasma experiment2008

    • Author(s)
      Olivera Stepanovic
    • Organizer
      The 1st International Conference on Plasma-nanotechnology & Science
    • Place of Presentation
      Nagoya, Japan
    • Related Report
      2007 Annual Research Report
  • [Presentation] Pattern transfer of carbon nanowall into SiO_2 film2008

    • Author(s)
      Akio Noda
    • Organizer
      The 1st International Conference on Plasma-nanotechnology & Science
    • Place of Presentation
      Nagoya, Japan
    • Related Report
      2007 Annual Research Report
  • [Presentation] Structural Control of Carbon Nanowalls Using Oxygen Gas Addition to C_2F_6/H_2 Plasma2008

    • Author(s)
      Wakana Takeuchi
    • Organizer
      The 1st International Conference on Plasma-nanotechnology & Science
    • Place of Presentation
      Nagoya, Japan
    • Related Report
      2007 Annual Research Report
  • [Presentation] プラズマCVD法により作製したCNWの初期成長における酸素添加効果2008

    • Author(s)
      近藤 真悟
    • Organizer
      第25回プラズマプロセシング研究会
    • Place of Presentation
      山口県
    • Related Report
      2007 Annual Research Report
  • [Presentation] ラジカル注入プラズマCVD法で作製したカーボンナノウォール構造における酸素ガス添加の効果2008

    • Author(s)
      竹内 和歌奈
    • Organizer
      第25回プラズマプロセシング研究会
    • Place of Presentation
      山口県
    • Related Report
      2007 Annual Research Report
  • [Presentation] カーボンナノウォールデバイス応用に向けたグラファイト構造制御2008

    • Author(s)
      竹内 和歌奈
    • Organizer
      科学研究費補助金特定領域研究「シリコンナノエレクトロニクスの新展開」-ポストスケーリングテクノロジー-第二回成果報告会
    • Place of Presentation
      東京都
    • Related Report
      2007 Annual Research Report
  • [Presentation] イオン・ラジカル独立照射によるカーボンナノウォールの作製に関する研究2008

    • Author(s)
      近藤 真悟
    • Organizer
      科学研究費補助金特定領域研究「シリコンナノエレクトロニクスの新展開」一ポストスケーリングテクノロジー-第二回成果報告会
    • Place of Presentation
      東京都
    • Related Report
      2007 Annual Research Report
  • [Presentation] プラズマCVD法で作製したカーボンナノウォールの成長メカニズム2008

    • Author(s)
      近藤 真悟
    • Organizer
      日本機械学会関東支部 第14期総会講演会
    • Place of Presentation
      東京都
    • Related Report
      2007 Annual Research Report
  • [Presentation] ラジカル制御によるグラフェンの構造制御と電気特性2008

    • Author(s)
      堀 勝
    • Organizer
      2008年春季 第55回応用物理学関係連合講演会
    • Place of Presentation
      千葉県
    • Related Report
      2007 Annual Research Report
  • [Presentation] イオン・ラジカル照射によるカーボンナノウォールの作製2008

    • Author(s)
      近藤 真悟
    • Organizer
      2008年春季 第55回応用物理学関係連合講演会
    • Place of Presentation
      千葉県
    • Related Report
      2007 Annual Research Report
  • [Presentation] 酸素添加ガスによるカーボンナノウォールの構造制御II2008

    • Author(s)
      竹内 和歌奈
    • Organizer
      2008年春季 第55回応用物理学関係連合講演会
    • Place of Presentation
      千葉県
    • Related Report
      2007 Annual Research Report
  • [Presentation] カーボンナノウォールに対するメタルコンタクト特性2008

    • Author(s)
      柏原 雅好
    • Organizer
      2008年春季 第55回応用物理学関係連合講演会
    • Place of Presentation
      千葉県
    • Related Report
      2007 Annual Research Report
  • [Presentation] 単一橋架けカーボンナノウォールの作製2008

    • Author(s)
      三国 裕之
    • Organizer
      2008年春季 第55回応用物理学関係連合講演会
    • Place of Presentation
      千葉県
    • Related Report
      2007 Annual Research Report
  • [Presentation] Plasma Nano-Processing for Fabrication of New Functional Graphene Sheet Nano-Devices2007

    • Author(s)
      M. Hori, M. Hiramatsu
    • Organizer
      5th International Conference on Advanced Materials and Devices
    • Place of Presentation
      Ramada Plaza Jeju Hotel (韓国)
    • Related Report
      2009 Final Research Report
  • [Presentation] Synthesis of Carbon Nanowalls and Challenge for New Functional Devices2007

    • Author(s)
      M. Hori
    • Organizer
      Double Tree Crystal City
    • Place of Presentation
      National Airport (米国)
    • Related Report
      2009 Final Research Report
  • [Presentation] Micro and Nano-Fabrication Processing on the Basis of Plasma Science2007

    • Author(s)
      M. Hori
    • Organizer
      The 9th International Symposium on Sputtering and Plasma Processes (ISSP 2007)
    • Place of Presentation
      Kanazawa Kokusai Hotel (神奈川県)
    • Related Report
      2009 Final Research Report
  • [Presentation] Fabrication of carbon nanowalls by radical controlled plasma process2007

    • Author(s)
      M. Hiramatsu, M. Hori
    • Organizer
      International Conference on Experimental Condensed Matter Physics (Advanced Nano Materials 2007)
    • Place of Presentation
      Indian Institute of Technology Bombay (インド)
    • Related Report
      2009 Final Research Report
  • [Presentation] Synthesis of Carbon Nanowalls and Challenge for New Functional Devices2007

    • Author(s)
      M.Hori (invited)
    • Organizer
      60th Annual Gaseous Electronics Conference
    • Place of Presentation
      DoubleTree Crystal City-National Airport, Arlington, USA
    • Related Report
      2008 Self-evaluation Report
  • [Presentation] Fabrication of carbon nanowalls by radical controlled plasma process2007

    • Author(s)
      M.Hiramatsu, M.Hori (Invited)
    • Organizer
      International Conference on Experimental Condensed Matter Physics
    • Place of Presentation
      Institute of Technology Bombay, Mumbai, India
    • Related Report
      2008 Self-evaluation Report
  • [Presentation] Growth and Properties of Carbon Nono Walls (CNW) Using Radical Injection PECVD2007

    • Author(s)
      Wakana Takeuchi
    • Organizer
      5th International Symposium on Advanced Plasma Processes and Diagnostics & lst International Symposium on Flexible Electronics Technology
    • Place of Presentation
      Suwon, Korea
    • Related Report
      2007 Annual Research Report
  • [Presentation] Etching Properties of Carbon Nanowalls Fabricated Using Radical Injection Plasma Enhanced CVD2007

    • Author(s)
      Shingo Kondo
    • Organizer
      18th International Symposium on Plasma Chemistry
    • Place of Presentation
      Kyoto, Japan
    • Related Report
      2007 Annual Research Report
  • [Presentation] The Structure and Electric Conduction of Carbon Nanowalls using Radical Injection Plasma Enhanced CVD2007

    • Author(s)
      Wakana Takeuchi
    • Organizer
      18th International Symposium on Plasma Chemistry
    • Place of Presentation
      Kyoto, Japan
    • Related Report
      2007 Annual Research Report
  • [Presentation] Transcriptio of Carbon Nanowall Pattern into SiO_2 Fim2007

    • Author(s)
      Akio Noda
    • Organizer
      18th International Symposium on Plasma Chemistry
    • Place of Presentation
      Kyoto, Japan
    • Related Report
      2007 Annual Research Report
  • [Presentation] Control of Electric Conduction of Carbon Nanowalls2007

    • Author(s)
      Wakana Takeuchi
    • Organizer
      2007 International Conference on Solid State Devices and Materials
    • Place of Presentation
      Tsukuba, Japan
    • Related Report
      2007 Annual Research Report
  • [Presentation] Pattern transfer of carbon nanowall into SiO_2 film2007

    • Author(s)
      Akio Noda
    • Organizer
      The Sixth Asian-European International Conference on Plasma Surface Engineering
    • Place of Presentation
      Nagasaki, Japan
    • Related Report
      2007 Annual Research Report
  • [Presentation] Synthesis of Carbon Nanowalls and Challenge for New Functional Devices (INVITED)2007

    • Author(s)
      Masaru Hori
    • Organizer
      60th Annual Gaseous Electronics Conference
    • Place of Presentation
      Arlington, USA
    • Related Report
      2007 Annual Research Report
  • [Presentation] Control of Structures of Carbon Nanowalls in Plasma Enhanced CVD2007

    • Author(s)
      Wakana Takeuchi
    • Organizer
      60th Annual Gaseous Electronics Conference
    • Place of Presentation
      Arlington, USA
    • Related Report
      2007 Annual Research Report
  • [Presentation] Study of Growth Process and Structures of Carbon Nanowalls Synthesized Using Radical Injected Plasma Enhanced CVD2007

    • Author(s)
      Shingo Kondo
    • Organizer
      American Vacuum Society 54th International Symposium &Exhibition
    • Place of Presentation
      Seattle, USA
    • Related Report
      2007 Annual Research Report
  • [Presentation] Evaluation and Control of Electric Conduction of Carbon Nanowalls Fabricated by Plasma-Enhanced CVD2007

    • Author(s)
      Wakana Takeuchi
    • Organizer
      American Vacuum Society 54th International Symposium & Exhibition
    • Place of Presentation
      Seattle, USA
    • Related Report
      2007 Annual Research Report
  • [Presentation] Etching Processes of Carbon Nanowalls ushlg Dual-Frequency Parallel-Plate Capacitively Coupled Plasma2007

    • Author(s)
      Shingo Kondo
    • Organizer
      20th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Kyoto, Japan
    • Related Report
      2007 Annual Research Report
  • [Presentation] Carbon Nanowall Fabrication using Radical-Controlled Plasma Processing toward thd Application for New Functional Devices2007

    • Author(s)
      Masaru Hori
    • Organizer
      6th Pacific Rim International Conference on Advanced Materials and Processing
    • Place of Presentation
      Jeju, Korea
    • Related Report
      2007 Annual Research Report
  • [Presentation] Effect of Doped Carbon Nanowalls by Nitrogen Addition2007

    • Author(s)
      竹内 和歌奈
    • Organizer
      第20回プラズマ材料科学シンポジウム
    • Place of Presentation
      名古屋
    • Related Report
      2007 Annual Research Report
  • [Presentation] Ar/H_2 Plasma Etching Effect of Carbon Nanowalls Using Radical Injection Plasma Enhanced CVD2007

    • Author(s)
      近藤 真悟
    • Organizer
      第20回プラズマ材料科学シンポジウム
    • Place of Presentation
      名古屋
    • Related Report
      2007 Annual Research Report
  • [Presentation] Pattern Transfer of Carbon Nanowalls into SiO_2 Film2007

    • Author(s)
      野田 章夫
    • Organizer
      第20回プラズマ材料科学シンポジウム
    • Place of Presentation
      名古屋
    • Related Report
      2007 Annual Research Report
  • [Presentation] 低次元カーボン系チャネルエンジニアリング2007

    • Author(s)
      堀 勝
    • Organizer
      科学研究費補助金特定領域研究「シリコンナノエレクトロニクスの新展開」-ポストスケーリングテクノロジー一第2回全体会議
    • Place of Presentation
      名古屋市
    • Related Report
      2007 Annual Research Report
  • [Presentation] 酸素添加ガスによるカーボンナノウォールの構造制御2007

    • Author(s)
      竹内 和歌奈
    • Organizer
      2007年秋季 第68回応用物理学会学術講演会
    • Place of Presentation
      札幌市
    • Related Report
      2007 Annual Research Report
  • [Presentation] Study of Initial Growth of CNWs Fabricated Using Radical Injection Plasma Ehhanced CVD with O_2 Gas2007

    • Author(s)
      近藤 真悟
    • Organizer
      第18回日本MRS学術シンポジウム
    • Place of Presentation
      東京都
    • Related Report
      2007 Annual Research Report
  • [Presentation] Nanofabrication Using Carbon Nanowalls and Challenge for New Functional Devices2006

    • Author(s)
      M. Hori, M. Hiramatsu
    • Organizer
      2006 International Microprocesses and Nanotechnology Conference (MNC 2006)
    • Place of Presentation
      Kamakura Prince Hotel (神奈川県)
    • Related Report
      2009 Final Research Report
  • [Presentation] Nanofabrication Using Carbon Nanowalls and Challenge for New Functional Devices2006

    • Author(s)
      M.Hori, M.Hiramatsu (Invited)
    • Organizer
      2006 International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Kamakura Prince Hotel, Kanagawa, Japan
    • Related Report
      2008 Self-evaluation Report
  • [Book] 4編6章カーボンナノウォールの開発と応用技術2007

    • Author(s)
      堀勝、平松美根男
    • Publisher
      (株)エヌ・ティー・エス
    • Related Report
      2009 Final Research Report
  • [Book] ナノカーボンハンドブック2007

    • Author(s)
      堀勝
    • Total Pages
      996
    • Publisher
      (株)エヌ・ティー・エス
    • Related Report
      2008 Self-evaluation Report
  • [Book] ナノカーボンハンドブック2007

    • Author(s)
      堀 勝
    • Total Pages
      996
    • Publisher
      (株)エヌ・ティー・エス
    • Related Report
      2007 Annual Research Report
  • [Remarks]

    • URL

      http://www.nuee.nagoya-u.ac.jp/labs/horilab/

    • Related Report
      2009 Final Research Report
  • [Remarks]

    • URL

      http://www.nuee.nagoya-u.ac.jp/labs/horilab/

    • Related Report
      2009 Annual Research Report
  • [Remarks]

    • URL

      http://www.nuee.nagoya-u.ac.jp/labs/horilab/

    • Related Report
      2007 Annual Research Report
  • [Patent(Industrial Property Rights)] カーボンナノウォール及びその製造方法2008

    • Inventor(s)
      堀勝、竹内和歌奈、加納浩之
    • Industrial Property Rights Holder
      堀勝、NUエコ・エンジニアリング(株)
    • Industrial Property Number
      2008-081314
    • Filing Date
      2008-03-26
    • Related Report
      2007 Annual Research Report
  • [Patent(Industrial Property Rights)] カーボンナノウォール及びその製造方法

    • Inventor(s)
      堀勝、竹内和歌奈、加納浩之
    • Industrial Property Rights Holder
      堀勝、NUエコ・エンジニアリング(株)
    • Industrial Property Number
      2008-081314
    • Related Report
      2008 Self-evaluation Report

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Published: 2006-04-01   Modified: 2018-03-28  

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