Study on Fabrication Process of Single-Flux-Quantum Integrated Circiuts
Project/Area Number |
18080007
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Research Category |
Grant-in-Aid for Scientific Research on Priority Areas
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Allocation Type | Single-year Grants |
Review Section |
Science and Engineering
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Research Institution | Nagoya University |
Principal Investigator |
AKIRA Fujimaki (FUJIMAKI Akira) Nagoya University, 大学院・工学研究科, 教授 (20183931)
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Co-Investigator(Kenkyū-buntansha) |
HIROYUKI Akaike 名古屋大学, 大学院・工学研究科, 助教 (20273287)
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Project Period (FY) |
2006 – 2009
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Project Status |
Completed (Fiscal Year 2009)
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Budget Amount *help |
¥56,200,000 (Direct Cost: ¥56,200,000)
Fiscal Year 2009: ¥4,200,000 (Direct Cost: ¥4,200,000)
Fiscal Year 2008: ¥14,500,000 (Direct Cost: ¥14,500,000)
Fiscal Year 2007: ¥12,600,000 (Direct Cost: ¥12,600,000)
Fiscal Year 2006: ¥24,900,000 (Direct Cost: ¥24,900,000)
|
Keywords | 超伝導 / 単一磁束量子 / 局在電磁波 / ジョセフソン接合 / 窒化ニオブ / RbN / 単一磁束量子回路 / 二硼化マグネシウム / NbN / オーバーダンプ特性 / ジョセフソン結合 / 反応性スパッタリング / 成膜条件 / 反応性イオンエッチング |
Research Abstract |
We have studied Josephson junctions based on niobium nitride (NbN), which has 1.5 times larger superconducting energy gap than niobium. We have formed tunnel barriers by nitriding aluminum deposited on the base electrodes of NbN. These junctions show excellent reproducibility and controllability in quality parameters such as critical current density and characteristic voltage. We have also demonstrated intrinsically overdamped junctions by inserting normal conducting layers of NbNx. The junctions have high potential for high-speed operation in the single-flux-quantum logic circuit.
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Report
(6 results)
Research Products
(67 results)
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[Journal Article] Design and implementation of a pipelined 8 bit-serial single-flux-quantum microprocessor with cache memories2007
Author(s)
M. Tanaka, Y. Yamanashi, N. Irie, H. -J. Park, S. Iwasaki, K. Takagi, K. Taketomi, A. Fujimaki, N. Yoshikawa, H. Terai, S. Yorozu
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Journal Title
Supercond. Sci. Technol. 20(11)
Related Report
Peer Reviewed
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[Presentation] Preparation of MgB2/B/MgB2 Josephson Junctions2009
Author(s)
N. Mitamura, C. Maruyama, H. Akaike, A. Fujimaki, R. Inoue, Y. Niihara, M. Naito
Organizer
12th Int. Superconductive Electronics Conf. (ISEC2009) TD-P14Extended Abstracts of the 12th International Superconductive Electronics Conference TD-P14
Place of Presentation
Fukuoka, Japan
Related Report
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[Presentation] Development of High-Speed Single-Flux-Quantum Microprocessors2006
Author(s)
A. Fujimaki, M. Tanaka, N. Irie, S. Iwasaki, T. Yamada, N. Takagi, H. Park, Y. Yamanashi, N. Yoshikawa, H. Terai, S. Yorozu, Y. Takai
Organizer
19th Int. Symposium on Superconductivity (ISS2006) FD-22-INV
Place of Presentation
Nagoya, Japan
Related Report
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