High Speed and High Precision Measurement of Nanometric 3D Edge Profiles of Next Generation Diamond Micro-Tools

• Project/Area Number: 18206016
• Research Category: Grant-in-Aid for Scientific Research (A)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Production engineering/Processing studies
• Research Institution: Tohoku University
• Principal Investigator: GAO Wei Tohoku University, 大学院・工学研究科, 教授 (70270816)
• Co-Investigator(Kenkyū-buntansha): ONO Takahito 東北大学, 大学院・工学研究科, 准教授 (90282095) ; KURIYAGAWA Tsunemoto 東北大学, 大学院・工学研究科, 教授 (90170092) ; SHIMIZU Hiroki 九州工業大学, 工学部, 准教授 (50323043) ; 荒井 義和 東北大学, 大学院・工学研究科, 助教 (20455801) ; 居 冰峰 東北大学, 大学院工学研究科, 助手 (10431529)
• Project Period (FY): 2006 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥50,050,000 (Direct Cost: ¥38,500,000、Indirect Cost: ¥11,550,000); Fiscal Year 2008: ¥8,840,000 (Direct Cost: ¥6,800,000、Indirect Cost: ¥2,040,000); Fiscal Year 2007: ¥10,400,000 (Direct Cost: ¥8,000,000、Indirect Cost: ¥2,400,000); Fiscal Year 2006: ¥30,810,000 (Direct Cost: ¥23,700,000、Indirect Cost: ¥7,110,000)
• Keywords: エッジ / 3次元形状 / 計測 / マイクロ / 工具 / 光プローブ / アライメント / AFM / 三次元形状

Research Abstract

先端のコ-ナ半径が非常に小さな(1μm程度)超精密切削加工用のダイヤモンドツールのエッジの形状を原子間力顕微鏡(AFM)により計測するため, 専用の計測装置を製作した. また, 計測の際に必要となるAFMプローブとツールとの位置合わせ(アライメント)を実現するため, 光プローブを利用したアライメント機構を開発した.

Research Products

• [Journal Article] On-machine Measurement of Tool Cutting (2009)
  • Author(s): Takemi Asai, Sayeda Ferdous, Yoshikazu Arai, Yi Yang and Wei Gao
  • Journal Title: Edge Profiles IJAT Vol.3 No.4
  • Peer Reviewed
• [Journal Article] マイクロ切削工具切れ刃形状の三次元測定装置に関する研究-測定装置の構築と切れ刃形状測定実験- (2009)
  • Author(s): 浅井岳見, 荒井義和, 高偉
  • Journal Title: 精密工学会誌 75(7)(印刷中)
  • NAID: 130000421706
  • Peer Reviewed
• [Journal Article] 3D Profile Measurement of Nanometer Cutting Edges of Single-Point Diamond Tools for Ultra-Precision Maching (2009)
  • Author(s): Y. Arai, T. Asai, S. Ferdous and W. Gao
  • Journal Title: Advanced Material Research 69-70(in press) Pages: 138-142
  • Peer Reviewed
• [Journal Article] Precision and fast measurement of 3D cutting edge profiles of single point diamond micro-tools (2009)
  • Author(s): W. Gao, T. Asai, Y. Arai
  • Journal Title: Annals of the CIRP 58(in press)
  • Peer Reviewed
• [Journal Article] Precision and fast measurement of 3D cutting edge profiles of single point diamond micra-tools (2009)
  • Author(s): W. Gao, T. Asai, Y. Arai
  • Journal Title: Annals of the CIRP 58(In press)
  • Peer Reviewed
• [Journal Article] マイクロ切削工具切れ刃形状の三次元測定装置に関する研究-測定装置の構築と切れ刃形状測定実験- (2009)
  • Author(s): 浅井岳見,荒井義和, 高偉
  • Journal Title: 精密工学会誌 75(印刷中)
  • NAID: 130000421706
  • Peer Reviewed
• [Journal Article] AFM with the Slope Compensation Technique for High-speed Precision Measurement of Micro-structured Surfaces (2008)
  • Author(s): Yuguo Cui, BinFeng Ju, Jun Aoki, Yoshikazu Arai, Wei Gao
  • Journal Title: Key Engineering Materials 381-382 Pages: 35-38
  • Peer Reviewed
• [Journal Article] A high-speed atomic force microscope for precision measurement of micro-structured surfaces (2008)
  • Author(s): Yuguo Cui, Yoshikazu Arai, Takemi Asai, BinFeng Ju and Wei Gao
  • Journal Title: International Journal of Precision Engineering and Manufacturing 9-3 Pages: 27-32
  • Peer Reviewed
• [Journal Article] A high-speed atomic force microscope for precision measurement of micro-structured surfaces (2008)
  • Author(s): Y. G. Cui, Y. Arai, T. Asai, B. F. Ju and W. Gao
  • Journal Title: International Journal of Precision Engineering and Manufacturing 9 Pages: 27-32
  • Peer Reviewed
• [Journal Article] Bing-Feng Ju and Satoshi Kiyono ; An AFM-based Edge Profile Measuring Instrument for Diamond Cutting Tools (2007)
  • Author(s): Takemi Asai, Takenori Motoki, Wei Gao
  • Journal Title: IJPEM 8-2 Pages: 54-58
  • Peer Reviewed
• [Journal Article] AFM with the slope compensation technique for high-speed precision measurement of micro-structured surfaces (2007)
  • Author(s): Y. G. Gui
  • Journal Title: Proceedings of ISMTII 2007 Pages: 469-472
  • Peer Reviewed
• [Journal Article] An AFM-based measuring instrument for edge profile measurement of diamond cutting tool (2007)
  • Author(s): Takemi Asai
  • Journal Title: International Journal of Precision Engineering and Manufacturing 8・1B(in press)
• [Journal Article] Nanometer edge profile measurement of diamond cutting tools by atomic force microscope with optical alignment sensor (2006)
  • Author(s): Wei Gao, Takenori Motoki and Satoshi Kiyono
  • Journal Title: Precision Engineering 30(4) Pages: 396-405
  • Peer Reviewed
• [Journal Article] Nanometer edge profile measurement of diamond cutting tools by atomic force microscope with optical alignment sensor (2006)
  • Author(s): W.Gao
  • Journal Title: Precision Engineering 30・4 Pages: 396-405
• [Presentation] 超精密切削工具切れ刃の三次元形状測定に関する研究-加工機上測定実験- (2009)
  • Author(s): 浅井岳見, 荒井義和, 高偉
  • Organizer: 2009年度精密工学会春季大会
  • Place of Presentation: 中央大学
  • Year and Date: 2009-03-11
• [Presentation] Precision Measurement of Edge Profiles of Cutting Micro-tools (2008)
  • Author(s): Takemi ASAI, Yoshikazu ARAI and Wei GAO
  • Organizer: 3rd International Conference on Positioning Technology
  • Place of Presentation: Hamamatsu, Japan
  • Year and Date: 2008-12-26
• [Presentation] 3D Profile Measurement of Nanometer Cutting Edges of Single-Point Diamond Tools for Ultra-Precision Machining (2008)
  • Author(s): Yoshikazu ARAI, Takemi ASAI and Wei GAO
  • Organizer: The 6th CHINA-JAPAN International Conference on Ultra-Precision Machining (6th CJICUPM, 2008)
  • Place of Presentation: Hunan University, Changsha, China
  • Year and Date: 2008-12-24
• [Presentation] Nanometric Edge Profile Measurement of CuttingTools on a Diamond Turning Machine (2008)
  • Author(s): Asai, T., Arai, Y., Cui, Y. and Gao, W.
  • Organizer: ISIST2008
  • Place of Presentation: Shenyang, China
  • Year and Date: 2008-12-17
• [Presentation] Precision Measurement of Edge Profiles of Cutting Micro-tools (2008)
  • Author(s): Takemi ASAI
  • Organizer: 3rd International Conference on Positioning Technology (ICPT2008)
  • Place of Presentation: Hamamatsu
  • Year and Date: 2008-11-26
• [Presentation] 3D Profile Measurement of Nanometer Cutting Edges of Single-Point Diamond Tools for Ultra-Precision Machining (2008)
  • Author(s): Yoshikazu ARAI
  • Organizer: 6th CJICUPM
  • Place of Presentation: Changsha, China
  • Year and Date: 2008-11-24
• [Presentation] Compensation of motion error in a high accuracy AFM (2008)
  • Author(s): Cui, Y., Arai, Y., He, G., Asai, T. and Gao, W.
  • Organizer: ISIST2008
  • Place of Presentation: Shenyang, China
  • Year and Date: 2008-09-17
• [Presentation] Nanometric Edge Profile Measurement of Cutting Tools on a Diamond Turning Machine (2008)
  • Author(s): Takemi Asai
  • Organizer: ISIST2008
  • Place of Presentation: Shenyang, China
  • Year and Date: 2008-09-17
• [Presentation] マイクロ・ダイヤモンド切削工具切れ刃形状測定に関する研究 (2008)
  • Author(s): 浅井岳見, 荒井義和, 高偉
  • Organizer: 2008年度砥粒加工学会学術講演会
  • Place of Presentation: 滋賀県立大学
  • Year and Date: 2008-09-05
• [Presentation] 高速高精度原子間力顕微鏡に関する研究 (2008)
  • Author(s): 崔玉国, 荒井義和, 高偉
  • Organizer: 2008年度砥粒加工学会学術講演会
  • Place of Presentation: 滋賀県立大学
  • Year and Date: 2008-09-05
• [Presentation] マイクロ・ダイヤモンド切削工具切れ刃形状測定に関する研究 (2008)
  • Author(s): 浅井岳見
  • Organizer: 2008年度砥粒加工学会学術講演会(ABTEC2008)
  • Place of Presentation: 滋賀県立大学, 滋賀県
  • Year and Date: 2008-09-05
• [Presentation] 高速高精度原子間力顕微鏡に関する研究 (2008)
  • Author(s): 崔玉国
  • Organizer: 2008年度砥粒加工学会学術講演会(ABTEC2008)
  • Place of Presentation: 滋賀県立大学, 滋賀県
  • Year and Date: 2008-09-05
• [Presentation] A spiral scanning-type AFM for high-speed and largearea measurement euspen 2008 (2008)
  • Author(s): Y. Cui, G. He, Y. Arai, T. Asai, W. Gao
  • Organizer: Zurich, Switzerland
  • Year and Date: 2008-05-21
• [Presentation] A spiral scanning-type AFM for high-speed and largearea measurement (2008)
  • Author(s): Y. Cui
  • Organizer: euspen 2008
  • Place of Presentation: Zurich, Switzerland
  • Year and Date: 2008-05-21
• [Presentation] An Instrument for Three-Dimensional Edge Profile Measurement of Micro-Cutting Tools (2008)
  • Author(s): T. Asai, Y. Arai, Y. Cui, W. Gao
  • Organizer: euspen 2008
  • Place of Presentation: Zurich, Switzerland
  • Year and Date: 2008-05-20
• [Presentation] イヤモンド切削工具切れ刃形状測定装置の開発 (2007)
  • Author(s): 浅井岳見, 荒井義和, 高偉
  • Organizer: 2007年度精密工学会東北支部学術講演会
  • Place of Presentation: 八戸工業大学
  • Year and Date: 2007-12-01
• [Presentation] 高速高精度微細形状計測用AFMに関する研究-傾斜補正による測定の高速化- (2007)
  • Author(s): 崔玉国, 荒井義和, 浅井岳見, 高偉
  • Organizer: 007年度精密工学会東北支部学術講演会
  • Place of Presentation: 八戸工業大学
  • Year and Date: 2007-12-01
• [Presentation] マイクロ・ダイヤモンド切削工具切れ刃形状測定装置の開発 (2007)
  • Author(s): 浅井岳見
  • Organizer: 2007年度精密工学会東北支部学術講演会
  • Place of Presentation: 八戸工業大学
  • Year and Date: 2007-12-01
• [Presentation] 高速高精度微細形状計測用AFMに関する研究 (2007)
  • Author(s): 崔玉国
  • Organizer: 2007年度精密工学会東北支部学術講演会
  • Place of Presentation: 八戸工業大学
  • Year and Date: 2007-12-01
• [Presentation] AFM with Slope Compensation Teqnique for High-speed Precision Measurement of Micro-structured Surfaces (2007)
  • Author(s): Y. G. Cui, B. F. Ju, J. Aoki, Y. Arai and W. Gao
  • Organizer: ISMTII 2007
  • Place of Presentation: Poster session
  • Year and Date: 2007-09-20
• [Presentation] ダイヤモンド切削工具3Dエッジ形状の高精度自動測定装置の開発 (2007)
  • Author(s): 浅井岳見, 元木健順, 高偉, 清野慧
  • Organizer: 2007年度精密工学会春季大会
  • Place of Presentation: 芝浦工業大学
  • Year and Date: 2007-03-21
• [Presentation] An AFM-based measuring instrument for edge profile measurement of diamond cutting tool (2006)
  • Author(s): Takemi Asai, Takenori Motoki, Wei Gao Bing-Feng Ju and Satoshi Kiyono
  • Organizer: 2nd International Conference on Positioning Technology(Jeju-do, Korea)
  • Place of Presentation: Poster session
  • Year and Date: 2006-10-26
• [Remarks]
  • URL: http://www.nano.mech.tohoku.ac.jp/