Development of topography-sensitive nano device processing aided by in-situ ellipsometry in supercritical fluids

• Project/Area Number: 18206031
• Research Category: Grant-in-Aid for Scientific Research (A)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Electronic materials/Electric materials
• Research Institution: University of Yamanashi
• Principal Investigator: KONDOH Eiichi University of Yamanashi, 大学院・医学工学総合研究部, 教授 (70304871)
• Project Period (FY): 2006 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥24,050,000 (Direct Cost: ¥18,500,000、Indirect Cost: ¥5,550,000); Fiscal Year 2008: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000); Fiscal Year 2007: ¥16,510,000 (Direct Cost: ¥12,700,000、Indirect Cost: ¥3,810,000); Fiscal Year 2006: ¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000)
• Keywords: 超臨界流体 / エリプソメトリー / 薄膜堆積 / スーパーミクロ細孔 / エリプソメトリ / 吸着 / 多孔質薄膜 / その場観測 / ナノ構造 / 自己整合 / ボトムアップ

Research Abstract

超臨界流体は気体と液体の中間の性質を有する高密度の溶媒である。超臨界流体中に有機金属錯体を溶解し反応により固体を析出させると細孔内へ原料が凝集して細孔内にのみ選択的に物質を充填でき, 微細プロセス限界を凌駕できると期待できる。本研究ではこの現象を理解するため, 超臨界流体中での吸着・凝集現象を観測する超臨界エリプソメトリーを構築した。実際に凝集の観測に成功するとともに, サブナノ細孔の評価にも適用した。また堆積の評価も行った。

Research Products

• [Journal Article] Kinetics of Deposition of Cu Thin Films in Supercritical Carbon Dioxide Solutions from a F-Free Copper(II) -Diketone Complex (2009)
  • Author(s): Masahiro Matsubara, Michiru Hirose, Kakeru Tamai, Yukihiro Shimogaki, and Eiichi Kondoh
  • Journal Title: J. Electrochem. Soc. 156, 6
  • Peer Reviewed
• [Journal Article] Topography-sensitive copper deposition in supercritical solutions (2009)
  • Author(s): Eiichi Kondoh, K. Nagano,C. Yamamoto, J. Yamanaka
  • Journal Title: Microelectronics Engineering 86 Pages: 902-905
  • Peer Reviewed
• [Journal Article] Conformal Deposition and Gap-Filling of Copper into Ultranarrow Patterns by Supercritical Fluid Deposition (2008)
  • Author(s): Takeshi Momose , Masakazu Sugiyama, EiichiKondoh, Yukihiro Shimogaki
  • Journal Title: Applied Physics Express 1
  • Peer Reviewed
• [Journal Article] Deposition of zinc oxide thin films in supercritical carbon dioxide solutions (2008)
  • Author(s): Eiichi Kondoh, Kenji Sasaki, Yoichi Nabetani
  • Journal Title: Applied Physics Express 1, 6
  • Peer Reviewed
• [Journal Article] Deposition Kinetics and Narrow-Gap-Filling in Cu Thin Film Growth from Supercritical Carbon Dioxide Fluids (2008)
  • Author(s): Eiichi Kondoh and Junpei Fukuda
  • Journal Title: Journal of Supercritical Fluids 44 Pages: 466-474
  • Peer Reviewed
• [Journal Article] Condensation and cleaning of a metalorganic copper compound to from porous low-dielectric constant thin films in su-percritical carbon dioxide (2008)
  • Author(s): E. Kondoh, E. Ukai, and S. Aruga
  • Journal Title: physica status solidi c, 5 Pages: 1219-1222
  • Peer Reviewed
• [Journal Article] Jasco report (2008)
  • Author(s): 近藤英一
  • Journal Title: 超臨界流体中薄膜エリプソメトリ Pages: 18-21
  • Peer Reviewed
• [Journal Article] Condensation and cleaning of an organometallic copper compound to/from porous low-dielectric constant thin films in super critical carbon dioxide (2008)
  • Author(s): E. Kondoh, E. Ukai, S. Aruga
  • Journal Title: Physica status solidi (c) 5 Pages: 1219-1222
  • Peer Reviewed
• [Journal Article] Conformal Deposition and Gap-Filling of Copper into Ultranarrow Patterns by Supercritical Fluid Deposition (2008)
  • Author(s): Takeshi Momose, Masakazu Sugiyama, Eiichi Kondoh, Yukihiro Shimogaki
  • Journal Title: Applied Physics Express 1
  • Peer Reviewed
• [Journal Article] Deposition of zinc Oxide Thin Films in Supercritical Carbon Dioxide Solutions (2008)
  • Author(s): Eiichi Kondoh, Kenji Sasaki, Yoichi Nabetani
  • Journal Title: Applied Physics Express 1
  • Peer Reviewed
• [Journal Article] Deposition Kinetics and Narrow-Gap-Filling in Cu Thin Film Growth from Supercritical Carbon Dioxide Fluids (2008)
  • Author(s): Eiichi Kondoh and Junpei Fukuda,
  • Journal Title: Journal of Supercritical Fluids, accepted for publication 44 Pages: 466-474
  • Peer Reviewed
• [Journal Article] ,Condensation and cleaning of a metalorganic copper compound to from porous low-dielectric constant thin films in su-percritical carbon dioxid (2008)
  • Author(s): Eiichi Kondoh, Shosaku Aruga, and Eiichi Ukai
  • Journal Title: physica status solidi c 5 Pages: 1219-1222
  • Peer Reviewed
• [Journal Article] Reduction of thin oxidized copper films using a hot-filament hydrogen radical source (2007)
  • Author(s): E. Kondoh, M. Fukasawa, and T. Ojimi
  • Journal Title: Journal of Vacuume Science and Technology 25 Pages: 415-420
  • Peer Reviewed
• [Journal Article] 超臨界流体を利用した薄膜形成技術とMEMS・NEMS 応用 (2007)
  • Author(s): 近藤英一
  • Journal Title: Material Stage Vol.7, No.5 Pages: 21-24
• [Journal Article] 表面技術協会,超臨界流体を利用した薄膜形成技術 (2006)
  • Author(s): 近藤英一
  • Journal Title: 表面技術 Vol.57, No.10 Pages: 695-700
• [Journal Article] 超臨界流体を利用した薄膜形成技術 (2006)
  • Author(s): 近藤英一
  • Journal Title: 表面技術 57 Pages: 695-695
  • NAID: 10020609638
• [Journal Article] A noise-free and jitterless cavity system to distribute clocks over 10GHz (2006)
  • Author(s): H.Kato, T.Kohori, E.Kondoh, T.Akitsu
  • Journal Title: IEEE Trasn. On Microwave Theory and Techniques 54 Pages: 3960-3960
• [Journal Article] Nanostructure formation using supercritical fluids (2006)
  • Author(s): Eiichi Kondoh, Michiru Hirose, Eiichi Ukai
  • Journal Title: Proceedings of the 8th Internatilanl Symposium on Supercritical Fluids
• [Journal Article] How to deliver a high-frequency clock over 100GHz using common BEOL technologies (2006)
  • Author(s): H.Kato, T.Kobori, K.Watanabe, Y.Kodaira, E.Kondoh, T.Akitsu, H.Kato
  • Journal Title: Proc. Adv. Metallization Conf. 2005 Pages: 165-165
• [Journal Article] Deposition of zinc oxide thin films in supercritical carbon dioxide solutions
  • Author(s): Eiichi Kondoh, Kenji Sasaki, and Yoichi Nabetani
  • Journal Title: Applied Physics Express (印刷中)
  • Peer Reviewed
• [Presentation] 超臨界流体中エリプソメトリを用いた多孔質膜細孔度評価の検討 (2009)
  • Author(s): 小高和也, 有賀庄作, 近藤英一
  • Organizer: 2009 年春季第56回応用物理学関係連合講演会
• [Presentation] 超臨界流体を利用した超ミクロ細孔の連結度評価 (2009)
  • Author(s): .近藤英一, 有賀庄作, 伊藤文則, 林喜弘
  • Organizer: 化学工学会第74年会
• [Presentation] 超臨界流体中有機金属還元法による金属薄膜堆積 (2009)
  • Author(s): 近藤英一
  • Organizer: (社)表面技術協会第119回講演大会
• [Presentation] 超臨界流体中エリプソメトリを用いた多孔質膜細孔度評価の検討 (2009)
  • Author(s): 小高和也, 有賀庄作, 近藤英一
  • Organizer: 2009年春季第56回応用物理学関係連合講演会
  • Place of Presentation: 筑波大学
• [Presentation] 超臨界流体を利用した超ミクロ細孔の連結度評価 (2009)
  • Author(s): 近藤英一, 有賀庄作, 伊藤文則, 林喜弘
  • Organizer: 化学工学会第74年会
  • Place of Presentation: 横浜国立大学
• [Presentation] 超臨界流体中有機金属還元法による金属薄膜堆積 (2009)
  • Author(s): 近藤英一
  • Organizer: 社団法人表面技術協会第119回講演大会
  • Place of Presentation: 山梨大学
• [Presentation] Siナノホールの作製と超臨界CO2によるCu埋め込み (2009)
  • Author(s): 玉井架, 松原正弘, 近藤英一, 李佳龍, 松村道雄
  • Organizer: 日本機械学会第15期総会講演会
  • Place of Presentation: 茨城大学
• [Presentation] 超臨界流体中エリプソメトリを用いた多孔質low-k膜の開孔性評価法の検討 (2009)
  • Author(s): 有賀庄作, 齋藤雄亮, 米山明里, 近藤英一
  • Organizer: 2008年秋季第69回応用物理学会学術講演会
  • Place of Presentation: 中部大学
• [Presentation] 超臨界流体を用いたCu薄膜堆積~成膜特性検討と貫通電極プロセスへの適用の試み (2008)
  • Author(s): 松原正弘, 近藤英一
  • Organizer: 電子材料研究会
  • Year and Date: 2008-05-19
• [Presentation] 超臨界流体を用いたCu薄膜堆積〜成膜特性検討と貫通電極プロセスへの適用の試み (2008)
  • Author(s): 松原正弘, 近藤英一
  • Organizer: 電気学会研究会 電子材料研究会
  • Place of Presentation: 社団法人電気学会
  • Year and Date: 2008-05-19
• [Presentation] A fast new approach for evaluating the connectivity of micropores(<2nm)and supermicropores(<0.5mn) in low-k thin films (2008)
  • Author(s): Eiichi Kondoh, Shosaku Aruga,Fuminori Ito and Yoshinori Hayashi
  • Organizer: Advanced Metallization Conference Asian Session 2008
  • Place of Presentation: The University of Tokyo
• [Presentation] Nanorod formation via topography-sensitive deposition in supercritical solutions (2008)
  • Author(s): Eiichi Kondoh, Michiru Hirose, Eiichi Ukai, Kodai Nagano, Junju Yamanaka, Chiaya Yamamoto
  • Organizer: MNE2008
  • Place of Presentation: Athens Hilton Hotel Greece
• [Presentation] Cu filmd eposition from super critical carbon dioxide fluids for 3D-IC THRU via formation (2008)
  • Author(s): Masahiro Matsubara, Eiichi Kondoh
  • Organizer: 11th European Meeting on Supercritical Fluids
  • Place of Presentation: Serhs Campus Hotel, Barcelona,Spain
• [Presentation] Si ナノホールの作製と超臨界CO_2によるCu 埋め込み, (2008)
  • Author(s): 玉井架, 松原正弘, 近藤英一, 李佳龍(阪大), 松村道雄
  • Organizer: 日本機械学会第15 期総会講演会
• [Presentation] 各種低密度薄膜の超臨界流体中でのその場エリプソメトリー観測 (2008)
  • Author(s): 有賀庄作, 斉藤雄亮, 米山明里, 小高和也, 玉井架, 近藤英一
  • Organizer: 化学工学会 第40 回秋季大会
• [Presentation] 超臨界流体を用いた各種細胞からの核酸のとりだし (2008)
  • Author(s): 近藤英一, 堀内愛, 御園生拓
  • Organizer: 化学工学会 第40回秋季大会
• [Presentation] 超臨界流体中エリプソメトリを用いた多孔質low-k 膜の開孔性評価法の検討 (2008)
  • Author(s): .有賀庄作, 齊藤雄亮, 米山明里, 近藤英一
  • Organizer: 2008 年秋季第69回応用物理学会学術講演会
• [Presentation] 超臨界CO2 堆積法を用いたMEMS 貫通電極ヴィア孔内のCu 薄膜形成(フロー方式第6 報) (2008)
  • Author(s): 近藤英一, 松原正弘
  • Organizer: 2008年春季第55回応用物理学関係連合講演会
• [Presentation] 多孔質Low-k 膜を超臨界二酸化炭素洗浄した際の共溶媒の挙動 (2008)
  • Author(s): 有賀庄作, 小高和也, 近藤英一
  • Organizer: 2008年春季第55回応用物理学関係連合講演会
• [Presentation] βジケトン錯体原料を用いたフロー式Cu 薄膜堆積の堆積特性 (2008)
  • Author(s): 松原正弘, 近藤英一
  • Organizer: 化学工学会第73 年会
• [Presentation] In-situ 偏光解析法による超臨界流体中での有機金属浸透のモニタリング (2008)
  • Author(s): 近藤英一, 有賀庄作, 鵜飼栄一
  • Organizer: 化学工学会第73 年会
• [Presentation] 超臨界CO2 流体を利用したDNA 抽出の試み (2008)
  • Author(s): .近藤英一, 堀内愛, 御園生拓
  • Organizer: 化学工学会第73年会
• [Presentation] フロー超臨界薄膜装置による薄膜の堆積特性と長時間成膜への適用 (2008)
  • Author(s): 近藤英一, 松原正弘
  • Organizer: 日本機械学会第14期総会講演会
• [Presentation] A Fast New Approach for Evaluating the Connectivity of Micropores (<2 nm) and Supermicropores (<0.5 nm) in Low-k Thin Films (2008)
  • Author(s): E. Kondoh, S. Aruga, F. Ito, Y. Hayashi
  • Organizer: Advanced Metallization Conference 2008 18th Asian Session
  • Place of Presentation: The Univ. of Tokyo
• [Presentation] 各種低密度薄膜の超臨界流体中でのその場エリプソメトリー観測 (2008)
  • Author(s): 有賀庄作, 斉藤雄亮, 米山明里, 小高和也, 玉井架, 近藤英一
  • Organizer: 化学工学会第40回秋季大会
  • Place of Presentation: 東北大学
• [Presentation] フロー方式のCu薄膜堆積の成膜特性と三次元貫通電極作成の試み (2008)
  • Author(s): 松原正弘, 深澤直樹, 米山明里
  • Organizer: 化学工学会第40回秋季大会
  • Place of Presentation: 東北大学
• [Presentation] Nanorod formation via topography-sensitive deposition in supercritical solutions (2008)
  • Author(s): E. Kondoh, M. Hirose, E. Ukai, K. Nagano, J. Yamanaka, C. Yamamoto
  • Organizer: MNE2008 34th International Conference
  • Place of Presentation: Athens Hilton Hotel Greece
• [Presentation] Cu film deposition from super critical carbon dioxide fluids for 3D-IC THRU via formation (2008)
  • Author(s): M, Matsubara, E, Kondoh
  • Organizer: 11th European Meeting on Supercritical Fluids
  • Place of Presentation: Serhs Campus Hotel Barcelona, Spain
• [Presentation] 超臨界二酸化炭素中その場偏光解析法の開発~多孔質low-k 膜の洗浄過程の解析 (2007)
  • Author(s): 近藤英一, 有賀庄作
  • Organizer: 第1回偏光計測研究会
  • Year and Date: 2007-11-16
• [Presentation] Metalization using supercritical fluids for post-scalability ULSI processing,8th Seminar Porous Glasses-Special Glasses; (2007)
  • Author(s): E. Kondoh
  • Organizer: Porous Glass Technology for Detection of Chemical Agents
  • Place of Presentation: in Wroclaw/Szklarska Poreba, Poland from the 4
  • Year and Date: 2007-09-08
• [Presentation] 超臨界流体の配線技術への応用 (2007)
  • Author(s): 近藤英一, 廣瀬みちる
  • Organizer: 日本機械学会関東支部2007年総会・講演会
  • Year and Date: 2007-03-16
• [Presentation] Deposition of Oxide Thin Films in Supercritical Carbon Dioxide Fluids (2007)
  • Author(s): E. Kondoh
  • Organizer: the Sixth Pacific Rim International Conference on Advanced Materials and Processing
  • Place of Presentation: ICC Cheju
• [Presentation] Bottom-up interconnect formation possibility using supercritical fluids: beyond scalability (2007)
  • Author(s): E. Kondoh
  • Organizer: The International Conference "Micro-and nanoelectronics-2007"(ICMNE-2007) and co-located Symosium"Quantum Informatics-2007"(QI-2007) will be held at the holiday hotel "Lipki"
  • Place of Presentation: Zvenigorod, Moscow region
• [Presentation] In-situ ellipsometric study on the condensation and cleanign of a metalorganic copper compond to/from porous low-k thin films in supercritical carbon dioxide (2007)
  • Author(s): E. Kondoh
  • Organizer: 12th International Symposium on Chemical-Mechanical Plarnization
  • Place of Presentation: Lake Placid, NY, USA
• [Presentation] Condensation and cleaning of an orgnometallic copper com-pound to/from porous low-dielectric constant thin films in su-percritical carbon dioxide (2007)
  • Author(s): E. Kondoh, E. Ukai, and S. Aruga
  • Organizer: The 4th International Conference on Spectroscopic Ellipsometry (ICSE4)
  • Place of Presentation: Stockholm, Sweden
• [Presentation] Novel "Topography-sensitive" Bottom-up mode for Filling Nano-features Using Superciritical Fluids as a Deposition Medium (2007)
  • Author(s): E.Kondoh and M. Hirose
  • Organizer: MRS 2007 Spring Meeting Symposium D: Deposition on Nonplanar Substrates
  • Place of Presentation: San Francisco
• [Presentation] 超臨界二酸化炭素中その場偏光解析法の開発(2)~多孔質low-k 膜の洗浄過程の解析 (2007)
  • Author(s): 有賀庄作, 鵜飼栄一, 近藤英一
  • Organizer: 2007年秋季第68回応用物理学会学術講演会
• [Presentation] フロー堆積システムによるCu薄膜堆積 (2007)
  • Author(s): 近藤英一, 廣瀬みちる, 福田順平, 松原正弘
  • Organizer: 化学工学会第39回秋季大会
• [Presentation] 機能性高密度流体プロセッシング (2007)
  • Author(s): 近藤英一
  • Organizer: 2007年秋季第68回応用物理学会学術講演会講演
• [Presentation] 超臨界流体中薄膜堆積法における「形状敏感」堆積モード : Beyond Scalability (2007)
  • Author(s): 近藤英一, 廣瀬みちる, 鵜飼栄一, 有賀庄作, 長能広大
  • Organizer: 2007年春季第54回応用物理学関係連合講演会
• [Presentation] Bottom-up interconnect formation possibility using supercritical fluids: beyond scalability(invited) (2007)
  • Author(s): E. Kondoh
  • Organizer: The International Conference "Micro-and nanoelectronics-2007"(ICMNE-2007)
  • Place of Presentation: hotel "Lipki", Zvenigorod, Moscow region
• [Presentation] 超臨界流体を利用した薄膜形成技術 (2006)
  • Author(s): 近藤英一
  • Organizer: 産業技術総合研究所new-SIC研究会第3回研究会
  • Year and Date: 2006-09-20
• [Presentation] Kinetics and Narrow-Gap Filling in Cu Thin Film Deposition from Supercritical Carbon Dioxide Fluids-Precise and Reliable Experiments using a Flow-Type Deposition Processor (2006)
  • Author(s): E. Kondoh, M. Hirose and J. Fukuda
  • Organizer: Advanced Metallization Conference 2006: 16th Asian Session, Sept
  • Place of Presentation: The University of Tokyo
• [Presentation] Nanostructure formation using supercritical fluids (2006)
  • Author(s): E.kondoh
  • Organizer: 32nd International Conference on Micro- and Nano- Engineering (MNE06)
  • Place of Presentation: Barcelona WTC, Spain
• [Presentation] フロー方式超臨界薄膜堆積装置の開発とCu成膜特性(フロー方式第5報)-全流体型システムの構築 (2006)
  • Author(s): 廣瀬みちる, 小林直, 近藤英一
  • Organizer: 2006年第67回応用物理学会学術講演会
• [Presentation] 超臨界流体をもちいたZnO 薄膜の堆積 (2006)
  • Author(s): 近藤英一, 佐々木健二
  • Organizer: 2006 年第67 回応用物理学会学術講演会
  • Place of Presentation: 立命館大学びわこくさつキャンパス
• [Book] 超臨界流体技術の開発と応用 (2008)
  • Author(s): 近藤英一
  • Publisher: CMC出版
• [Book] 薄膜ハンドブック (2008)
  • Author(s): 近藤英一
  • Publisher: オーム社
• [Book] 最近の化学工学58超臨界流体技術の実用化最前線 (2007)
  • Author(s): 近藤英一
  • Publisher: 化学工業社