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Development of topography-sensitive nano device processing aided by in-situ ellipsometry in supercritical fluids

Research Project

Project/Area Number 18206031
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionUniversity of Yamanashi

Principal Investigator

KONDOH Eiichi  University of Yamanashi, 大学院・医学工学総合研究部, 教授 (70304871)

Project Period (FY) 2006 – 2008
Project Status Completed (Fiscal Year 2008)
Budget Amount *help
¥24,050,000 (Direct Cost: ¥18,500,000、Indirect Cost: ¥5,550,000)
Fiscal Year 2008: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2007: ¥16,510,000 (Direct Cost: ¥12,700,000、Indirect Cost: ¥3,810,000)
Fiscal Year 2006: ¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000)
Keywords超臨界流体 / エリプソメトリー / 薄膜堆積 / スーパーミクロ細孔 / エリプソメトリ / 吸着 / 多孔質薄膜 / その場観測 / ナノ構造 / 自己整合 / ボトムアップ
Research Abstract

超臨界流体は気体と液体の中間の性質を有する高密度の溶媒である。超臨界流体中に有機金属錯体を溶解し反応により固体を析出させると細孔内へ原料が凝集して細孔内にのみ選択的に物質を充填でき, 微細プロセス限界を凌駕できると期待できる。本研究ではこの現象を理解するため, 超臨界流体中での吸着・凝集現象を観測する超臨界エリプソメトリーを構築した。実際に凝集の観測に成功するとともに, サブナノ細孔の評価にも適用した。また堆積の評価も行った。

Report

(4 results)
  • 2008 Annual Research Report   Final Research Report ( PDF )
  • 2007 Annual Research Report
  • 2006 Annual Research Report
  • Research Products

    (69 results)

All 2009 2008 2007 2006 Other

All Journal Article (20 results) (of which Peer Reviewed: 14 results) Presentation (46 results) Book (3 results)

  • [Journal Article] Kinetics of Deposition of Cu Thin Films in Supercritical Carbon Dioxide Solutions from a F-Free Copper(II) -Diketone Complex2009

    • Author(s)
      Masahiro Matsubara, Michiru Hirose, Kakeru Tamai, Yukihiro Shimogaki, and Eiichi Kondoh
    • Journal Title

      J. Electrochem. Soc. 156, 6

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Topography-sensitive copper deposition in supercritical solutions2009

    • Author(s)
      Eiichi Kondoh, K. Nagano,C. Yamamoto, J. Yamanaka
    • Journal Title

      Microelectronics Engineering 86

      Pages: 902-905

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Conformal Deposition and Gap-Filling of Copper into Ultranarrow Patterns by Supercritical Fluid Deposition2008

    • Author(s)
      Takeshi Momose , Masakazu Sugiyama, EiichiKondoh, Yukihiro Shimogaki
    • Journal Title

      Applied Physics Express 1

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Deposition of zinc oxide thin films in supercritical carbon dioxide solutions2008

    • Author(s)
      Eiichi Kondoh, Kenji Sasaki, Yoichi Nabetani
    • Journal Title

      Applied Physics Express 1, 6

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Deposition Kinetics and Narrow-Gap-Filling in Cu Thin Film Growth from Supercritical Carbon Dioxide Fluids2008

    • Author(s)
      Eiichi Kondoh and Junpei Fukuda
    • Journal Title

      Journal of Supercritical Fluids 44

      Pages: 466-474

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Condensation and cleaning of a metalorganic copper compound to from porous low-dielectric constant thin films in su-percritical carbon dioxide2008

    • Author(s)
      E. Kondoh, E. Ukai, and S. Aruga
    • Journal Title

      physica status solidi c, 5

      Pages: 1219-1222

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Jasco report2008

    • Author(s)
      近藤英一
    • Journal Title

      超臨界流体中薄膜エリプソメトリ

      Pages: 18-21

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Condensation and cleaning of an organometallic copper compound to/from porous low-dielectric constant thin films in super critical carbon dioxide2008

    • Author(s)
      E. Kondoh, E. Ukai, S. Aruga
    • Journal Title

      Physica status solidi (c) 5

      Pages: 1219-1222

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Conformal Deposition and Gap-Filling of Copper into Ultranarrow Patterns by Supercritical Fluid Deposition2008

    • Author(s)
      Takeshi Momose, Masakazu Sugiyama, Eiichi Kondoh, Yukihiro Shimogaki
    • Journal Title

      Applied Physics Express 1

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Deposition of zinc Oxide Thin Films in Supercritical Carbon Dioxide Solutions2008

    • Author(s)
      Eiichi Kondoh, Kenji Sasaki, Yoichi Nabetani
    • Journal Title

      Applied Physics Express 1

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Deposition Kinetics and Narrow-Gap-Filling in Cu Thin Film Growth from Supercritical Carbon Dioxide Fluids2008

    • Author(s)
      Eiichi Kondoh and Junpei Fukuda,
    • Journal Title

      Journal of Supercritical Fluids, accepted for publication 44

      Pages: 466-474

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] ,Condensation and cleaning of a metalorganic copper compound to from porous low-dielectric constant thin films in su-percritical carbon dioxid2008

    • Author(s)
      Eiichi Kondoh, Shosaku Aruga, and Eiichi Ukai
    • Journal Title

      physica status solidi c 5

      Pages: 1219-1222

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Reduction of thin oxidized copper films using a hot-filament hydrogen radical source2007

    • Author(s)
      E. Kondoh, M. Fukasawa, and T. Ojimi
    • Journal Title

      Journal of Vacuume Science and Technology 25

      Pages: 415-420

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] 超臨界流体を利用した薄膜形成技術とMEMS・NEMS 応用2007

    • Author(s)
      近藤英一
    • Journal Title

      Material Stage Vol.7, No.5

      Pages: 21-24

    • Related Report
      2008 Final Research Report
  • [Journal Article] 表面技術協会,超臨界流体を利用した薄膜形成技術2006

    • Author(s)
      近藤英一
    • Journal Title

      表面技術 Vol.57, No.10

      Pages: 695-700

    • Related Report
      2008 Final Research Report
  • [Journal Article] 超臨界流体を利用した薄膜形成技術2006

    • Author(s)
      近藤英一
    • Journal Title

      表面技術 57

      Pages: 695-695

    • NAID

      10020609638

    • Related Report
      2006 Annual Research Report
  • [Journal Article] A noise-free and jitterless cavity system to distribute clocks over 10GHz2006

    • Author(s)
      H.Kato, T.Kohori, E.Kondoh, T.Akitsu
    • Journal Title

      IEEE Trasn. On Microwave Theory and Techniques 54

      Pages: 3960-3960

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Nanostructure formation using supercritical fluids2006

    • Author(s)
      Eiichi Kondoh, Michiru Hirose, Eiichi Ukai
    • Journal Title

      Proceedings of the 8th Internatilanl Symposium on Supercritical Fluids

    • Related Report
      2006 Annual Research Report
  • [Journal Article] How to deliver a high-frequency clock over 100GHz using common BEOL technologies2006

    • Author(s)
      H.Kato, T.Kobori, K.Watanabe, Y.Kodaira, E.Kondoh, T.Akitsu, H.Kato
    • Journal Title

      Proc. Adv. Metallization Conf. 2005

      Pages: 165-165

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Deposition of zinc oxide thin films in supercritical carbon dioxide solutions

    • Author(s)
      Eiichi Kondoh, Kenji Sasaki, and Yoichi Nabetani
    • Journal Title

      Applied Physics Express (印刷中)

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Presentation] 超臨界流体中エリプソメトリを用いた多孔質膜細孔度評価の検討2009

    • Author(s)
      小高和也, 有賀庄作, 近藤英一
    • Organizer
      2009 年春季第56回応用物理学関係連合講演会
    • Related Report
      2008 Final Research Report
  • [Presentation] 超臨界流体を利用した超ミクロ細孔の連結度評価2009

    • Author(s)
      .近藤英一, 有賀庄作, 伊藤文則, 林喜弘
    • Organizer
      化学工学会第74年会
    • Related Report
      2008 Final Research Report
  • [Presentation] 超臨界流体中有機金属還元法による金属薄膜堆積2009

    • Author(s)
      近藤英一
    • Organizer
      (社)表面技術協会第119回講演大会
    • Related Report
      2008 Final Research Report
  • [Presentation] 超臨界流体中エリプソメトリを用いた多孔質膜細孔度評価の検討2009

    • Author(s)
      小高和也, 有賀庄作, 近藤英一
    • Organizer
      2009年春季第56回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学
    • Related Report
      2008 Annual Research Report
  • [Presentation] 超臨界流体を利用した超ミクロ細孔の連結度評価2009

    • Author(s)
      近藤英一, 有賀庄作, 伊藤文則, 林喜弘
    • Organizer
      化学工学会第74年会
    • Place of Presentation
      横浜国立大学
    • Related Report
      2008 Annual Research Report
  • [Presentation] 超臨界流体中有機金属還元法による金属薄膜堆積2009

    • Author(s)
      近藤英一
    • Organizer
      社団法人表面技術協会第119回講演大会
    • Place of Presentation
      山梨大学
    • Related Report
      2008 Annual Research Report
  • [Presentation] Siナノホールの作製と超臨界CO2によるCu埋め込み2009

    • Author(s)
      玉井架, 松原正弘, 近藤英一, 李佳龍, 松村道雄
    • Organizer
      日本機械学会第15期総会講演会
    • Place of Presentation
      茨城大学
    • Related Report
      2008 Annual Research Report
  • [Presentation] 超臨界流体中エリプソメトリを用いた多孔質low-k膜の開孔性評価法の検討2009

    • Author(s)
      有賀庄作, 齋藤雄亮, 米山明里, 近藤英一
    • Organizer
      2008年秋季第69回応用物理学会学術講演会
    • Place of Presentation
      中部大学
    • Related Report
      2008 Annual Research Report
  • [Presentation] 超臨界流体を用いたCu薄膜堆積~成膜特性検討と貫通電極プロセスへの適用の試み2008

    • Author(s)
      松原正弘, 近藤英一
    • Organizer
      電子材料研究会
    • Year and Date
      2008-05-19
    • Related Report
      2008 Final Research Report
  • [Presentation] 超臨界流体を用いたCu薄膜堆積〜成膜特性検討と貫通電極プロセスへの適用の試み2008

    • Author(s)
      松原正弘, 近藤英一
    • Organizer
      電気学会研究会 電子材料研究会
    • Place of Presentation
      社団法人電気学会
    • Year and Date
      2008-05-19
    • Related Report
      2008 Annual Research Report
  • [Presentation] A fast new approach for evaluating the connectivity of micropores(<2nm)and supermicropores(<0.5mn) in low-k thin films2008

    • Author(s)
      Eiichi Kondoh, Shosaku Aruga,Fuminori Ito and Yoshinori Hayashi
    • Organizer
      Advanced Metallization Conference Asian Session 2008
    • Place of Presentation
      The University of Tokyo
    • Related Report
      2008 Final Research Report
  • [Presentation] Nanorod formation via topography-sensitive deposition in supercritical solutions2008

    • Author(s)
      Eiichi Kondoh, Michiru Hirose, Eiichi Ukai, Kodai Nagano, Junju Yamanaka, Chiaya Yamamoto
    • Organizer
      MNE2008
    • Place of Presentation
      Athens Hilton Hotel Greece
    • Related Report
      2008 Final Research Report
  • [Presentation] Cu filmd eposition from super critical carbon dioxide fluids for 3D-IC THRU via formation2008

    • Author(s)
      Masahiro Matsubara, Eiichi Kondoh
    • Organizer
      11th European Meeting on Supercritical Fluids
    • Place of Presentation
      Serhs Campus Hotel, Barcelona,Spain
    • Related Report
      2008 Final Research Report
  • [Presentation] Si ナノホールの作製と超臨界CO_2によるCu 埋め込み,2008

    • Author(s)
      玉井架, 松原正弘, 近藤英一, 李佳龍(阪大), 松村道雄
    • Organizer
      日本機械学会第15 期総会講演会
    • Related Report
      2008 Final Research Report
  • [Presentation] 各種低密度薄膜の超臨界流体中でのその場エリプソメトリー観測2008

    • Author(s)
      有賀庄作, 斉藤雄亮, 米山明里, 小高和也, 玉井架, 近藤英一
    • Organizer
      化学工学会 第40 回秋季大会
    • Related Report
      2008 Final Research Report
  • [Presentation] 超臨界流体を用いた各種細胞からの核酸のとりだし2008

    • Author(s)
      近藤英一, 堀内愛, 御園生拓
    • Organizer
      化学工学会 第40回秋季大会
    • Related Report
      2008 Final Research Report
  • [Presentation] 超臨界流体中エリプソメトリを用いた多孔質low-k 膜の開孔性評価法の検討2008

    • Author(s)
      .有賀庄作, 齊藤雄亮, 米山明里, 近藤英一
    • Organizer
      2008 年秋季第69回応用物理学会学術講演会
    • Related Report
      2008 Final Research Report
  • [Presentation] 超臨界CO2 堆積法を用いたMEMS 貫通電極ヴィア孔内のCu 薄膜形成(フロー方式第6 報)2008

    • Author(s)
      近藤英一, 松原正弘
    • Organizer
      2008年春季第55回応用物理学関係連合講演会
    • Related Report
      2008 Final Research Report
  • [Presentation] 多孔質Low-k 膜を超臨界二酸化炭素洗浄した際の共溶媒の挙動2008

    • Author(s)
      有賀庄作, 小高和也, 近藤英一
    • Organizer
      2008年春季第55回応用物理学関係連合講演会
    • Related Report
      2008 Final Research Report
  • [Presentation] βジケトン錯体原料を用いたフロー式Cu 薄膜堆積の堆積特性2008

    • Author(s)
      松原正弘, 近藤英一
    • Organizer
      化学工学会第73 年会
    • Related Report
      2008 Final Research Report
  • [Presentation] In-situ 偏光解析法による超臨界流体中での有機金属浸透のモニタリング2008

    • Author(s)
      近藤英一, 有賀庄作, 鵜飼栄一
    • Organizer
      化学工学会第73 年会
    • Related Report
      2008 Final Research Report
  • [Presentation] 超臨界CO2 流体を利用したDNA 抽出の試み2008

    • Author(s)
      .近藤英一, 堀内愛, 御園生拓
    • Organizer
      化学工学会第73年会
    • Related Report
      2008 Final Research Report
  • [Presentation] フロー超臨界薄膜装置による薄膜の堆積特性と長時間成膜への適用2008

    • Author(s)
      近藤英一, 松原正弘
    • Organizer
      日本機械学会第14期総会講演会
    • Related Report
      2008 Final Research Report
  • [Presentation] A Fast New Approach for Evaluating the Connectivity of Micropores (<2 nm) and Supermicropores (<0.5 nm) in Low-k Thin Films2008

    • Author(s)
      E. Kondoh, S. Aruga, F. Ito, Y. Hayashi
    • Organizer
      Advanced Metallization Conference 2008 18th Asian Session
    • Place of Presentation
      The Univ. of Tokyo
    • Related Report
      2008 Annual Research Report
  • [Presentation] 各種低密度薄膜の超臨界流体中でのその場エリプソメトリー観測2008

    • Author(s)
      有賀庄作, 斉藤雄亮, 米山明里, 小高和也, 玉井架, 近藤英一
    • Organizer
      化学工学会第40回秋季大会
    • Place of Presentation
      東北大学
    • Related Report
      2008 Annual Research Report
  • [Presentation] フロー方式のCu薄膜堆積の成膜特性と三次元貫通電極作成の試み2008

    • Author(s)
      松原正弘, 深澤直樹, 米山明里
    • Organizer
      化学工学会第40回秋季大会
    • Place of Presentation
      東北大学
    • Related Report
      2008 Annual Research Report
  • [Presentation] Nanorod formation via topography-sensitive deposition in supercritical solutions2008

    • Author(s)
      E. Kondoh, M. Hirose, E. Ukai, K. Nagano, J. Yamanaka, C. Yamamoto
    • Organizer
      MNE2008 34th International Conference
    • Place of Presentation
      Athens Hilton Hotel Greece
    • Related Report
      2008 Annual Research Report
  • [Presentation] Cu film deposition from super critical carbon dioxide fluids for 3D-IC THRU via formation2008

    • Author(s)
      M, Matsubara, E, Kondoh
    • Organizer
      11th European Meeting on Supercritical Fluids
    • Place of Presentation
      Serhs Campus Hotel Barcelona, Spain
    • Related Report
      2008 Annual Research Report
  • [Presentation] 超臨界二酸化炭素中その場偏光解析法の開発~多孔質low-k 膜の洗浄過程の解析2007

    • Author(s)
      近藤英一, 有賀庄作
    • Organizer
      第1回偏光計測研究会
    • Year and Date
      2007-11-16
    • Related Report
      2008 Final Research Report
  • [Presentation] Metalization using supercritical fluids for post-scalability ULSI processing,8th Seminar Porous Glasses-Special Glasses;2007

    • Author(s)
      E. Kondoh
    • Organizer
      Porous Glass Technology for Detection of Chemical Agents
    • Place of Presentation
      in Wroclaw/Szklarska Poreba, Poland from the 4
    • Year and Date
      2007-09-08
    • Related Report
      2008 Final Research Report
  • [Presentation] 超臨界流体の配線技術への応用2007

    • Author(s)
      近藤英一, 廣瀬みちる
    • Organizer
      日本機械学会関東支部2007年総会・講演会
    • Year and Date
      2007-03-16
    • Related Report
      2008 Final Research Report
  • [Presentation] Deposition of Oxide Thin Films in Supercritical Carbon Dioxide Fluids2007

    • Author(s)
      E. Kondoh
    • Organizer
      the Sixth Pacific Rim International Conference on Advanced Materials and Processing
    • Place of Presentation
      ICC Cheju
    • Related Report
      2008 Final Research Report
  • [Presentation] Bottom-up interconnect formation possibility using supercritical fluids: beyond scalability2007

    • Author(s)
      E. Kondoh
    • Organizer
      The International Conference "Micro-and nanoelectronics-2007"(ICMNE-2007) and co-located Symosium"Quantum Informatics-2007"(QI-2007) will be held at the holiday hotel "Lipki"
    • Place of Presentation
      Zvenigorod, Moscow region
    • Related Report
      2008 Final Research Report
  • [Presentation] In-situ ellipsometric study on the condensation and cleanign of a metalorganic copper compond to/from porous low-k thin films in supercritical carbon dioxide2007

    • Author(s)
      E. Kondoh
    • Organizer
      12th International Symposium on Chemical-Mechanical Plarnization
    • Place of Presentation
      Lake Placid, NY, USA
    • Related Report
      2008 Final Research Report
  • [Presentation] Condensation and cleaning of an orgnometallic copper com-pound to/from porous low-dielectric constant thin films in su-percritical carbon dioxide2007

    • Author(s)
      E. Kondoh, E. Ukai, and S. Aruga
    • Organizer
      The 4th International Conference on Spectroscopic Ellipsometry (ICSE4)
    • Place of Presentation
      Stockholm, Sweden
    • Related Report
      2008 Final Research Report
  • [Presentation] Novel "Topography-sensitive" Bottom-up mode for Filling Nano-features Using Superciritical Fluids as a Deposition Medium2007

    • Author(s)
      E.Kondoh and M. Hirose
    • Organizer
      MRS 2007 Spring Meeting Symposium D: Deposition on Nonplanar Substrates
    • Place of Presentation
      San Francisco
    • Related Report
      2008 Final Research Report
  • [Presentation] 超臨界二酸化炭素中その場偏光解析法の開発(2)~多孔質low-k 膜の洗浄過程の解析2007

    • Author(s)
      有賀庄作, 鵜飼栄一, 近藤英一
    • Organizer
      2007年秋季第68回応用物理学会学術講演会
    • Related Report
      2008 Final Research Report
  • [Presentation] フロー堆積システムによるCu薄膜堆積2007

    • Author(s)
      近藤英一, 廣瀬みちる, 福田順平, 松原正弘
    • Organizer
      化学工学会第39回秋季大会
    • Related Report
      2008 Final Research Report
  • [Presentation] 機能性高密度流体プロセッシング2007

    • Author(s)
      近藤英一
    • Organizer
      2007年秋季第68回応用物理学会学術講演会講演
    • Related Report
      2008 Final Research Report
  • [Presentation] 超臨界流体中薄膜堆積法における「形状敏感」堆積モード : Beyond Scalability2007

    • Author(s)
      近藤英一, 廣瀬みちる, 鵜飼栄一, 有賀庄作, 長能広大
    • Organizer
      2007年春季第54回応用物理学関係連合講演会
    • Related Report
      2008 Final Research Report
  • [Presentation] Bottom-up interconnect formation possibility using supercritical fluids: beyond scalability(invited)2007

    • Author(s)
      E. Kondoh
    • Organizer
      The International Conference "Micro-and nanoelectronics-2007"(ICMNE-2007)
    • Place of Presentation
      hotel "Lipki", Zvenigorod, Moscow region
    • Related Report
      2007 Annual Research Report
  • [Presentation] 超臨界流体を利用した薄膜形成技術2006

    • Author(s)
      近藤英一
    • Organizer
      産業技術総合研究所new-SIC研究会第3回研究会
    • Year and Date
      2006-09-20
    • Related Report
      2008 Final Research Report
  • [Presentation] Kinetics and Narrow-Gap Filling in Cu Thin Film Deposition from Supercritical Carbon Dioxide Fluids-Precise and Reliable Experiments using a Flow-Type Deposition Processor2006

    • Author(s)
      E. Kondoh, M. Hirose and J. Fukuda
    • Organizer
      Advanced Metallization Conference 2006: 16th Asian Session, Sept
    • Place of Presentation
      The University of Tokyo
    • Related Report
      2008 Final Research Report
  • [Presentation] Nanostructure formation using supercritical fluids2006

    • Author(s)
      E.kondoh
    • Organizer
      32nd International Conference on Micro- and Nano- Engineering (MNE06)
    • Place of Presentation
      Barcelona WTC, Spain
    • Related Report
      2008 Final Research Report
  • [Presentation] フロー方式超臨界薄膜堆積装置の開発とCu成膜特性(フロー方式第5報)-全流体型システムの構築2006

    • Author(s)
      廣瀬みちる, 小林直, 近藤英一
    • Organizer
      2006年第67回応用物理学会学術講演会
    • Related Report
      2008 Final Research Report
  • [Presentation] 超臨界流体をもちいたZnO 薄膜の堆積2006

    • Author(s)
      近藤英一, 佐々木健二
    • Organizer
      2006 年第67 回応用物理学会学術講演会
    • Place of Presentation
      立命館大学びわこくさつキャンパス
    • Related Report
      2008 Final Research Report
  • [Book] 超臨界流体技術の開発と応用2008

    • Author(s)
      近藤英一
    • Publisher
      CMC出版
    • Related Report
      2008 Final Research Report
  • [Book] 薄膜ハンドブック2008

    • Author(s)
      近藤英一
    • Publisher
      オーム社
    • Related Report
      2008 Final Research Report
  • [Book] 最近の化学工学58超臨界流体技術の実用化最前線2007

    • Author(s)
      近藤英一
    • Publisher
      化学工業社
    • Related Report
      2008 Final Research Report

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Published: 2006-04-01   Modified: 2016-04-21  

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