Research Project
Grant-in-Aid for Scientific Research (A)
Photonic, electronic, and acoustic properties of quantum-sized silicon have been studied for their characterizations and device applications toward the functional integration. The results and significances are summarized as follows.(1) Development of photonic devices based on enhanced luminescence- It was confirmed by combination of anneal with surface passivation that both the efficiency and the stability were much improved, and then the evidence of energy transfer in nanosilicon was clearly detected by analyses of photoexcitation-relaxation process.- Process technologies for stable blue luminescence, optical cavity, photoconduction, nanowire, and 3-dimensional periodic nanostructure were developed as components of silicon photonics.(2) Applications of ballistic electron emitter- The usefulness of nanosilicon ballistic electron emitter as means of negative ion source and hydrogen gas generation was shown by operation in air and in pure water, respectively.- The applicability in vacuum was also demonstrated by the use as planar cold cathode for parallel electron-beam lithography and ultra-high-sensitivity image sensing.(3) Improved ultrasonic emission and device applications- The appropriate design and driving techniques compatible with efficient and stable ultrasonic emission from nanosilicon device were developed on a basis of systematic analyses.- Due to the flat frequency response, the nanosilicon emitter was successfully applied to sound source for studies on bio-acoustic communication and digital information transmission.(4) Implementation of functional integration- The device concept and process flow were given for monolithic integration of photonic, electronic, and acoustic functions into silicon substrate.- Actuality of this approach was demonstrated by prototyping two devices : sound-emissive electroluminescent diode and surface-emitting device with ballistic excitation mechanism.
All 2009 2008 2007 2006 Other
All Journal Article (83 results) (of which Peer Reviewed: 39 results) Presentation (72 results) Book (13 results) Remarks (2 results) Patent(Industrial Property Rights) (7 results)
J. Vac. Sci. Technol. B 26
Pages: 716-719
Pages: 711-715
Jpn. J. Appl. Phys. 47
Pages: 2902-2905
10022548317
Pages: 3123-3126
10022551893
Pages: 3095-3098
10022551826
燃料電池 7
Pages: 88-92
40015853214
J. Vac. Sci. Technol B 26
J. Vac. Sci. Technol B. 26
Jpn. J. Appl. Phys 47
The J. Fuel Cell Technol 7
Appl. Phys. Lett. 91
Appl. Phys. Lett. 90
Brain Research 1163
Pages: 91-99
J. Vac. Sci. Technol. B 25
Pages: 661-666
Pages: 524-527
Jpn. J. Appl. Phys. 46
Pages: 3462-3465
physica status solidi(a) 204
Pages: 2141-2144
Pages: 1302-1306
映像情報メディア学会誌 61
Pages: 387-392
110006854561
Pages: 6218-6221
Pages: 3645-3647
10022546529
Pages: 633-637
Proc. Int. Display Workshop IDW07
Pages: 2165-2168
Pages: 3479-3481
10022546290
Mater. Res. Soc. Symp. Proc. 958
Appl. Phys. Lett 91
Jpn. J. Appl. Phys 46
Appl. Phys. Lett 90
Pages: 163505-7
J. Inst. Image and TV Eng 61
J. Vac. Sci. Technol B 25
physica status solidi (a) Vol. 204
Mater. Res. Soc. Symp. Proc. Vol. 958, L08
Pages: 2-7
Mater. Res. Soc. Symp. Proc. Vol. 958, L05
Pages: 10-15
Proc. Int. Display Workshop
Landolt-bornstein - New Series Vol. III-34
Pages: 121-136
physica status solidi (a) 204
Mater. Res. Symp. Proc. 958
Jpn. J. Appl. Phys. 45
Pages: 7240-7242
Sensors and Actuators A: Physical 125
Pages: 422-428
Thin Solid Films 508
Pages: 406-409
J. Vac. Sci. Technol. B 24
Pages: 1021-1025
Appl. Phys. Lett. 89
Pages: 191103-5
Appl. Phys. Lett. 88
Pages: 43902-4
Pages: 93509-11
10022541088
Pages: 3642-3644
10022542101
10022541895
Appl. Phys. Lett 89
Appl. Phys. Lett 88
Jpn. J. Appl. Phys 45
Sensors and Actuators A : Physical Vol. 125
Sensors and Actuators A : Physical 125
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