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Development of GHz ultrafast phonon resonance spectroscopy system and study on the interface stiffness of multilayer thin films

Research Project

Project/Area Number 18310077
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Nanomaterials/Nanobioscience
Research InstitutionOsaka University

Principal Investigator

OGI Hirotsugu  Osaka University, 大学院・基礎工学研究科, 准教授 (90252626)

Co-Investigator(Kenkyū-buntansha) HIRAO Masahiko  大阪大学, 大学院・基礎工学研究科, 教授 (80112027)
NAKAMURA Nobutomo  大阪大学, 大学院・基礎工学研究科, 助教 (50452404)
KUSAKABE Kouichi  大阪大学, 大学院・基礎工学研究科, 准教授 (10262164)
TARUMI Ryuichi  大阪大学, 大学院・工学研究科, 准教授 (30362643)
小野 輝男  京都大学, 化学研究所, 教授 (90296749)
Co-Investigator(Renkei-kenkyūsha) ONO Teruo  京都大学, 化学研究所, 教授 (90296749)
Project Period (FY) 2006 – 2008
Project Status Completed (Fiscal Year 2008)
Budget Amount *help
¥16,460,000 (Direct Cost: ¥15,500,000、Indirect Cost: ¥960,000)
Fiscal Year 2008: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2007: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2006: ¥12,300,000 (Direct Cost: ¥12,300,000)
Keywords弾性定数 / ナノ薄膜 / 人口超格子 / フォノン共鳴 / フェムト秒パルス光 / 薄膜 / フェムト秒レーザー / 第一原理計算 / 磁性 / 超格子 / 界面 / 光計測 / 超音波計測
Research Abstract

フェムト秒パルス光を用いて, ナノ薄膜内に超高周波の超音波共鳴を励起し, 励起光と同期した別のフェムト秒パルス光によってピコ秒の時間分解能での超音波共鳴の様子を受信する手法を開発し, これを用いて, ナノ薄膜の力学的性質を正確に評価する手法を確立した. そして,多層ナノ薄膜人口超格子の界面の弾性に関する情報を積極的に抽出する手法を考案し,これまで評価することの困難であった界面の弾性や健全性を評価することに成功した.

Report

(4 results)
  • 2008 Annual Research Report   Final Research Report ( PDF )
  • 2007 Annual Research Report
  • 2006 Annual Research Report
  • Research Products

    (52 results)

All 2009 2008 2007 Other

All Journal Article (19 results) (of which Peer Reviewed: 8 results) Presentation (33 results)

  • [Journal Article] Stacking-Fault Structure Explains Unusual Elasticity of Nanocrystalline Diamonds2009

    • Author(s)
      H. Tanei, K. Tanigaki, K. Kusakabe, H. Ogi, N. Nakamura, M. Hirao
    • Journal Title

      Applied Physics Letters 94

      Pages: 41914-41914

    • Related Report
      2008 Final Research Report
  • [Journal Article] ブリルアン振動を用いた酸化物薄膜の弾性定数測定と組織評価2009

    • Author(s)
      舎川知広, 荻博次, 中村暢伴, 平尾雅彦, 小高秀文, 木原直人
    • Journal Title

      日本機械学会論文集A編 75

      Pages: 72-78

    • NAID

      120004837122

    • Related Report
      2008 Final Research Report
  • [Journal Article] Elastic-Constant Measurement in Oxide and Semiconductor Thin Films by Brillouin Oscillations Excited by Picosecond Ultrasound2009

    • Author(s)
      H. Ogi, T. Shagawa, N. Nakam ura, M. Hirao, H. Odaka, N. Kihara
    • Journal Title

      Japanese Journal of Applied Physics (印刷中)

    • NAID

      120007148375

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Stacking-Fault Structure Explains Unusual Elasticity of Nanocrystalline Diamonds2009

    • Author(s)
      H. Tanei, K. Tanigaki, K. Kusa kabe, H. Ogi, N. Nakamura, M. Hirao
    • Journal Title

      Applied Physics Letters 94

      Pages: 41914-41914

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] ブリルアン振動を用いた酸化物薄膜の弾性定数測定と組織評価2009

    • Author(s)
      舎川知広, 荻博次, 中村暢伴, 平尾雅彦, 小高秀文, 木原直人
    • Journal Title

      日本機械学会論文集 A編 75

      Pages: 72-78

    • NAID

      120004837122

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Brillouin oscillations in sputtered vitreous SiO_2 thin films2008

    • Author(s)
      H. Ogi, T. Shagawa, N. Nakamura, M. Hirao, H. Odaka, N. Kihara
    • Journal Title

      Physical Review B 75

      Pages: 134204-134204

    • Related Report
      2008 Final Research Report
  • [Journal Article] Laser-Induced Coherent Acoustic Phonons for Measuring Elastic Constants of Ultra-Thin Films2008

    • Author(s)
      N. Nakamura, A. Uranishi, T. Shagawa, H. Ogi, M. Hirao, and M. Nishiyama
    • Journal Title

      Films, J. Sol. Mech. Mater. Eng 2

      Pages: 1420-1426

    • NAID

      130000079044

    • Related Report
      2008 Final Research Report
  • [Journal Article] Stable Elasticity of Epitaxial Cu Thin Films on Si2008

    • Author(s)
      N. Nakamura, H. Ogi, and M. Hirao
    • Journal Title

      Physical Review B 77

      Pages: 245416-245416

    • Related Report
      2008 Final Research Report
  • [Journal Article] Recovery of Elastic Constant of Ultrathin Cu Films by Low Temperature Annealing2008

    • Author(s)
      N. Nakamura, H. Ogi, T. Shagawa, and M. Hirao
    • Journal Title

      Annealing, Applied Physics Letters 92

      Pages: 141901-141901

    • Related Report
      2008 Final Research Report
  • [Journal Article] Unusual elastic behavior of nanocrystalline diamond thin films2008

    • Author(s)
      H. Tanei, N. Nakamura, H. Ogi, M. Hirao, R. Ikeda
    • Journal Title

      Physical Review Letters 100

      Pages: 16804-16804

    • Related Report
      2008 Final Research Report
  • [Journal Article] Brillouin oscillations in sputtered vitreous SiO_2 thin films2008

    • Author(s)
      H. Ogi, T. Shagawa, N. Nakam ura, M. Hirao, H. Odaka, N. Kihara
    • Journal Title

      Physical Review B 75

      Pages: 134204-134204

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Laser-Induced Coherent Acoustic Phonons for Measuring Elastic Constants of Ultra-Thin Films2008

    • Author(s)
      N. Nakamura, A. Uranishi, T. Shagawa, H. Ogi, M. Hirao, M. Nishiyama
    • Journal Title

      J. Sol. Mech. Mater. Eng 2

      Pages: 1420-1426

    • NAID

      130000079044

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Stable Elasticity of Epitaxial Cu Thin Films on Si2008

    • Author(s)
      N. Nakamura, H. Ogi, M. Hirao
    • Journal Title

      Physical Review B 77

      Pages: 245416-245416

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Recovery of Elastic Constant of Ultrathin Cu Films by Low Temperature Annealine2008

    • Author(s)
      N. Nakamura, H. Ogi, T. Shagawa, M. Hirao
    • Journal Title

      Applied Physics Letters 92

      Pages: 141901-141901

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Stiffened ultrathin Pt films confirmed by acoustic-phonon resonances2007

    • Author(s)
      H. Ogi, M. Fujii, N. Nakamura, T. Yasui, and M. Hirao
    • Journal Title

      Physical Review Letters 98

      Pages: 195503-195503

    • Related Report
      2008 Final Research Report 2007 Annual Research Report
  • [Journal Article] Mechanism of Elastic Softening Behavior in Superlattice2007

    • Author(s)
      N. Nakamura, H. Ogi, T. Yasui, M. Fujii, and M. Hirao
    • Journal Title

      Physical Review Letters 99

      Pages: 35502-35502

    • NAID

      120007148355

    • Related Report
      2008 Final Research Report 2007 Annual Research Report
  • [Journal Article] Resonance acoustic-phonon spectroscopy for studying elasticity of ultrathin films2007

    • Author(s)
      H. Ogi, M. Fujii, N. Nakamura, T. Shagawa, and M. Hirao
    • Journal Title

      Applied Physics Letters 90

      Pages: 191906-191906

    • Related Report
      2008 Final Research Report
  • [Journal Article] Resonance acoustic-phonon spectroscopy for studying elasticity of ultrathin films2007

    • Author(s)
      H. Ogi, M. Fujii, N. Nakamura, T. Shagawa. and M. Hirao
    • Journal Title

      Applied Physics Letters 90

      Pages: 191906-191906

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Elastic-Constant Measurement in Oxide and Semiconductor Thin Films by Brillouin Oscillations Excited by Picosecond Ultrasound

    • Author(s)
      H. Ogi, T. Shagawa, N. Nakamura, M. Hirao, H. Odaka, N. Kihara
    • Journal Title

      Japanese Journal of Applied Physics (in press)

    • NAID

      120007148375

    • Related Report
      2008 Final Research Report
  • [Presentation] ナノ結晶ダイヤモンド薄膜におけるsp2結合領域と異方性弾性定数との関係2009

    • Author(s)
      多根井寛志
    • Organizer
      2008年春季 第55回応用物理学関係連合講演会
    • Place of Presentation
      日本大学理工学部船橋キャンパス
    • Related Report
      2008 Annual Research Report
  • [Presentation] 金属ナノ薄膜の異常弾性に関する研究 : 第一原理計算とレーザー音響フォノン共鳴計測2009

    • Author(s)
      多根井寛志
    • Organizer
      2008年春季 第55回応用物理学関係連合講演会
    • Place of Presentation
      日本大学理工学部船橋キャンパス
    • Related Report
      2008 Annual Research Report
  • [Presentation] ナノ構造物の共振計測と物性評価およびセンシングへの応用2008

    • Author(s)
      荻博次
    • Organizer
      日本材料学会第42回マイクロマテリアル部門委員会講演会
    • Place of Presentation
      熊本大学インキュベーションラボラトリー
    • Year and Date
      2008-12-12
    • Related Report
      2008 Final Research Report
  • [Presentation] ナノ構造物の共振計測と物性評価およびセンシングヘの応用2008

    • Author(s)
      荻 博次
    • Organizer
      日本材料学会 第42回マイクロマテリアル部門委員会講演会
    • Place of Presentation
      熊本大学インキュベーションラボラトリー
    • Year and Date
      2008-12-12
    • Related Report
      2008 Annual Research Report
  • [Presentation] 極短パルス光によるナノ構造物の共振計測と非破壊評価2008

    • Author(s)
      荻博次
    • Organizer
      日本非破壊検査協会 第2回レーザー超音波および先進非接触計測技術研究会
    • Place of Presentation
      東北大学青葉記念会館
    • Year and Date
      2008-11-14
    • Related Report
      2008 Annual Research Report 2008 Final Research Report
  • [Presentation] ナノ薄膜の弾性特性に関する研究~超音波を利用した弾性定数計測法の開発~2008

    • Author(s)
      中村暢伴, 荻博次, 平尾雅彦
    • Organizer
      第39回マイクロマテリアル部門委員会
    • Place of Presentation
      神戸大学
    • Year and Date
      2008-01-29
    • Related Report
      2008 Final Research Report
  • [Presentation] ナノ薄膜の弾性特性に関する研究〜超音波を利用した弾性定数計測法の開発〜2008

    • Author(s)
      中村 暢伴
    • Organizer
      第39回マイクロマテリアル部門委員会
    • Place of Presentation
      神戸大学
    • Year and Date
      2008-01-29
    • Related Report
      2007 Annual Research Report
  • [Presentation] Elastic constant and microstructure of oxide thin films studied by picosecond laser ultrasounds2008

    • Author(s)
      舎川知広, 荻博次, 中村暢伴, 平尾雅彦
    • Organizer
      第29回超音波エレクトロニクスの基礎と応用に関するシンポジウム
    • Place of Presentation
      仙台市シルバーセンター
    • Related Report
      2008 Final Research Report
  • [Presentation] ナノ結晶ダイヤモンド薄膜の異方性弾性定数と内部組織 : 超音波計測と第一原理計算2008

    • Author(s)
      多根井寛志, 中村暢伴, 荻博次, 平尾雅彦
    • Organizer
      第69回応用物理学会学術講演会
    • Place of Presentation
      中部大学
    • Related Report
      2008 Annual Research Report 2008 Final Research Report
  • [Presentation] ブリルアン振動を用いた酸化物薄膜のサブテラヘルツ帯の音響特性評価2008

    • Author(s)
      舎川知広, 荻博次, 中村暢伴, 平尾雅彦
    • Organizer
      日本機械学会2008年度年次大会
    • Place of Presentation
      横浜国立大学
    • Related Report
      2008 Final Research Report
  • [Presentation] Elastic Constants and sp2-Bonded Region of Nanocrystalline Diamond Thin Films2008

    • Author(s)
      H. Tanei, N. Nakamura, H. Ogi, M. Hirao
    • Organizer
      35th Annual Rreview of Progress in Quantitative Nondestructive Evaluation, University of Illinois at Chicago
    • Place of Presentation
      Chicago, Illinois, USA
    • Related Report
      2008 Final Research Report
  • [Presentation] Elastic Constants and Microstructure of SiO_2 thin Films Studied by Brillouin Oscillations2008

    • Author(s)
      H. Ogi, T. Shagawa, N. Nakamura, and M. Hirao
    • Organizer
      1st International Symposium on Laser Ultrasonics: Science, Technology and Applications, Ecole de technologie superieue (ETS)
    • Place of Presentation
      Montreal, Canada
    • Related Report
      2008 Final Research Report
  • [Presentation] Anomalous Phonon-Vibration Frequencies in Metallic Ultrathin Films Studied by Resonant Acoustic-Phonon Spectroscopy and Ab-initio calculations2008

    • Author(s)
      H. Tanei, N. Nakamura, H. Ogi, and M. Hirao
    • Organizer
      1st International Symposium on Laser Ultrasonics : Science, Technology and Applications, Ecole de technologie superieue (ETS)
    • Place of Presentation
      Montreal, Canada
    • Related Report
      2008 Final Research Report
  • [Presentation] ナノ結晶ダイヤモンド薄膜におけるsp2結合領域と異方性弾性定数との関係2008

    • Author(s)
      多根井寛志, 中村暢伴, 荻博次, 平尾雅彦
    • Organizer
      2008年春季第55回応用物理学関係連合講演会
    • Place of Presentation
      日本大学理工学部船橋キャンパス
    • Related Report
      2008 Final Research Report
  • [Presentation] 金属ナノ薄膜の異常弾性に関する研究 : 第一原理計算とレーザー音響フォノン共鳴計測2008

    • Author(s)
      多根井寛志, 中村暢伴, 荻博次, 平尾雅彦
    • Organizer
      2008年春季第55回応用物理学関係連合講演会
    • Place of Presentation
      日本大学理工学部船橋キャンパス
    • Related Report
      2008 Final Research Report
  • [Presentation] Elastic Constants of Strained Cu Thin Films Studied by Acoustic-Phonon Resonance Spectroscopy2008

    • Author(s)
      N. Nakamura, H. Ogi, and M. Hirao
    • Organizer
      2008年MRS Spring Meeting
    • Place of Presentation
      Moscone West and San Francisco Marriott
    • Related Report
      2008 Final Research Report 2007 Annual Research Report
  • [Presentation] Elastic constant and microstructure of oxide thin films studied by picosecond laser ultrasounds2008

    • Author(s)
      舎川 知広
    • Organizer
      第29回 超音波エレクトロニクスの基礎と応用に関するシンポジウム
    • Place of Presentation
      仙台市シルバーセンター
    • Related Report
      2008 Annual Research Report
  • [Presentation] ブリルアン振動を用いた酸化物薄膜のサブテラヘルツ帯の音響特性評価2008

    • Author(s)
      舎川 知広
    • Organizer
      日本機械学会 2008年度 年次大会
    • Place of Presentation
      横浜国立大学
    • Related Report
      2008 Annual Research Report
  • [Presentation] Elastic Constants and sp2-Bonded Region of Nanocrystalline Diamond Thin Films2008

    • Author(s)
      多根井寛志
    • Organizer
      35th Annual Rreview of Progress in Quantitative Nondestructive Evaluation
    • Place of Presentation
      University of Illinois at Chicago, Chicago, Illinois, USA
    • Related Report
      2008 Annual Research Report
  • [Presentation] Elastic Constants and Microstructure of SiO_2 thin Films Studied by Brillouin Oscillations2008

    • Author(s)
      荻 博次
    • Organizer
      lst International Symposium on Laser Ultrasonics : Science, Technology and Applications
    • Place of Presentation
      Ecole de technologie supe rieue (ETS), Montreal, Canada
    • Related Report
      2008 Annual Research Report
  • [Presentation] Anomalous Phonon-Vibration Frequencies in Metallic Ultrathin Films Studied by Resonant Acoustic-Phonon Spectroscopy and Ab-initio calculations2008

    • Author(s)
      多根井寛志
    • Organizer
      1st International Symposium on Laser Ultrasonics : Science, Technology and Applications
    • Place of Presentation
      Ecole de technologie superieue (ETS), Montreal, Canada
    • Related Report
      2008 Annual Research Report
  • [Presentation] 異常に大きな弾性ひずみを受ける薄膜内の超音波特性2007

    • Author(s)
      中村暢伴, 荻博次, 平尾雅彦
    • Organizer
      日本非破壊検査協会「非線形現象を利用した非破壊検査・材料評価研究会」第6回研究会
    • Place of Presentation
      京大会館
    • Related Report
      2008 Final Research Report 2007 Annual Research Report
  • [Presentation] サブテラヘルツ音響フォノン共鳴スペクトロスコピーによるナノ薄膜の弾性定数測定と健全性評価2007

    • Author(s)
      荻博次
    • Organizer
      第51回日本学術会議材料工学連合講演会
    • Place of Presentation
      京大会館
    • Related Report
      2008 Final Research Report 2007 Annual Research Report
  • [Presentation] 先端共振法と圧電体 : 材料定数測定とヤング率顕微鏡2007

    • Author(s)
      荻博次
    • Organizer
      日本セラミックス協会第20回秋季シンポジウム
    • Place of Presentation
      名古屋工業大学
    • Related Report
      2008 Final Research Report
  • [Presentation] レーザー励振音響フォノン共鳴法の開発と銅ナノ薄膜の弾性定数測定2007

    • Author(s)
      中村暢伴, 荻博次, 平尾雅彦
    • Organizer
      日本機械学会2007年度年次大会
    • Place of Presentation
      関西大学千里山キャンパス
    • Related Report
      2008 Final Research Report 2007 Annual Research Report
  • [Presentation] ピコ秒レーザー超音波法によるナノ薄膜の弾性定数測定と健全性評価2007

    • Author(s)
      舎川知広, 荻博次, 中村暢伴, 平尾雅彦
    • Organizer
      日本機械学会2007年度年次大会
    • Place of Presentation
      関西大学千里山キャンパス
    • Related Report
      2008 Final Research Report
  • [Presentation] Co/Pt超格子の異常弾性軟化現象とひずみエネルギーの関係に関する研究2007

    • Author(s)
      中村暢伴, 荻博次, 平尾雅彦
    • Organizer
      2007年秋季第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Related Report
      2008 Final Research Report
  • [Presentation] Elastic constants and micro defects of yttria-stabilized zirconia thin films studied by resonant ultrasound spectroscopy and micromechanics modeling2007

    • Author(s)
      N. Nakamura, H. Ogi, H. Waki, and M. Hirao
    • Organizer
      International Congress on Ultrasonics
    • Place of Presentation
      ウィーン工科大学
    • Related Report
      2008 Final Research Report
  • [Presentation] Elastic constants and microstructure of nano-crystalline CVD diamond thin films2007

    • Author(s)
      N. Tanei, H. Ogi, N. Nakamura, M. Hirao
    • Organizer
      International Congress on Ultrasonics
    • Place of Presentation
      ウィーン工科大学
    • Related Report
      2008 Final Research Report 2007 Annual Research Report
  • [Presentation] Co/Pt超格子の異常弾性軟化現象とひずみエネルギーの関係に関する研究2007

    • Author(s)
      中村 暢伴
    • Organizer
      2007年秋季 第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Related Report
      2007 Annual Research Report
  • [Presentation] Elastic constants and micro defects of yttria-stabilized zirconi a thin films studied by resonant ultrasound spectroscopy and micromechanics modeling2007

    • Author(s)
      中村 暢伴
    • Organizer
      International Congress on Ultrasonics
    • Place of Presentation
      ウィーン工科大学
    • Related Report
      2007 Annual Research Report
  • [Presentation] ピコ秒レーザー超音波法によるナノ薄膜の弾性定数測定と健全性評価2007

    • Author(s)
      舎川 知広
    • Organizer
      日本機械学会 2007年度年次大会
    • Place of Presentation
      関西大学 千里山キャンパス
    • Related Report
      2007 Annual Research Report
  • [Presentation] 先端共振法と圧電体: 材料定数測定とヤング率顕微鏡2007

    • Author(s)
      荻 博次
    • Organizer
      日本セラミックス協会第20回秋季シンポジウム
    • Place of Presentation
      名古屋工業大学
    • Related Report
      2007 Annual Research Report

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Published: 2006-04-01   Modified: 2016-04-21  

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