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Time resolved and in-situ structural analysis of a ferroelectric thin film during polarization switching using synchrotron-based diffraction

Research Project

Project/Area Number 18310085
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Nanomaterials/Nanobioscience
Research InstitutionJapan Synchrotron Radiation Research Institute

Principal Investigator

SAKATA Osami  Japan Synchrotron Radiation Research Institute, Japan Synchrotron Radiation Research Institute Research & Utilization Div., Surface Structure Team Leader (40215629)

Co-Investigator(Kenkyū-buntansha) FUNAKUBO Hiroshi  Tokyo Institute of Technology, 総合理工学研究科, Associate Professor (90219080)
KIMURA Shigeru  Japan Synchrotron Radiation Research Institute, Research & Utilization Div., Nano Group Leader (50360821)
YABASHI Makina  RIKEN, XFEL Project Head Offece, Experimental Facility Group, Research Scientist (00372144)
Project Period (FY) 2006 – 2007
Project Status Completed (Fiscal Year 2007)
Budget Amount *help
¥12,980,000 (Direct Cost: ¥12,200,000、Indirect Cost: ¥780,000)
Fiscal Year 2007: ¥3,380,000 (Direct Cost: ¥2,600,000、Indirect Cost: ¥780,000)
Fiscal Year 2006: ¥9,600,000 (Direct Cost: ¥9,600,000)
KeywordsSimultaneous analysis of structure and polarizatio / Pulse-electric-field-induced starin / Time-resolved measurement / Synchrotron-based diffraction / X-ray microbeam / Structural analysis of thin film / BL13XU Surface and Interface Structures / Sping-8 / 強誘電体ドメイン構造
Research Abstract

A synchrotron-based time-resolved diffraction method has been developed for characterizing a piezoelectric thin film. This was why we needed to complete a time-resolved diffraction system equipped with a ferroelectric test system. We introduced the fenoelectric test system(Toyotechinca FCE-HS100D) for high-speed characterization of polarization in a ferroelectric thin film and modified it for a time-resolved and in-situ measurement. We have succeeded in detection of electrostuction(electuc-field-induced strain) of ferroelectric thin films such as epitaxial Pb(Zr_<0.25>, Ti_<0.75>) O_3(PZT) and polycrystalline BiFeO_3(BFO) films. The electrostnctive strain was induced by an applied electric field having repeated ns-width pulses. In addition, we determined piezoelectric constants from diffraction peak shifts.
The apparatus receives a pulse pattern formed by a 508 MHz counter using the RF signals as a clock of the Spring-8 storage ring and applies a pulse electric field to a sample. We use … More d the pulse pattern as a trigger ; accordingly the applied electric fields were synchronized with incident x-rays.
A sample was a 750 nm-thick PZT film epitaxially grown on a SrRuO_3 thin film using metal organic chemical vapor deposition. Upper Pt electrodes with a diameter of 100 μm were arrayed in a lattice. One prober touched an upper electiode Pt incident x-rays hit, while the other touched another upper electrode. We aligned a polar direction in the PZT film using an applied voltage of 30 V in advance ; consequently, polarization(+Pr) remamed. We made a Θ-2Θ scan around the PZT 004 Bragg angle and recorded a diffraction- intensity profile as a function of time at each combination of Θ and 2Θ angle using an avalanche photo diode detector for a fixed voltage of 0, 10, 20 30 40 50, 55, 60, 70, and 75 V, respectively. The unipolar-rectangular-shape pulse width of 200 ns was repeatedly applied with a period of 800 ns. Measured time used at each angle was 100 s. An incident slit size used was 15×15μm.
We observed that the 004 main peaks were shifted toward the lower angle only when the applied field was on. This indicates that the(004) lattice-plane spacing along the surface normal was lengthened because of electrostriction. The pulse electric-field induced strain Δd / d estimated from the main peak shift for 50 V was 0.0004 ; correspondingly, piezoelectric constant d_<33> was 13 pm / V. Furthermore, our finding is that the other peak appeared at a lower angle. d_<33> obtained from the other peak shift is ca. 50 pm / V. This value almost corresponds to that obtained using AFM measurements.
We also applied the time-resolved diffraction method to characterizing a polycrystalline BFO thin film. The applied voltages were 0, 3, 5, 8, 10, 11, and 12 V with a 150 ns width and a 804 ns periodicity. Obtained d_<33> values for the(001) and(110) domain were 27.8 and 26.4 pm / V, respectively. Less

Report

(3 results)
  • 2007 Annual Research Report   Final Research Report Summary
  • 2006 Annual Research Report
  • Research Products

    (39 results)

All 2008 2007 2006 2004

All Journal Article (25 results) (of which Peer Reviewed: 7 results) Presentation (11 results) Book (1 results) Patent(Industrial Property Rights) (2 results)

  • [Journal Article] X-ray Reciprocal-Lattice Space Imaging Method for Quick analysis of Buried Crystalline Nanostructure - a Diffraction Method Fixed at an Angular Position2008

    • Author(s)
      O.Sakata, W.Yashiro, K.Sakamoto and K.Miki
    • Journal Title

      The Transactions of Materials Research Society of Japan (accepted)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] X-ray reciprocal-lattice space imaging method for quick analysis of buried crystalline nanostructure-a siffraction method fixed at an angular position2008

    • Author(s)
      O. Sakata, W. Yashiro, K. Sakamoto, and K. Miki
    • Journal Title

      The Transactions of Materials Research Society of Japan (accepted)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] X-ray Reciprocal-Lattice Space Imaging Method for Quick analysis of Buried Crystalline Nanostructure-a Diffraction Method Fixed at an Angular Position2008

    • Author(s)
      O. Sakata, W. Yashiro, K. Sakamoto and K. Miki
    • Journal Title

      The Transactions of Materials Research Society of Japan (Accepted)

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Multilayer relaxation of Ru(0001)-(2 x 2) studied by surface x-ray diffraction2007

    • Author(s)
      M.Nakamura, H.Kato, N.Hoshi, K.Sumitani, and O.Sakata
    • Journal Title

      J. Phys. Chem. C 111

      Pages: 977-980

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Structural characterization of Ar^+-irradiated SrTiO_3 showing room-temperature blue luminescence2007

    • Author(s)
      D.Kan, O.Sakata, S.Kimura, M.Takano, Y.Shimakawa
    • Journal Title

      Jpn. J. Appl. Phys. 46

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] X線回折法によるナノ材料の界面構造の迅速評価2007

    • Author(s)
      坂田修身、吉本護、三木一司
    • Journal Title

      セラミックス 岡山 15

      Pages: 49-52

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] X線逆格子イメージング法を用いた表界面ナノ構造評価2007

    • Author(s)
      坂田修身、吉本護、三木一司、中村将志、舟窪浩
    • Journal Title

      日本結晶学会誌 49

      Pages: 292-299

    • NAID

      10019794372

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Journal Article] Multilayer relaxation of Ru(0001) -(2 x 2) studied by surface x-ray diffraction2007

    • Author(s)
      M. Nakamma, H. Kato, N. Hoshi, K. Sumitani, and O. Sakata
    • Journal Title

      J Phys. Cham. C 111

      Pages: 977-980

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Structural characterization of Ar^+-irradiated SrTiO_3 showing room-temperature blue luminescence2007

    • Author(s)
      D. Kan, O. Sakata, S. Kimura, M. Takano, and Y. Shimakawa
    • Journal Title

      Jpn. J. Appl. Phys. 46

      Pages: 471-473

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Nanostructural characterization of surfaces, interfaces, and thinfilms using x-ray reciprocal-lattice space imaging(written in Japanese)2007

    • Author(s)
      O. Sakata, M. Yoshimoto, K. Miki, M. Nakamura, and H. Funakubo
    • Journal Title

      Journal of Crystallographic Society of Japan 49

      Pages: 292-299

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] 酸化物薄膜の界面研究の進展 -実用化への観点からみた進展-2007

    • Author(s)
      H. Funakubo, O. Sakata, and N. Mizutani
    • Journal Title

      Ceramics Data Book 2007 35

      Pages: 47-52

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] X回線折法によるナノ材料の界面構造の迅速評価2007

    • Author(s)
      坂田修身、吉本護、三木一司
    • Journal Title

      セラミックス 岡山 15

      Pages: 49-52

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Structural characterization of Ar^+-irradiated SrTiO_3 showing room-temperature blue luminescence2007

    • Author(s)
      D. Kan, O. Sakata, S. Kimura, M. Takano, Y. Shimakawa
    • Journal Title

      Jpn. J. Appl. Phys. 46

      Pages: 471-473

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 酸化物薄mlの界面研究の進展・実N化への観点からみた進展2007

    • Author(s)
      舟窪 浩、坂田修身、水谷惟恭
    • Journal Title

      セラミックデータベース 35

      Pages: 47-52

    • Related Report
      2007 Annual Research Report
  • [Journal Article] Multilayer relaxation of Ru(0001)-(2 x 2) studied by surface x-ray diffraction2007

    • Author(s)
      M.Nakamura, H.Kato, N.Hoshi, K.Sumitani, O.Sakata
    • Journal Title

      J. Phys. Chem. C 111

      Pages: 977-977

    • Related Report
      2006 Annual Research Report
  • [Journal Article] X線回折法によるナノ材料の界面構造の迅速評価2007

    • Author(s)
      坂田修身, 吉本譲, 三木一司
    • Journal Title

      セラミックス 岡山 15

      Pages: 49-49

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Preparation and Structural Analysis of Micro-patterned Pb(Zr,Ti)O_3 Film by Metal organic Chemical Vapor Deposition2006

    • Author(s)
      S.Yokoyama, K.Takahashi, S.Okamoto, A.Nagai, J.Minamidate, K.Saito, N.Ohashi, H.Haneda, O.Sakata, S.Kimura, K.Nishida, T.Katoda, and H.Funakubo
    • Journal Title

      Jpn. J. Appl. Phys. 45

      Pages: 5102-5106

    • NAID

      10018148793

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Thickness dependence of dielectric properties in bismuth layer-structured dielectrics2006

    • Author(s)
      K.Takahashi, M.Suzuki, T.Kojima, Takayuki Watanabe, Y.Sakashita, K.Kato, O.Sakata, K.Sumitani, and H.Funakubo
    • Journal Title

      Appl. Phys. Lett. 89

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] X線逆格子イメージング法によるナノ材料の迅速評価2006

    • Author(s)
      坂田修身、吉本護、三木一司
    • Journal Title

      セラミックス 42

      Pages: 992-997

    • NAID

      10020358031

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Preparation and Structural Analysis of Micro-patterned Pb(Zr,Ti) O_3 Film by Metalorganic Chemical Vapor Deposition2006

    • Author(s)
      S. Yokoyama, K. Takahashi, S. Okamoto, A. Nagai, J. Mmamidate, K. Saito, N. Ohashi, H. Haneda, O. Sakata, S. Kimura, K. Nishida, T. Katoda, and H. Funakubo
    • Journal Title

      Jpn. J. Appl. Phys. 45

      Pages: 5102-5106

    • NAID

      10018148793

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Thickness dependence of dielectric properties in bismuth layer-structured dielectrics2006

    • Author(s)
      K. Takahashi, M Suzuki, T. Kojima, Takayuki Watanabe, Y. Sakashita, K. Kato, O. Sakata, K. Sumitani, and H. Funakubo
    • Journal Title

      Appl. Phys. Lett. 89

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Rapid characterization of a nanomaterial structure using x-ray reciprocal-lattice imaging(written in Japanese)2006

    • Author(s)
      O. Sakata, M. Yoshimoto, and K. Miki
    • Journal Title

      Ceramics Japan 42

      Pages: 992-997

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Preparation and Structural Analysis of Micro-patterned Pb(Zr,Ti)O_3 Film by Metalorganic Chemical Vapor Deposition2006

    • Author(s)
      S.Yokoyama, K.Takahashi, S.Okamoto, A.Nagai, J.Minamidate, K.Saito, N.Ohashi, H.Haneda, O.Sakata, S.Kimura, K.Nishida, T.Katoda, H.Funakubo
    • Journal Title

      Jpn. J. Appl. Phys. 45

      Pages: 5102-5102

    • NAID

      10018148793

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Thickness dependence of dielectric properties in bismuth layer-structured dielectrics2006

    • Author(s)
      K.Takahashi, M.Suzuki, T.Kojima, Takayuki Watanabe, Y.Sakashita, K.Kato, O.Sakata, K.Sumitani, H.Funakubo
    • Journal Title

      Appl. Phys. Lett. 89

      Pages: 82901-82901

    • Related Report
      2006 Annual Research Report
  • [Journal Article] X線逆格子イメージング法によるナノ材料の迅速評価2006

    • Author(s)
      坂田修身, 吉本譲, 三木一司
    • Journal Title

      セラミックス 42

      Pages: 992-992

    • NAID

      10020358031

    • Related Report
      2006 Annual Research Report
  • [Presentation] Siに埋め込まれたBi原子スケール細線の構造評価2007

    • Author(s)
      坂田修身、矢代航、D.R.Bowler、坂本邦博、三木一司
    • Organizer
      第20回日本放射光学会年会・放射光科学合同シンポジウム
    • Place of Presentation
      広島国際会議場
    • Year and Date
      2007-01-12
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Siに埋め込まれたBi原子スケール細線の構造評価(Invited)2007

    • Author(s)
      O. Sakata, W. Yashuo, D. R Bowler, and K. Sakamoto, and K Miki
    • Organizer
      The 20th annual meeting of the Japanese Society for Synchrotron Radiation Research
    • Place of Presentation
      International Conference Center Hiroshima
    • Year and Date
      2007-01-12
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] その場X線回折法によるNiO薄膜から壁状構造への変化過程の活性化エネルギーの評価2007

    • Author(s)
      坂田修身、松田晃史、吉本 護
    • Organizer
      日本結晶学会2007年度年会
    • Place of Presentation
      東京工業大学 大岡山キャンパス
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] Strained-relaxed Novel Domain Structure of Epitaxially Grown Pb(Zr,Ti)O_3 Thick Films by Metal Organic Chemical Vapor Deposition2007

    • Author(s)
      H.Funakubo, H.Nakaki, R.Ikariyama, S.Yokoyama, Y.-K.Kim, K.Nishida, K.Saito, O.Sakata and S.Kimura
    • Organizer
      2007 MRS Fall Meeting
    • Place of Presentation
      Boston,MA,U.S.A
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] その場X線回折法によるNio薄膜から壁状構造への変化過程の活性化エネルギーの評価2007

    • Author(s)
      O. Sakata, A. Matsuda, and M. Yoshimoto
    • Organizer
      The 2007 annual meeting of the Crystallographic Society of Japan
    • Place of Presentation
      Tokyo Institute of Technology, Ookayama
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Strained-relaxed Novel Domain Structure of Epitaxially Grown Pb(Zr,Ti) O_3 Thick Films by Metal Organic Chemical Vapor Deposition2007

    • Author(s)
      H. Funakubo, H. Nakaki, R. Ikariyama, S. Yokoyama, Y.- K. Kim, K. Nishida, K. Saito, O. Sakata and S Kimura
    • Organizer
      The 2007 MRS Fall Meeting
    • Place of Presentation
      Boston, MA, U.S.A
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Strained-relaxed Novel Domain Structure of Epitaxially Grown Pb(Zr, Ti) O_3 Thick Films by Metal Organic Chemical Vapor Deposition2007

    • Author(s)
      H. Funakubo, H. Nakaki, R. Ikariyama, S. Yokoyama, Y.-K. Kim, K. Nishida, K. Saito, O. Sakata and S. Kimura
    • Organizer
      2007 MRS Fall Meeting
    • Place of Presentation
      Boston, MA, U.S.A
    • Related Report
      2007 Annual Research Report
  • [Presentation] Observation of 1D and 2D nanostructures using X-ray reciprocal-lattice Space Imaging2006

    • Author(s)
      Osami Sakata
    • Organizer
      The Ninth International Conference on Surface X-ray and Neutron Scattering
    • Place of Presentation
      Academia Sinica,Taipei,Taiwan
    • Year and Date
      2006-07-18
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Observation of ID and 2D nanostructures using X ray recipirocal-lattice Space Imaging (Invited)2006

    • Author(s)
      Osami Sakata
    • Organizer
      The Ninth Internatuonal Conference on Surface X-ray and Neutron Scattering
    • Place of Presentation
      Academia, Sinica, Taipei, Taiwan
    • Year and Date
      2006-07-18
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Reciprocal-lattice-space imaging of 1D nanostructures by the obvious-at-a-glance x-ray diffraction method2006

    • Author(s)
      Osami Sakata
    • Organizer
      'Buried' Interface Science with X-rays and Neutrons 2006
    • Place of Presentation
      マルコー・イン新横浜
    • Year and Date
      2006-07-04
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Reciprocal-lattice-space imaging of 1D nanostructures □ by the obvious-at-a glance x-ray diffraction method (Invited)2004

    • Author(s)
      Osami Sakata
    • Organizer
      Workshop on 'Buried' Interface Science with X-ray and Neutrons 2006
    • Place of Presentation
      the Marko Inn Hotel Yokohama
    • Year and Date
      2004-07-04
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Book] セラミックデータブック2007(の一部:酸化物薄膜の界面研究の進展 -実用化への観点からみた進展-)2007

    • Author(s)
      舟窪 浩、坂田修身、水谷惟恭
    • Publisher
      工業製品技術協会(株式会社テクノプラザ)
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 特許出願2007

    • Inventor(s)
      伊福俊博、福井哲朗、武田憲一、舟窪浩、中木寛、碇山理究、坂田修身
    • Industrial Property Rights Holder
      キヤノン、財団法人 高輝度光科学研究センター
    • Industrial Property Number
      2007-053507
    • Filing Date
      2007-03-02
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 特許出願2007

    • Inventor(s)
      伊福俊博, 福井哲朗, 武田憲一, 舟窪浩, 中木寛, 碇山理究, 坂田修身
    • Industrial Property Rights Holder
      キャノン 財団法人高輝度光科学研究センター
    • Industrial Property Number
      2007-053507
    • Filing Date
      2007-03-02
    • Related Report
      2006 Annual Research Report

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Published: 2006-04-01   Modified: 2016-04-21  

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