Control of metal oxide nano-structure by radio-frequency impulse discharge under fast gas flow in small diameter tubes

• Project/Area Number: 18340182
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Plasma science
• Research Institution: Tohoku University
• Principal Investigator: IIZUKA Satoru Tohoku University, 大学院・工学研究科, 准教授 (20151227)
• Project Period (FY): 2006 – 2009
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥12,690,000 (Direct Cost: ¥11,700,000、Indirect Cost: ¥990,000); Fiscal Year 2008: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000); Fiscal Year 2007: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000); Fiscal Year 2006: ¥8,400,000 (Direct Cost: ¥8,400,000)
• Keywords: プラズマ応用 / 高周波インパルス放電 / 細管内表面処理 / 金属酸化物 / ナノ粒子 / MgO膜 / スパッタリング / マイクロプラズマ / ZnO膜 / 大気圧放電

Research Abstract

アルゴン酸素プラズマ反応性スパッタリングによって, MgOの球状で単結晶, 中空ナノ微粒子の生成に初めて成功した. 粒子の直径は100nm程度である. また, Mg有機化合物を用いたプラズマCVD 法によって, 内面壁に規則的に垂直突起状のナノロッドを生成できることが明らかになった. ナノロッドの間隔が狭くなると, 次第に表面が滑らかな一様な薄膜になることが明らかになった. さらに, ZnOナノワイヤの形成も観測された.
以上のように, 金属酸化物薄膜の表面構造をナノスケールで制御堆積する方法が実証された.

Research Products

• [Journal Article] MgO microparticle deposition by RF impulse discharge in a small-diameter tube (2009)
  • Author(s): 村岡琢正, 飯塚哲
  • Journal Title: Jpn.J.Appl.Phys 48
  • Peer Reviewed
• [Journal Article] Production of MgO thin films by RF impulse plasma CVD in a small diameter tube (2009)
  • Author(s): 樫村透, 飯塚哲
  • Journal Title: Plasma Sci. Symp. 2009 and 26th Symp. on Plasma Processing, Nagoya Pages: 242-243
• [Journal Article] Formation of ZnO nanowires in hollow-type magnetron O_2/Ar RF plasma, Plasma Sci (2009)
  • Author(s): 小野秀樹, 飯塚哲
  • Journal Title: Symp. 2009 and 26th Symp. on Plasma Processing, Nagoya Pages: 252-253
• [Journal Article] MgO microparticle deposition by RF impulse discharge in a small-diameter tube (2009)
  • Author(s): Takumasa Muraoka
  • Journal Title: Japanese Journal of Applied Physics 48 Pages: 25528-25532
  • Peer Reviewed
• [Journal Article] Production of MgO thin films by RF impulse plasma CVD in a small diameter tube (2009)
  • Author(s): Toru Kashlmura
  • Journal Title: Plasma Science Symposium 2009 and the 26th Symposium on Plasma Processing Pages: 42-243
• [Journal Article] Formation of ZnO nanowires in hollow-type magnetron O2 / Ar RF plasma (2009)
  • Author(s): Hideki Ono
  • Journal Title: Plasma Science Symposium 2009 and the 26th Symposium on Plasma Processing Pages: 252-253
• [Journal Article] Control of electron temperature by varying dc voltage to a mesh grid blanketed with thin film in plasmas (2008)
  • Author(s): 加藤公義, 恵美淳一, 飯塚哲
  • Journal Title: Jpn. J. Appl. Phys 47, No.11 Pages: 8565-8569
  • NAID: 40016346992
  • Peer Reviewed
• [Journal Article] roduction of ZnO Nanowires in Hollow-Type Magnetron O_2/Ar RF Plasma (2008)
  • Author(s): 小野秀樹, 飯塚哲
  • Journal Title: Inter. Interdisciplinary-Symp. on Gaseous and Liquid Plasmas Pages: 187-190
• [Journal Article] MgO Microparticle Deposition by RF Impulse Discharge in Small Coaxial Electrode System (2008)
  • Author(s): 村岡琢正, 樫村透, 飯塚哲
  • Journal Title: Inter. Interdisciplinary-Symp. on Gaseous and Liquid Plasmas Pages: 131-134
• [Journal Article] RF impulse barrier discharge for MgO microparticle production in sub-atmospheric pressure regime (2008)
  • Author(s): 村岡琢正, 飯塚哲
  • Journal Title: 14th Inter. Conf. on Plasma Physics Pages: 86-386
  • Peer Reviewed
• [Journal Article] Process of ZnO nanowires growth in energy-controlled hollow-type magnetron RF plasma (2008)
  • Author(s): 小野秀樹, 飯塚哲
  • Journal Title: Proceedings of the 25th Symp. on Plasma Processing, Yamaguchi Pages: 285-286
• [Journal Article] Spherical MgO microparticle deposition by RF impulse discharge with small coaxial electrode (2008)
  • Author(s): Takumasa Muraoka, Toru Kashimura and Satoru Iizuka
  • Journal Title: 9th Asia-Pacific Conf. on Plasma Sci. and Technol., Huangshan, China Pages: 311-311
  • Peer Reviewed
• [Journal Article] Growth of ZnO nanowires in hollow-type Magnetron O2/Ar plasmas (2008)
  • Author(s): Hideki Ono and Satoru Iizuka
  • Journal Title: 9th Asia-Pacific Conf. on Plasma Sci. and Technol., Huangshan, China Pages: 309-309
  • Peer Reviewed
• [Journal Article] Control of electron temperature by varying dc voltage to a mesh grid blanketed with thin film in plasmas (2008)
  • Author(s): Kohgi Kato
  • Journal Title: Japanese Journal of Applied Physics 47 Pages: 8565-8569
  • Peer Reviewed
• [Journal Article] RF impulse barrier discharge for MgO microparticle production in sub-atmospheric pressure regime (2008)
  • Author(s): Takumasa Muraoka
  • Journal Title: 14th International Conference on Plasma Physics Pages: 386-386
  • Peer Reviewed
• [Journal Article] Electron temperature control by applying dc voltage to a mesh grid blanketed with thin films in reactive plasmas (2008)
  • Author(s): Kohgi Kato
  • Journal Title: 14th International Conference on Plasma Physics Pages: 280-280
  • Peer Reviewed
• [Journal Article] MgO Microparticle Deposition by RF Impulse Discharge in Small Coaxial Electrode System (2008)
  • Author(s): Takumasa Muraoka
  • Journal Title: International Interdisciplinary-Symposium on Gaseous and Liquid Plasmas Pages: 131-134
• [Journal Article] Production of ZnO Nanowires in Hollow-Type Magnetron O2 / Ar RF Plasma (2008)
  • Author(s): Hideki Ono
  • Journal Title: International Interdisciplinary-Symposium on Gaseous and Liquid Plasmas Pages: 187-190
• [Journal Article] Decomposition of Carbon Dioxide by CO2 / H2O Plasma in a Narrow Tube (2008)
  • Author(s): Genki Satoh
  • Journal Title: International Interdisciplinary-Symposium on Gaseous and Liquid Plasmas Pages: 179-182
• [Journal Article] Growth of ZnO nanowires in hollow-type Magnetron O2 / Arplasmas (2008)
  • Author(s): Hideki Ono
  • Journal Title: 9th Asia-Pacific Conference on Plasma Science and Technology Pages: 309-309
  • Peer Reviewed
• [Journal Article] Spherical MgO microparticle deposition by RF impulse discharge with small coaxial electrode (2008)
  • Author(s): Takumasa Muraoka
  • Journal Title: 9th Asia-Pacific Conference on Plasma Science and Technology Pages: 311-311
  • Peer Reviewed
• [Journal Article] Process of ZnO nanowires growth in energy-controlled hollow-type magnetron RF plasma (2008)
  • Author(s): Hideki Ono
  • Journal Title: 25th Symposium on Plasma Processing Pages: 285-286
• [Journal Article] Production of CO2/H2O plasmas in a narrow tube by RF impulse discharge (2008)
  • Author(s): Genki Sato
  • Journal Title: 25th Symposium on Plasma Processing Pages: 149-150
• [Journal Article] Effect of Surface Charge on Ignition of RF Impulse Discharge Used for Surface MgO Coating in A Small-Diameter Glass Tube (2007)
  • Author(s): 村岡琢正, 飯塚哲
  • Journal Title: The XXVIII Inter. Conf. on Phenomena in Ionized Gases(Prague, Czech Republic) Pages: 855-858
  • Peer Reviewed
• [Journal Article] Modification of inner surface of a small-diameter PTFE tube by RF impulse discharge with coaxial micro-electrodes (2007)
  • Author(s): 村岡琢正, 飯塚哲
  • Journal Title: 18th Inter. Symp. on Plasma Chemistry, Kyoto 28P135 Pages: 1-4
  • Peer Reviewed
• [Journal Article] Deposition of ZnO in energy-controlled O_2/Ar hollow-type magnetron RF discharge plasma (2007)
  • Author(s): 小野秀樹, 飯塚哲
  • Journal Title: 18th Inter. Symp. on Plasma Chemistry, Kyoto, Japan 27P29 Pages: 1-4
  • Peer Reviewed
• [Journal Article] Characteristics of Ar/O_2hollow-type magnetron rf discharge plasma with zinc target (2007)
  • Author(s): 小野秀樹, 中野拓也, 飯塚哲
  • Journal Title: Proceedings of the 24th Symp. on Plasma Processing, Osaka Pages: 51-52
• [Journal Article] Surface charge effect and surface modification by rf impulse discharge in a small-diameter tube (2007)
  • Author(s): Takumasa Muraoka and Satoru Iizuka
  • Journal Title: Proceedings of the 24th Symposium on Plasma Processing, Osaka Pages: 53-54
• [Journal Article] Deposition of ZnO nanowires in Energy-Controlled Hollow-Type Magnetron RF O_2/Ar Plasma (2007)
  • Author(s): Hideki Ono, Satoru Iizuka
  • Journal Title: The 20th Symposium on Plasma Science for Materials, Nagoya Pages: 134-134
• [Journal Article] MgO Microparticle Deposition by RF Impulse Discharge in a Small-Diameter Tube (2007)
  • Author(s): 村岡琢正, 飯塚哲
  • Journal Title: The 20th Symposium on Plasma Science for Materials, Nagoya Pages: 98-98
• [Journal Article] Electron-temperature control by varying dc voltage to a mesh grid covered by thin film in plasmas (2007)
  • Author(s): Kohgi Kato
  • Journal Title: Thin Solid Films 515 Pages: 4004-4097
  • Peer Reviewed
• [Journal Article] Effect of Surface Charge on Ignition of RF Impulse Discharge Used for Surface MgO Coating in A Small-Diameter Glass Tube (2007)
  • Author(s): Takumasa Muraoka
  • Journal Title: XXVIII International Conference on Phenomena in Ionized Gases Pages: 855-858
  • Peer Reviewed
• [Journal Article] Modification of inner surface of a small-diameter PTFE tube by RF impulse discharge with coaxial micro-electrodes (2007)
  • Author(s): Takumasa Muraoka
  • Journal Title: 18th International Symposium on Plasma Chemistry
  • Peer Reviewed
• [Journal Article] Deposition of ZnO in energy-controlled O_2/Ar hollow-type magnetron RF discharge plasma (2007)
  • Author(s): Hideki Ono
  • Journal Title: 18th International Symposium on Plasma Chemistry
  • Peer Reviewed
• [Journal Article] Deposition of ZnO nanowires in Energy-Controlled Hollow-Type Magnetron RF O_2/Ar Plasma (2007)
  • Author(s): Hideki Ono
  • Journal Title: 20th Symposium on Plasma Science for Materials Pages: 134-134
  • Peer Reviewed
• [Journal Article] MgO Microparticle Deposition by RF Impulse Discharge in a Small-Diameter Tube (2007)
  • Author(s): Takumasa Muraoka
  • Journal Title: 20th Symposium on Plasma Science for Materials Pages: 98-98
  • Peer Reviewed
• [Journal Article] Characteristics of Ar/O2 hollow-type magnetron rf discharge plasma with zinc target (2007)
  • Author(s): Hideki Ono
  • Journal Title: Proceedings of the 24th Symposium on Plasma Processing Pages: 51-52
• [Journal Article] Surface charge effect and surface modification by rf impulse discharge in a small-diameter tube (2007)
  • Author(s): Takumasa Muraoka
  • Journal Title: Proceedings of the 24th Symposium on Plasma Processing Pages: 53-54
• [Journal Article] Characteristics of a micro-plasma produced by atmospheric pressure RF impulse discharge using coaxial micro-electrode (2006)
  • Author(s): Yasuhiro Tanaka
  • Journal Title: Thin Solid Films 506-507 Pages: 436-439
• [Journal Article] Characteristics of atmospheric pressure micro-discharge in small diameter glass tube by using rf-impulse (2006)
  • Author(s): Takumasa Muraoka
  • Journal Title: Abstracts of the 8th Asia-Pacific Conference on Plasma Science and Technology and 19th Symposium on Plasma Science for Materials Pages: 58-58
• [Presentation] ホローマグネトロンO_2/Ar高周波プラズマ中ZnOナノワイヤーの生成, プラズマ科学シンポジウム (2009)
  • Author(s): 小野秀樹, 飯塚哲
  • Organizer: 第26回プラズマプロセッシング研究会
  • Place of Presentation: 名古屋大学豊田講堂シンポジオン
  • Year and Date: 2009-02-02
• [Presentation] 高周波インパルスプラズマCVDによる微細ガラス管内MgO薄膜の生成, プラズマ科学シンポジウム (2009)
  • Author(s): 樫村透, 飯塚哲
  • Organizer: 第26回プラズマプロセッシング研究会
  • Place of Presentation: 名古屋大学豊田講堂シンポジオン
  • Year and Date: 2009-02-02
• [Presentation] ホローマグネトロン02/Ar高周波プラズマ中ZnOナノワイヤーの生成 (2009)
  • Author(s): 小野秀樹
  • Organizer: プラズマ科学シンポジウム、第26回プラズマプロセッシング研究会
  • Place of Presentation: 名古屋大学豊田講堂シンポジオン, 名古屋
  • Year and Date: 2009-02-02
• [Presentation] 高周波インパルスプラズマCVDによる微細ガラス管内MgO薄膜の生成 (2009)
  • Author(s): 樫村透
  • Organizer: プラズマ科学シンポジウム、第26回プラズマプロセッシンゲ研究会
  • Place of Presentation: 名古屋大学豊田講堂シンポジオン, 名古屋
  • Year and Date: 2009-02-02
• [Presentation] Growth of ZnO nanowires in hollow-type Magnetron O_2/Ar plasmas (2008)
  • Author(s): 小野秀樹, 飯塚哲
  • Organizer: 9th Asia-Pacific Conference on Plasma Science and Technology
  • Place of Presentation: 黄山国際ホテル, 中国
  • Year and Date: 2008-10-08
• [Presentation] Spherical MgO microparticle deposition by RF impulse discharge with small coaxial electrode (2008)
  • Author(s): 村岡琢正, 樫村透, 飯塚哲
  • Organizer: 9th Asia-Pacific Conference on Plasma Science and Technology
  • Year and Date: 2008-10-08
• [Presentation] Growth of ZnO nanawires in hollow-type Magnetton O2 / Ar plasmas (2008)
  • Author(s): 小野秀樹
  • Organizer: 9th Asia-Pacific Conference on Plasma Science and Technology
  • Place of Presentation: 黄山国際ホテル, 黄山(中国)
  • Year and Date: 2008-10-08
• [Presentation] Spherical MgO microparticle deposition by RF impulse discharge with small coaxial electrode (2008)
  • Author(s): 村岡琢正
  • Organizer: 9th Asia-Pacific Conference on Plasma Science and Technology
  • Place of Presentation: 黄山国際ホテル, 黄山(中国)
  • Year and Date: 2008-10-08
• [Presentation] RF impulse barrier discharge for MgO microparticle production in sub-atmospheric pressure regime (2008)
  • Author(s): 村岡琢正, 飯塚哲
  • Organizer: 14th Inter. Conf. on Plasma Physics
  • Place of Presentation: 福岡国際会議センター
  • Year and Date: 2008-09-08
• [Presentation] RF impulse barrier discharge for MgO microparticle production in sub-atmospheric pressure regime (2008)
  • Author(s): 村岡琢正
  • Organizer: 14th International Conference on Plasma Physics
  • Place of Presentation: 福岡国際会議センター, 福岡
  • Year and Date: 2008-09-08
• [Presentation] Electron temperature control by applying dc voltage to a mesh grid blanketed with thin films in reactive nlasmas (2008)
  • Author(s): 加藤公義
  • Organizer: 14th International Conference on Plasma Physics
  • Place of Presentation: 福岡国際会議センター, 福岡
  • Year and Date: 2008-09-08
• [Presentation] Production of ZnO Nanowires in Hollow-Type Magnetron O_2/Ar RF Plasma (2008)
  • Author(s): 小野秀樹, 飯塚哲
  • Organizer: International Interdisci- plinary-Symp. on Gaseous and Liquid Plasmas
  • Place of Presentation: ホテルクレセント, 秋保, 仙台
  • Year and Date: 2008-09-05
• [Presentation] MgO Microparticle Deposition by RF Impulse Discharge in Small Coaxial Electrode System (2008)
  • Author(s): 村岡琢正, 樫村透, 飯塚哲
  • Organizer: International Interdisciplinary-Symp. on Gaseous and Liquid Plasmas
  • Place of Presentation: ホテルクレセント, 秋保, 仙台
  • Year and Date: 2008-09-05
• [Presentation] Production of ZnO Nanowires in Hollow-Type Magnetron O2 / Ar RF Plasma (2008)
  • Author(s): 小野秀樹
  • Organizer: International Interdisciplinary-Symposium on Gaseous and Liquid Plasmas
  • Place of Presentation: ホテルクレセント, 秋保, 仙台
  • Year and Date: 2008-09-05
• [Presentation] MgO Microparticle Deposition by RF Impulse Discharge in Small Coaxial flectrode System (2008)
  • Author(s): 村岡琢正
  • Organizer: International Interdisciplinary-Symposium on Gaseous and Liouid Plasmas
  • Place of Presentation: ホテルクレセント, 秋保, 仙台
  • Year and Date: 2008-09-05
• [Presentation] Decomposition of Carbon Dioxide by CO2 / H2O Plasma in a Narrow Tube (2008)
  • Author(s): 佐藤元紀
  • Organizer: International Interdisciplinary-Symposium on Gaseous and Liquid Plasmas
  • Place of Presentation: ホテルクレセント, 秋保, 仙台
  • Year and Date: 2008-09-05
• [Presentation] ホローマグネトロンO2/Ar高周波プラズマ中ZnO ナノワイヤーの成長メカニズム (2008)
  • Author(s): 小野秀樹, 飯塚哲
  • Organizer: 応用物理学会
  • Place of Presentation: 中部大学
  • Year and Date: 2008-09-02
• [Presentation] ホローマグネトロン02/Ar高周波プラズマ中ZnOナノワイヤーの成長メカニズム (2008)
  • Author(s): 小野秀樹
  • Organizer: 応用物理学会
  • Place of Presentation: 中部大学, 名古屋
  • Year and Date: 2008-09-02
• [Presentation] ホローマグネトロンO_2/Ar高周波プラズマ中ZnOナノワーヤー成長に対するガス比依存性 (2008)
  • Author(s): 小野秀樹, 飯塚哲
  • Organizer: 日本原子力学会, プラズマ・核融合学会
  • Place of Presentation: 青森市民ホール
  • Year and Date: 2008-06-19
• [Presentation] ホローマグネトロン02/Ar高周波プラズマ中ZnOナノワーヤー成長に対するガス比依存性 (2008)
  • Author(s): 小野秀樹
  • Organizer: 日本原子力学会、プラズマ・核融合学会
  • Place of Presentation: 青森市民ホール, 青森
  • Year and Date: 2008-06-19
• [Presentation] エネルギー制御型ホローマグネトロン高周波放電プラズマによるZnOナノワイヤー成長過程 (2008)
  • Author(s): 小野秀樹, 飯塚哲
  • Organizer: 第25回プラズマプロセシング研究会
  • Place of Presentation: 山口県教育会館
  • Year and Date: 2008-01-23
• [Presentation] 高周波インパルス放電を用いた細管内炭酸ガス水蒸気プラズマの生成 (2008)
  • Author(s): 佐藤元紀
  • Organizer: 第25回プラズマプロセシング研究会
  • Place of Presentation: 山口県教育会館
  • Year and Date: 2008-01-23
• [Presentation] エネルギー制御型ホローマグネトロン高周波プラズマによるZnOナノワーヤー生成機構 (2007)
  • Author(s): 小野秀樹, 飯塚哲
  • Organizer: プラズマ・核融合学会
  • Place of Presentation: イーグレ姫路
  • Year and Date: 2007-11-27
• [Presentation] エネルギー制御型ホローマグネトロン高周波プラズマによるZnOナノワーヤー生成機構 (2007)
  • Author(s): 小野秀樹
  • Organizer: プラズマ・悪融合学会第24回年会
  • Place of Presentation: イーグレ姫路
  • Year and Date: 2007-11-27
• [Presentation] 小型同軸型高周波インパルス放電によるMgOマイクロ微粒子の生成 (2007)
  • Author(s): 村岡琢正, 飯塚哲
  • Organizer: 第68回応用物理学会
  • Place of Presentation: 北海道工業大学
  • Year and Date: 2007-09-04
• [Presentation] 小型同軸型公衆はインパルス放電によるMgOマイクロ微粒子の生成 (2007)
  • Author(s): 村岡琢正
  • Organizer: 第68回応用物理学会
  • Place of Presentation: 北海道工業大学
  • Year and Date: 2007-09-04
• [Presentation] Modification of inner surface of a small-diameter PTFE tube by RF impulse discharge with coaxial micro-electrodes (2007)
  • Author(s): 村岡琢正, 飯塚哲
  • Organizer: 18th International Symposium on Plasma Chemistry
  • Place of Presentation: 京都大学
  • Year and Date: 2007-08-27
• [Presentation] Deposition of ZnO in energy-controlled O_2/Ar hollow-type magnetron RF discharge plasma (2007)
  • Author(s): 小野秀樹, 飯塚哲
  • Organizer: 18th International Symposium on Plasma Chemistry
  • Place of Presentation: 京都大学
  • Year and Date: 2007-08-27
• [Presentation] Effect of Surface Charge on Ignition of RF Impulse Discharge Used for Surface MgO Coating in A Small-Diameter Glass Tube (2007)
  • Author(s): 村岡琢正, 飯塚哲
  • Organizer: XXVIII Inter. Conf. on Phenomena in Ionized Gases
  • Place of Presentation: Top Hotel, プラハ(チェコ)
  • Year and Date: 2007-07-15
• [Presentation] Effect of Surface Charge on Ignition of RF Impulse Discharge Used for Surface MgO Coating in A Small-Diameter Glass Tube (2007)
  • Author(s): Takumasa Muraoka
  • Organizer: XXVIII International Conference on Phenomena in Ionized Gases
  • Place of Presentation: Top Hotel,プラハ(チェコ)
  • Year and Date: 2007-07-15
• [Presentation] Deposition of ZnO nanowires in Energy-Controlled Hollow-Type Magnetron RF O_2/Ar Plasma (2007)
  • Author(s): 小野秀樹, 飯塚哲
  • Organizer: 20th Symposium on Plasma Science for Materials
  • Place of Presentation: 名古屋大学
  • Year and Date: 2007-06-21
• [Presentation] MgO Microparticle Deposition by RF Impulse Discharge in a Small-Diameter Tube (2007)
  • Author(s): 村岡琢正, 飯塚哲
  • Organizer: 20th Symposium on Plasma Science for Materials
  • Place of Presentation: 名古屋大学
  • Year and Date: 2007-06-21
• [Presentation] エネルギー制御型ホローマグネトロンO_2/Ar高周波プラズマの特性とZnO生成 (2007)
  • Author(s): 小野秀樹, 飯塚哲
  • Organizer: 第54回応用物理学会
  • Place of Presentation: 青山学院大学
  • Year and Date: 2007-03-27
• [Presentation] 小型同軸型インパルス放電による細管内表面改質 (2007)
  • Author(s): 村岡琢正, 飯塚哲
  • Organizer: 第54回応用物理学会
  • Place of Presentation: 青山学院大学
  • Year and Date: 2007-03-27
• [Presentation] Characteristics of Ar/O_2hollow-type magnetron rf discharge plasma with zinc target (2007)
  • Author(s): 小野秀樹, 中野拓也, 飯塚哲
  • Organizer: 24th Symp. on Plasma Processing
  • Place of Presentation: 大阪, 千里
  • Year and Date: 2007-01-19
• [Presentation] Surface charge effect and surface modification by rf impulse discharge in a small-diameter tube (2007)
  • Author(s): 村岡琢正, 飯塚哲
  • Organizer: 24th Symp. on Plasma Processing
  • Place of Presentation: 大阪, 千里
  • Year and Date: 2007-01-19
• [Presentation] 微細ガラス管内高周波インパルスマイクロ放電の周波数特性とMgO薄膜形成 (2006)
  • Author(s): 村岡琢正, 飯塚哲
  • Organizer: 第67回応用物理学会
  • Place of Presentation: 立命館大学
  • Year and Date: 2006-08-29
• [Presentation] Characteristics of atmospheric pressure micro-discharge in small diameter glass tube by using rf-impulse (2006)
  • Author(s): 村岡琢正, 飯塚哲
  • Organizer: 8th Asia-Pacific Conference on Plasma Science and Technology and 19th Symposium on Plasma Science for Materials
  • Place of Presentation: Cairns, Australia
  • Year and Date: 2006-07-03
• [Patent(Industrial Property Rights)] 酸化物中空粒子, その製造方法及び酸化物中空粒子製造装置 (2008)
  • Inventor(s): 飯塚哲
  • Industrial Property Rights Holder: 飯塚哲
  • Industrial Property Number: 2008-293788
  • Filing Date: 2008-11-17
• [Patent(Industrial Property Rights)] 酸化物中空粒子、その製造方法及び酸化物中空粒子製造装置 (2008)
  • Inventor(s): 飯塚哲
  • Industrial Property Rights Holder: 飯塚哲
  • Filing Date: 2008-11-16
• [Patent(Industrial Property Rights)] 微細管内プラズマ発生法とこれを用いた薄膜堆積方法, 微細管内壁面改質方法 (2007)
  • Inventor(s): 飯塚哲
  • Industrial Property Rights Holder: 飯塚哲
  • Patent Publication Number: 2008-192567
  • Filing Date: 2007-02-07
• [Patent(Industrial Property Rights)] 微細管内プラズマ発生法と微細管内壁表面改質法 (2007)
  • Inventor(s): 飯塚哲
  • Industrial Property Rights Holder: 飯塚哲
  • Industrial Property Number: 2007-028491
  • Filing Date: 2007-02-07