Formation of rugate-type multilayered porous silicon aiming at application to sensors

• Project/Area Number: 18350107
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Inorganic industrial materials
• Research Institution: Kyoto University
• Principal Investigator: OGATA Yukio Kyoto University, エネルギー理工学・研究所, 教授 (30152375)
• Co-Investigator(Kenkyū-buntansha): SAKKA Tetsuo 京都大学, エネルギー理工学・研究所, 准教授 (10196206) ; FUKAMI Kazuhiro 京都大学, エネルギー理工学・研究所, 助教 (60452322)
• Project Period (FY): 2006 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥17,140,000 (Direct Cost: ¥14,800,000、Indirect Cost: ¥2,340,000); Fiscal Year 2008: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000); Fiscal Year 2007: ¥6,500,000 (Direct Cost: ¥5,000,000、Indirect Cost: ¥1,500,000); Fiscal Year 2006: ¥7,000,000 (Direct Cost: ¥7,000,000)
• Keywords: 多孔質シリコン / 半導体多層膜 / 光学センサー / 陽極酸化

Research Abstract

電気化学的にシリコン表面を多孔質化し、その多孔構造を正弦波的に変化させた多層構造(ルゲート型構造)を作製した。ルゲート型構造は光学フィルターとして働く。アルコール蒸気環境下において、多孔層内に物質が凝縮することにより多層構造の屈折率が変化する。この結果生じる反射光の波長変化をアルコール蒸気の検出に応用した。センシングを目的とする多層構造の構造最適化を図り、物質の検出濃度限界を明らかにした。

Research Products

• [Journal Article] Preparation and Optical Properties of Porous Silicon Rugate-Type Multilayers with Different Pore Sizes (2009)
  • Author(s): M. S. Salem, M. J. Sailor, K. Fukami, T. Sakka, Y. H. Ogata
  • Journal Title: Physica Status Solidi C 6 Pages: 1620-1623
  • Peer Reviewed
• [Journal Article] Cylindrical pore arrays in silicon with intermediate nano-sizes: A template for nanofabrication and multilayer applications (2008)
  • Author(s): F. A. Harraz, S. M. El-Sheikh, T. Sakka, and Y.H. Ogata
  • Journal Title: Electrochimica Acta 53 Pages: 6444-6451
  • Peer Reviewed
• [Journal Article] Sensitivity of porous silicon rugate filters for chemical vapor detection (2008)
  • Author(s): M. S. Salem, M. J. Sailor, K. Fukami, T. Sakka, and Y. H. Ogata
  • Journal Title: Journal of Applied Physics 103
  • Peer Reviewed
• [Journal Article] Hybrid nanostructure of polypyrrole and porous silicon prepared by galvanostatic technique (2008)
  • Author(s): F.A. Harraz, M.S. Salem, T.Sakka, Y.H. Ogata
  • Journal Title: Electrochimica Acta 53 Pages: 3734-3740
  • Peer Reviewed
• [Journal Article] Electrochemically driven intrusion of silver particles into silicon under polarization (2008)
  • Author(s): Y. L. Kawamura, K. Fukami, T. Sakka, and Y. H. Ogata
  • Journal Title: Electrochemistry Communications 10 Pages: 346-349
  • Peer Reviewed
• [Journal Article] Fine-tuning in size and surface morphology of rod-shaped polypyrrole using porous silicon as template (2008)
  • Author(s): K. Fukami, F. A. Harraz, T. Yamauchi, T. Sakka , and Y. H. Ogata
  • Journal Title: Electrochemistry Communications 10 Pages: 56-60
  • Peer Reviewed
• [Journal Article] Hybrid Nanostructure of Polypyrrole and Porous Silicon Prepared by Galvanostatic Technique (2008)
  • Author(s): F. A. Harraz, M. S. Salem. T. Sakka, Y. H. Ogata
  • Journal Title: Electrochimica Acta 53 Pages: 3734-3740
  • Peer Reviewed
• [Journal Article] Sensitivity of Porous Silicon Rugate Filters for Chemical Vapor Detection (2008)
  • Author(s): M. S. Salem, M. J. Sailor, K. Fukami, T. Sakka, Y. H. Ogata
  • Journal Title: Journal of Applied Physics 103 Pages: 83516-83516
  • Peer Reviewed
• [Journal Article] Cylindrical Pore Arrays in Silicon with Intermediate Nano-Sizes : A Template for Nanofabrication and (2008)
  • Author(s): F. A. Harraz, S. M. El-Sheikh, T. Sakka, Y. H. Ogata
  • Journal Title: Electrochimica Acta 53 Pages: 6444-6451
  • Peer Reviewed
• [Journal Article] Fine-tuning in size and surface morphology of rod-shaped polypyrrole using porous silicon as template (2008)
  • Author(s): K. Fukami, F.A. Harraz, T. Yamauchi, T. Sakka and Y.H. Ogata
  • Journal Title: Electrochemisistry Communications 10 Pages: 56-60
  • Peer Reviewed
• [Journal Article] Electrochemically driven intrusion of silver particles into silicon under polarization (2008)
  • Author(s): Y.L. Kawamura, K. Fukami, T. Sakka, and Y.H. Ogata
  • Journal Title: Electrochemistry Communications 10 Pages: 346-349
  • Peer Reviewed
• [Journal Article] Sensing of chemical vapor using a porous multilayer prepared from lightly doped silicon (2007)
  • Author(s): M. S. Salem, M. J. Sailor, F. A. Harraz, T. Sakka, and Y. H. Ogata
  • Journal Title: Physica Status Solidi C 4 Pages: 2073-2077
  • Peer Reviewed
• [Journal Article] Electrochemical preparation of a rugate filter in silicon and its deviation from the ideal structure (2007)
  • Author(s): M. S. Salem, M. J. Sailor, T. Sakka, and Y. H. Ogata
  • Journal Title: Journal of Applied Physics 101
  • Peer Reviewed
• [Journal Article] Electrochemical formation of porous silicon with medium-sized pores (2007)
  • Author(s): Y. H. Ogata, A. Koyama, F. A. Harraz, M. S. Salem, and T. Sakka
  • Journal Title: Electrochemistry 75 Pages: 270-272
  • NAID: 10018294877
  • Peer Reviewed
• [Journal Article] Sensing of chemical vapor using a porous multilayer prepared from lightly doped silicon (2007)
  • Author(s): M.S. Salem, M.J. Sailor, F.A. Harraz, T. Sakka, and Y.H. Ogata
  • Journal Title: Physica Status Solidi C 4 Pages: 2073-2077
  • Peer Reviewed
• [Journal Article] Electrochemical Formation of Porous Silicon with Medium-Sized Pores (2007)
  • Author(s): Y.H.Ogata, A.Koyama, F.A.Harraz, M.S.Salem, T.Sakka
  • Journal Title: Electrochemistry 75・3 Pages: 270-272
  • NAID: 10018294877
• [Journal Article] Electrochemical Preparation of a Rugate Filter in Silicon and Its Deviation from the Ideal Structure (2007)
  • Author(s): M.S.Salem, M.J.Sailor, T.Sakka, Y.H.Ogata
  • Journal Title: Journal of Applied Physics 101・6
• [Journal Article] Electrochemical metal deposition on silicon (2006)
  • Author(s): Y. H. Ogata, K. Kobayashi, and M. Motoyama
  • Journal Title: Current Opinion in Solid State and Materials Science 10 Pages: 163-172
  • Peer Reviewed
• [Journal Article] Electrochemical stabilization of porous silicon multilayers for sensing various chemical compounds (2006)
  • Author(s): M. S. Salem, M. J. Sailor, F. A. Harraz, T. Sakka, and Y. H. Ogata
  • Journal Title: Journal of Applied Physics 100
  • Peer Reviewed
• [Journal Article] Electrochemical Stabilization of Porous Silicon Multilayers for Sensing Various Chemical Compounds (2006)
  • Author(s): M.S.Salem, M.J.Sailor, F.A.H arraz, T.Sakka, Y.H.Ogata
  • Journal Title: Journal of Applied Physics 100・8
• [Presentation] 異なる孔径をもつルゲート型多孔質シリコン多層膜の作製と光学特性 (2009)
  • Author(s): M. S. M. Salem, M. J. Sailor, 深見一弘, 作花哲夫, 尾形幸生
  • Organizer: 表面技術協会第119回講演大会
  • Place of Presentation: 山梨大学, 甲府市
  • Year and Date: 2009-03-17
• [Presentation] 異なる孔径をもつルゲート型多孔質シリコン多層膜の作製と光学特性 (2009)
  • Author(s): M. S. M. Salem, M. J. Sailor, 深見一弘, 作花哲夫, 尾形幸生
  • Organizer: 表面技術協会第119回講演大会
  • Place of Presentation: 山梨大学, 甲府
  • Year and Date: 2009-03-17
• [Presentation] Formation mechanism of porous silicon with medium pores: the role of KMnO_4 (2008)
  • Author(s): K. Fukami, H. Kamakura, T. Sakka, Y. H. Ogata
  • Organizer: Pacific Rim Meeting on Electrochemical and Solid-State Science
  • Place of Presentation: ホノルル, 米国
  • Year and Date: 2008-10-14
• [Presentation] Formation mechanism of porous silicon with medium pores : the role of KMnO4 (2008)
  • Author(s): K. Fukami, H. Kamakura. T. Sakka. Y. H. Ogata
  • Organizer: Pacific Rim Meeting on Electrochemical and Solid-State Science
  • Place of Presentation: ホノルル, 米国
  • Year and Date: 2008-10-14
• [Presentation] Structure formation in silicon (2008)
  • Author(s): Y. H. Ogata
  • Organizer: カリフォルニア大学サンディエゴ校化学・生物化学科セミナー
  • Place of Presentation: UCSD, ラホヤ, 米国
  • Year and Date: 2008-10-10
• [Presentation] Structure formation in silicon (2008)
  • Author(s): Y. H. Ogata
  • Organizer: カリフォルニア大学サンデエイゴ校化学・生物化学科セミナー
  • Place of Presentation: UCSD, ラホヤ, 米国
  • Year and Date: 2008-10-10
• [Presentation] (2008)
  • Author(s): M. S. M. Salem, M. J. Sailor, 深見一弘, 作花哲夫, 尾形幸生
  • Organizer: 表面技術協会第118回講演大会
  • Place of Presentation: 近畿大学, 東大阪市
  • Year and Date: 2008-09-01
• [Presentation] Pore formation in silicon and the pore filling (2008)
  • Author(s): Y. H. Ogata
  • Organizer: International Symposium on Anodizing Science and Technology
  • Place of Presentation: 北海道
  • Year and Date: 2008-07-25
• [Presentation] Pore formation in silicon and the pore filling (2008)
  • Author(s): Y. H. Ogata
  • Organizer: International Symposium on Anodizing Science and Technology
  • Place of Presentation: ルスツ, 北海道
  • Year and Date: 2008-07-25
• [Presentation] Pore formation on p-type Si by silver-assisted electrolysis (2008)
  • Author(s): M. L. Chourou, Y. L. Kawamura, K. Fukami, T. Sakka, Y. H. Ogata
  • Organizer: 電気化学会第75回大会
  • Place of Presentation: 山梨大学, 甲府市
  • Year and Date: 2008-03-31
• [Presentation] Pore formation on p-type Si by silver-assisted electrolysis (2008)
  • Author(s): M.L. Chourou^*, Y.L. Kawamura, K. Fukami, T. Sakka, Y.H. Ogata
  • Organizer: 電気化学会第75回大会
  • Place of Presentation: 山梨大学,甲府市
  • Year and Date: 2008-03-31
• [Presentation] Preparation and optical properties of porous silicon rugate-type multilayers with different pore sizes (2008)
  • Author(s): M. S. Salem, M. J. Sailor, K. Fukami, T. Sakka, Y. H. Ogata
  • Organizer: The 6th International Conference of Porous Semiconductors-Science and Technology
  • Place of Presentation: サ・コマ、スペイン
  • Year and Date: 2008-03-11
• [Presentation] 山内健、多孔質シリコンへのポリピロールの電解重合 (2007)
  • Author(s): 深見一弘, 作花哲夫, 尾形幸生
  • Organizer: 第9回関西表面技術フォーラム
  • Place of Presentation: 近畿大学, 東大阪市
  • Year and Date: 2007-12-11
• [Presentation] 多孔質シリコンへのポリピロールの電解重合 (2007)
  • Author(s): 深見一弘^*, 作花哲夫, 尾形幸生, 山内健
  • Organizer: 第9回関西表面技術フォーラム
  • Place of Presentation: 近畿大学,東大阪市
  • Year and Date: 2007-12-11
• [Presentation] Rugate-type multilayers of porous silicon and their optical properties (2007)
  • Author(s): M. S. Salem, M. J. Sailor, T. Sakka, and Y. H Ogata
  • Organizer: International Workshop on Nanostructure & Nanoelectronics
  • Place of Presentation: 東北大学, 仙台市
  • Year and Date: 2007-11-21
• [Presentation] Rugate-type multilayers of porous silicon and their optical properties (2007)
  • Author(s): M.S. Salem, M.J. Sailor, T. Sakka, and Y.H. Ogata^*
  • Organizer: International Workshop on Nanostructure & Nanoelectronics
  • Place of Presentation: 東北大学,仙台市
  • Year and Date: 2007-11-21
• [Presentation] ルゲート型多孔質シリコン多層構造の作製 (2007)
  • Author(s): M. S. M. Salem,M. J. Sailor, 作花哲夫, 尾形幸生
  • Organizer: 表面技術協会第116回講演大会
  • Place of Presentation: 長崎大学, 長崎市
  • Year and Date: 2007-09-19
• [Presentation] ルゲート型多孔質シリコン多層構造の作製 (2007)
  • Author(s): M.S.M. Salem, M.J. Sailor, 作花哲夫, 尾形幸生^*
  • Organizer: 表面技術協会第116回講演大会
  • Place of Presentation: 長崎大学,長崎市
  • Year and Date: 2007-09-19
• [Presentation] 電解条件下における銀微粒子のシリコン中への貫入現象 (2007)
  • Author(s): 川村洋介, 深見一弘, 作花哲夫, 尾形幸生
  • Organizer: 表面技術協会第116回講演大会
  • Place of Presentation: 長崎大学, 長崎市
  • Year and Date: 2007-09-18
• [Presentation] 電解条件下における銀微粒子のシリコン中への貫入現象 (2007)
  • Author(s): 川村洋介^*, 深見一弘, 作花哲夫, 尾形幸生
  • Organizer: 表面技術協会第116回講演大会
  • Place of Presentation: 長崎大学,長崎市
  • Year and Date: 2007-09-18
• [Presentation] Metal deposition on silicon (2007)
  • Author(s): Y. H. Ogata
  • Organizer: 2nd German-French Summer School on Electrochemistry & Nanotechnologies
  • Place of Presentation: ロザリ, フランス
  • Year and Date: 2007-09-04
• [Presentation] Metal deposition on silicon (2007)
  • Author(s): Y.H. Ogata^*
  • Organizer: 2nd German-French Summer School on Electrochemistry & Nanotechnologies
  • Place of Presentation: ロザリ,フランス
  • Year and Date: 2007-09-04
• [Presentation] Electrochemical preparation of an ideally-structured porous silicon rugate filter (2007)
  • Author(s): M. S. Salem, M. J. Sailor, T. Sakka,Y. H. Ogata
  • Organizer: 5th Spring Meeting of International Society of Electrochemistry
  • Place of Presentation: ダブリン, アイルランド
  • Year and Date: 2007-05-03
• [Presentation] Electrochemical preparation of an ideally-structured porous silicon rugate filter (2007)
  • Author(s): M.S. Salem^*, M.J. Sailor, T. Sakka, Y.H. Ogata
  • Organizer: 5th Spring Meeting of International Society of Electrochemistry
  • Place of Presentation: ダブリン、アイルランド
  • Year and Date: 2007-05-03
• [Presentation] Formation of meso- and micro-porous silicon multilayers for sensing chemical vapors (2007)
  • Author(s): M. S. Salem, M. J. Sailor, T. Sakka, Y. H. Ogata
  • Organizer: The Joint International Conference of The 4th IGNOIE-COE06 & SOIM-COE06
  • Place of Presentation: 仙台エクセルホテル東急, 仙台
  • Year and Date: 2007-01-24
• [Presentation] 多様な形態を持つ多孔質シリコンの作製と応用 (2007)
  • Author(s): 尾形幸生
  • Organizer: 京都発明協会第27期新工業材料ゼミナール(第4回)
  • Place of Presentation: 京都リサーチパーク、京都市
  • Year and Date: 2007-01-24
• [Presentation] Electrochemical preparation of a rugate filter in silicon and its deviation from ideal structure (2006)
  • Author(s): M. S. Salem, M. J. Sailor, T. Sakka, Y. H. Ogata
  • Organizer: 2006年電気化学秋季大会
  • Place of Presentation: 同志社大学京田辺キャンパス, 京田辺市
  • Year and Date: 2006-09-14
• [Presentation] Photo-controlled metal deposition on silicon and control of light using multilayered porous silicon (2006)
  • Author(s): Y. H. Ogata
  • Organizer: KIFEE (Kyoto International Forum for Environment and Energy) Symposium, September 6-8
  • Place of Presentation: ノルウェイ科学技術大学, トロンハイム, ノルウェイ
  • Year and Date: 2006-09-08
• [Book] 「多孔体の精密制御と機能・物性評価」中の「多孔質シリコン」と「多孔質シリコンの光学特性」 (2008)
  • Author(s): 尾形幸生
  • Publisher: サイエンス&テクノロジー
• [Book] 「多孔体の精密制御と機能・物性評価」中の「多孔質シリコン」と「多孔質シリコンの光学特性」(分担) (2008)
  • Author(s): 尾形幸生
  • Total Pages: 578
  • Publisher: サイエンス&テクノロジー