Development of Photonic Integrated Circuits for Silicon Photonics

• Project/Area Number: 18360033
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Applied optics/Quantum optical engineering
• Research Institution: Tokyo Institute of Technology
• Principal Investigator: MIZUMOTO Tetsuya Tokyo Institute of Technology, 大学院・理工学研究科, 教授 (00174045)
• Project Period (FY): 2006 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥16,990,000 (Direct Cost: ¥15,100,000、Indirect Cost: ¥1,890,000); Fiscal Year 2008: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000); Fiscal Year 2007: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000); Fiscal Year 2006: ¥8,800,000 (Direct Cost: ¥8,800,000)
• Keywords: 光集積回路 / シリコンフォトニクス / シリコン細線導波路 / 導波路型光アイソレータ / 磁気光学ガーネット / ダイレクトボンディング / 表面活性化接合 / シリコン集積回路 / 導波路型光サーキュレータ / 分布反射器 / グレーティング

Research Abstract

シリコン光集積回路を実現するための基礎として、シリコン導波路型光アイソレータと発光デバイスについて研究を実施した。特に、これらの光デバイスを形成するために必要な、磁気光学ガーネットやIII-V族化合物半導体をシリコン導波層上に接合するために、表面活性化接合法を開拓した。さらに、試作したシリコン導波路型光アイソレータにおいてアイソレーション21dBの良好な特性を実現し、発光デバイスを形成するための分布反射器をシリコン導波路上に形成した。

Research Products

• [Journal Article] Magneto-optical isolator with silicon waveguides fabricated by direct bonding (2008)
  • Author(s): Y. Shoji, T. Mizumoto, H. Yokoi, I-Wei Hsieh, and Richard M. Osgood, Jr.
  • Journal Title: Applied Physics Letters vol.92 Pages: 71117-71117
  • Peer Reviewed
• [Journal Article] Magneto-optical isolator with silicon waveguides fabricated by direct bonding (2008)
  • Author(s): Y. Shoji, T. Mizumoto, H. Ybkoi, I-Wei Hsieh, and Richard M. Osgood, Jr.
  • Journal Title: Applied Physics Letters 92 Pages: 71117-71117
  • Peer Reviewed
• [Journal Article] Wideband operation of Mach-Zehnder interferometric magneto-optical isolator using phase adjustment (2007)
  • Author(s): Y. Shoji and T. Mizumoto
  • Journal Title: Optics Express vol.15 Pages: 13446-13450
  • Peer Reviewed
• [Journal Article] Polarization-independent magnetooptical waveguide isolator using TM-mode nonreciprocal phase shift (2007)
  • Author(s): Y. Shoji, I-Wei Hsieh, Richard M. Osgood, Jr., and T. Mizumoto
  • Journal Title: IEEE/OSA Journal of Lightwave Technology vol.25, No.10 Pages: 3108-3113
  • Peer Reviewed
• [Journal Article] Ultrawideband design of waveguide magneto-optical isolator operating in 1.31・m and 1.55・m band (2007)
  • Author(s): Y. Shoji and T. Mizumoto
  • Journal Title: Optics Express vol.15 Pages: 639-645
  • Peer Reviewed
• [Journal Article] Wideband operation of Mach-Zehnder interferometric magneto-optical isolator using phase adjustment (2007)
  • Author(s): Y. Shoji and T. Mizumoto
  • Journal Title: Optics Express 15 Pages: 13446-13450
  • Peer Reviewed
• [Journal Article] (招待講演)異種結晶接合による光アイソレータとLD集積化 (2007)
  • Author(s): 水本
  • Journal Title: レーザー学会学術講演会第27回年次大会
• [Journal Article] Wideband design of nonreciprocal phase shift optical isolators using phase adjustment in Mach-Zehnder interferometers (2006)
  • Author(s): Y. Shoji and T. Mizumoto
  • Journal Title: Applied Optics vol.45, No.27 Pages: 7144-7150
  • Peer Reviewed
• [Journal Article] Demonstration of interferometric waveguide optical isolator with a unidirectional magnetic field (2006)
  • Author(s): Y.Yazaki, Y.Shoji, T.Mizumoto
  • Journal Title: Technical Digest of the 12th Microoptics Conference (MOC'06), Seoul(Korea) Pages: 66-67
  • NAID: 110004719486
• [Journal Article] Novel polarization-independent waveguide optical isolator employing nonreciprocal phase shift (2006)
  • Author(s): Y.Shoji, T.Mizumoto
  • Journal Title: Technical Digest of the 12th Microoptics Conference (MOC'06), Seoul(Korea) Pages: 82-83
• [Journal Article] Wideband operation of magneto-optical isolator with phase adjusted Mach-Zehnder interferometer (2006)
  • Author(s): Y.Shoji, T.Mizumoto
  • Journal Title: 2006 IEEE LEOS Annual Meeting, Montreal(Canada)
• [Journal Article] 一方向磁界印加形干渉光アイソレータの動作検証 (2006)
  • Author(s): 矢崎, 庄司, 水本
  • Journal Title: 2006年秋季第67回応用物理学会講演会
• [Journal Article] 位相調整によるマッハツェンダー干渉型光アイソレータの広帯域化 (2006)
  • Author(s): 庄司, 水本
  • Journal Title: 2006年秋季第67回応用物理学会講演会
• [Journal Article] 半漏れ型光アイソレータの試作・特性評価 (2006)
  • Author(s): 水本, 斎藤, 武井
  • Journal Title: 2006年秋季第67回応用物理学会講演会
• [Journal Article] SOIグレーティング光導波路の製作 (2006)
  • Author(s): 武井, 水本
  • Journal Title: 2006年電子情報通信学会エレクトロニクスソサィエティ大会
• [Journal Article] 半漏れ型光アイソレータの試作 (2006)
  • Author(s): 水本, 斎藤, 武井
  • Journal Title: 2006年電子情報通信学会エレクトロニクスソサィエティ大会 Pages: 206-206
• [Journal Article] 非相反移相型光アイソレータの広帯域化の動作実証 (2006)
  • Author(s): 庄司, 水本
  • Journal Title: 2006年電子情報通信学会エレクトロニクスソサイエティ Pages: 207-207
• [Presentation] Optical isolator with SOI waveguide (2009)
  • Author(s): T. Mizumoto and Y. Shoji
  • Organizer: 2009 Optical Fiber Communication Conference(OFC2009)
  • Place of Presentation: San Diego, California, OWV3(Invited)
  • Year and Date: 2009-03-25
• [Presentation] (Invieted)Optical isolator with SOI waveguide (2009)
  • Author(s): T. Mizumoto, Y. Shoji
  • Organizer: 2009 Optical Fiber Communication Conference(OFC2009)
  • Place of Presentation: San Diego, USA
  • Year and Date: 2009-03-25
• [Presentation] シリコン導波路型光サーキュレータの提案 (2008)
  • Author(s): 武井, 佐々木, 桐田, 吉田, 水本
  • Organizer: 電子情報通信学会光エレクトロニクス研究会, 電子情報通信学会技術報告書
  • Place of Presentation: 東京(vol.108, OPE2008-136)(1-4)
  • Year and Date: 2008-12-19
• [Presentation] シリコン導波路型光サーキュレータの提案 (2008)
  • Author(s): 武井, 佐々木, 桐田, 古田, 水本
  • Organizer: 電子情報通信学会光エレクトロニクス研究会
  • Place of Presentation: 東京
  • Year and Date: 2008-12-19
• [Presentation] Optical isolators for integrated photonics (2008)
  • Author(s): T. Mizumoto
  • Organizer: Photonics
  • Place of Presentation: New Delhi(2008, WC2-2)(Invited)
  • Year and Date: 2008-12-17
• [Presentation] (Invited)Optical isolators for integrated photonics (2008)
  • Author(s): T. Mizumoto
  • Organizer: Photonics 2008
  • Place of Presentation: New Delhi, India
  • Year and Date: 2008-12-17
• [Presentation] Waveguide optical isolators for integrated optics (2008)
  • Author(s): T. Mizumoto, Y. Shoji, R. Takei, and K. Sakurai
  • Organizer: Asia Optical Fiber Communications & Optoelectronic Exposition & Conference(AOE 2008)
  • Place of Presentation: Shanghai, China, SuQ1(Invited)
  • Year and Date: 2008-11-02
• [Presentation] (Invited)Waveguide optical isolators for integrated optics (2008)
  • Author(s): T. Mizumoto, Y. Shoji, R. Takei, K. Sakurai
  • Organizer: Asia Optical Fiber Communications & Optoelectronic Exposition & Conference (AOE2008)
  • Place of Presentation: Shanghai, China
  • Year and Date: 2008-11-02
• [Presentation] Low temperature direct bonding and its application to photonic devices (2008)
  • Author(s): T. Mizumoto, R. Takei, Y. Shoji, and K. Sakurai
  • Organizer: The 214th Meeting of Electrochemical Society, Fourth International Symposium on Integrated Optoelectronics
  • Place of Presentation: Honolulu, Hawaii(2042)(Invited)
  • Year and Date: 2008-10-15
• [Presentation] (Invited)Low temperature direct bonding and its application to photonic devices (2008)
  • Author(s): T. Mizumoto, R. Takei, Y. Shoji, K. Sakurai
  • Organizer: The 214th Meeting of Electrochemical Society
  • Place of Presentation: Honolulu, USA
  • Year and Date: 2008-10-15
• [Presentation] Optical isolator for silicon-on-insulator circuits (2008)
  • Author(s): T. Mizumoto and Y. Shoji
  • Organizer: European Conference on Optical Communication(ECOC 2008)
  • Place of Presentation: Brussels, Belgium(Tu.4.C.1)(Invited)
  • Year and Date: 2008-09-23
• [Presentation] (Invited)Optical isolator for silicon-on-insulator circuits (2008)
  • Author(s): T. Mizumoto, Y. Shoji
  • Organizer: European Conference on Optical Communication (ECOC 2008)
  • Place of Presentation: Brussels, Belgium
  • Year and Date: 2008-09-23
• [Presentation] Si導波路光サーキュレータの提案 (2008)
  • Author(s): 武井, 庄司, 水本
  • Organizer: 2008年電子情報通信学会エレクトロニクスソサィエティ大会
  • Place of Presentation: 川崎(C-3-10)
  • Year and Date: 2008-09-16
• [Presentation] Si導波路光サーキュレータの提案 (2008)
  • Author(s): 武井, 庄司, 水本
  • Organizer: 2008年電子情報通信学会エレクトロニクスソサィエティ大会
  • Place of Presentation: 明治大学, 川崎市
  • Year and Date: 2008-09-16
• [Presentation] 非相反移相効果を用いたSi細線導波路型光サーキュレータの提案 (2008)
  • Author(s): 武井, 庄司, 水本
  • Organizer: 2008年秋季秋季第68回応用物理学会講演会
  • Place of Presentation: 名古屋(3-ZN-3)
  • Year and Date: 2008-09-03
• [Presentation] Si導波路上への磁性ガーネット直接接合を用いた干渉型光アイソレータ (2008)
  • Author(s): 庄司, 横井, I-Wei Hsieh, Richard M. Osgood, Jr., 水本
  • Organizer: 2008年秋季秋季第68回応用物理学会講演会
  • Place of Presentation: 名古屋(3a-ZN-2)
  • Year and Date: 2008-09-03
• [Presentation] 非相反移相効果を用いたSi線導波路型光サーキュレータの提案 (2008)
  • Author(s): 武井, 庄司, 水本
  • Organizer: 2008年秋季秋季第68回応用物理学会講演会
  • Place of Presentation: 中部大学, 名古屋市
  • Year and Date: 2008-09-03
• [Presentation] シリコン導波路型光非相反デバイス (2008)
  • Author(s): 水本, 庄司, 武井, 横井
  • Organizer: 電子情報通信学会第9回シリコン・フォトニクス研究会
  • Place of Presentation: 仙台(SiPH2008- 11)(招待講演)
  • Year and Date: 2008-07-19
• [Presentation] (招待講演)シリコン導波路型光非相反デバイス (2008)
  • Author(s): 水本, 庄司, 武井, 横井
  • Organizer: 電子情報通信学会第9回シリコン・フォトニクス研究会
  • Place of Presentation: 東北大学, 仙台市
  • Year and Date: 2008-07-19
• [Presentation] Waveguide optical isolators fabricated by direct bonding (2008)
  • Author(s): T. Mizumoto, Y. Shoji, and R. Takei
  • Organizer: Indium Phosphide and Related Materials (IPRM'08)
  • Place of Presentation: Versailles, France(WA3.1-Inv)(Invited)
  • Year and Date: 2008-05-28
• [Presentation] Integrated waveguide optical isolators : principle and history (2008)
  • Author(s): T. Mizumoto and Y. Shoji
  • Organizer: the 2008 Conference on Lasers and Electro-Optics(CLEO 2008), Symposium on Integrated Optical Isolators and Magneto-Optical Phenomena
  • Place of Presentation: San Jose, California(CThC1)(Invited)
  • Year and Date: 2008-05-28
• [Presentation] (Invited)Waveguide optical isolators fabricated by direct bonding (2008)
  • Author(s): T. Mizumoto, Y. Shoji, R. Takei
  • Organizer: Indium Phosphide and Related Materials (IPRM'O8)
  • Place of Presentation: Versailles, France
  • Year and Date: 2008-05-28
• [Presentation] Si導波路を用いた干渉型光アイソレータの動作実証 (2008)
  • Author(s): 庄司, 横井, I-Wei Hsieh, Richard M. Osgood, Jr., 水本
  • Organizer: 2008年電子情報通信学会総合全国大会
  • Place of Presentation: 北九州(C-3-29)
  • Year and Date: 2008-05-18
• [Presentation] (Invited)Integrated waveguide optical isolators : principle and history (2008)
  • Author(s): T. Mizumoto, Y. Shoji
  • Organizer: the 2008 Conference on Lasers and Electro-Optics (CLEO 2008)
  • Place of Presentation: San Jose, USA
  • Year and Date: 2008-05-08
• [Presentation] シリコン導波路を用いた非相反移相型光アイソレータ (2008)
  • Author(s): 庄司, 横井, I-Wei Hsieh, Richard M. Osgood, Jr., 水本
  • Organizer: 2008年春季第55回応用物理学関係連合講演会
  • Place of Presentation: 日本大学、船橋
  • Year and Date: 2008-03-28
• [Presentation] Si導波路を用いた干渉型光アイソレータの動作実証 (2008)
  • Author(s): 庄司, 横井, I-Wei Hsieh, Richard M. Osgood, Jr., 水本
  • Organizer: 2008年電子情報通信学会総合全国大会
  • Place of Presentation: 北九州市立大学、北九州市
  • Year and Date: 2008-03-18
• [Presentation] Magneto-optical isolator with SOI waveguides (2008)
  • Author(s): Y. Shoji, H. Yokoi, I-Wei Hsieh, Richard M. Osgood, Jr., and T. Mizumoto
  • Organizer: 2008 Optical Fiber Communication Conference(OFC2008)
  • Place of Presentation: San Diego, California(OTuC8)
  • Year and Date: 2008-02-26
• [Presentation] Magneto-optical isolator with SOI waveguides (2008)
  • Author(s): Y. Shoji, H. Yokoi, I-Wei Hsieh, Richard M. Osgood, Jr., and T. Mizumoto
  • Organizer: 2008 Optical Fiber Communication Conference (OFC2008)
  • Place of Presentation: San Diego, California, USA
  • Year and Date: 2008-02-26
• [Presentation] Room-temperature direct bonding for integrated optical devices (2007)
  • Author(s): R. Takei, K. Abe, and T. Mizumoto
  • Organizer: IEEE LEOS Annual Meeting, Lake Buena Vista
  • Place of Presentation: Florida(TuD4)
  • Year and Date: 2007-10-23
• [Presentation] Design of an ultra-wideband magneto-optical isolator operating in 1.31・m and 1.55・m (2007)
  • Author(s): Y. Shoji and T. Mizumoto
  • Organizer: IEEE LEOS Annual Meeting
  • Place of Presentation: Lake Buena Vista, Florida(TuC4)
  • Year and Date: 2007-10-23
• [Presentation] Design of an ultra-wideband magneto-optical isolator operating in 1.31μm and 1.55μm (2007)
  • Author(s): Y. Shoji and T. Mizumoto
  • Organizer: IEEE LEGS Annual Meeting
  • Place of Presentation: Lake Buena Vista, Florida, USA
  • Year and Date: 2007-10-23
• [Presentation] Room-temperature direct bonding for integrated optical devices (2007)
  • Author(s): R. Takei, K. Abe and T. Mizumoto
  • Organizer: IEEE LEGS Annual Meeting
  • Place of Presentation: Lake Buena Vista, Florida, USA
  • Year and Date: 2007-10-23
• [Presentation] 非相反移相型光アイソレータの超広帯域設計 (2007)
  • Author(s): 庄司, 水本
  • Organizer: 2007年電子情報通信学会エレクトロニクスソサィエティ大会
  • Place of Presentation: 鳥取(C-3-70)(193)
  • Year and Date: 2007-09-10
• [Presentation] 非相反移相型光アイソレータの超広帯域設計 (2007)
  • Author(s): 庄司, 水本
  • Organizer: 2007年電子情報通信学会エレクトロニクスソサィエティ大会
  • Place of Presentation: 鳥取大学、鳥取
  • Year and Date: 2007-09-10
• [Presentation] 酸素プラズマによる表面処理を用いたInP-Si常温ダイレクトボンディング (2007)
  • Author(s): 武井, 水本
  • Organizer: 2007年秋季第68回応用物理学会講演会
  • Place of Presentation: 札幌(4-3-25)
  • Year and Date: 2007-09-04
• [Presentation] 1.31-1.55・m帯で動作する超広帯域型光アイソレータの設計 (2007)
  • Author(s): 庄司, 水本
  • Organizer: 2007年秋季第68回応用物理学会講演会
  • Place of Presentation: 札幌(4-3-23)
  • Year and Date: 2007-09-04
• [Presentation] 1.31-1.55μm帯で動作する超広帯域型光アイソレータの設計 (2007)
  • Author(s): 庄司, 水本
  • Organizer: 2007年秋季第68回応用物理学会講演会
  • Place of Presentation: 札幌
  • Year and Date: 2007-09-04
• [Presentation] 酸素プラズマによる表面処理を用いたInP-Si常温ダイレクトボンディング (2007)
  • Author(s): 武井, 水本
  • Organizer: 2007年秋季第68回応用物理学会講演会
  • Place of Presentation: 北海道工業大学、札幌
  • Year and Date: 2007-09-04
• [Presentation] Wideband operation of magneto-optical isolator with phase adjusted Mach- Zehnder interferometer (2006)
  • Author(s): Y. Shoji and T. Mizumoto
  • Organizer: 2006 IEEE LEOS Annual Meeting
  • Place of Presentation: Montreal, Canada(ThV2)
  • Year and Date: 2006-11-02
• [Presentation] Wafer bonding of magneto-optic garnet and its application to integrated optical devices (2006)
  • Author(s): T. Mizumoto
  • Organizer: The 210th Meeting of Electrochemical Society, Third International Symposium on Integrated Optoelectronics
  • Place of Presentation: Cancun, Mexico(1258)(Invited)
  • Year and Date: 2006-10-31
• [Presentation] 非相反移相型光アイソレータの広帯域化の動作実証 (2006)
  • Author(s): 庄司, 水本
  • Organizer: 2006年電子情報通信学会エレクトロニクスソサィエティ大会
  • Place of Presentation: 金沢(C-3-85)
  • Year and Date: 2006-09-22
• [Presentation] SOIグレーティング光導波路の製作 (2006)
  • Author(s): 武井, 水本
  • Organizer: 2006年電子情報通信学会エレクトロニクスソサィエティ大会
  • Place of Presentation: 金沢(CS-3-11)(S-46)
  • Year and Date: 2006-09-21
• [Presentation] Integration of optical isolators and semiconductor lasers by wafer bonding (2006)
  • Author(s): T. Mizumoto, K. Sakurai, Y. Shoji, and H. Saito
  • Organizer: Asia Pacific Optical Communications(APOC2006)
  • Place of Presentation: Gwangju, Korea(6352-90)(Invited)
  • Year and Date: 2006-09-07
• [Presentation] 位相調整によるマッハツェンダー干渉型光アイソレータの広帯域化 (2006)
  • Author(s): 庄司, 水本
  • Organizer: 2006年秋季第67回応用物理学会講演会
  • Place of Presentation: 滋賀(29a-ZX-4)(1067)
  • Year and Date: 2006-08-29
• [Presentation] Novel design of nonreciprocal phase shift optical isolators for wideband operation (2006)
  • Author(s): Y. Shoji and T. Mizumoto
  • Organizer: the 11th Optoelectronics and Communications Conference(OECC 2006)
  • Place of Presentation: Kaoshung, Taiwan
  • Year and Date: 2006-07-05
• [Presentation] シリコン導波路を用いた非相反移相型光アイソレータ (2005)
  • Author(s): 庄司, 横井, I-Wei Hsieh, Richard M. Osgood, Jr., 水本
  • Organizer: 2008年春季第55回応用物理学関係連合講演会
  • Place of Presentation: 船橋(28p-ZG-12)
  • Year and Date: 2005-05-28