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Development of a compact vacuum ultraviolet laser using a hollow fiber for plasma regulation and applications to photo-materials processing

Research Project

Project/Area Number 18360040
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied optics/Quantum optical engineering
Research InstitutionUniversity of Miyazaki

Principal Investigator

KUBODERA Shoichi  University of Miyazaki, 工学部, 教授 (00264359)

Co-Investigator(Kenkyū-buntansha) KAWANAKA Junji  大阪大学, レーザーエネルギー学研究センター, 准教授 (50264362)
KATTO Masahito  宮崎大学, 産学連携センター, 准教授 (80268466)
YOKOTANI Atsushi  宮崎大学, 工学部, 教授 (00183989)
KAKU Masanori  宮崎大学, 工学部, 助教 (10425621)
Project Period (FY) 2006 – 2008
Project Status Completed (Fiscal Year 2008)
Budget Amount *help
¥9,220,000 (Direct Cost: ¥7,900,000、Indirect Cost: ¥1,320,000)
Fiscal Year 2008: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2007: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2006: ¥3,500,000 (Direct Cost: ¥3,500,000)
Keywords真空紫外光 / 希ガスエキシマ / 光電界電離 / 中空ファイバー / 超短パルス高強度レーザー / 光物質プロセス / 真空紫外 / 卓上型レーザー / 高強度レーザー / 光プロセス / 短波長光源技術
Research Abstract

アルゴンで充たされた中空ファイバー内に高強度レーザー励起の光電界電離プラズマを生成し, 波長126nmの真空紫外アルゴンエキシマ増幅を行い, その特性を評価した. また希ガスを非線形媒質として超短パルス赤外光の第7高調波(波長126nm)の最適化を行った. 一台の励起用超短パルス高強度レーザーを用いて, アルゴンプラズマ増幅器と第7高調波を発生する増幅システムを構成し, 第7高調波出力の増幅を観測した. これらと並行して各種真空紫外光エネルギーに対する物質の脱離, 解離, 分解等の基礎過程を明らかにした.

Report

(4 results)
  • 2008 Annual Research Report   Final Research Report ( PDF )
  • 2007 Annual Research Report
  • 2006 Annual Research Report
  • Research Products

    (52 results)

All 2009 2008 2007 2006 Other

All Journal Article (19 results) (of which Peer Reviewed: 12 results) Presentation (31 results) Remarks (2 results)

  • [Journal Article] Harmonics generation in VUV spectral region driven by a NIR Ti : sapphire laser in rare gases2009

    • Author(s)
      M. Katto, K. Oda, M. Kaku, S. Kubodera, A.Yokotani, N. Miyanaga, and K. Mima
    • Journal Title

      Proceedings of SPIE vol.7131

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] OFI argon excimer amplifier for intense subpicosecond VUV pulse generation2009

    • Author(s)
      M. Kaku, S. Kubodera, K. Oda, M. Katto, A. Yokotani, N. Miyanaga, and K. Mima
    • Journal Title

      Proc. SPIE vol.7131

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] OFI rare-gas excimer amplifier for high-intensity VUV pulse generation2009

    • Author(s)
      M. Katto, M. Kaku, K. Oda, T. Kamikihara, A. Yokotani, S. Kubodera, N. Miyanaga, and K. Mima
    • Journal Title

      Proc. SPIE vol.7196

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Harmonics generation in VUV spectral region driven by a NIR Ti : sapphire laser in rare gases2009

    • Author(s)
      Masahito Katto, et al.
    • Journal Title

      Proceedings of SPIE (印刷中)

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] OFI argon excimer amplifier for intense subpicosecond VUV pulse generation2009

    • Author(s)
      Masanori Kaku, et al.
    • Journal Title

      Proceedings of SPIE (印刷中)

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] OFI rare-gas excimer amplifier for high-intensity VUV pulse generation2009

    • Author(s)
      Masahito Katto, et al.
    • Journal Title

      Proceedings of SPIE 7196

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] High-intensity subpicosecond vacuum ultraviolet laser system2008

    • Author(s)
      S. Kubodera, M. Kaku, Y. Taniguchi, M. Katto, A. Yokotani, N. Miyanaga, and K. Mima
    • Journal Title

      Proc. SPIE vol.6874

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] 紫外・真空紫外光源の開発と光プロセスへの応用2008

    • Author(s)
      甲藤 正人ら
    • Journal Title

      レーザー学会第381回研究会報告「短波長光の発生とその応用」 RTM-08-42

      Pages: 5-10

    • NAID

      10023995831

    • Related Report
      2008 Annual Research Report
  • [Journal Article] Vacuum ultraviolet argon excimer laser initiated by optical-field-induced ionization electrons2007

    • Author(s)
      S. Kubodera, Y. Taniguchi, T. Higashiguchi, and M. Katto
    • Journal Title

      Proc. SPIE vol.6346

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Subpicosecond vacuum ultraviolet laser system for advanced materials processing2007

    • Author(s)
      S. Kubodera, Y. Taniguchi, A. Hosotani, M. Katto, A. Yokotani, N. Miyanaga, and K. Mima
    • Journal Title

      Proc. SPIE vol.6452

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Effect of laser fluence on poly-crystallization of hydroxyapatite film coated by PLD method2007

    • Author(s)
      Masahito Katto, et. al.
    • Journal Title

      Journal of Laser Micro/Nanoengineering 2

      Pages: 152-155

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Subpicosecond vacuum ultraviolet laser system for advanced materials processing2007

    • Author(s)
      Shoichi Kubodera, et. al.
    • Journal Title

      Proceedings of SPIE 6452

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 高強度真空紫外アルゴンエキシマレーザーの開発2007

    • Author(s)
      加来昌典, ら
    • Journal Title

      レーザー学会第365回研究会報告「レーザー応用」 RTM-07-28

      Pages: 7-11

    • NAID

      10019843601

    • Related Report
      2007 Annual Research Report
  • [Journal Article] 高強度真空紫外エキシマレーザー2007

    • Author(s)
      窪寺昌一, 加来昌典
    • Journal Title

      電気学会光・量子デバイス研究会資料 OQD-07-64

      Pages: 31-35

    • NAID

      10025660608

    • Related Report
      2007 Annual Research Report
  • [Journal Article] 高輝度真空紫外コヒーレント光源の開発2007

    • Author(s)
      甲藤正人, ら
    • Journal Title

      レーザー学会第368回研究会報告「短波長光の発生とその応用」 RTM-07-47

      Pages: 13-18

    • NAID

      10020028971

    • Related Report
      2007 Annual Research Report
  • [Journal Article] Subpicosecond vacuum ultraviolet laser system for advanced materials processing2007

    • Author(s)
      Shoichi Kubodera, et al.
    • Journal Title

      Proceedings of SPIE (In press)

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Vacuum ultraviolet argon excimer laser initiated by optical-field-induced ionization electrons2007

    • Author(s)
      Shoichi Kubodera, et al.
    • Journal Title

      Proceedings of SPIE (In press)

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Optical amplification of argon excimers in the vacuum ultraviolet spectral region, produced by ultrashort-pulse high-intensity-laser-produced electrons2006

    • Author(s)
      Y. Morita, T. Higashiguchi, and S. Kubodera
    • Journal Title

      Applied Physics B vol.82

      Pages: 31-33

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] 真空紫外光で拓く環境調和型プロセス -高輝度真空紫外コヒーレント光源の開発とその応用技術の開発-2006

    • Author(s)
      甲藤 正人, 他
    • Journal Title

      レーザー学会第352回研究会報告 RTM-6-27-34

      Pages: 1-5

    • NAID

      10020611464

    • Related Report
      2006 Annual Research Report
  • [Presentation] OFI rare-gas excimer amplifier for high-intensity VUV pulse generation2009

    • Author(s)
      Shoichi Kubodera, et al.
    • Organizer
      Photonics West 2009
    • Place of Presentation
      San Jose (USA)
    • Year and Date
      2009-01-27
    • Related Report
      2008 Annual Research Report
  • [Presentation] 高調波発生を利用した超短パルス真空紫外コヒーレント光の発生2009

    • Author(s)
      小田一義ら
    • Organizer
      レーザー学会学術講演会第29回年次大会
    • Place of Presentation
      徳島大学
    • Year and Date
      2009-01-10
    • Related Report
      2008 Annual Research Report
  • [Presentation] 高強度レーザー励起真空紫外希ガスエキシマを用いた光増幅器2009

    • Author(s)
      加来昌典ら
    • Organizer
      レーザー学会学術講演会第29回年次大会
    • Place of Presentation
      徳島大学
    • Year and Date
      2009-01-10
    • Related Report
      2008 Annual Research Report
  • [Presentation] OFI rare-gas excimer amplifier for high-intensity VUV pulse generation2009

    • Author(s)
      S. Kubodera, M. Kaku, K. Oda, T. Kamikihara, M. Katto, A. Yokotani, N. Miyanaga, and K. Mima
    • Organizer
      Photonics West 2009 (SPIE Meeting)
    • Place of Presentation
      San Jose (USA)
    • Related Report
      2008 Final Research Report
  • [Presentation] 紫外・真空紫外光源の開発と光プロセスへの応用2008

    • Author(s)
      甲藤正人ら
    • Organizer
      レーザー学会第381回研究会「短波長光の発生とその応用」
    • Place of Presentation
      九州大学
    • Year and Date
      2008-12-10
    • Related Report
      2008 Annual Research Report
  • [Presentation] 高強度レーザー励起アルゴンエキシマを用いた真空紫外光増幅器2008

    • Author(s)
      藤花 駿介ら
    • Organizer
      平成20年度応用物理学会九州支部学術講演会
    • Place of Presentation
      宮崎大学
    • Year and Date
      2008-11-30
    • Related Report
      2008 Annual Research Report
  • [Presentation] Optical amplification of the OFI rare-gas excimers in the vacuum ultraviolet2008

    • Author(s)
      Masanori Kaku, et al.
    • Organizer
      The 21st Annual Meeting of the IEEE Lasers & Electro-Optics Society (IEEE/LEOS 2008)
    • Place of Presentation
      Newport Beach, USA
    • Year and Date
      2008-11-13
    • Related Report
      2008 Annual Research Report
  • [Presentation] Optical amplification of vacuum ultraviolet rare-gas excimers excited by a high-intensity laser2008

    • Author(s)
      Shinya Harano, et al.
    • Organizer
      第61回電気関係学会九州支部連合大会(国際セッション, 光および量子エレクトロニクス)
    • Place of Presentation
      大分大学
    • Year and Date
      2008-09-24
    • Related Report
      2008 Annual Research Report
  • [Presentation] Subpicosecond VUV seed pulse generation using the harmonic radiation2008

    • Author(s)
      Tadashi Kamikihara, et al.
    • Organizer
      第61回電気関係学会九州支部連合大会(国際セッション, 光および量子エレクトロニクス)
    • Place of Presentation
      大分大学
    • Year and Date
      2008-09-24
    • Related Report
      2008 Annual Research Report
  • [Presentation] OFI argon excimer amplifier for intense subpicosecond VUV pulse generation2008

    • Author(s)
      Masanori Kaku, et al.
    • Organizer
      XVII International Symposium on Gas Flow and Chemical Lasers & High Power Lasers(GCL-HPL 2008)
    • Place of Presentation
      Lisbon, Portugal
    • Year and Date
      2008-09-18
    • Related Report
      2008 Annual Research Report
  • [Presentation] Harmonics generation in VUV spectral region driven by a NIRTi : sapphire laser in rare gases2008

    • Author(s)
      Masahito Katto, et al.
    • Organizer
      XVII International Symposium on Gas Flow and Chemical Lasers & High Power Lasers(GCL-HPL 2008)
    • Place of Presentation
      Lisbon, Portugal
    • Year and Date
      2008-09-16
    • Related Report
      2008 Annual Research Report
  • [Presentation] 高強度レーザー励起希ガスエキシマを用いた真空紫外光増幅器2008

    • Author(s)
      藤花 駿介ら
    • Organizer
      第69回応用物理学会学術講演会
    • Place of Presentation
      中部大学
    • Year and Date
      2008-09-04
    • Related Report
      2008 Annual Research Report
  • [Presentation] 高調波発生を利用した超短パルス真空紫外コヒーレント光の特性2008

    • Author(s)
      小田一義ら
    • Organizer
      第69回応用物理学会学術講演会
    • Place of Presentation
      中部大学
    • Year and Date
      2008-09-03
    • Related Report
      2008 Annual Research Report
  • [Presentation] レーザー生成プラズマの原理と応用〜ナノ秒レーザープラズマからフェムト秒レーザープラズマまで〜2008

    • Author(s)
      窪寺 昌一
    • Organizer
      CREST 「自由空間に3次元コンテンツを描き出す技術」シンポジウム
    • Place of Presentation
      東京大学
    • Year and Date
      2008-07-09
    • Related Report
      2008 Annual Research Report
  • [Presentation] OFI rare-gas excimer amplifier for intense sub-picosecond VUV pulse generation2008

    • Author(s)
      Masanori Kaku, et al.
    • Organizer
      CLEO/QELS 2008
    • Place of Presentation
      San Jose, USA
    • Year and Date
      2008-05-08
    • Related Report
      2008 Annual Research Report
  • [Presentation] 高強度レーザー励起真空紫外アルゴンエキシマ増幅器の特性2008

    • Author(s)
      谷口雄太, ら
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      日本大学理工学部
    • Year and Date
      2008-03-28
    • Related Report
      2007 Annual Research Report
  • [Presentation] 超短パルス真空紫外コヒーレント光の発生2008

    • Author(s)
      小田一義, ら
    • Organizer
      レーザー学会学術講演会第28回年次大会
    • Place of Presentation
      名古屋国際会議場
    • Year and Date
      2008-01-30
    • Related Report
      2007 Annual Research Report
  • [Presentation] High-intensity subpicosecond vacuum ultraviolet laser system2008

    • Author(s)
      Shoichi Kubodera, et. al.
    • Organizer
      Photonics West 2008
    • Place of Presentation
      San Jose (USA)
    • Year and Date
      2008-01-22
    • Related Report
      2007 Annual Research Report
  • [Presentation] Optical amplification of the OFI rare-gas excimers in the vacuum ultraviolet2008

    • Author(s)
      M. Kaku, S. Harano, S. Touge, M. Katto, A. Yokotani, S. Kubodera, N. Miyanaga, and K. Mima
    • Organizer
      The 21st Annual Meeting of the IEEE Lasers & Electro-Optics Society (IEEE/LEOS 2008)
    • Place of Presentation
      Newport Beach (USA)
    • Related Report
      2008 Final Research Report
  • [Presentation] 高ピーク出力真空紫外レーザー2008

    • Author(s)
      窪寺昌一
    • Organizer
      平成20年電気学会全国大会シンポジウム「次世代を拓く光量子源開発とその応用プロセス」
    • Place of Presentation
      福岡工業大学
    • Related Report
      2008 Final Research Report 2007 Annual Research Report
  • [Presentation] 高強度真空紫外エキシマレーザー2007

    • Author(s)
      窪寺昌一, 加来昌典
    • Organizer
      光・量子デバイス研究会「次世代光源に関する提案」
    • Place of Presentation
      九州大学西新プラザ
    • Year and Date
      2007-12-14
    • Related Report
      2007 Annual Research Report
  • [Presentation] 高輝度真空紫外コヒーレント光源の開発2007

    • Author(s)
      甲藤正人, ら
    • Organizer
      レーザー学会第368回研究会「短波長光の発生とその応用」
    • Place of Presentation
      宇都宮大学
    • Year and Date
      2007-12-05
    • Related Report
      2007 Annual Research Report
  • [Presentation] 光電界電離を用いた真空紫外アルゴンエキシマ増幅器に関する研究2007

    • Author(s)
      原野慎也, ら
    • Organizer
      平成19年度応用物理学会九州支部学術講演会
    • Place of Presentation
      九州工業大学
    • Year and Date
      2007-12-01
    • Related Report
      2007 Annual Research Report
  • [Presentation] Optical amplification of vacuum ultraviolet argon excimer produced by ahigh-intensity laser2007

    • Author(s)
      Masanori Kaku, et. al.
    • Organizer
      IEEE/LEOS 2007
    • Place of Presentation
      Florida, USA
    • Year and Date
      2007-10-23
    • Related Report
      2007 Annual Research Report
  • [Presentation] 高強度真空紫外アルゴンエキシマレーザーの開発2007

    • Author(s)
      加来昌典, ら
    • Organizer
      レーザー学会第365回研究会「レーザー応用」
    • Place of Presentation
      指宿いわさきホテル
    • Year and Date
      2007-09-14
    • Related Report
      2007 Annual Research Report
  • [Presentation] 高強度レーザー励起真空紫外アルゴンエキシマ増幅器の特性(2)2007

    • Author(s)
      谷口雄太, ら
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-07
    • Related Report
      2007 Annual Research Report
  • [Presentation] 超短パルス真空紫外コヒーレント光の発生2007

    • Author(s)
      小田一義, ら
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-07
    • Related Report
      2007 Annual Research Report
  • [Presentation] OFI vacuum ultraviolet rare-gas excimer amplifier for subpicosecond VUV pulse amplification2007

    • Author(s)
      Masanori Kaku, et. al.
    • Organizer
      CLEO Pacific Rim 200
    • Place of Presentation
      Seoul, South Korea
    • Year and Date
      2007-08-29
    • Related Report
      2007 Annual Research Report
  • [Presentation] Optical-field induced ionization vacuum ultraviolet rare-gas excimer laser2007

    • Author(s)
      Shoichi Kubodera, et. al.
    • Organizer
      The 15th International Conference on Vacuum Ultraviolet Radiation Physics (VUV XV)
    • Place of Presentation
      Berlin, Germany
    • Year and Date
      2007-07-30
    • Related Report
      2007 Annual Research Report
  • [Presentation] 真空紫外光源とその応用2007

    • Author(s)
      窪寺昌一、甲藤正人、横谷篤至
    • Organizer
      レーザー学会学術講演会第27回年次大会
    • Place of Presentation
      宮崎
    • Related Report
      2008 Final Research Report
  • [Presentation] 真空紫外光で拓く環境調和型プロセスに向けて~高輝度真空紫外コヒーレント光の発生とその応用技術の開発~2006

    • Author(s)
      甲藤正人、横谷篤至、窪寺昌一、宮永憲明、三間圀興
    • Organizer
      第67回応用物理学会学術講演会
    • Place of Presentation
      立命館大学
    • Related Report
      2008 Final Research Report
  • [Remarks]

    • URL

      http://www.opt.miyazaki-u.ac.jp

    • Related Report
      2008 Annual Research Report
  • [Remarks]

    • URL

      http://www.opt.miyazaki-u.ac.jp

    • Related Report
      2007 Annual Research Report

URL: 

Published: 2006-04-01   Modified: 2016-04-21  

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