Development of Compact Plasma Reactors Constructed by Piezoelectric Transformer

• Project/Area Number: 18360140
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: 電力工学・電気機器工学
• Research Institution: Chiba Institute of Technology
• Principal Investigator: ITOH Haruo Chiba Institute of Technology, 工学部, 教授 (90083849)
• Co-Investigator(Kenkyū-buntansha): SUZUKI Susumu 千葉工業大学, 工学部, 准教授 (00265472) ; TERANISHI Kenji 徳島大学, 大学院, 助教 (80435403) ; SHIMOMURA Naoyuki 徳島大学, 大学院, 准教授 (90226283)
• Project Period (FY): 2006 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥15,550,000 (Direct Cost: ¥14,800,000、Indirect Cost: ¥750,000); Fiscal Year 2008: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000); Fiscal Year 2007: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000); Fiscal Year 2006: ¥12,300,000 (Direct Cost: ¥12,300,000)
• Keywords: 自己組織化 / プラズマリアクタ / 電子放出 / 圧電トランス / 誘電体バリア放電

Research Abstract

本研究では、小型高電圧発生素子である圧電トランス(PT)を用いたプラズマリアクタの実用化を目的とし、PTにより発生する誘電体バリア放電(DBD)の放電現象を明らかにしながら、実用器機への応用を検討した。PTにより開発したオゾン発生器の内部に使用する誘電体電極の材料効果について検討し、高効率でのオゾン生成が可能な誘電体材料を見出した。各種希ガス中でPTによりDBDを生成し、172 nmと126 nmの真空紫外光を放射する小型エキシマランプを開発した。DBD中で発光輝点が規則正しく整列する自己組織化現象の発生条件と誘電体表面の蓄積電荷の存在を明らかにした。

Research Products

• [Journal Article] 誘電体電極上の蓄積電荷により誘起されるDBDの自己組織化現象 (2009)
  • Author(s): 伊藤晴雄、寺西研二、鈴木進、下村直行
  • Journal Title: 電気学会論文誌A(掲載決定) Vol. 129
  • NAID: 10025100120
  • Peer Reviewed
• [Journal Article] Experimental Investigations of Ozone Zero Phenomenon (2009)
  • Author(s): Kazumasa Murayama, Naoaki Matsumura, Masaki Taguchi, Yasuhiro Kato, Kenji Teranishi, Susumu Suzuki and Haruo Itoh,
  • Journal Title: European Physical Journal Applied Physics Vol. 47
  • Peer Reviewed
• [Journal Article] 誘電体電極上の蓄積電荷により誘起されるDBDの自己組織化現象 (2009)
  • Author(s): 伊藤晴雄
  • Journal Title: 電気学会論文誌A (掲載決定) 129
  • NAID: 10025100120
  • Peer Reviewed
• [Journal Article] Experimental Investigations of Ozone Zero Phenomenon (2009)
  • Author(s): Kazumasa Murayama
  • Journal Title: European Physical Journal Applied Physics 47
  • Peer Reviewed
• [Journal Article] 圧電トランスによる放電プラズマ生成とその応用 (2008)
  • Author(s): 伊藤晴雄
  • Journal Title: 放電研究 Vol. 51 Pages: 3-10
• [Journal Article] Self-Organized Patterns of Dielectric Barrier Discharge Generated by Piezoelectric Transformer (2008)
  • Author(s): Haruo Itoh, Kenji Teranishi, Yoshihide Hashimoto, Naoyuki Shimomura and Susumu Suzuki
  • Journal Title: IEEE Trans. Plasma Sci. Vol. 36 Pages: 1348-1349
  • Peer Reviewed
• [Journal Article] VUV Spectroscopic Measurement for Dielectric Barrier Discharge Excited by Piezoelectric Transformer in He-Xe Mixture (2008)
  • Author(s): Kenji Teranishi, Daisuke Inada, Naoyuki Shimomura, Susumu Suzuki and Haruo Itoh
  • Journal Title: IEEE Trans. Plasma Sci. Vol. 36 Pages: 1340-1341
  • Peer Reviewed
• [Journal Article] 圧電トランスによる放電プラズマ生成とその応用 (2008)
  • Author(s): 伊藤晴雄
  • Journal Title: 放電研究 51 Pages: 3-10
• [Journal Article] Self-Organized Patterns of Dielectric Barrier Discharge Generated by Piezoelectric Transformer (2008)
  • Author(s): Haruo Itoh
  • Journal Title: IEEE Trans. Plasma Sci. 36 Pages: 1348-1349
  • Peer Reviewed
• [Journal Article] VUV Spectroscopic Measurement for Dielectric Barrier Discharge Excited by Piezoelectric Transformer in He-Xe Mixture (2008)
  • Author(s): Kenji Teranishi
  • Journal Title: IEEE Trans. Plasma Sci. 36 Pages: 1340-1341
  • Peer Reviewed
• [Journal Article] VUV Spectroscopic Measurement for Dielectric Barrier Discharge Excitedl by Piezoelectrkric Transformer in He-Xe Mixture (2008)
  • Author(s): Kenji Teranishi
  • Journal Title: IEEE Trants.Plasma Sci. 36(掲載決定)
  • Peer Reviewed
• [Journal Article] Self-Organized Patterns of Dielectric Barrier Discharge Generated by Piezoelectric Transformer (2008)
  • Author(s): Haruo Itoh
  • Journal Title: IEEE Trans.Plasma Sci. 36(掲載決定)
  • Peer Reviewed
• [Journal Article] Extreme Decrease of Ozone Product Using High Pure Oxygen (2007)
  • Author(s): Masaki Taguchi, Keisuke Yamashiro, Tetsumi Takano, Haruo Itoh
  • Journal Title: Plasma Processes and Polymers Vol. 4 Pages: 719-727
  • Peer Reviewed
• [Journal Article] Observation of VUV Emission Spectra from DC Positive Corona Discharge (2007)
  • Author(s): Yasuhide Kashiwagi, Hironari Ito, Kazuo Noguchi, Kenji Teranishi, Susumu Suzki and Haruo Itoh
  • Journal Title: IEEJ Trans. FM Vol.127, No.9 Pages: 537-542
  • NAID: 10019523152
  • Peer Reviewed
• [Journal Article] A Compact Excimer Lamp Constructed by Piezoelectric Transformer (2007)
  • Author(s): Kenji Teranishi and Haruo Itoh
  • Journal Title: J. Light and Vis. Env. Vol.31, No.1 Pages: 5-10
  • NAID: 110006241754
  • Peer Reviewed
• [Journal Article] A Compact Excimer Lamp Consteructed by Piezoelectric Transformer (2007)
  • Author(s): Kenji Teranishi
  • Journal Title: Journal of Light and Visual Environment 31 Pages: 5-10
  • Peer Reviewed
• [Journal Article] Observation of VUV Emission Spectra from DC Positive Corona Discharge (2007)
  • Author(s): Yasuhide Kashiwagi
  • Journal Title: IEEJ Trans.FM 127 Pages: 537-542
  • Peer Reviewed
• [Journal Article] Extreme Decrease of Ozone Product Using High Pure Oxygen (2007)
  • Author(s): Masaki Taguchi
  • Journal Title: Plasma Process.Polym 4 Pages: 719-727
  • Peer Reviewed
• [Journal Article] Townsend's Secondary Ionization Coefficient of Mgo Film in Ar and Electron Reflection at the Surface (2007)
  • Author(s): S.Suzuki, H.Itoh
  • Journal Title: Japanese Journal of Applied Physics Vol.46・No.3A Pages: 1129-1136
  • NAID: 10018867500
• [Journal Article] A Compact Excimer Lamp Constracted by Piezoelectric Transformer (2007)
  • Author(s): K.Teranishi, H.Itoh
  • Journal Title: Journalof Light and visual Environment Vol.31・No.1 Pages: 5-10
• [Journal Article] Discharge Plasmas Generated by Piezoelectric Transformers and Their Applications (2006)
  • Author(s): Haruo Itoh, Kenji Teranishi and Susumu Suzuki
  • Journal Title: Plasma Sources, Sci. and Technol. Vol.15
  • Peer Reviewed
• [Journal Article] 圧電トランスを用いた小型オゾン発生器の開発 (2006)
  • Author(s): 伊藤晴雄、寺西研二
  • Journal Title: オゾンニュース No.61 Pages: 3-6
• [Journal Article] 圧電トランスを用いた小型オゾン発生器のオゾン生成特性 (2006)
  • Author(s): 伊藤晴雄
  • Journal Title: 」放電研究 Vol.49, No.2 Pages: 78-80
• [Journal Article] Electron Collision Cross Sections of Mercury (2006)
  • Author(s): S.Suzuki, K.Kazuma, H.Itoh
  • Journal Title: Journal of Plasma and Fusion Reserch Series Vol.7 Pages: 314-318
• [Journal Article] Discharge Plasmas Generated by Piezoelectric Transformer and Their Applications (2006)
  • Author(s): H.Itoh, K.Teranishi, S.Suzuki
  • Journal Title: Plasma Sources, Science and Technology Vol.15
• [Journal Article] VUV Emission Characteristics from Piezoelectric Transformer Bored Excimer Lampe (2006)
  • Author(s): K.Teranishi, D.Inada, S.Suzuki, H.Itoh
  • Journal Title: Proc. 3^<rd> Int. Workshop on Microplasma (Greifswald) Pages: 123-123
• [Journal Article] Development of Ozone Generator Using Parallel Driving of Piezoelectric Transformers (2006)
  • Author(s): K.Teranishi, S.Suzuki, H.Itoh
  • Journal Title: Contributed Papers of HAKONE X Pages: 172-175
• [Presentation] 放電の自己組織化現象と誘電体電極上の蓄積電荷 (2009)
  • Author(s): 小林和人
  • Organizer: 平成21年電気学会全国大会
  • Place of Presentation: 北海道大学
  • Year and Date: 2009-03-19
• [Presentation] 圧電トランス型オゾナイザの電極温度がオゾン生成に及ぼす影響 (2009)
  • Author(s): 寺西研二
  • Organizer: 平成21年電気学会全国大会
  • Place of Presentation: 北海道大学
  • Year and Date: 2009-03-19
• [Presentation] 圧電トランス型オソナイザの電極温度がオゾン生成に及ぼす影響 (2009)
  • Author(s): 寺西研二
  • Organizer: 平成21年電気学会全国大会
  • Place of Presentation: 北海道大学
  • Year and Date: 2009-03-19
• [Presentation] 圧電トランスを用いた小型Xe2*エキシマランプの開発 (2009)
  • Author(s): 守屋康平
  • Organizer: 平成21年電気学会全国大会
  • Place of Presentation: 北海道大学
  • Year and Date: 2009-03-17
• [Presentation] 圧電トランスを用いた小型Xe^*_2エキシマランプの開発 (2009)
  • Author(s): 守屋康平
  • Organizer: 平成21年電気学会全国大会
  • Place of Presentation: 北海道大学
  • Year and Date: 2009-03-17
• [Presentation] 圧電トランスを用いたDBD型エキシマランプ (2008)
  • Author(s): 守屋康平
  • Organizer: 2008年放電学会年次大会
  • Place of Presentation: 早稲田大学
  • Year and Date: 2008-11-15
• [Presentation] 圧電トランス型オゾン発生器の電極温度がオゾン生成に及ぼす影響 (2008)
  • Author(s): 島田洋司
  • Organizer: 2008年放電学会年次大会
  • Place of Presentation: 早稲田大学
  • Year and Date: 2008-11-15
• [Presentation] 圧電トランス型プラズマリアクタの表面電位分布と放電電力の測定 (2008)
  • Author(s): 寺西研二
  • Organizer: 2008年放電学会年次大会
  • Place of Presentation: 早稲田大学
  • Year and Date: 2008-11-15
• [Presentation] 圧電トランスによる放電プラズマ生成とその応用 (2008)
  • Author(s): 伊藤晴雄
  • Organizer: 2008年放電学会若手セミナー
  • Place of Presentation: 八王子セミナーハウス
  • Year and Date: 2008-11-14
• [Presentation] Traces of Accumulated Charges on Dielectric Electrode in Self-Organization (2008)
  • Author(s): Haruo Itoh
  • Organizer: 61th Gaseous Electronics Conference
  • Place of Presentation: Texas, USA
  • Year and Date: 2008-10-15
• [Presentation] Experimental Investigations of Ozone Zero Phenomenon (2008)
  • Author(s): Kazumasa Murayama
  • Organizer: 11th International Symposium on High Pressure Low Temperature Plasma Chemistry
  • Place of Presentation: Oleron Island, France
  • Year and Date: 2008-09-09
• [Presentation] 圧電トランスを用いた誘電体バリア放電型プラズマリアクタの動作特性 (2008)
  • Author(s): 寺西研二
  • Organizer: 平成20年電気学会基礎・材料・共通部門大会
  • Place of Presentation: 千葉工業大学
  • Year and Date: 2008-08-22
• [Presentation] Occurrence condition of self-organization in barrier discharge generated by piezoelectric transformer (2008)
  • Author(s): Kenji Teranishi
  • Organizer: 19th Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases
  • Place of Presentation: Granada, Spain
  • Year and Date: 2008-07-17
• [Presentation] Occurrence condition of self-organization in barrier discharge generated by piezoelectric transformer (2008)
  • Author(s): Kenji Teranishi
  • Organizer: 19th Europhysics Conference on the Atomic a nd Molecular Physics of Ionized Gases
  • Place of Presentation: Granada, Spain
  • Year and Date: 2008-07-17
• [Presentation] DBD-type Ozone Generator Using Piezoelectric Transformers: Effect of Barrier Electrode Material on Ozone Generation (2008)
  • Author(s): Kenji Teranishi
  • Organizer: 28th IEEE International Power Modulator Conference
  • Place of Presentation: Nevada, USA
  • Year and Date: 2008-05-28
• [Presentation] DBD-type Ozone Generator Using Piezoelectric Transformers : Effect of Barrier Electrode Material on Ozone Generation (2008)
  • Author(s): Kenji Teranishi
  • Organizer: 28th IEEE International Power Modulator Con ference
  • Place of Presentation: Nevada, USA
  • Year and Date: 2008-05-28
• [Presentation] PT型オゾナイザのオゾン生成効率 (2008)
  • Author(s): 伊藤晴雄
  • Organizer: 第18回日本オゾン協会年次研究講演会
  • Place of Presentation: タワーホール船堀
  • Year and Date: 2008-05-27
• [Presentation] 沿面放電の伸展に及ぼす真空紫外光の影響 (2008)
  • Author(s): 伊藤 宏成
  • Organizer: 平成20年電気学会全国大会
  • Place of Presentation: 福岡工業大学(福岡県)
  • Year and Date: 2008-03-21
• [Presentation] 放電中の酸素およびオゾンに関する基礎データPart.2 無声放電型オゾン発生器の技術動向 (2008)
  • Author(s): 伊藤 晴雄
  • Organizer: 平成20年電気学会全国大会
  • Place of Presentation: 福岡工業大学(福岡県)
  • Year and Date: 2008-03-21
• [Presentation] MgO薄膜の二次電離係数 (2008)
  • Author(s): 鈴木 進
  • Organizer: 平成20年電気学会全国大会
  • Place of Presentation: 福岡工業大学(福岡県)
  • Year and Date: 2008-03-21
• [Presentation] 圧電トランスによる誘電体バリア放電の自己組織化現象 (2008)
  • Author(s): 橋本祥英
  • Organizer: 平成20年電気学会全国大会
  • Place of Presentation: 福岡工業大学(福岡県)
  • Year and Date: 2008-03-19
• [Presentation] DBD型オゾン発生器の誘電体電極材料がオゾン生成に及ぼす影響 (2008)
  • Author(s): 寺西研二
  • Organizer: 平成20年電気学会全国大会
  • Place of Presentation: 福岡工業大学(福岡県)
  • Year and Date: 2008-03-19
• [Presentation] N2(A3Σ+u)のホルムアルデヒドによる衝突脱励起反応速度係数の決定 (2008)
  • Author(s): 鈴木 進
  • Organizer: 平成20年電気学会全国大会
  • Place of Presentation: 福岡工業大学(福岡県)
  • Year and Date: 2008-03-19
• [Presentation] Ar中における二次電離係数の検討 (2008)
  • Author(s): 今野 和弥
  • Organizer: 平成20年電気学会全国大会
  • Place of Presentation: 福岡工業大学(福岡県)
  • Year and Date: 2008-03-19
• [Presentation] オゾンゼロ現象の実験的研究 (2008)
  • Author(s): 松村 直明
  • Organizer: 平成20年電気学会全国大会
  • Place of Presentation: 福岡工業大学(福岡県)
  • Year and Date: 2008-03-19
• [Presentation] 円筒容器表面におけるオゾン消滅率と表面状態 (2008)
  • Author(s): 伴 清孝
  • Organizer: 平成20年電気学会全国大会
  • Place of Presentation: 福岡工業大学(福岡県)
  • Year and Date: 2008-03-19
• [Presentation] 大気圧下におけるTownsend放電の成立機溝 (2008)
  • Author(s): 伊藤 晴雄
  • Organizer: 電気学会放電研究会
  • Place of Presentation: 北海道大学(北海道)
  • Year and Date: 2008-03-10
• [Presentation] MgO薄膜の工次電子放出係数の検討 (2007)
  • Author(s): 鈴木 進
  • Organizer: 第22回 光源物性とその応用研究会資料
  • Place of Presentation: 名古屋工業大学(名古屋)
  • Year and Date: 2007-12-07
• [Presentation] 沿面放電の伸展に及ぼす真空紫外光の影響 (2007)
  • Author(s): 伊藤 宏成
  • Organizer: 2007年放電学会年次大会
  • Place of Presentation: 芝浦工業大学(東京都)
  • Year and Date: 2007-11-15
• [Presentation] 材料表面におけるオゾン消滅率と表面状態 (2007)
  • Author(s): 伴清 孝
  • Organizer: 2007年放電学会年次大会
  • Place of Presentation: 芝浦工業大学(東京都)
  • Year and Date: 2007-11-15
• [Presentation] 圧電トランスを用いたDBD型オゾン発生器の開発 (2007)
  • Author(s): 寺西研二
  • Organizer: 電気学会プラズマ/放電合同研究会
  • Place of Presentation: 北海道大学(北海道)
  • Year and Date: 2007-09-14
• [Presentation] N2(A3Σ+u)の大気汚染物質による衝突脱励起反応速度係数の決定 (2007)
  • Author(s): 鈴木 進
  • Organizer: 電気学会プラズマ/放電合同研究会
  • Place of Presentation: 北海道大学(北海道)
  • Year and Date: 2007-09-13
• [Presentation] Discharge Plasmas Generated by Piezoelectric Transformer and Their Applications: VUV Emission from Xe and Ar Excimers (2007)
  • Author(s): Haruo Itoh
  • Organizer: 28th International Conference on Phenomena in Ionized Gases
  • Place of Presentation: Prague, Czech Republic
  • Year and Date: 2007-07-17
• [Presentation] Discharge Plasmas Generated by Piezoelectric Transformer and Their Applications: Material Effect of Dielectric Barrier Electrode on Ozone Generation (2007)
  • Author(s): Kenji Teranishi
  • Organizer: 28th International Conference on Phenomena in Ionized Gases
  • Place of Presentation: Prague, Czech Republic
  • Year and Date: 2007-07-17
• [Presentation] Discharge Plasmas Generated by Piezoelectric Transformer and and Their Applications:Material Effect of Dielectric Barrier Electrode on Ozone Generation (2007)
  • Author(s): Kenji Teranishi
  • Organizer: 28th International Conference on phenomena in Ionized Gases
  • Place of Presentation: Prague,Czech Republic
  • Year and Date: 2007-07-17
• [Presentation] Discharge Plasmas Generated by Piezoelectric Transformer and Their Applications:VUV Emission from Xe and Ar Excimers (2007)
  • Author(s): Haruo Itoh
  • Organizer: 28th International Conference on Phenomena in Ionize Gases
  • Place of Presentation: Prague,Czech Republic
  • Year and Date: 2007-07-17
• [Presentation] Determination of Collisional Quenching Rate Coefficient of N2(A3Σ+u)bv Air Pollutans (2007)
  • Author(s): Susumu Suzuki
  • Organizer: 28th International Conferenoe on Phenomena in Ionized Gases
  • Place of Presentation: Prague,Czech Republic
  • Year and Date: 2007-07-17
• [Presentation] 圧電トランスの並列運転を利用したオゾン発生器 (2007)
  • Author(s): 寺西研二
  • Organizer: 第17回日本オゾン協会年次研究講演会
  • Place of Presentation: 松山市(愛媛県)
  • Year and Date: 2007-06-15
• [Presentation] 圧電トランスの並列運転を利用したオゾン発生器. (2007)
  • Author(s): 寺西 研二
  • Organizer: 第17回日本オゾン協会年次研究講演会
  • Place of Presentation: 松山市(愛媛県)
  • Year and Date: 2007-06-15
• [Presentation] 圧電トランスを用いた小型エキシマランプ (2006)
  • Author(s): 伊藤晴雄
  • Organizer: 第21回光源物性とその応用研究会
  • Place of Presentation: 神奈川大学(神奈川県)
  • Year and Date: 2006-10-02
• [Presentation] 圧電トランス型小型プラズマリアクタの動作特性とその応用 (2006)
  • Author(s): 伊藤晴雄
  • Organizer: パルスパワー/放電合同研究会
  • Place of Presentation: 蔵王温泉こまくさ荘(山形県)
  • Year and Date: 2006-06-30
• [Presentation] 圧電トランスを用いた小型オゾン発生器のオゾン生成特性 (2006)
  • Author(s): 伊藤晴雄
  • Organizer: 放電学会春季合同シンポジウム
  • Place of Presentation: 芝浦工業大学(東京都)
  • Year and Date: 2006-06-19
• [Patent(Industrial Property Rights)] 特許 (2007)
  • Inventor(s): 寺西研二、鈴木進、伊藤晴雄
  • Industrial Property Rights Holder: 伊藤晴雄、矢嶋明
  • Acquisition Date: 2007-04-06