Flexible and highly-efficient hollow optical fiber for transmission of 13-nm extreme ultraviolet light and 0.15nm soft X ray

• Project/Area Number: 18360157
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Electron device/Electronic equipment
• Research Institution: Tohoku University
• Principal Investigator: MATSUURA Yuji Tohoku University, 大学院・医工学研究科, 教授 (10241530)
• Co-Investigator(Kenkyū-buntansha): IWAI Katsumasa 国立仙台電波工業高等専門学校, 情報通信工学科, 助教 (10361130)
• Project Period (FY): 2006 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥17,350,000 (Direct Cost: ¥14,500,000、Indirect Cost: ¥2,850,000); Fiscal Year 2008: ¥5,720,000 (Direct Cost: ¥4,400,000、Indirect Cost: ¥1,320,000); Fiscal Year 2007: ¥6,630,000 (Direct Cost: ¥5,100,000、Indirect Cost: ¥1,530,000); Fiscal Year 2006: ¥5,000,000 (Direct Cost: ¥5,000,000)
• Keywords: 中空ファイバ / 真空紫外 / 軟X線 / X線伝送 / 中空導波路 / レーザ誘起プラズマ

Research Abstract

極紫外(EUV)光・軟X線という伝送路未開の領域を開拓し, 可視-近赤外領域で一般的に使用されているガラス光ファイバのように, 柔軟かつ高効率な伝送路を実現することを目的とする. その方法として, EUV・軟X線の波長の全域をほぼ完璧に透過する唯一の材料,「真空」をコアとする中空光ファイバを選び, その構成材料や構造などについて最適設計を行うとともに, 製造方法をあらたに開発した. また, 開発した中空光ファイバを用いた新機能を有するX線検査装置の試作・評価を行った.

Research Products

• [Journal Article] Bragg fiber taper for subwavelength beam generation (2008)
  • Author(s): L. Ma, Y. Matsuura
  • Journal Title: J. Lightwave Technol vol.26,no.24 Pages: 3847-3852
  • Peer Reviewed
• [Journal Article] Hollow optical fibers loaded with an inner dielectric film for terahertz broadband spectroscopy (2008)
  • Author(s): Y. Matsuura, E. Takeda
  • Journal Title: J.Opt.Soc.Am.B vol.25,no.12 Pages: 1949-1954
  • Peer Reviewed
• [Journal Article] Infrared hollow fiber with a vitreous film as the dielectric inner coating layer (2008)
  • Author(s): K. Iwai, M. Miyagi, Y. Shi, X. Zhu, Y. Matsuura
  • Journal Title: Opt.Lett. vol.32,no.23 Pages: 3420-3422
  • Peer Reviewed
• [Journal Article] Bragg fiber taper for subwavelength beam generation (2008)
  • Author(s): L. Ma
  • Journal Title: J. Lightwave Technol. 26 Pages: 3847-3852
  • Peer Reviewed
• [Journal Article] Hollow optical fibers loaded with an inner dielectric film for terahertz broadband spectroscopy (2008)
  • Author(s): Y. Matsuura
  • Journal Title: J. Opt. Soc. Am. B 25 Pages: 1949-1954
  • Peer Reviewed
• [Journal Article] Infrared hollow fiber with a vitreous film as the dielectric inner coating layer (2008)
  • Author(s): K. I. wai
  • Journal Title: Opt. Lett. 32 Pages: 3420-3423
  • Peer Reviewed
• [Journal Article] Hollow fiber optics with improved durability for high-peak-power pulses of Q-switched Nd : YAG lasers (2007)
  • Author(s): Y. Matsuura, A. Tshuchiuchi, H. Noguchi, M. Miyagi
  • Journal Title: Appl.Opt vol.46,no.8 Pages: 1279-1282
  • Peer Reviewed
• [Journal Article] Tapered hollow waveguide for focusing infrared laser beams (2007)
  • Author(s): S. Narita, Y. Matsuura, M. Miyagi
  • Journal Title: Opt.Lett. vol.32,no.8 Pages: 930-932
  • Peer Reviewed
• [Journal Article] Transmission properties of infrared hollow fibers produced by drawing a glass-tube preform (2007)
  • Author(s): R. Kasahara, Y. Matsuura, T. Katagiri, M. Miyagi
  • Journal Title: Opt.Eng. vol.46,no.2
  • NAID: 120003728565
  • Peer Reviewed
• [Journal Article] Hollow fiber optics with improved durability for high-peak-powerpulses of Q-switched Nd: YAG lasers (2007)
  • Author(s): Y. Matsuura
  • Journal Title: Appl. Opt. 46 Pages: 1279-1282
  • Peer Reviewed
• [Journal Article] Tapered hollow waveguide for focusing infrared laser beams (2007)
  • Author(s): S. Narita
  • Journal Title: Opt. Lett. 32 Pages: 930-932
  • Peer Reviewed
• [Journal Article] Transmission properties of infrared hollow fibers produced by drawing a glass-tube preform. (2007)
  • Author(s): R.Kasahara
  • Journal Title: Opt. Eng. 46・2
• [Journal Article] Hollow fiber optics with improved durability for high-peak-power pulses of Q-switched Nd : YAG lasers (2007)
  • Author(s): Y.Matsuura
  • Journal Title: Appl. Opt. 46・8 Pages: 1279-1282
• [Journal Article] All-solid single-mode Bragg fibers for compact fiber devices (2006)
  • Author(s): T. Katagiri, Y. Matsuura, M. Miyagi
  • Journal Title: J.Lightwave Technol vol.24,no.11 Pages: 4314-4318
  • Peer Reviewed
• [Journal Article] Side-Firing Sealing Caps for Hollow Optical Fibers (2006)
  • Author(s): T. Watanabe, Y. Matsuura
  • Journal Title: Lasers in Surgery and Medicine vol.38 Pages: 792-797
  • Peer Reviewed
• [Journal Article] Bundled hollow optical fibers for transmission of high-peak-power Q-switched Nd : YAG laser pulses (2006)
  • Author(s): O. Yilmaz, M. Miyagi, Y. Matsuura
  • Journal Title: Appl.Opt. vol.45,no.27 Pages: 7174-7178
  • Peer Reviewed
• [Journal Article] Bundled hollow optical fibers for transmission of high-peak-power Q-switched Nd : YAG laser pulses (2006)
  • Author(s): O.Yilmaz
  • Journal Title: Appl. Opt. 45・27 Pages: 7174-7178
• [Journal Article] Side-Firing Sealing Caps for Hollow Optical Fibers (2006)
  • Author(s): T.Watanabe
  • Journal Title: Lasers in Surgery and Medicine 38・6 Pages: 792-797
• [Journal Article] All-solid single-mode Bragg fibers for compact fiber devices (2006)
  • Author(s): T.Katagiri
  • Journal Title: J. Lightwave Technol. 24・11 Pages: 4314-4318
• [Presentation] 軟X線伝送用金属中空ファイバを用いた蛍光X線分析 (2009)
  • Author(s): 前田真吾, 松浦祐司
  • Organizer: 電子情報通信学会2009年総合大会
  • Place of Presentation: 松山
  • Year and Date: 2009-03-24
• [Presentation] 軟X線伝送用金属中空ファイバを用いた蛍光X線分析 (2009)
  • Author(s): 前田真吾
  • Organizer: 電子情報通信学会通信総合大会
  • Place of Presentation: 愛媛大学
  • Year and Date: 2009-03-17
• [Presentation] 軟X線伝送用金属中空ファイバ-曲がり損失低減の検討- (2008)
  • Author(s): 前田真吾
  • Organizer: 電子情報通信学会通信ソサイエティ大会
  • Place of Presentation: 明治大学
  • Year and Date: 2008-09-17
• [Presentation] 軟X線伝送用金属中空ファイバ-曲がり損失低減の検討- (2008)
  • Author(s): 前田真吾, 松浦祐司
  • Organizer: 電子情報通信学会通信ソサイエティ大会
  • Place of Presentation: 川崎(B-13-27)
  • Year and Date: 2008-09-13
• [Presentation] 軟X線スポット照射用金属中空ファイバの高効率化 (2008)
  • Author(s): 前田 真吾
  • Organizer: レーザー学会学術講演会第28回年次大会
  • Place of Presentation: 名古屋国際会議場
  • Year and Date: 2008-02-01
• [Presentation] 軟X線スポット照射用金属中空ファイバの高効率化 (2008)
  • Author(s): 前田真吾, 松浦祐司
  • Organizer: レーザー学会学術講演会第28回年次大会
  • Place of Presentation: 名古屋(1pIV-7)
  • Year and Date: 2008-01-29
• [Presentation] 軟X線伝送用金属中空ファイバ (2007)
  • Author(s): 前田真吾, 松浦祐司
  • Organizer: 電子情報通信学会通信ソサイエティ大会
  • Place of Presentation: 鳥取(B-13-15)
  • Year and Date: 2007-09-14
• [Presentation] 軟X線伝送用金属中空ファイバ (2007)
  • Author(s): 前田 真吾
  • Organizer: 電子情報通信学会通信ソサイエティ大会
  • Place of Presentation: 鳥取大学
  • Year and Date: 2007-09-10
• [Presentation] EUV光用ルテニウム中空ファイバの試作 (2007)
  • Author(s): 吉田貴則, 松浦祐司
  • Organizer: 第54回応用物理学関係連合講演会
  • Place of Presentation: 相模原(27p-ZL-7)
  • Year and Date: 2007-03-27
• [Presentation] UV, x-ray, and Raman waveguides for medical treatments (2006)
  • Author(s): Y. Matsuura
  • Organizer: Advaced study institute on optical waveguide sensing and imaging
  • Place of Presentation: Gatineau,Canada
  • Year and Date: 2006-10-19
• [Presentation] 13nm帯EUV光用金属中空ファイバ-金属の選択と試作- (2006)
  • Author(s): 吉田貴則, 松浦祐司
  • Organizer: 第67回応用物理学会学術講演会
  • Place of Presentation: 滋賀(30a-ZB-2)
  • Year and Date: 2006-08-30