A new technological development for functional ceramic coatings by solution-spraying thermal plasma CVD under controlled atmospheres

• Project/Area Number: 18360307
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Inorganic materials/Physical properties
• Research Institution: Hokkaido University
• Principal Investigator: SHIMADA Shiro Hokkaido University, 大学院・工学研究科, 教授 (90002310)
• Co-Investigator(Kenkyū-buntansha): AKASHI Kouya 北海道大学, 大学院工学研究科, 准教授 (20312647) ; KIYONO Hajime 北海道大学, 大学院・工学研究科, 助教 (50281788) ; KAWAMURA Midori 北見工業大学, 准教授 (70261401)
• Project Period (FY): 2006 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥17,410,000 (Direct Cost: ¥15,100,000、Indirect Cost: ¥2,310,000); Fiscal Year 2008: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000); Fiscal Year 2007: ¥7,020,000 (Direct Cost: ¥5,400,000、Indirect Cost: ¥1,620,000); Fiscal Year 2006: ¥7,400,000 (Direct Cost: ¥7,400,000)
• Keywords: 機能性セラミックス / 雰囲気制御 / 熱プラズマ / CVD / 機能性 / セラミックス / コーティング / 耐磨耗性 / 複合膜

Research Abstract

現在、塩化物ガスを使用した熱CVD法でWC-Co超硬上へ様々なセラミックスコーティングが施され、工業的に切削工具として使用されている。この成膜法は、比較的高いコーティング温度(~1050℃)によるWC-Coの劣化、塩化物ガスによる環境汚染などの問題点がある。著者は、比較的安価で取り扱いが容易でしかも環境に易しいアルコキシド溶液を熱プラズマ中へ噴霧する新規なコティング法を開発し、低温(<800℃)で窒化物・炭化物・ホウ化物・酸化物の単相膜、複合膜、多層膜などを作製した。これらのコーティング膜は市販のTiNや二層膜TiN/Al_2O_3と比較しても同程度かより優れた耐摩耗性を示した。

Research Products

• [Journal Article] Deposition and wear resistance of composite TiBC-SiC coatings on Si wafer by thermal plasma CVD (2009)
  • Author(s): Shiro Shimada, Yusuke Fuji, Hajime Kiyono, Jiro. Tsujino, Isao. Yamazaki
  • Journal Title: J. Ceram. Soc. Jpn. 117 Pages: 415-420
  • NAID: 10025966864
  • Peer Reviewed
• [Journal Article] Coatings and microstructures of monolithic TiB_2 films and double layer and composite TiCN/TiB_2 films from alkoxide solutions by thermal plasma CVD (2008)
  • Author(s): S. Shimada, M. Takahashi, H. Kiyono, and J. Tsujino
  • Journal Title: Thin Solid Films 516 Pages: 6610-6621
  • Peer Reviewed
• [Journal Article] Thermal plasma CVD of PSZ and double layered TiN/PSZ coatings by injection of alkoxides solutions with H2O (2008)
  • Author(s): S. Shimada, Furuta, J. Tsujino, I. Yamazaki
  • Journal Title: Surface Coatings and Technology 202 Pages: 4644-4652
  • Peer Reviewed
• [Journal Article] Thermal plasma CVD of PSZ and double layered TiN / PSZ coati ngs by injection of alkoxides solutions with H2O (2008)
  • Author(s): S. Shimada, T. Furuta, J. Tsujino, I. Yamazaki
  • Journal Title: Surface Coatings and Technology 202 Pages: 4644-4652
  • Peer Reviewed
• [Journal Article] Coatings and microstructures of monolithic TiB_2 films and double layer and c omposite TiCN / TiB_2 films from alkoxide solutions by thermal plasma CVD (2008)
  • Author(s): S. Shimada, M. Takahashi, H. Kiyono, and J. Tsujino
  • Journal Title: Thin Solid Films 516 Pages: 6610-6621
  • Peer Reviewed
• [Journal Article] Thermally stable Ag thin films Modified with very thin Al oxide layer (2008)
  • Author(s): M. Kawamura, Y. Inami, Y. Abe, K. Sasaki
  • Journal Title: Jpn. J. Appl. Phys. 47 Pages: 8917-8920
  • NAID: 120005844998
  • Peer Reviewed
• [Journal Article] 熱プラズマCVD法によるTiBC, TiBN, SiNx単層膜とTiBC-SiNxとTiBN-SiNx二層膜の作製とその耐摩耗性評価 (2007)
  • Author(s): 藤祐輔, 嶋田志郎, 清野肇
  • Journal Title: 粉体粉末冶金協会誌 54 Pages: 287-293
  • NAID: 130000057992
  • Peer Reviewed
• [Journal Article] Diamond Growth on a Si Substrate with Ceramic Interlayers (2007)
  • Author(s): Y.S. Li, C. Xiao, A. Hirose, Q. Yang, and S.Shimada
  • Journal Title: J. Am. Ceram. Soc. 90(5) Pages: 1427-1433
  • Peer Reviewed
• [Journal Article] Deposition and wear resistance of Ti-B-N-C coatings on WC-Co cutting tools from alkoxide solutions by thermal plasma CVD (2007)
  • Author(s): S. Shimada, M. Takahashi^a, J. Tsujino, I.Yamazaki, K. Tsuda
  • Journal Title: Surface Coatings and Technology 201 Pages: 7194-7200
  • Peer Reviewed
• [Journal Article] Deposition and wear resistance of Ti-B-N-C coatings on WC-Co cutting tools from alkoxide solutions by thermal plasma CVD (2007)
  • Author(s): S. Shimada, M. Takahashi, J. Tsujino, I. Yamazaki, K. Tsuda
  • Journal Title: Surface Coatings and Technology 201 Pages: 7194-7200
  • Peer Reviewed
• [Journal Article] 熱プラズマCVD法によるTiBC,TiBN,SiNx単層膜とTiBC-SiNxとTiBN-SiNx二層膜の作製とその耐摩耗性評価 (2007)
  • Author(s): 藤 祐輔, 嶋田 志郎, 清野 肇
  • Journal Title: 粉体粉末冶金協会誌 54 Pages: 287-293
  • NAID: 130000057992
  • Peer Reviewed
• [Journal Article] Diamond Growth on a Si Substrate with Ceramic Interlayers (2007)
  • Author(s): Y. S. Li, C. Xiao, A. Hirose, Q. Yang, S. Shimada
  • Journal Title: Journal of the American Ceramics Society 90 Pages: 1427-1433
  • Peer Reviewed
• [Journal Article] Target-Surface Compound Layers Formed by Reactive Sputtering of Si Target in Ar + O2 and Ar + N2 Mixed Gases (2007)
  • Author(s): Y. Abe, T. Takisawa, M. kawamura, K. Sasaki
  • Journal Title: Jpn. J. Appl. Phys 46 Pages: 6778-67821
  • NAID: 120005845001
  • Peer Reviewed
• [Journal Article] Comparison of the agglomeration behavior of Ag(Al)films and Ag(Au)films (2007)
  • Author(s): K. Sugawara, M. Kawamura, Y. Abe and K. Sasaki
  • Journal Title: Microelectronic Engineering 84 Pages: 2478-2480
  • Peer Reviewed
• [Journal Article] Synthesis of Al_2O_<3->SiO_2 films by Ar/O_2 plasma-enhanced CVD from alkoxide precursors (2006)
  • Author(s): Y.S. Li, S. Shimada, A. Hirose
  • Journal Title: Chemical Va por Deposition 12(5) Pages: 255-258
  • Peer Reviewed
• [Journal Article] Synthesis of Ti-Al-Si-N nanocomposite films using liquid injection PECVD from alkoxide precursors (2006)
  • Author(s): Y.S. Li, S. Shimada, H. Kiyono and A. Hirose
  • Journal Title: Acta Materialia 54(8) Pages: 2041-2048
  • Peer Reviewed
• [Journal Article] Crystalline SiC/amorphous SiNx graded films prepared by plasma-enhanced CVD from HMDS precursor (2006)
  • Author(s): Y.S. Li, H. Kiyono, S. Shimada, X. Lu. A.Hirose
  • Journal Title: Diamond and Related Materials 15(10) Pages: 1727-1731
  • Peer Reviewed
• [Journal Article] Synthesis and anti-corrosion behavior of SiC and SiNx films produced by liquid injection PECVD (2006)
  • Author(s): Y.S. Li and S. Shimada
  • Journal Title: Surface Coatings and Technology 201 Pages: 160-1165
  • Peer Reviewed
• [Journal Article] Synthesis and anti-corrosion behavior of SiC and SiNx films produced by liquid injection PECVD (2006)
  • Author(s): Y.S.Li, S.Shimada
  • Journal Title: Surface Coatings and Technology 201 Pages: 1160-1165
• [Journal Article] Mechanical and filed emission of CGed Si(C,N) films synthesized by PECVD from HMDS precursor (2006)
  • Author(s): Y.S.Li, H.Kiyono, S.Shimada, X.Lu, A.Hirose
  • Journal Title: Diamond and Related Materials 15 Pages: 1727-1731
• [Journal Article] Synthesis of Ti-Al-Si-N nanocomposite films using liquid injection PECVD from alkoxide precursors (2006)
  • Author(s): Y Y.S.Li, H.Kiyono, S.Shimada, A.Hirose
  • Journal Title: Acta Materialia 54 Pages: 2041-2048
• [Journal Article] Synthesis of Al_2O_3-SiO_2 Films by Ar/O_2 Plasma-Enhanced CVD from Alkoxide Precursors (2006)
  • Author(s): Y Y.S.Li, S.Shimada, A.Hirose
  • Journal Title: Chemical Vapor Deposition 12 Pages: 255-258
• [Journal Article] Effects of the Ar-N2 Sputtering Gas Mixture on the Preferential Orientation of Sputtered Ru Films (2006)
  • Author(s): M.Kawamura, K.Yagi, Y.Abe, K.Sasaki
  • Journal Title: Thin Solid Films 494 Pages: 240-243
• [Journal Article] Sputter-deposition of Ag films in a nitrogen discharge (2006)
  • Author(s): M.Kawamura, Y.Abe, K.Sasaki
  • Journal Title: Thin Solid Films 515 Pages: 540-542
  • NAID: 120003056854
• [Presentation] 熱プラズマCVDによるセラミックスコーティング膜の作製と耐磨耗性 (2009)
  • Author(s): 嶋田志郎
  • Organizer: PSS-2009/SRR-26
  • Place of Presentation: 名古屋大学, 名古屋
• [Presentation] 雰囲気制御熱プラズマCVDを用いたTiN-PSZ二層膜コーティングと耐磨耗特性 (2009)
  • Author(s): 坂本尭則, 嶋田志郎, 清野肇, 辻野二朗・山崎勲
  • Organizer: 第47回セラミックス基礎科学討論会
  • Place of Presentation: 大阪国際会議場, 大阪
• [Presentation] 熱プラズマCVD法で作製したTiN-AlN複合膜の酸化挙動 (2008)
  • Author(s): 寺尾祐信、嶋田志郎、辻野二朗、山崎勲
  • Organizer: 北海道支部2008年夏季研究発表会
  • Place of Presentation: 北見工業大、北見
  • Year and Date: 2008-07-19
• [Presentation] Direct Synthesis of Adherent and Oriented Diamond Nanostructures on Steels (2008)
  • Author(s): Y. Li, S. Shimada, A. Hirose
  • Organizer: IUMRS
  • Place of Presentation: Nagoya International Conf. Hall, Nagoya
• [Presentation] Deposition and wear resistance of TiBCN-based Coatings from alkoxide solutions by thermal plasma CVD (2008)
  • Author(s): Shiro Shimada
  • Organizer: ASPT08
  • Place of Presentation: Wuhan, China
• [Presentation] Oxidation of Composite TiN-AlN Films Prepared by Thermal PlasmaCVD (2008)
  • Author(s): S. Shimada and Y. Terao
  • Organizer: IUMRS
  • Place of Presentation: Nagoya International Conf. Hall, Nagoya
• [Presentation] 水蒸気制御下での熱プラズマCVDによるアルコキシド溶液からのTiN-PSZ二層膜コーティングの微構造観察 (2008)
  • Author(s): 坂本尭則、嶋田志郎、清野肇、辻野二朗、山崎勲
  • Organizer: 粉体粉末冶金協会平成20年度秋季大会
  • Place of Presentation: 九州大学, 福岡
• [Presentation] Oxidation of TiN-AlN thin films coated from alkoxide solutions by thermal plasma CVD (2008)
  • Author(s): S. Shimada, Y. Terao, J. Tsujino, I. Yamazaki
  • Organizer: 7^<th> International Conference on the Microscopy of Oxidation
  • Place of Presentation: University of Chester, UK
• [Presentation] 熱プラズマCVD法によるアルコキシド溶液からのTiN基窒化物の複合膜および2層膜のコーティングと耐摩耗性 (2007)
  • Author(s): 嶋田志郎
  • Organizer: 第45回CVD研究会
  • Place of Presentation: ホテルサザンビレッジ
  • Year and Date: 2007-08-20
• [Presentation] 窒化物材料の新規プロセス開発-ナノ粒子、薄膜、単晶について- (2007)
  • Author(s): 嶋田志郎
  • Organizer: 日本セラミックス協会2007年年会
  • Place of Presentation: 武蔵工業大学、東京
• [Presentation] 水蒸気制御下での熱プラズマCVDによるアルコキシド溶液からのTiN-PSZ二層膜コーティングと耐磨耗性評価 (2007)
  • Author(s): 坂本尭則、嶋田志郎、清野肇、辻野二朗、山崎勲
  • Organizer: 粉体粉末冶金協会平成19年度秋季大会
  • Place of Presentation: 京都繊維大、京都
• [Presentation] Deposition of Ti-B-C-N on WC-Co Alloy from Alkoxide Solutions by Thermal Plasma CVD (2007)
  • Author(s): J. Tsujino, K. Tsuda, I. Yamazaki, S. Shimada
  • Organizer: 10^<th> ECerS Conf.
  • Place of Presentation: Goller Verlag, Barden-Barden Germany
• [Presentation] Coatings and microstructure of Ti-B-N-C films from alkoxide solutions by thermal plasma CVD (2007)
  • Author(s): S. Shimada and M. Takahashi
  • Organizer: The 20^<th> Symposium on Plasma Science for Materials
  • Place of Presentation: Nagoya University,Nagoya
• [Presentation] 熱プラズマCVD 法によるTiB_2-SiNx二層膜の作製とその耐摩耗性評価 (2006)
  • Author(s): 藤祐輔, 嶋田志郎, 清野肇
  • Organizer: 粉体粉末冶金協会
  • Place of Presentation: 大阪大学, 大阪
• [Book] Deposition and Properties of nano/micro monolithic, composite, and double-layer nitrides, borides, and carbides films coatings from alkoxide solutions by thermal plasma CVD(in press)
  • Author(s): Shiro Shimada
  • Publisher: Nanocoatings : Processes, Properties and Applications, Nova Science Publishers, Inc. U.S.A
• [Remarks]
  • URL: http://kotai.4-mc.eng.hokudai.ac.jp/kotai/engindex.html
• [Patent(Industrial Property Rights)] ジルコニア膜の成膜法、硬質合金切削用工具の被覆方法及び硬質合金切削用工具 (2006)
  • Inventor(s): 嶋田志郎、辻野二朗、山崎勲、津田圭一
  • Industrial Property Number: 2006-193897
  • Filing Date: 2006-07-14