Study on Superfine Wire Manufacturing by Supercritical Nano-plating Method
| Project/Area Number |
18360350
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Material processing/treatments
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| Research Institution | Tokyo Institute of Technology |
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Principal Investigator |
SONE Masato Tokyo Institute of Technology, Precision and Intelligence Laboratory, Associate Professor (30323752)
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| Co-Investigator(Kenkyū-buntansha) |
HIGO Yakichi Tokyo Institute of Technology, Precision and Intelligence Laboratory, Professor (30016802)
ISHIYAMA Chiemi Tokyo Institute of Technology, Precision and Intelligence Laboratory, Assistant Professor (00311663)
SHIBATA Akinobu Tokyo Institute of Technology, Precision and Intelligence Laboratory, Assistant Professor (60451994)
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| Project Period (FY) |
2006 – 2007
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| Project Status |
Completed (Fiscal Year 2007)
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| Budget Amount *help |
¥17,400,000 (Direct Cost: ¥15,600,000、Indirect Cost: ¥1,800,000)
Fiscal Year 2007: ¥7,800,000 (Direct Cost: ¥6,000,000、Indirect Cost: ¥1,800,000)
Fiscal Year 2006: ¥9,600,000 (Direct Cost: ¥9,600,000)
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| Keywords | Plating / Superfine Manufacturing / Superfine Wiring Process / Supercritical Fluid / Surface Finishing |
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| Research Abstract |
An innovative electroplating technology "Supercritical Nanoplating (SNP)", which is a hybrid of supercritical fluid and electroplating technology, has been proposed. In this technology, electroplating reactions are carried out in emulsion of supercritical carbon dioxide (CO_2) and electroplating solution with surfactants. The objective of this study is to develop a novel, superfine wire manufacturing technology by SNP with supercritical CO_2 washing. Firstly, we elucidated the plating reaction by measuring the current values in the emulsion using minute terminals connected to a programmable power supply, while simultaneously observing the dispersion state of the emulsion through a high-pressure view cell. The flow of current values in the emulsion system fluctuated, and the current value decreased together with the amplitude of the fluctuant current when the pressure was increased. The fluctuant current flow in the emulsion was concluded to play an important role in the fabrication of the nano grain nickel structure in the plated film. Secondly, the electroless plating reactions are carried out in an emulsion of sc-CO_2 and an electroless plating solution with surfactant. The Ni-P film obtained by this proposed technique was a uniform and conformal film without the pinholes that form from the hydrogen bubbles produced by the electrolysis of water, and without the nodules that form from the nuclear growth on the electroless plating reaction. Lastly, SNP was applied to the superfine wiring. The superfine Cu wiring by SNP successfully gave uniform, excellent Cu wire without void on the Si substrate with φ120 nm hole. Thus, SNP technology has great possibility to contribute to next generation integrated circuit technology.
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Report
(3 results)
Research Products
(60 results)
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[Journal Article] Metallization on Polymer by 'Catalyzation in Supercritical CO_2 and Electroless Plating in Dense CO_2 Emulsion2008
Author(s)
B-H., Woo, M., Sone, A., Shibata, C., Ishiyama, K., Masuda, M., Yamagata, T., Endo, T., Hatsuzawa, Y., Higo
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Journal Title
Surface & Coating Technology 202/16
Pages: 3921-3926
Description
「研究成果報告書概要(欧文)」より
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[Journal Article] Uniform Ni-P Film using an Electroless Plating Method with an Emulsion of Supercritical Carbon Dioxide2007
Author(s)
Hiroki, Uchiyama, Masato, Sone, Chiemi, Ishiyama, Tatsuro, Endo, Takeshi Hatsuzawa, Yakichi, Higo
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Journal Title
Surface & Coating Technology 154[7]
Description
「研究成果報告書概要(欧文)」より
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[Journal Article] Novel porous film by electroplating with an emulsion of supercritical CO_22007
Author(s)
M., Rahman, M., Sone, H., Uchiyama, M., Sakurai, S., Miyata, T., Nagai, Y., Higo, H., Kameyama
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Journal Title
Surface & Coating Technology 201
Pages: 7513-7518
Description
「研究成果報告書概要(欧文)」より
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[Journal Article] Wear Properties of Nickel Coating Film Plated From Emulsion with Dense Carbon Dioxide2006
Author(s)
Md. Z., Rahman, M., Sone, M., Eguchi, K., Ikeda, S., Miyata', T., Yamamoto
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Journal Title
Surface & Coating Technology 201(3-4)
Pages: 606-611
Description
「研究成果報告書概要(欧文)」より
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[Journal Article] Fabrication of thin palladium membrane by electroplating coexisting with supercritical carbon dioxide.2006
Author(s)
S., Uemiya, YMakino, I.Miyazaki, H., Kawamura, R., Yoshiie, M., Nishimura, M., Sone, S., Miyata
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Journal Title
Maku 31(6)
Pages: 332-336
NAID
Description
「研究成果報告書概要(欧文)」より
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[Presentation] Fabrication of PdxNiyP100-x-y Metallic Glass film by Electroless Alloy Plating and its catalyst activity"2007
Author(s)
Y., Imamura, M., Sone, A., Shibata, C., Ishiyama, Y., Higo
Organizer
2007 MRS Fall Meeting
Place of Presentation
Boston, USA
Year and Date
2007-11-28
Description
「研究成果報告書概要(欧文)」より
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[Presentation] Novel Porous Film Fabricated by Electroplating Method with the Emulsion of Supercritical CO_22006
Author(s)
Masato, Sone, Md. Mizanur, Rahman, Makoto, Sakurai, Seizo, Miyatab, Takabumi, Nagai, Yakichi, Higo, Hideo, Kameyama
Organizer
8th International Symposium on Supercritical Fluids
Place of Presentation
Kyoto. Japan
Year and Date
2006-11-06
Description
「研究成果報告書概要(欧文)」より
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