Synthesis of periodic nanoporous silica and silica phosphate films and their applications to electronic devices

• Project/Area Number: 18360374
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Properties in chemical engineering process/Transfer operation/Unit operation
• Research Institution: Osaka University
• Principal Investigator: UEYAMA Korekazu Osaka University, 大学院・基礎工学研究科, 教授 (10092149)
• Co-Investigator(Kenkyū-buntansha): NISHIYAMA Norikazu 大阪大学, 大学院・基礎工学研究科, 准教授 (10283730)
• Project Period (FY): 2006 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥18,240,000 (Direct Cost: ¥15,600,000、Indirect Cost: ¥2,640,000); Fiscal Year 2008: ¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000); Fiscal Year 2007: ¥7,280,000 (Direct Cost: ¥5,600,000、Indirect Cost: ¥1,680,000); Fiscal Year 2006: ¥6,800,000 (Direct Cost: ¥6,800,000)
• Keywords: 構造・機能材料 / ナノ材料 / 燃料電池 / 電子 / 電気材料 / 薄膜 / メソポーラスシリカ / Low-k / 電解質膜 / リン酸塩 / low-k

Research Abstract

規則配列した均一メソ孔を有するメソポーラスシリカの薄膜化を行った。メソポーラスシリカ薄膜の熱的、機械的安定性を向上させるために界面活性剤(有機テンプレート)薄膜にシリカ源を蒸気で供給する合成手法(蒸気合成法)を開発した。次世代Low-k材料や燃料電池電解質膜の開発を目指して、蒸気合成したシリカ薄膜およびリン酸シリケート薄膜の誘電率やプロトン伝導性を測定し、その可能性を示した

Research Products

• [Journal Article] Synthesis of 3D pore mesostructured silica films by vapor infiltration of tetraethoxysilane (2008)
  • Author(s): Takanori Maruo, Kaori Nagata, Norikazu Nishiyama, Yasuyuki Egashira and Korekazu Ueyama
  • Journal Title: J. Colloid Interface Sci 328 Pages: 120-123
  • Peer Reviewed
• [Journal Article] Vapor phase synthesis of mesoporous silica thin films with a 3D pore structure (2008)
  • Author(s): Takanori Maruo, Kaori Nagata, Norikazu Nishiyama, Yasuyuki Egashira, Korekazu Ueyama, Christopher P. Muzzillo, Michael P. Tate, Hugh W. Hillhouse
  • Journal Title: Stud. Surf. Sci. Catal 174A Pages: 417-420
  • Peer Reviewed
• [Journal Article] Disordered Mesoporous Silica Low-k Thin Films Prepared by Vapor Deposition into a Triblock Copolymer Template Film (2008)
  • Author(s): Takanori Maruo, Shunsuke Tanaka, Hugh W. Hillhouse, Norikazu Nishiyama, Yasuyuki Egashira, and Korekazu Ueyama
  • Journal Title: Thin Solid Films 516 Pages: 4771-4776
  • Peer Reviewed
• [Journal Article] Low-index mesoporous silica films modified with trimethylethoxysilane (2008)
  • Author(s): Takanori Maruo, Shunsuke Tanaka, Norikazu Nishiyama, Ken-ichiro Motoda, Katsuya Funayama, Yasuyuki Egashira, and Korekazu Ueyama
  • Journal Title: Colloids and Surfaces A 318 Pages: 84-87
  • Peer Reviewed
• [Journal Article] Proton-conducting mesoporous silica/phosphate composite films prepared by vapor phase method (2008)
  • Author(s): Yuko Nishiyama, Kentaro Ochi, Norikazu Nishiyama, Yasuyuki Egashira and Korekazu Ueyama
  • Journal Title: Electrochemical and Solid-State Letters 11
  • Peer Reviewed
• [Journal Article] Low-index mesoporous silica films modified with trimethylethoxysilane (2008)
  • Author(s): Takanori Maruo
  • Journal Title: Colloids and Surfaces A 318 Pages: 84-87
  • Peer Reviewed
• [Journal Article] Disordered Mesoporous Silica Low-k Thin Films Prepared by Vapor Deposition into a Triblock Copolymer Template Film (2008)
  • Author(s): Takanori Maruo
  • Journal Title: Thin Solid Films 516 Pages: 4771-4776
  • Peer Reviewed
• [Journal Article] Vapor phase synthesis of mesoporous silica thin films with a 3Dpore structure (2008)
  • Author(s): Takanori Maruo
  • Journal Title: Stud. Surf. Sci. Catal. 174A Pages: 417-420
  • Peer Reviewed
• [Journal Article] Synthesis of 3D pore mesostructured silica films by vapor infiltration of tetraethoxysilane (2008)
  • Author(s): Takanori Maruo
  • Journal Title: J. Colloid Interface Sci. 328 Pages: 120-123
  • Peer Reviewed
• [Journal Article] Proton-conducting mesoporous silica/phosphate composite films prepared by vapor phase method (2008)
  • Author(s): Yuko Nishiyama
  • Journal Title: Electrochemical and Solid-State Letters 11
  • Peer Reviewed
• [Journal Article] Vapor Phase Synthesis of Ordered Mesoporous Silica-Phosphate Complex Films and Their Proton Conductivity (2007)
  • Author(s): Norikazu Nishiyama, Yuko Nishiyama, Kentaro Ochi, Yasuyuki Egashira, Korekazu Ueyama
  • Journal Title: Conductivity" Stud. Surf. Sci. Catal 170 Pages: 1912-1917
  • Peer Reviewed
• [Journal Article] Vapor Phase Preparations of Mesoporous Silica Thin Films for Ultra-Low-k Dielectrics (2007)
  • Author(s): Shunsuke Tanaka, Takanori Maruo, Norikazu Nishiyama, Korekazu Ueyama, Hugh W. Hillhouse
  • Journal Title: Stud. Surf. Sci. Catal 165 Pages: 595-598
  • Peer Reviewed
• [Journal Article] Vapor Phase Synthesis of Mesoporous SiO_2-P_2O_5 Thin Films (2007)
  • Author(s): Norikazu Nishiyama, Junji Kaihara, Yuko Nishiyama, Yasuyuki Egashira, Korekazu Ueyama
  • Journal Title: Langmuir 23 Pages: 4746-4748
  • Peer Reviewed
• [Journal Article] Vapor Phase Synthesis of Mesoporous SiO_2-P_2O_5 Thin Films (2007)
  • Author(s): Norikazu Nishiyama
  • Journal Title: Langmuir 23 Pages: 4746-4748
  • Peer Reviewed
• [Journal Article] Vapor Phase Preparations of Mesoporous Silica Thin Films for Ultra-Low-k Dielectrics (2007)
  • Author(s): Shunsuke Tanaka
  • Journal Title: Stud. Surf. Sci. Catal. 165 Pages: 595-598
  • Peer Reviewed
• [Journal Article] Vapor Phase Synthesis of Ordered Mesoporous Silica-Phosphate Complex Films and Their Proton Conductivity (2007)
  • Author(s): Norikazu Nishiyama
  • Journal Title: Stud. Surf. Sci. Catal. 170 Pages: 1912-1917
  • Peer Reviewed
• [Journal Article] Synthesis of Ordered Mesoporous Zirconium Phosphate Films by Spin Coating and Vapor Treatments (2006)
  • Author(s): Yuko Nishiyama, Shunsuke Tanaka, Hugh W. Hillhouse, Norikazu Nishiyama, Yasuyuki Egashira, Korekazu Ueyama
  • Journal Title: Langmuir 22 Pages: 9469-9472
  • Peer Reviewed
• [Journal Article] Synthesis of Ordered Mesoporous Zirconium Phosphate Films by Spin Coating and Vapor Treatments (2006)
  • Author(s): Y.Nishiyama, S.Tanaka, H.W.Hillhouse, N.Nishiyama, Y.Egashira, K.Ueyama
  • Journal Title: Langmuir 22・23 Pages: 9469-9472
• [Presentation] Vapor phase synthesis of mesoporous silica thin films with a 3D pore structure (2008)
  • Author(s): Takanori Maruo, Kaori Nagata, Norikazu Nishiyama, Yasuyuki Egashira, Korekazu Ueyama, Christopher P. Muzzillo, Michael P. Tate and Hugh W. Hillhouse
  • Organizer: 4th FEZA Conference, Paris
  • Place of Presentation: France
• [Presentation] Proton Conductive Silicate/Phosphate Composite Membranes (2008)
  • Author(s): Yuko Nishiyama, Norikazu Nishiyama, Yasuyuki Egashira and Korekazu Ueyama
  • Organizer: 6th spring meeting of International Society of Electrochemistry, Foz do Iguacu
  • Place of Presentation: Brazil
• [Presentation] Vapor Phase Synthesis of Ordered Mesoporous Silicon Phosphate Films and Their Proton Conductivity (2007)
  • Author(s): Norikazu Nishiyama, Yuko Nishiyama, Kentaro Ochi, Yasuyuki Egashira, Korekazu Ueyama
  • Organizer: IZC
  • Place of Presentation: Beijing, Chin
• [Presentation] Vapor Phase Synthesis of Mesoporous Silica Low-k films (2007)
  • Author(s): Takanori Maruo, Shunsuke Tanaka, Norikazu Nishiyama,, Yasuyuki Egashira, Korekazu Ueyama
  • Organizer: IZC
  • Place of Presentation: Beijing, China
• [Presentation] Synthesis of Ordered Mesoporous Zirconium Phosphate Films and Their Proton Conductivity (2006)
  • Author(s): Yuko Nishiyama, Shunsuke Tanaka, Norikazu Nishiyama, Yasuyuki Egashira, Korekazu Ueyama
  • Organizer: 210th Meeting of Electrochemical Society (210th ECS)
  • Place of Presentation: Cancun, Mexico