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Fabrication of high coercivity magnetic nanostructures by electron beam induced deposition with dual metal-organic gases

Research Project

Project/Area Number 18510103
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Nanomaterials/Nanobioscience
Research InstitutionNational Institute for Materials Science

Principal Investigator

TAKEGUCHI Masaki  National Institute for Materials Science, Nanocharacterization Center, Senior Researcher (30354327)

Project Period (FY) 2006 – 2007
Project Status Completed (Fiscal Year 2007)
Budget Amount *help
¥4,050,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥450,000)
Fiscal Year 2007: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2006: ¥2,100,000 (Direct Cost: ¥2,100,000)
KeywordsElectron beam induced deposition / Electron holography / Transmission electron microscopy / Nanostructure / 電子線誘起蒸着(EBID) / FePt / 磁性ナノ構造
Research Abstract

We modified our UHV-FE-SEM, by which we could introduce one kind of gas in its camber, to an EBID instrument with dual gases introduction system. Electron beam induced deposition with a mixture gas of Fe (C_5H_5)2 and Fe (CO)_5 was carried out to fabricate nanostructures with different iron concentrations using this instrument. It was found that the iron concentration could be controlled by changing the ratio of partial pressure of Fe (C_5H_5)_2 and Fe (CO)_5. Electron holography was employed to evaluate the remanent magnetic flux density Br for the nanostructures with various compositional ratios of iron to carbon, indicating that the Br value is related to the iron concentration.
A mixture gas of Fe (CO)_5 and (CH_3)_3 (C_5H_5)Pt was used as a precursor and post-annealing at 600℃ for 2 hour was performed to accomplish the crystallization process. Nanorods were composed of a chain of crystalline Fe-Pt alloy nanoparticles encapsulated within a carbon-containing sheath. The nanoparticles were identified to be face centered tetragonal FePt phase L10 by electron diffraction and HRTEM. The residual magnetic flux density Br of the nanorods was evaluated from electron holography, showing a strong ferromagnetic character.
The addition of water vapor to Fe (CO)_5 could effectively reduce carbon content and the addition of enough water vapor resulted in the formation of carbon-free crystalline Fe_3O_4 nanorods. However, in the case of W (CO)_6, the resulting nanorods were composed of a carbon-rich amorphous matrix and tungsten oxide nanocrystals embedded in a matrix. This result suggested that the effect of the catalytic property of iron on the EBID process with water vapor use might be important.

Report

(3 results)
  • 2007 Annual Research Report   Final Research Report Summary
  • 2006 Annual Research Report
  • Research Products

    (22 results)

All 2007 2006

All Journal Article (14 results) (of which Peer Reviewed: 5 results) Presentation (8 results)

  • [Journal Article] Nanostructure Fabrication by Electron-Beam-Induced Deposition with Metal Carbonyl Precursor and Water Vapor2007

    • Author(s)
      M.Takeguchi,M.Shimojo and K.Furuya
    • Journal Title

      Japanese Journal of Applied Physics 46

      Pages: 6183-6186

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Nanostructure Fabrication by Electron-Beam-Induced Deposition with Metal Carbonyl Precursor and Water Vapor2007

    • Author(s)
      M. Takeguchi, M. Shimojo, K. Furuya
    • Journal Title

      Jpn. J. Appl. Phys. 46

      Pages: 6183-6186

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Nanostructure Fabrication by Electron-Beam-Induced Deposition with Metal Carbonyl Precursor and Water Vapor2007

    • Author(s)
      M. Takeguchi, M. Shimojo, K. Furuya
    • Journal Title

      Japanese Journal of Applied Physics 46

      Pages: 6183-6186

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of a nano-magnet on a piezo-driven tip in a TEM sample holder2006

    • Author(s)
      M.Takeguchi,M.Shimojo,R.Che and K.Furuya
    • Journal Title

      Journal of Materials Science 41

      Pages: 2627-2630

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Fabrication of nanostructures with different iron concentration by electron beam induced deposition with a mixture gas of iron carbonyl and ferrocene,and their magnetic properties2006

    • Author(s)
      M.Takeguchi,M.Shimojo,K.Mitsuishi,M.Tanaka,R.Che and K.Furuya
    • Journal Title

      Journal of Materials Science 41

      Pages: 4532-4536

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] 電子線誘起蒸着(EBID)による磁性ナノ構造創製/電子線誘起蒸着(EBID)による磁性ナノ構造創製2006

    • Author(s)
      竹口雅樹、下条雅幸、古屋一夫
    • Journal Title

      顕微鏡 41

      Pages: 127-130

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Fabrication of a nano-magnet on a piezo-driven tip in a TEM sample holder2006

    • Author(s)
      M. Takeguchi, M. Shimojo, R. Che, K. Furuya
    • Journal Title

      Journal of Materials Science 41

      Pages: 2627-2630

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Fabrication of nanostructures with different iron concentration by electron beam induced deposition with a mixture gas of iron carbonyl and ferrocene, and their magnetic properties2006

    • Author(s)
      M. Takeguchi, M. Shimojo, K. Mitsuishi, M. Tanaka, R. Che, K. Furuya
    • Journal Title

      Journal of Materials Science 41

      Pages: 4532-4536

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Fabrication of magnetic nanostructures by electron beam induced deposition(EBID)2006

    • Author(s)
      M. Takeguchi, M. Shimojo, K. Furuya
    • Journal Title

      Kenbikyo(in Japanese) 41

      Pages: 127-130

    • NAID

      10018183243

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Fabrication of a nano-magnet on a piezo-driven tip in a TEM sample holder2006

    • Author(s)
      M.Takeguchi, M.Shimojo, R.Che, K.Furuya
    • Journal Title

      Journal of Materials Science 41

      Pages: 2627-2627

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Fabrication of nanostructures with different iron concentration by electron beam induced deposition with a mixture gas of iron carbonyl and ferrocene, and their magnetic properties2006

    • Author(s)
      M.Takeguchi, M.Shimojo, K.Mitsuishi, M.Tanaka, R.Che, K.Furuya
    • Journal Title

      Journal of Materials Science 41

      Pages: 4532-4532

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Electron holographic study of the effect of contact resistance of connected nanowires on resistivity measurement2006

    • Author(s)
      M.Takeguchi, M.Shimojo, M.Tanaka, R.Che, W.Zhang, K.Furuya
    • Journal Title

      Surface and Interface Analysis 38

      Pages: 1628-1628

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Electron beam-induced formation of nanosized α-Fe crystals2006

    • Author(s)
      W.Zhang, M.Shimojo, M.Takeguchi, K.Furuya
    • Journal Title

      Journal of Materials Science 41

      Pages: 2577-2577

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Formation of Fe-Pt intermetallic phase in nanostructures by electron-beam-induced deposition and postdeposition alloying processes2006

    • Author(s)
      W.Zhang, R.Che, M.Takeguchi, M.Shimojo, K.Furuya
    • Journal Title

      Surface and Interface Analysis 38

      Pages: 1527-1527

    • Related Report
      2006 Annual Research Report
  • [Presentation] TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshine)-metal precursors2007

    • Author(s)
      M.Takeguchi,M.Shimojo,M.Tanaka,K.Mitsuishi and K.Furuya
    • Organizer
      20th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Kyoto(Japan)
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshine) -metal precursors2007

    • Author(s)
      M. Takeguchi, M. Shimojo, M. Tanaka, K. Mitsuishi, K. Furuya
    • Organizer
      20th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Kyoto(Japan)
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshine)-metal precursors2007

    • Author(s)
      M. Takeguchi, M. Shimojo, M. Tanaka, K. Mitsuishi, K.Furuya
    • Organizer
      20th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      京都国際会館(京都市)
    • Related Report
      2007 Annual Research Report
  • [Presentation] Nanostructure fabrication by electron beam induced deposition with metal carbonyl precursor and water vapor2006

    • Author(s)
      M.Takeguchi,M.Shimojo,K.Furuya
    • Organizer
      19th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Kamakura(Japan)
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Electron Holography Characterization of Nanostructures with Different Iron Concentations Formed by Electron Beam Induced Deposition2006

    • Author(s)
      M.Takeguchi,R.Che,M.Shimojo and K.Furuya
    • Organizer
      The 16th International Microscopy Congress(IMC16)
    • Place of Presentation
      Sapporo(Japan),
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Fabrication and Characterization of Magnetic Nanostructures with Different Iron Concentration2006

    • Author(s)
      M.Takeguchi,M.Shimojo,R.Che and K.Furuya,
    • Organizer
      Microscopy & Microanalysis 2006 Meeting
    • Place of Presentation
      Chicago(USA),
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Electron Holography Characterization of Nanostructures with Different Iron Concentations Formed by Electron Beam Induced Deposition2006

    • Author(s)
      M. Takeguchi, R. Che, M. Shimojo, K. Furuya
    • Organizer
      The 16th International Microscopy Congress(IMC16)
    • Place of Presentation
      Sapporo(Japan)
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Fabrication and Characterization of Magnetic Nanostructures with Different Iron Concentration2006

    • Author(s)
      M. Takeguchi, M. Shimojo, R. Che, K. Furaya
    • Organizer
      Microscopy & Microanalysis 2006 Meeting
    • Place of Presentation
      Chicago(USA)
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary

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Published: 2006-04-01   Modified: 2016-04-21  

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