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A Fundamental Study on Optical Emission Spectroscopy Measurement of Atmospheric Pressure Discharge Plasmas

Research Project

Project/Area Number 18540485
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Plasma science
Research InstitutionTokyo Institute of Technology

Principal Investigator

AKATSUKA Hiroshi  Tokyo Institute of Technology, Research Laboratory for Nuclear Reactors, Associate Professor (50231808)

Co-Investigator(Kenkyū-buntansha) MATSUURA Haruaki  Tokyo Institute of Technology, Research Laboratory for Nuclear Reactors, Assistant Professor (70262326)
Project Period (FY) 2006 – 2007
Project Status Completed (Fiscal Year 2007)
Budget Amount *help
¥3,890,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥390,000)
Fiscal Year 2007: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2006: ¥2,200,000 (Direct Cost: ¥2,200,000)
Keywordsatmospheric pressure plasma / optical emission spectroscopy / collisional radiative model / collisional relaxation / excitation temperature / atomic collision / excited states population / collision frequency / 衝突幅射モデル / アルゴンプラズマ / 電子温度測定 / マイクロ波放電 / 励起状態密度分布
Research Abstract

We studied a method to estimate electron temperature of atmospheric pressure argon plasma, based upon the population distribution of the excited populations of argon atoms in the plasma. Numerical calculations show that the excitation temperature determined by population of 4p and 5p levels is found to be a function of the electron temperature as well as the gas temperature, while its dependence on the electron density is rather weak when the electron density is less than 1012 cm-3, where the collision frequency of neutral ground atoms with the excited states is larger than that with electrons. We found that the two temperatures Te and Tg are both essential, and the ratio of excited state population is almost independent of the electron density. If we determine the approximate gas temperature by other methods like OES measurement of rotation temperature, we can fix the gas temperature in the CR model. Consequently, the excitation temperature is uniquely correlated with the electron temperature. We demonstrate experimental OES measurement of argon plasma at atmospheric pressure excited by 2.45 GHz microwave with its power 150 W and find the electron temperature about (0.9±0.1) eV.

Report

(3 results)
  • 2007 Annual Research Report   Final Research Report Summary
  • 2006 Annual Research Report
  • Research Products

    (43 results)

All 2007 2006

All Journal Article (21 results) (of which Peer Reviewed: 9 results) Presentation (22 results)

  • [Journal Article] Spectroscopic Study on the Vibrational Populations of N_2 C 3II and B 3II States in a Microwave Nitrogen Discharge2007

    • Author(s)
      T. Sakamoto, H. Matsuura, and H. Akatsuka
    • Journal Title

      J. Appl. Phys. 101

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Experimental Study of Temperatures of Atmospheric-Pressure Nonequilibrium Ar/N_2 Plasma Jets and Poly(ethylene terephtalate)-Surface Processing2007

    • Author(s)
      T. Yuji, Y. Suzaki, T. Yamawaki, H. Sakaue and H. Akatsuka
    • Journal Title

      Jpn. J. Appl. Phys. 46[2]

      Pages: 795-798

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] 大気圧非平衡DCパルス放電プラズマの発光分光計測及びPENフィルムの表面改質2007

    • Author(s)
      湯地敏史、須崎嘉文、山脇孝、松島勇雄、赤塚洋
    • Journal Title

      高温学会誌 33[3]

      Pages: 137-141

    • NAID

      10029254950

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Basic Characteristics of Ar/N_2 Atmospheric-Pressure Nonequilibrium Microwave Discharge Plasma Jets2007

    • Author(s)
      T. Yuji, K. Fujioka, S. Fujii and H. Akatsuka
    • Journal Title

      IEEJ Trans. 2

      Pages: 473-475

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Actinometry Measurement of Oxygen Dissociation Degree in a Microwave Discharge Plasma and Effect of Electron Energy Distribution Function2007

    • Author(s)
      T. Sakamoto, H. Matsuura, and H. Akatsuka
    • Journal Title

      J. Adv. Oxid. Technol. 10

      Pages: 247-252

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Titanium Oxidation by Microwave Discharge Oxygen Plasma and Relationship with Plasma Parameters2007

    • Author(s)
      S. Kakizaka, T. Sakamoto, H. Matsuura and H. Akatsuka
    • Journal Title

      J. Adv. Oxid. Technol. 10

      Pages: 253-259

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Spectroscopic Study on the Vibrational Populations of N2 C3II and B3II States in a Microwave Nitrogen Discharge2007

    • Author(s)
      T., Sakamoto, H., Matsuura, H., Akatsuka
    • Journal Title

      J.Appl. Phys 101

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Experimental Study of Temperatures of Atmospheric-Pressure Nonequilibrium Ar/N2 Plasma Jets andPoly (ethylene terephtalate)-Surface Processing2007

    • Author(s)
      T., Yuji, Y., Suzaki, T., Yamawaki, H., Sakaue, H., Akatsuka
    • Journal Title

      Jpn. J. Appl. Phys 46 [2]

      Pages: 795-798

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Optical Emission Spectroscopy of Atmospheric-Pressure Non-Equilibrium DC Pulse Discharge Plasma Jets and PEN Film Surface Modification2007

    • Author(s)
      T., Yuji, Y., Suzaki, T., Yamawaki, I., Matsushima, H., Akatsuka
    • Journal Title

      J. High Temp. Soc 33 [3]

      Pages: 137-141

    • NAID

      10029254950

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Basic Characteristics of Ar/N2 Atmospheric-Pressure Nonequilibrium Microwave Discharge Plasma Jets2007

    • Author(s)
      T., Yuji, K., Fujioka, S., Fujii, H., Akatsuka
    • Journal Title

      IEEJ Trans 2

      Pages: 473-475

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Actinometry Measurement of Oxygen Dissociation Degree in a Microwave Discharge Plasma and Effect of Electron Energy Distribution Function2007

    • Author(s)
      T., Sakamoto, H., Matsuura, H., Akatsuka
    • Journal Title

      J. Adv. Oxid. Technol 10

      Pages: 247-252

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Titanium Oxidation by Microwave Discharge Oxygen Plasma and Relationship with Plasma Parameters2007

    • Author(s)
      S., Kakizaka, T., Sakamoto, H., Matsuura, H., Akatsuka
    • Journal Title

      J. Adv. Oxid. Technol 10

      Pages: 253-259

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Spectroscopic Study on the Vibrational Populations of N_2 C^3II and B^3II States in a Microwave Nitrogen Discharge2007

    • Author(s)
      T. Sakamoto, H. Matsuura, and H. Akatsuka
    • Journal Title

      J. Appl. Phys. 101

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Estimation of Electron Temperature of Non-Equilibrium Argon Plasma of Atmospheric Pressure by OES Measurement2007

    • Author(s)
      H.Akatsuka, T.Yuji, K.Fujioka, T.Urayama, R.Ramasamy, S.Fujii
    • Journal Title

      第24回「プラズマプロセシング研究会」(SPP-24)プロシーディングス

      Pages: 387-388

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Spectroscopic Study on Vibrational Distribution of N_2 C 3II and B 3II States in Microwave Nitrogen Discharge2006

    • Author(s)
      T. Sakamoto, H. Matsuura, and H. Akatsuka
    • Journal Title

      Jpn. J. Appl. Phys. 45[10A]

      Pages: 7905-7910

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] 大気圧非平衡マイクロ波プラズマジェットの発光分光計測と表面改質プロセスの相関2006

    • Author(s)
      湯地敏史、藤岡万也、藤井修逸、福山紅陽、赤塚洋
    • Journal Title

      プラズマ応用科学 14

      Pages: 139-142

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Spectroscopic Study on Vibrational Distribution of N2 C3II and B 3II States in Microwave Nitrogen Discharge Jpn2006

    • Author(s)
      T., Sakamoto, H., Matsuura, H., Akatsuka
    • Journal Title

      J. Appl. Phys 45 [10A]

      Pages: 7905-7910

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Optical Emission Spectroscopy and Correlation on Surface Treatment for Processing by Atmospheric Pressure Non-Equilibrium Microwave Discharge PlasmaJetAppl2006

    • Author(s)
      T., Yuji, K., Fujioka, S., Fujii, K., Fukuyama, H., Akatsuka
    • Journal Title

      Plasma Sci 14

      Pages: 139-142

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Population Distribution of Atmospheric Pressure Argon Discharge Based on CR Model2006

    • Author(s)
      H.Akatsuka
    • Journal Title

      Proc. XVIIIth ESCAMPIG, Europhys. Conf. Abst. ECA 30G

      Pages: 329-330

    • Related Report
      2006 Annual Research Report
  • [Journal Article] 大気圧マイクロ波Arプラズマの発光分光計測とCRモデルによる電子温度推定2006

    • Author(s)
      赤塚 洋, 湯地敏史, 藤岡万也, ラズラマサミー, 藤井修逸
    • Journal Title

      第67回応用物理学会学術講演会講演予稿集

      Pages: 151-151

    • Related Report
      2006 Annual Research Report
  • [Journal Article] 大気圧アルゴンプラズマの励起状態数密度に関する理論検討(2)2006

    • Author(s)
      赤塚 洋
    • Journal Title

      日本物理学会講演概要集(2006年秋季大会) 61[2]

      Pages: 133-133

    • Related Report
      2006 Annual Research Report
  • [Presentation] 実験室酸素窒素プラズマの電子エネルギー・振動励起の非平衡性2007

    • Author(s)
      赤塚洋
    • Organizer
      日本天文学会2007年秋季大会
    • Place of Presentation
      岐阜大学
    • Year and Date
      2007-09-28
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] Non-Equilibrium of EEDF and VDF of O2-N2 Plasmas in Laboratory Experiments2007

    • Author(s)
      H., Akatsuka
    • Organizer
      2007 Autumn Meeting of Astronomical Society of Japan
    • Place of Presentation
      Gifu Univ
    • Year and Date
      2007-09-28
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] マイクロ波放電酸素窒素プラズマ中の酸素窒素の解離度2007

    • Author(s)
      市川陽亮、坂本武士、松浦治明、赤塚洋
    • Organizer
      第62回日本物理学会年次大会
    • Place of Presentation
      北海道大学
    • Year and Date
      2007-09-21
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] Dissociaion Degree of Oxygen and Nitrogen in a Microwave Discharge O2-N2 Plasma2007

    • Author(s)
      Y. Ichikawa, T. Sakamoto, H. Matsuura and H. Akatsuka
    • Organizer
      62nd Annual Meeting of the Physical Society of Japan
    • Place of Presentation
      Hokkaido Univ
    • Year and Date
      2007-09-21
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 開放端磁場を流れる低温アルゴンアークジェットプラズマの加速現象2007

    • Author(s)
      市井宏輝, 吉田和行, 長原洋, 松浦治明, 赤塚洋
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-05
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] Acceleration of a Cold Argon Arc Jet Plasma Flowing along Open-Field-Line2007

    • Author(s)
      H. Ichii, Y. Yoshida, Y. Nagahara, H. Matsuura and H. Akatsuka
    • Organizer
      The 68th Autumn Meeting of the Japan Society of Applied Physics
    • Place of Presentation
      Hokkaido Institute of Technology
    • Year and Date
      2007-09-05
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Spectroscopic Study on Dissociation Degree of Nitrogen and Oxygen in N_2-O_2 Microwave Discharge Plasma2007

    • Author(s)
      Y. Ichikawa, T. Sakamoto, H. Matsuura, H. Akatsuka
    • Organizer
      18th International Symposium on Plasma Chemistry
    • Place of Presentation
      京都大学吉田キャンパス
    • Year and Date
      2007-08-30
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] Spectroscopic Study on Dissociation Degree of Nitrogen and Oxygen in N2-O2 Microwave Discharge Plasma2007

    • Author(s)
      Y. Ichikawa, T. Sakamoto, H. Matsuura, and H. Akatsuka
    • Organizer
      18th International Symposium on Plasma Chemistry
    • Place of Presentation
      Kyoto Univ., Yoshida Campus
    • Year and Date
      2007-08-30
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 大気圧非平衡マイクロ波放電プラズマジェットを用いたPENフィルム表面処理における基礎特性2007

    • Author(s)
      湯地敏史, 浦山 卓也, 藤井 修逸, 飯島 善時, 須崎 嘉文, 赤塚 洋
    • Organizer
      平成19年電気学会 基礎・材料・共通部門大会
    • Place of Presentation
      大阪大学吹田キャンパス
    • Year and Date
      2007-08-28
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] 大気圧非平衡DCパルス放電プラズマジェットにおけるラジカルシミュレーション2007

    • Author(s)
      加藤秀史, 川野泰和, 湯地敏史, 市川幸美, 鳥家秀昭, 赤塚 洋
    • Organizer
      平成19年電気学会 基礎・材料・共通部門大会
    • Place of Presentation
      大阪大学吹田キャンパス
    • Year and Date
      2007-08-28
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] Basic Characteristics for Atmospheric Pressure Microwave Discharge Non-Equilibrium Plasma Jet2007

    • Author(s)
      T. Yuji, T. Urayama, S. Fujii, Y. Iijima, Y. Suzaki and H. Akatsuka
    • Organizer
      2007 Annual Conference of Fundamentals and Materials Society IEE Japan
    • Place of Presentation
      Osaka Univ., Suita Campus
    • Year and Date
      2007-08-28
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Radical Simulation of Atmospheric Pressure DC Pulse Discharge Non-Equilibrium Plasma Jet2007

    • Author(s)
      H. Kato, H. Kawano, T. Yuji, Y. Ichikawa, H. Toya and H. Akatsuka
    • Organizer
      2007 Annual Conference of Fundamentals and Materials Society IEE Japan
    • Place of Presentation
      Osaka Univ., Suita Campus
    • Year and Date
      2007-08-28
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Estimation of Electron Temperature of Non-Equilibrium Argon Plasma of Atmospheric Pressure by OES Measurement2007

    • Author(s)
      H. Akatsuka, T. Yuji, T. Urayama, R. Raju and S. Fujii
    • Organizer
      3rd International Congress on Cold Atmospheric Pressure Plasmas: Sources and Applications(CAPPSA2007)
    • Place of Presentation
      Universiteit Gent, Ghent Belgium
    • Year and Date
      2007-07-11
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Estimation of Electron Temperature of Non-Equilibrium Argon Plasma of Atmospheric Pressure by OES Measurement2007

    • Author(s)
      T. Yuji, T. Urayama, R. Raju and S. Fujii
    • Organizer
      3rd International Congress on Cold Atmospheric Pressure Plasmas : Sources and Applications (CAPPSA2007)
    • Place of Presentation
      Universiteit Gent, Ghent Belgium
    • Year and Date
      2007-07-11
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Estimation of Electron Temperature of Non-Equilibrium Argon Plasma of Atmospheric Pressure by OES Measurement2007

    • Author(s)
      H. Akatsuka, T. Yuji, K. Fujioka, T. Urayama, R. Ramasamy and S. Fujii
    • Organizer
      第24回「プラズマプロセシング研究会」(SPP-24)
    • Place of Presentation
      千里ライフサイエンスセンター
    • Year and Date
      2007-01-31
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Estimation of Electron Temperature of Non-Equilibrium Argon Plasma of Atmospheric Pressure by OES Measurement T. Yuji, T. Urayama, S. Fujii, Y. Iijima, Y. Suzaki and H. Akatsuka2007

    • Author(s)
      H. Akatsuka, T. Yuji, K. Fujioka, T. Urayama, R. Ramasamy and S. Fujii
    • Organizer
      The 24th Symposium on Plasma Processing
    • Place of Presentation
      Senri Life Science Center, Osaka, Japan 2007 Annual Conference of
    • Year and Date
      2007-01-31
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 大気圧アルゴンプラズマの励起状態数密度に関する理論検討(2)2006

    • Author(s)
      赤塚 洋
    • Organizer
      日本物理学会2006年秋季大会
    • Place of Presentation
      千葉大学・西千葉キャンパス
    • Year and Date
      2006-09-23
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Numerical Study on Population Distribution of Argon Discharge of Atmospheic Pressure (2) 2006 Autumn Meeting of the Physical Society of Japan2006

    • Author(s)
      H., Akatsuka
    • Organizer
      Chiba Univ
    • Place of Presentation
      Nishi Chiba Campus
    • Year and Date
      2006-09-23
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 大気圧マイクロ波Arプラズマの発光分光計測とCRモデルによる電子温度推定2006

    • Author(s)
      赤塚 洋、湯地敏史、藤岡万也、ラズ ラマサミー、藤井修逸
    • Organizer
      第67回応用物理学会学術講演会
    • Place of Presentation
      立命館大学・びわこくさつキャンパス
    • Year and Date
      2006-08-30
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] T. Yuji, K. Fujioka, R. Ramasamy, and S. Fujii,OES Measurement of Microwave Ar Discharge of Atmospheric Pressure and Estimation of Electron Temperature by CR Model2006

    • Author(s)
      H., Akatsuka
    • Organizer
      The 67th Autumn Meeting of the Japan Society of Applied Physics
    • Place of Presentation
      Ritsumaikan Univ. Biwako-Kusatsu Campus
    • Year and Date
      2006-08-30
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Population Distribution of Atmospheric Pressure Argon Discharge Based on CR Model2006

    • Author(s)
      H. Akatsuka
    • Organizer
      XVIIIth ESCAMPIG
    • Place of Presentation
      Grand Hotel Tiziano e dei Congressi, Lecce, Italy
    • Year and Date
      2006-07-14
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Population Distribution of Atmospheric Pressure Argon Discharge Based on CR Model XVIIIth ESCAMPIG2006

    • Author(s)
      H. Akatsuka
    • Organizer
      Grand Hotel Tiziano e dei Congress
    • Place of Presentation
      Lecce,Italy
    • Year and Date
      2006-07-14
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary

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Published: 2006-04-01   Modified: 2016-04-21  

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