A Fundamental Study on Optical Emission Spectroscopy Measurement of Atmospheric Pressure Discharge Plasmas
| Project/Area Number |
18540485
|
|---|
| Research Category |
Grant-in-Aid for Scientific Research (C)
|
| Allocation Type | Single-year Grants |
|---|
| Section | 一般 |
|---|
| Research Field |
Plasma science
|
|---|
| Research Institution | Tokyo Institute of Technology |
|---|
Principal Investigator |
AKATSUKA Hiroshi Tokyo Institute of Technology, Research Laboratory for Nuclear Reactors, Associate Professor (50231808)
|
|---|
| Co-Investigator(Kenkyū-buntansha) |
MATSUURA Haruaki Tokyo Institute of Technology, Research Laboratory for Nuclear Reactors, Assistant Professor (70262326)
|
|---|
| Project Period (FY) |
2006 – 2007
|
| Project Status |
Completed (Fiscal Year 2007)
|
| Budget Amount *help |
¥3,890,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥390,000)
Fiscal Year 2007: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2006: ¥2,200,000 (Direct Cost: ¥2,200,000)
|
|---|
| Keywords | atmospheric pressure plasma / optical emission spectroscopy / collisional radiative model / collisional relaxation / excitation temperature / atomic collision / excited states population / collision frequency / 衝突幅射モデル / アルゴンプラズマ / 電子温度測定 / マイクロ波放電 / 励起状態密度分布 |
|---|
| Research Abstract |
We studied a method to estimate electron temperature of atmospheric pressure argon plasma, based upon the population distribution of the excited populations of argon atoms in the plasma. Numerical calculations show that the excitation temperature determined by population of 4p and 5p levels is found to be a function of the electron temperature as well as the gas temperature, while its dependence on the electron density is rather weak when the electron density is less than 1012 cm-3, where the collision frequency of neutral ground atoms with the excited states is larger than that with electrons. We found that the two temperatures Te and Tg are both essential, and the ratio of excited state population is almost independent of the electron density. If we determine the approximate gas temperature by other methods like OES measurement of rotation temperature, we can fix the gas temperature in the CR model. Consequently, the excitation temperature is uniquely correlated with the electron temperature. We demonstrate experimental OES measurement of argon plasma at atmospheric pressure excited by 2.45 GHz microwave with its power 150 W and find the electron temperature about (0.9±0.1) eV.
|
Report
(3 results)
Research Products
(43 results)
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
[Presentation] Estimation of Electron Temperature of Non-Equilibrium Argon Plasma of Atmospheric Pressure by OES Measurement T. Yuji, T. Urayama, S. Fujii, Y. Iijima, Y. Suzaki and H. Akatsuka2007
Author(s)
H. Akatsuka, T. Yuji, K. Fujioka, T. Urayama, R. Ramasamy and S. Fujii
Organizer
The 24th Symposium on Plasma Processing
Place of Presentation
Senri Life Science Center, Osaka, Japan 2007 Annual Conference of
Year and Date
2007-01-31
Description
「研究成果報告書概要(欧文)」より
Related Report
-
-
-
-
-
-
