An application of low energy stom scattering spectrosoopy for insulator surface atomic structure analysis
| Project/Area Number |
18560023
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Thin film/Surface and interfacial physical properties
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| Research Institution | Osaka Prefecture University |
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Principal Investigator |
KENJI Umezawa Osaka Prefecture University, Facuity of Liberal Arts and Sciences, Associate Professor (80213487)
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| Co-Investigator(Kenkyū-buntansha) |
UEDA Krosurtki Toyota Technological Institute, Dept Mat. Sci., Professor (60029212)
上田 一之 豊田工業大学, 工学研究科, 教授 (60029121)
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| Project Period (FY) |
2006 – 2007
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| Project Status |
Completed (Fiscal Year 2007)
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| Budget Amount *help |
¥3,810,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥210,000)
Fiscal Year 2007: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2006: ¥2,900,000 (Direct Cost: ¥2,900,000)
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| Keywords | surface science / insulator / 表面界面物性 |
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| Research Abstract |
We have been developing a low energy atom scattering system combined with a time-of-flight spectrometer for insulator surface structural analysis. Insulator surface structure is difficult to study because of charging effects during electron or ion beam bombardment. Structural analyses of insulator surfaces are very important in fundamental research as well as technology fields. In our system, charged ion beams of .2 keV-Ne^+ are converted into neutral beams by charge exchange with the same element gas after the primary beam passes through a chopper. Other features of this system are pulsed beams, time-of-flight measurements, and a micochannel plate (MCP) detector is mounted along the primary beam. This is a home made equipment. All electric circuits were designed and developed by scientists who are familiar with engineering.
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Report
(3 results)
Research Products
(22 results)
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[Presentation] 低速原子散乱分光装置2007
Author(s)
梅澤 憲司
Organizer
第6回 産学官連携推進会議
Place of Presentation
京都国際会議場
Year and Date
2007-06-16
Description
「研究成果報告書概要(和文)」より
Related Report
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