Reduction of resistance of ZnO film by the microwave surface wave hydrogen plasma

• Project/Area Number: 18560025
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Thin film/Surface and interfacial physical properties
• Research Institution: Toyo University
• Principal Investigator: KASHIWAGI Kunihiro Toyo University, 工学部, 教授 (30058094)
• Co-Investigator(Kenkyū-buntansha): YOSHIDA Yasuhiko 東洋大学, 工学部, 教授 (80134500)
• Project Period (FY): 2006 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥3,790,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥390,000); Fiscal Year 2008: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000); Fiscal Year 2007: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000); Fiscal Year 2006: ¥2,100,000 (Direct Cost: ¥2,100,000)
• Keywords: 低抵抗ZnO薄膜 / 透明導電膜 / マイクロ波表面波 / H_2 プラズマ / P型ZnO / ZnO膜 / N_2プラズマ / Zn0透明導電膜 / H_2プラズマ / ZnO透明導電膜

Research Abstract

通常ZnOは化学量論比上の結合では、透明で高い電気的絶縁性を持っている。イオンプレーティング法で形成されたZnO膜にマイクロ波表面波(1000W)で励起したH_2 プラズマを30(sec)程度照射する事で、膜の可視領域における光学的透過率を下げることなく、また他の種々な金属元素をドープすることなく電気的な抵抗率を~10^<-3>(Ωcm)まで下げる事ができた。よってZnOの透明導電膜としての新しい応用が可能である。

Research Products

• [Journal Article] Optical Thin Film Coating Having High Damage Resistance in Near-Sttoichiometric MgO-Doped LiTAO_3 (2008)
  • Author(s): R.TATENO, K.KASHIWAGI
  • Journal Title: Japanese Journal of Applied Physics 20(6) Pages: 6784-6786
  • Peer Reviewed
• [Journal Article] Ultraviolet irradiation Effect on and Depth Profiles in X-ray Photoelectron Spectra of Poly(vinylphyridine)Thin Film (2008)
  • Author(s): S.NISHIYAMA, M.TAJIMA, Y.YOSHIDA (5), et.al.
  • Journal Title: Japanese Journal of Applied Physics 47(1) Pages: 432-437
  • Peer Reviewed
• [Journal Article] Microstructure and randaom magnetic anisotropy in Fe-Ni based nanocrystalline thin filmas (2008)
  • Author(s): S.THOMAS, S.H.Al-HARTHI, Y.YOSHIDA(6), et.al.
  • Journal Title: Journal of Physics D : Applied Physics 41(15)
  • Peer Reviewed
• [Journal Article] Evidence for polaron codduction in nanostructured manganese ferrite (2008)
  • Author(s): E.Veena GOPALAN, K.A.MALINI, Y.YOSHIDA(5), et.al.
  • Journal Title: Journal of Physics D : Applied Physics 41(18)
  • Peer Reviewed
• [Journal Article] Strain induced anomalous re shift in mesoscopic iron oxide prepared by a novel technique (2008)
  • Author(s): T.N.NARAYANAN, D.S.KUMAR, Y.YOSHIDA, M.R.ANANTHARAMAN
  • Journal Title: Bulletin of Materials Science 31(5) Pages: 759-766
  • Peer Reviewed
• [Journal Article] Optical Thin Film Coating Having High Damage Resistance in Near-Stoichiometric MgO-Doped LiTAO_3. (2008)
  • Author(s): R. TATENO, K. KASHIWAGI
  • Journal Title: Japanese Journal of Applied Physics 20(6) Pages: 6784-6786
  • Peer Reviewed
• [Journal Article] Ultraviolet irradiation Effects on and Depth Profiles in X-ray Photoelectron Spectra of Poly (vinylphyridine) Thin Films. (2008)
  • Author(s): Y. YOSHIDA, et al.
  • Journal Title: Japanese Journal of Applied Physics 47(1) Pages: 432-437
  • Peer Reviewed
• [Journal Article] Microstructure and random magnetic anisotropy in FE-NI based nanocrystalline thin films. (2008)
  • Author(s): Y. YOSHIDA, et al.
  • Journal Title: Journal of Physics D : Applied Physics 41(15)
  • Peer Reviewed
• [Journal Article] Evidence for polaron codduction in nanostructured manganese ferrite. (2008)
  • Author(s): Y. YOSHIDA, et al.
  • Journal Title: Journal of Physics D : Applied Physics 41(18)
  • Peer Reviewed
• [Journal Article] Strain induced anomalous red shift in mesoscopic iron oxide prepared by a novel technique. (2008)
  • Author(s): Y. YOSHIDA, et al.
  • Journal Title: Bulletin of Materials Science 31(5) Pages: 759-766
  • Peer Reviewed
• [Journal Article] Plasma Polymerization of Manganese Chloride Tetraphenylporphyrin and Evaluation of the Thin Film (2007)
  • Author(s): A. SHOJI, N.TSUKADA, D. S. KUMAR, K. KASHIWAGI, Y. YOSHIDA
  • Journal Title: Journal Photopolymer Science and Technology 20(2) Pages: 241-244
  • NAID: 130004464535
  • Peer Reviewed
• [Journal Article] Characterization and Properties of the Plasma Polymer Films prepared from Carbon Dioxide and 1,3-Butadiene (2007)
  • Author(s): A.SHOJI, K.NAKAMURA, KMURATA, K.KASHIWAGI(8) ,Y.YOSHIDA (9) et.al.
  • Journal Title: Journal Photopolymer Science and Technology 20(6) Pages: 817-822
  • NAID: 130004833197
  • Peer Reviewed
• [Journal Article] Theroelectric properties of Cu_2O thin films (2007)
  • Author(s): S.UMAHASHI, K.KASHIWAGI, H.MORITA, A.KUROKOUCHI, K.WADA
  • Journal Title: Proc. of the 9th International Symposium on Suputtering & Plasma Processes(ISSP 2007) Pages: 467-467
  • Peer Reviewed
• [Journal Article] Plasma Polymerization of Manganese Chloride Tetraphenylporphyrin and Evaluation of the Thin Film. (2007)
  • Author(s): Atsumu Shoji, Naoya Tsukada, D. Sakthi Kumar, Kunihiro Kashiwagi and Yasuhiko Yoshida
  • Journal Title: Journal Photopolymer Science and Technology 20(2) Pages: 241-244
  • NAID: 130004464535
  • Peer Reviewed
• [Journal Article] Characterization and Properties of the Plasma Polymer Films prepared from Carbon Dioxide and 1,3-Butadiene. (2007)
  • Author(s): Atsumu Shoji, Kenji Nakamura, Satoko Nishiyama, D. Sakthi Kumar, Katsuto Murato, Yuichi Nakagawa, Hiromichi Noguchi, Kunihiro Kashiwagi, Yasuhiko Yoshida and Shigeru Ishii
  • Journal Title: Journal Photopolymer Science and Technology 20(6) Pages: 817-822
  • NAID: 130004833197
  • Peer Reviewed
• [Journal Article] The surface modification effect by irradiation of a surface wave excited hydrogen plasma onto zinc oxide films (2006)
  • Author(s): T.NAKAYAMA, Y.SATA, K.KASHIWAGI, et.al.
  • Journal Title: Proc. Of the XXIIth International Symposium on Discharges and Electrical Insulation in Vacuum Pages: 569-571
  • Peer Reviewed
• [Journal Article] Change of Zinc Oxide Thin Film Resistively by Irradiation of Hydrogen Plasma Produced by Microwave Surface Wave (2006)
  • Author(s): T.NAKAYAMA, Y.SATA, K.KASHIWAGI, et.al.
  • Journal Title: Proc. Of the 6^<th> International Symposium on Microwave Effect/Appplication Pages: 213-216
  • Peer Reviewed
• [Journal Article] Surface modification of plasma polymerized silicon resin films produced at different gas atmospheres (2006)
  • Author(s): A. SHOJI, T. FUKUSHIMA, D. S. KUMAR, K. KASHIWAGI ,Y. YOSHIDA
  • Journal Title: Journal of Photopolymer Science and Technology 19(2) Pages: 241-244
  • NAID: 130004464489
  • Peer Reviewed
• [Journal Article] The surface modification effect by irradiation of a surface wave excited hydrogen plasma onto zinc oxide thin films (2006)
  • Author(s): T. NAKAYAMA,T.TAKIZAWA, Y. SAKAMOTO, K.KASHIWAGI
  • Journal Title: Proc. Of the XXII International Symposium on Discharges and Electrical Insulation in Vacuum Pages: 569-571
  • Peer Reviewed
• [Journal Article] Surface modification of plasma polymerized silicon resin films produced at different gas atmospheres (2006)
  • Author(s): A.SHOJI et al.
  • Journal Title: J. of Photopolymer Science and Technology 19(2) Pages: 241-244
• [Journal Article] The surface modification effect by irradiation of a surface wave excited hydrogen plasma onto zinc oxide thin films. (2006)
  • Author(s): T.NAKAYAMS et al.
  • Journal Title: Pro. of the XXIIth International Symposium on Discharges and Electrical Insulation in Vacuum. Pages: 569-571
• [Journal Article] Change of Zinc Oxide Thin Film Resistively by Irradiation of Hydrogen Plasma Produced by Microwave Surface Wave. (2006)
  • Author(s): T.NAKAYAMS et al.
  • Journal Title: Proc. of the 6th International Symposium on Microwave Effect・Application Pages: 213-216
• [Journal Article] Effect of the microwave surface wave H2 plasma surface treatment on ZnO film. (2006)
  • Author(s): Y.SATA et al.
  • Journal Title: Proc. of the 4th Int. International Symposium on Bioscience and Nanotechnology. Pages: 96-96
• [Journal Article] Thermoelectric properties of Cu20 thin films. (2006)
  • Author(s): S.UMAHASHI et al.
  • Journal Title: Proc. of the 4th International Symposium on Bioscience and Nanotechnology Pages: 95-95
• [Journal Article] Plasma polymerization of Tween. (2006)
  • Author(s): Y.SASUGA et al.
  • Journal Title: Proc. of the 4th International Symposium on Bioscience and Nanotechnology Pages: 48-81
• [Presentation] Effect of Plasma Exposure on the ZnO Film (2008)
  • Author(s): Y.KONDO, Y.SATA, K. KASHIWAGI, Y. YOSHIDA
  • Organizer: The IUMRS International Conference in ASIA 2008
  • Place of Presentation: Nagoya Congress Center, Nagoya
  • Year and Date: 2008-12-09
• [Presentation] Effect of Plasma Exposure on the ZnO Film (2008)
  • Author(s): Y. KONDO, Y. SATA, K. KASHIWAGI, Y. YOSHIDA
  • Organizer: The IUMRS International Conference in ASIA 2008
  • Place of Presentation: Nagoya Congress Center, Nagoya Japan
  • Year and Date: 2008-12-09
• [Presentation] プラズマを用いる表面改質処理と薄膜の作製-その機能性評価とバイオへ応用- (2008)
  • Author(s): 吉田泰彦, 柏木邦宏, サクチ クマール
  • Organizer: 東京都ナノテクノロジー事業家協議会
  • Place of Presentation: 都立産業技術センター・城南支所、東京
  • Year and Date: 2008-11-12
• [Presentation] Syntheses of Plasma Thin Films and Their Applications to Biotechnology. (2008)
  • Author(s): Y. YOSHIDA, D. S. KUMAR, A. SHOJI
  • Organizer: The 6^<th> International Symposium on Bioscience and Nanotechnology
  • Place of Presentation: Enryo Hall, toyo Univ., Tokyo, Japan
  • Year and Date: 2008-11-07
• [Presentation] プラズマを用いる表面改質処理と薄膜の作製-その機能性評価とバイオへの応用- (2008)
  • Author(s): 吉田泰彦, 柏木邦宏, サクチ クマール
  • Organizer: 平成20年度第2回SAITEC産官連携セミナーIn東洋大学
  • Place of Presentation: 東洋大学川越キャンパス、川越
  • Year and Date: 2008-09-29
• [Presentation] プラズマプロセスによる薄膜の作製とそのバイオテクノロジーへの応用. (2008)
  • Author(s): Y. YOSHIDA, D. S. KUMAR, A. SHOJI
  • Organizer: The 26^<th> International Coference of Photto polymer Science and Technology (CPS-25), Materials & Processes for Advanced Microlithography and Nanotechnology, B2-09
  • Place of Presentation: University Convention Hall, Chiba Univ., Tiba, Japan
  • Year and Date: 2008-06-26
• [Presentation] ZnO薄膜の導電性に関する水素プラズマ照射効果 (2007)
  • Author(s): 佐田洋平、近藤祐輔、柏木邦宏、吉田泰彦、滝沢力、坂本雄一
  • Organizer: 第68回応用物理学会学術講演会(、7a-H-2/II、p.665)
  • Place of Presentation: 札幌
  • Year and Date: 2007-09-07
• [Presentation] Theroelectric properties of Cu_2O thin films (2007)
  • Author(s): S.UMAHASHI, K.KASHIWAGI, H.MORITA, A.KUROKOUCHI, K.WADA
  • Organizer: The 9^<th> International Symposium on Suputtering & Plasma Processes(ISSP 2007)
  • Place of Presentation: Kanazawa
  • Year and Date: 2007-09-06
• [Presentation] Thermoelectric properties of Cu_2O thin films. (2007)
  • Author(s): S. Umahashi, K. Kashiwagi, H. Morita, A. Kurokouchi, K. Wada, Y. Yoshida
  • Organizer: The 9th International Symposium on Sputtering & Plasma Processes(ISSP 2007)
  • Place of Presentation: Kanazawa
  • Year and Date: 2007-07-09
• [Presentation] 水素プラズマによる透明酸化亜鉛薄膜の抵抗変化 (2007)
  • Author(s): 中山貴道、滝沢力、柏木邦宏、佐田洋平、坂本雄一
  • Organizer: 日本電磁波エネルギー応用学会、国士舘大学世田谷キャンパス
  • Place of Presentation: 東京
  • Year and Date: 2007-01-22
• [Presentation] Optical Thin Film with High Damage Resistance for Nd : YAG Laser Device (2007)
  • Author(s): R.TATENO and K.KASHIWAGI
  • Organizer: 13^<th> Microoptics Conference (Sponcered by The Japan Society of Applied Physics)
  • Place of Presentation: Takamatsu
• [Presentation] Effect of the microwave surface wave H_2 plasma surface treatment on ZnO film (2007)
  • Author(s): Y.SATA, K.KASHIWAGI, Y.YOSHIDA, T.TAKIZAWA, Y.SAKAMOTO
  • Organizer: 5^<th> International Symposium on Bioscience and Nanotechnology
  • Place of Presentation: Kawagoe
• [Presentation] Theroelectric properties of Cu2O thin films (2) (2007)
  • Author(s): S. UMAHASHI, K.KASHIWAGI, Y.YOSHIDA
  • Organizer: 5^<th> International Symposium on Bioscience and Nanotechnology
  • Place of Presentation: Kawagoe
• [Presentation] マイクロ波表面波水素プラズマによる表面改質効果( The Surface modification effect by irradiation of a surface wave excited hydrogen MW plasma.) (2007)
  • Author(s): 滝沢力、坂本雄一、柏木邦宏、佐田洋平
  • Organizer: 第1回日本電磁波エネルギーシンポジウム(2C10)
  • Place of Presentation: 仙台
• [Presentation] ZnO薄膜の導電性に関する水素プラズマ照射効果 (2007)
  • Author(s): 佐田洋平、中山貴道、柏木邦宏、滝沢力、坂本雄一
  • Organizer: 第115回表面技術協会講演大会要旨集(279)
• [Presentation] ZnO薄膜へのH2 マイクロ波表面波プラズマによる表面改質効果(2) (2007)
  • Author(s): 佐田洋平、中山貴道、滝沢力、柏木邦宏、坂本雄一
  • Organizer: 春季「第53回応用物理学会関係連合講演会」
• [Presentation] Thermoelectric properties of Cu_2O thin films(2). (2007)
  • Author(s): S. Umahashi, K. Kashiwagi, Y. Yoshida
  • Organizer: The 5th International Symposium on Bioscience and Nanotechnology
  • Place of Presentation: Kawagoe
• [Presentation] Effect of the microwave surface wave H_2 plasma surface treatment on ZnO film. (2007)
  • Author(s): Y. Sata, K. Kashiwagi, Y. Yoshida, T. Takizawa, Y. Sakamoto
  • Organizer: The 5th International Symposium on Bioscience and Nanotechnology
  • Place of Presentation: Kawagoe
• [Presentation] Plasma polymerization of Tween (2006)
  • Author(s): Y. SASUGA, F. W. SHI, A. SHOJI, D. S. KUMAR, K. KASHIWAGI, Y. YOSHIDA
  • Organizer: 20", The 4^<th>International Symposium on Bioscience and Nanotechnology(P-48, p.81)
  • Place of Presentation: OkinawaConvention Centre, Ginowan, Okinawa
• [Presentation] Effect of the microwave surface wave H2 plasma surface treatment on ZnO film (2006)
  • Author(s): Y.SATA, T.NAKAYAMA, K.KASHIWAGI, T.TAKIZAWA and Y.SAKAMOTO
  • Organizer: The 4^<th> International Symposium on Bioscience and Nanotechnology(P-96)
  • Place of Presentation: Okinawa Convention Centre, Ginowan, Okinawa
• [Presentation] Frequency Dependency of Au Thin Film for Bio-sensor by R.F. Ion-plating (2006)
  • Author(s): H.HASEGAWA, R.SUMI,K.KASHIWAGI
  • Organizer: The 4^<th> International Symposium on Bioscienceand Nanotechnology(P-98)
  • Place of Presentation: Okinawa Convention Centre, Ginowan, Okinawa
• [Presentation] Chage of Zinc Oxide Thin Film Resistively by Irradiation of Hydrogen Plasma Produced by Microwave Surface Wave (2006)
  • Author(s): T. NAKAYAMA,T.Takizawa, Y. SAKAMOTO, K.KASHIWAGI
  • Organizer: 第6回マクロ波効果・応用物理国際シンポジウム, ソフトピアジャパンセンター
  • Place of Presentation: 大垣市
• [Presentation] 水素プラズマZnO薄膜表面改質効果 (2006)
  • Author(s): 佐田洋平、中山貴道、柏木邦宏、滝沢力、坂本雄一
  • Organizer: 第67回応用物理学会学術講演会講演予稿集(590)
  • Place of Presentation: 立命館大学(びわこ、くさつキャンパス)
• [Presentation] Frequency Dependency of Au Thin Film for Bio-sensor by R.F. Ion-plating (2006)
  • Author(s): H.HASEGAWA, R.SUMI, K.KASHIWAGI and H.IMAGAWA
  • Organizer: 8^<th> International Conference on Advanced Surface Engineering
• [Presentation] Thermoelectric properties of Cu2O thin films (2006)
  • Author(s): H.HASEGAWA, R.SUMI, K.KASHIWAGI and H.IMAGAWA
  • Organizer: The 4^<th> International Symposium on Bioscience and Nanotechnology(P-95)
  • Place of Presentation: Okinawa Convention Centre, Ginowan, Okinawa
• [Presentation]
  • Author(s): S.UMAHASHI, K.KASHIWAGI, H.MORITA, A.KUROKOUCHI , K.WADA