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Nano Machining of Channels by Rubbing at Ultrasonic Frequency Under Control of Surface Fracture at Nano Scale

Research Project

Project/Area Number 18560067
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Materials/Mechanics of materials
Research InstitutionAkita University

Principal Investigator

MURAOKA Mikio  Akita University, Faculty of Engineering and Resource Science, Associate Professor (50190872)

Co-Investigator(Kenkyū-buntansha) OKUYAMA Eiki  Akita University, Faculty of Engineering and Resource Science, Associate Professor (80177188)
Project Period (FY) 2006 – 2007
Project Status Completed (Fiscal Year 2007)
Budget Amount *help
¥3,830,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥330,000)
Fiscal Year 2007: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2006: ¥2,400,000 (Direct Cost: ¥2,400,000)
KeywordsAtomic force microscopy / Nano machining at ultrasonic freauency / Concentrated-mass cantilever / Nano channel / Shear force control / Second mode of flexural vibration / Nano machining of groove / Cyclic rubbing of tip / 超音波加工 / 走査型プローブ顕微鏡
Research Abstract

The aim of this project is to present a method of nano machining by rubbing at ultrasonic frequency and to show the ability of fabrication of nano channels and the application. The results are summarized as follows:
1. Concentrated-mass cantilever for nano machining
We developed a unique cantilever for nano machining. The cantilever has a rod-like mass on the tip equipped at the free end. The attached mass enhances the moment of inertia in addition to the translational inertia. In the second mode of flexural vibration, the free end of the cantilever behaves like a pined end due to the inertia of the attached mass. The vertical motion of the tip is depressed and the tip rotates around the gravitational center of the attached mass. The tip apex vibrates laterally and is able to sense interactive shear force between the tip apex and a sample surface. When the moment of inertia of the attached mass is 4 times larger than that of the cantilever, the dynamics of the concentrated-mass cantilever becomes the same as that the one-freedom mass-spring system even in the case that the tip is bought into contact with a sample surface. This means that the concentrated-mass cantilever is able to provide sufficient rubbing force when it is used in the cyclic contact mode.
2. Nano-machining of channels
Although the vertical motion of the free end of the cantilever is depressed, the deflection angle can be detected. The normal operation mode for cyclic contact was applied to the concentrated-mass cantilever, where the shear force was controlled. We demonstrated fabrication of nano channels with a width of a few hundreds of nanometers and a depth of a few tens of nanometers on a resin surface.

Report

(3 results)
  • 2007 Annual Research Report   Final Research Report Summary
  • 2006 Annual Research Report
  • Research Products

    (14 results)

All 2008 2007 2006

All Journal Article (12 results) (of which Peer Reviewed: 5 results) Presentation (2 results)

  • [Journal Article] Residual-Strain-Induced Nanocoils of Metallic Nanowires2008

    • Author(s)
      M., Muraoka
    • Journal Title

      J. Nanosci. Nanotechnol. 8

      Pages: 439-442

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Residual-strain-induced nanocoils of metallic nanowires2008

    • Author(s)
      M. Muraoka
    • Journal Title

      J. Nanosci. Nanotechnol. Vol.8

      Pages: 439-442

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Residual-Strain-Induced Nanocoils of Metallic Nanowires2008

    • Author(s)
      M. Muraoka, N. Settsu and M. Saka
    • Journal Title

      J. Nanosci. Nanotechnol. 8

      Pages: 439-442

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Vibraitonal dynamics of concentrated-mass cantilevers in atomic force acoustic microscopy: Presence of modes with selective enhancement of vertical or lateral tip motion2007

    • Author(s)
      M., Muraoka
    • Journal Title

      J. Phys.: Conf. Ser. 61

      Pages: 836-840

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Vibrational dynamics of concentrated-mass cantilevers in atomic force acoustic microscopy : Presence of modes with selective enhancement of vertical or lateral motion2007

    • Author(s)
      M. Muraoka
    • Journal Title

      J. Phys : Conf. Ser. Vol.60

      Pages: 836-840

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Vibraitonal dynamics of concentrated-mass cantilevers in atomic force acoustic microscopy: Presence of modes with selective enhancement of vertical or lateral tip motion2007

    • Author(s)
      M. Muraoka
    • Journal Title

      J. Phys.: Conf. Ser 61

      Pages: 836-840

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Linear and nonlinear contact in atomic force acoustic microscopy2007

    • Author(s)
      Mikio Muraoka
    • Journal Title

      Jpn. J. Appl. Phys. (in press)

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Vibrational dynamics of concentrated-mass cantilevers in atomic force acoustic microscopy : Presence of modes with selective enhancement of vertical or lateral tip motion2007

    • Author(s)
      Mikio Muraoka
    • Journal Title

      J. Phys. : Conf. Ser., Int. Conf. Nanosci. and Tech., Basel, July 30-Aug. 4, 2006 (in press)

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Nano machining by rubbing at ultrasonic frequency under controlled shear force2006

    • Author(s)
      M., Muraoka
    • Journal Title

      Proc.3^<rd> Int. Conf. on Advanced Mechanical Eng. and Mechanics, Hammamet(Tunisia), CD-ROM No. SD73

      Pages: 1-4

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Nano machining by rubbing at ultrasonic frequency under controlled shear force2006

    • Author(s)
      M. Muraoka
    • Journal Title

      Proc. 3rd Int. Conf. on Advanced Mechanical Engineering and Mechanics, Hammamet(Tunisia) (CD-ROM), Paper No.SD73

      Pages: 1-4

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Nano machining by rubbing at ultrasonic frequency under controlled shear force2006

    • Author(s)
      Mikio Muraoka, Hiromi Ishikawa
    • Journal Title

      Proc. 3rd Int. Conf. Adv. Mechancal Eng. Mechanics, Hammamet (Tunisia), Dec. 17-19, 2006 (CD-ROM)

    • Related Report
      2006 Annual Research Report
  • [Journal Article] シアフォース制御下の超音波ナノマシーニング2006

    • Author(s)
      石川広美, 岡村幹夫
    • Journal Title

      2006年度精密工学会東北支部学術講演会講演論文集

      Pages: 31-32

    • Related Report
      2006 Annual Research Report
  • [Presentation] シアフォース制御下の超音波ナノマシーニング2006

    • Author(s)
      石川広美
    • Organizer
      精密工学会東北支部
    • Place of Presentation
      本荘市
    • Year and Date
      2006-12-02
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Nano machining by rubbing at ultrasonic frequency under controlled shear force2006

    • Author(s)
      H. Ishikawa
    • Organizer
      The Japan Society for Precision Engineering, Tohoku Branch
    • Place of Presentation
      Honjo(Akita, Japan)
    • Year and Date
      2006-12-02
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary

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Published: 2006-04-01   Modified: 2016-04-21  

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