| Project/Area Number |
18560105
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Tottori University |
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Principal Investigator |
MIZUMOTO Hiroshi Tottori University, Fac. of Engineering, Professor (80108795)
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| Project Period (FY) |
2006 – 2007
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| Project Status |
Completed (Fiscal Year 2007)
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| Budget Amount *help |
¥3,870,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥270,000)
Fiscal Year 2007: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2006: ¥2,700,000 (Direct Cost: ¥2,700,000)
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| Keywords | Positioning / Machine Tool / Aerostatic bearing / Active control / Inherent restrictor / Aerostatic coupling / Nanotechnology |
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| Research Abstract |
A multifunction active aerostatic coupling is proposed for improving the performance of ultraprecision positioning system. This aerostatic coupling is characterized to have an active aerostatic thrust bearing and the positioning system employing the coupling has following functions:
(1) Isolation of vibration from the driving mechanism : Lateral vibration of the driving mechanism generates the table vibration in the order of several micrometers. By using the aerostatic coupling, the vibration of the driving mechanism is isolated and the table vibration is reduced to the nanometer order.
(2) Improvement of thrust stiffness : The use of the aerostatic coupling is effective for improving the accuracy of the table motion, however, there occurs some decrease in the thrust stiffness of the feed drive device. Active control of the aerostatic thrust bearing in the coupling realizes the infinite thrust stiffness. The effect of the active control on the dynamic thrust stiffness can also be seen to the frequency of 10Hz.
(3) Ultraprecision positioning: The active aerostatic coupling has the function of short-stroke positioning with high-resolution. The experiment of step positioning shows that the positioning resolution of the active aerostatic coupling is 50pm at least. The coupling also controls the micro rotation of the table in the order of μrad. These functions are effective for improving the positioning performance of the ultraprecision positioning system used in the several fields of nanotechnology, such as ultraprecision machine tool, ultraprecision measuring machine, and stepper for LSI.
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