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Multifunction ActiveAerostatic Coupling for Ultraprecision Positioning System

Research Project

Project/Area Number 18560105
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionTottori University

Principal Investigator

MIZUMOTO Hiroshi  Tottori University, Fac. of Engineering, Professor (80108795)

Project Period (FY) 2006 – 2007
Project Status Completed (Fiscal Year 2007)
Budget Amount *help
¥3,870,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥270,000)
Fiscal Year 2007: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2006: ¥2,700,000 (Direct Cost: ¥2,700,000)
KeywordsPositioning / Machine Tool / Aerostatic bearing / Active control / Inherent restrictor / Aerostatic coupling / Nanotechnology
Research Abstract

A multifunction active aerostatic coupling is proposed for improving the performance of ultraprecision positioning system. This aerostatic coupling is characterized to have an active aerostatic thrust bearing and the positioning system employing the coupling has following functions:
(1) Isolation of vibration from the driving mechanism : Lateral vibration of the driving mechanism generates the table vibration in the order of several micrometers. By using the aerostatic coupling, the vibration of the driving mechanism is isolated and the table vibration is reduced to the nanometer order.
(2) Improvement of thrust stiffness : The use of the aerostatic coupling is effective for improving the accuracy of the table motion, however, there occurs some decrease in the thrust stiffness of the feed drive device. Active control of the aerostatic thrust bearing in the coupling realizes the infinite thrust stiffness. The effect of the active control on the dynamic thrust stiffness can also be seen to the frequency of 10Hz.
(3) Ultraprecision positioning: The active aerostatic coupling has the function of short-stroke positioning with high-resolution. The experiment of step positioning shows that the positioning resolution of the active aerostatic coupling is 50pm at least. The coupling also controls the micro rotation of the table in the order of μrad. These functions are effective for improving the positioning performance of the ultraprecision positioning system used in the several fields of nanotechnology, such as ultraprecision machine tool, ultraprecision measuring machine, and stepper for LSI.

Report

(3 results)
  • 2007 Annual Research Report   Final Research Report Summary
  • 2006 Annual Research Report
  • Research Products

    (11 results)

All 2007 2006

All Journal Article (11 results) (of which Peer Reviewed: 4 results)

  • [Journal Article] A Dual-mode Pico-Positioning System using Active Aerostatic Coupling2007

    • Author(s)
      H. Mizumoto, Y. Yabuta, S. Arii, M. Yabuya and Y. Tazoe
    • Journal Title

      International Journal of Precision Engineering and Manufacturing Vol.8,No2

      Pages: 32-37

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Tactics for Picometer Positioning using Active Aerostatic Lubrication2007

    • Author(s)
      H. Mizumoto, Y. Yabuta, S. Arii, Y. Tazoe and Y. Kami
    • Journal Title

      Proceeding of 7th international conference of euspen Vol.1

      Pages: 196-199

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] A Dual-mode Pico-Positioning System using Active Aerostatic Coupling2007

    • Author(s)
      H. Mizumoto, Y. Yabuta, S. Arii, M. Yabuya, Y. Tazoe
    • Journal Title

      Int. J. of Prec. Engg. and Manufacturing Vol. 8, No.2

      Pages: 32-37

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Tactics for Picometer Positioning using Active Aerostatic Lubrication2007

    • Author(s)
      H. Mizumoto, Y. Yabuta, S. Arii, Y. Tazoe, Y. Kami
    • Journal Title

      Proc. of 7th Int. Conf. of euspen Vol. 1

      Pages: 196-199

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] A Dual-mode Pico-Positioning System using Active Aerostatic Coupling2007

    • Author(s)
      H. Mizumoto, Y. Yabuta, S. Arii, M. Yabuya and Y. Tazoe
    • Journal Title

      International Journal of Precision Engineering and Manufacturing Vol.8, No2

      Pages: 32-37

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] ピコメートル位置決めをめざして2007

    • Author(s)
      水本 洋
    • Journal Title

      機械の研究 59巻2号

      Pages: 251-259

    • NAID

      40015254078

    • Related Report
      2007 Annual Research Report
  • [Journal Article] Proposal of Active Aerostatic Coupling for Ultraprecision Positioning System2006

    • Author(s)
      H. Mizumoto, Y. Yabuta, S. Arii Y. Tazoe and Y. Kami
    • Journal Title

      Proceeding of 6th international conference of euspen Vol.1

      Pages: 293-296

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Proposal of Active Aerostatic Coupling for Ultraprecision Positioning System2006

    • Author(s)
      H. Mizumoto, Y. Yabuta, S. Arii, Y. Tazoe,Y. Kami
    • Journal Title

      Proc. of 6th Int. Conf. of euspen Vol. 1

      Pages: 293-296

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Proposal of Active Aerostatic Coupling for Ultraprecision Positioning System2006

    • Author(s)
      H.Mizumoto, Y.Yabuta, S.Arii, Y.Tazoe, Y.Kami
    • Journal Title

      Proceeding of 6^<th> international conference of euspen Vol.1

      Pages: 293-296

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Dual-mode pico-positioning system using active aerostatic coupling2006

    • Author(s)
      H.Mizumoto, Y.Yabuta, S.Arii, M.Yabyua, Y.Tazoe
    • Journal Title

      Proceeding of 2nd International Conference of Positioning Technology Vol.1

      Pages: 146-151

    • Related Report
      2006 Annual Research Report
  • [Journal Article] An Improvement of Control Tactics for Pico-Positioning System2006

    • Author(s)
      T.Fujita, H.Mizumoto, S.Arii, Y.Tazoe
    • Journal Title

      Proceeding of 2nd International Conference of Production and Manufacturing Technology Vol.1

      Pages: 189-192

    • Related Report
      2006 Annual Research Report

URL: 

Published: 2006-04-01   Modified: 2016-04-21  

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