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Micro-cooler on the wafer

Research Project

Project/Area Number 18560203
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Thermal engineering
Research InstitutionKyushu University

Principal Investigator

KUBOTA Hiromi  Kyushu University, Faculty of Engineering, Assistant Professor (10117103)

Co-Investigator(Kenkyū-buntansha) TAKATA Yasuyuki  Kyushu University, Faculty of Engineering, Professor (70171444)
Project Period (FY) 2006 – 2007
Project Status Completed (Fiscal Year 2007)
Budget Amount *help
¥3,580,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥180,000)
Fiscal Year 2007: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2006: ¥2,800,000 (Direct Cost: ¥2,800,000)
KeywordsMicro Device / Refrigerator / Wafer
Research Abstract

Joule-Thompson micro-cooler was fabricated firstly on a silicon wafer using photo-fabrication technology and the fundamental performance was measured using ethylene as a refrigerant. Since the result, in which the excellent thermal conductivity of a silicon wafer had the bad influence on the fundamental performances, was obtained, Joule-Thompson micro-cooler was fabricated on the photo-sensitive glass using same photo-fabrication technology and the fundamental performances was also measured. However, the improvement on the performance by reduction of the heat invasion to the cooling unit was not confirmed nevertheless the photo-sensitive glass was used. This might be because of the reduction of the cross sectional area of a channel due to invasion of the water-glass to a channel in case of adhesion of a photo-sensitive glass heat exchanger by water glass. Moreover, the size and form after etching were different for the heat exchangers using photo-sensitive glass and silicone. In order to consider strictly the difference in the heat exchanger performance by the quality of the material, it is necessary to arrange factors other than the quality of the materials, such as a size, as much as possible, and to compare them. Moreover, improvement in the accuracy of glass heat exchanger fabrication is indispensable on the whole. Next, the heat exchanger which has a micro channel like a micro-cooler shows different thermal conductivity characteristics from the usual size heat exchanger, due to the size effect of the channel. The heat exchanger which has a micro channel was modeled and numerical analysis of the heat flow was conducted. It turns out that the mass flow rate at the time of the present experiment is too large as a result, and it seems that the temperature effectiveness will improve if a mass flow rate is decreased and the thermal conductivity of a heat exchanger material is made small.

Report

(3 results)
  • 2007 Annual Research Report   Final Research Report Summary
  • 2006 Annual Research Report
  • Research Products

    (8 results)

All 2007 2006

All Journal Article (3 results) Presentation (5 results)

  • [Journal Article] ジュール・トムソン型マイクロ冷凍機の基礎研究2006

    • Author(s)
      藤井智明, 須賀原光喜, 立川孝幸, 久保田裕己, 河野正道, 高橋厚史, 高田保之
    • Journal Title

      第43回日本伝熱シンポジウム講演論文集 III

      Pages: 657-658

    • Related Report
      2006 Annual Research Report
  • [Journal Article] ジュール・トムソン型マイクロ冷凍機2006

    • Author(s)
      河野正道, 藤井智明, 須賀原光喜, 立川孝幸, 久保田裕己, 高橋厚史, 高田保之
    • Journal Title

      第11回動力・エネルギー技術シンポジウム講演論文集 06-8

      Pages: 159-160

    • Related Report
      2006 Annual Research Report
  • [Journal Article] ジュール・トムソン型マイクロ冷凍機の基礎研究2006

    • Author(s)
      立川孝幸, 須賀原光喜, 諸江将吾, 久保田裕己, 河野正道, 高橋厚史, 高田保之
    • Journal Title

      熱工学コンファレンス講演論文集 06-2

      Pages: 293-294

    • Related Report
      2006 Annual Research Report
  • [Presentation] ジュール・トムソン型マイクロ冷凍機に関する研究2007

    • Author(s)
      立川 孝幸, 久保田 裕巳, 他
    • Organizer
      第12回動力・エネルギー技術シンポジウム
    • Place of Presentation
      東京海洋大学海洋工学部
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] MICRO-REFRIGERATOR FABRICATED ON SILICON WAFER2007

    • Author(s)
      Y.Takata, H.Kubota, et. al.
    • Organizer
      Fifth International Conbrence on Nanochannels, Microchannels and Minichannels
    • Place of Presentation
      Universidad De Las Americas Puebla,Mexico
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Study of Joul-Thomson micro-cooler2007

    • Author(s)
      T., Tachikawa, H., Kubota, et. al.
    • Organizer
      Power and Energy System Division/The Japanese Society of Mechanical Engineering
    • Place of Presentation
      Tokyo Univ. of Marine Science and Technology
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] MICRO-REFRIGERATOR FABRICATED ON SILICON WAFER2007

    • Author(s)
      Y., Takata, H., Kubota, et. al.
    • Organizer
      Fifth International Conference on nochannels, Microchannels and Minichannels
    • Place of Presentation
      Universidad De Las Americas Puebla, Mexico
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] MICRO-REFRIGERATOR FABRICATED ON SILICON WAFER2007

    • Author(s)
      Y. Takata, H. Kubota, et. al.
    • Organizer
      Fifth International Conference on Nanochannels, Microchannels and Minichannels
    • Place of Presentation
      Universidad De Las Americas Puebla,Mexico
    • Related Report
      2007 Annual Research Report

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Published: 2006-04-01   Modified: 2016-04-21  

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