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Development of continuous flowing high density plasma source in the atmospheric pressure?

Research Project

Project/Area Number 18560268
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 電力工学・電気機器工学
Research InstitutionSaitama University

Principal Investigator

MAEYAMA Mitsuaki  Saitama University, GRADUATE SCHOOL OF SCIENCE AND ENGINEERING, ASSOCIATE PROFESSOR (00196875)

Co-Investigator(Kenkyū-buntansha) KOBAYASHI Shinichi  SAITAMA UNIVERSITY, GRADUATE SCHOOL OF SCIENCE AND ENGINEERING, PROFESSOR (40008876)
YAMANOU Yasushi  SAITAMA UNIVERSITY, GRADUATE SCHOOL OF SCIENCE AND ENGINEERING, ASSISTANT PROFESSOR (30323380)
Project Period (FY) 2006 – 2007
Project Status Completed (Fiscal Year 2007)
Budget Amount *help
¥3,560,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2007: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2006: ¥2,000,000 (Direct Cost: ¥2,000,000)
KeywordsPlasma / atmospheric pressure plasma / micro hollow cathode discharge / MHCD / MCS discharge / parallel MCS discharge / WIPS discharge / MHCD / 並列MCS放電
Research Abstract

The micro hollow cathode discharge (MHCD) is a promising one to generate a atmospheric pressure glow plasma. And, to produce 3-dimensional large volume and atmospheric pressure glow plasma, parallel operations of the micro-cathode sustained (MCS) discharge is required. In this study, we demonstrated parallel MCS discharges in flat plate and cylindrical geometries, as follow,
1: Demonstration of stable parallel MHCD Comparing current-voltage characteristics of MHCD of several dielectric materials (mica, Teflon, FR-4), MHCD electrode using FR-4 has a long lifetime and wide discharge current range over 100mA.2: Resolving operating conditions of parallel MCS discharge Injecting large amount of plasma from MHCD electrodes to MCS discharge region, the break down and the sustaining voltages of MCS discharge is demonstrated to be controlled by the current value of MHCD. And using these conditions, parallel MCS discharges of flat plate electrodes, furthermore cylindrical shaped electrode which suites well for the continuous gas treatment applications.

Report

(3 results)
  • 2007 Annual Research Report   Final Research Report Summary
  • 2006 Annual Research Report
  • Research Products

    (14 results)

All 2007 2006

All Journal Article (5 results) Presentation (9 results)

  • [Journal Article] 並列MHCDを利用した大容積プラズマ源に与える単一MHCDの影響2007

    • Author(s)
      石ヶ谷 章弘
    • Journal Title

      平成19年電気学会全国大会 講演予稿集 1

      Pages: 69-69

    • Related Report
      2006 Annual Research Report
  • [Journal Article] 圧力情報の追加による磁気面内部補間解析の収束性の検討2007

    • Author(s)
      岩崎 正浩
    • Journal Title

      平成19年電気学会全国大会 講演予稿集 1

      Pages: 232-232

    • Related Report
      2006 Annual Research Report
  • [Journal Article] 並列MHCDを利用した大容積プラズマ源に与える単一MHCDの影響2006

    • Author(s)
      石ヶ谷 章弘
    • Journal Title

      (社)プラズマ・核融合学会 第23回年回予稿集

      Pages: 122-122

    • Related Report
      2006 Annual Research Report
  • [Journal Article] 磁気閉じ込めプラズマの磁気面内部補間解析における圧力情報の効果の検討2006

    • Author(s)
      前山 光明
    • Journal Title

      (社)プラズマ・核融合学会 第23回年回予稿集

      Pages: 111-111

    • Related Report
      2006 Annual Research Report
  • [Journal Article] 未知関数の違いによる磁気面内部補間解析の収束性の検討2006

    • Author(s)
      前山 光明
    • Journal Title

      (社)プラズマ・核融合学会 第23回年回予稿集

      Pages: 231-231

    • Related Report
      2006 Annual Research Report
  • [Presentation] 大気圧,大容積プラズマ源のためのマイクロホローカソード放電2007

    • Author(s)
      石ケ谷章弘
    • Organizer
      第24回プラズマ・核融合学会年会
    • Place of Presentation
      姫路
    • Year and Date
      2007-11-29
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] Micro Hollow Cathode Discharge for Large Volume and Atmospheric Pressure Glow Plasma Source2007

    • Author(s)
      A. Ishigaya
    • Organizer
      JSPF 23th Annual Meeting of JSPS
    • Place of Presentation
      Himeji
    • Year and Date
      2007-11-29
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Parallel operation of micro-hollow-cathode sustained discharge2007

    • Author(s)
      M. Maeyama
    • Organizer
      28th Int. Conf. On Phenomena in Ionized Gases
    • Place of Presentation
      チェコ共和国、プラハ
    • Year and Date
      2007-07-17
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Parallel operation of micro-hollow-cathode sustained discharge2007

    • Author(s)
      M. Maeyama
    • Organizer
      28th Int, Conf. On Phenomena in Ionized Gases
    • Place of Presentation
      チェコ共和国、プラハ
    • Year and Date
      2007-07-17
    • Related Report
      2007 Annual Research Report
  • [Presentation] 並列MHCDを利用した大容量プラズマ源に与える単-MHCDの影響2007

    • Author(s)
      石ケ谷章弘
    • Organizer
      平成19年電気学会全国大会
    • Place of Presentation
      冨山
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Parallel operation of micro-hollow-cathode sustained discharge2007

    • Author(s)
      M. Maeyama
    • Organizer
      28th Int. Conf. On Phenomena in Ionized Gases
    • Place of Presentation
      Prague (Czech)
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Effects of one MHCD to the Large Volume Plasma using parallel MHCDs2007

    • Author(s)
      A. Ishigaya
    • Organizer
      2007 National convention record I. E. E. Japan
    • Place of Presentation
      Toyama
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 並列MHCDを利用した大容量プラズマ源に与える単-MHCDの影響2006

    • Author(s)
      石ケ谷章弘
    • Organizer
      第23回ラズマ・核融合学会年会
    • Place of Presentation
      つくば
    • Year and Date
      2006-11-29
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Effects of one MHCD to the Large Volume Plasma using parallel MHCDs2006

    • Author(s)
      A. Ishigaya
    • Organizer
      JSPF 23th Annual Meeting of JSPS
    • Place of Presentation
      Tsukuba
    • Year and Date
      2006-11-29
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary

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Published: 2006-04-01   Modified: 2016-04-21  

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