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DEVELOPMENT OF NEW ULTRASONIC SENSORS UTILIZING EVANESCENT ACOUSTIC FIELDS

Research Project

Project/Area Number 18560324
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionTohoku Gakuin University

Principal Investigator

YAMADA KEN  Tohoku Gakuin University, DEPARTMENT OF ELECTRONIC ENGINEERING, PROFESSOR (80134021)

Co-Investigator(Kenkyū-buntansha) HOSHIMIYA TSUTOMU  TOHOKU GAKUIN UNIVERSITY, DEPARTMENT OF ELECTRONIC ENGINEERING, PROFESSOR (40118336)
Project Period (FY) 2006 – 2007
Project Status Completed (Fiscal Year 2007)
Budget Amount *help
¥3,840,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥240,000)
Fiscal Year 2007: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2006: ¥2,800,000 (Direct Cost: ¥2,800,000)
Keywordsmeasurement system / functional device / electronic devices / ultrasonic sensor / evanescent wave / energy-trapping / air-film damning / エネルギー閉じ込め共振子 / 分布定数等価回路
Research Abstract

1. Proximity sensing through the air-film damping effect caused by a longitudinal-mode piezoelectric vibrator has been studied. The vibrator is composed of a thin bar cut out from a 140° rotated Y-cut LiNbO_3 wafer having a glass plate on one end. The glass plate is approached to an acrylic plate served as a test object. It has been found for the vibrator operating at the first resonant frequency of 80.9 kHz that the Q-value decreases markedly from 8,000 to 1,000 in the range where the vibrator-to-object distance d is less than 0.5 mm.
2. For the case of operation at the second mode having two nodal lines, the initial Q-value decreases to 3, 500. However, the vibrator can be supported more steadily than that in the case of the first mode operation. From these results, it has been confirmed that the proposed system utilizing the air-film damping effect can be applied for a proximity sensor.
3. Trapped-energy mode thickness vibrators have been fabricated and applied for liquid level sensor … More s. When the surrounding region of the trapped-energy-mode vibrators, where the vibration energy decays exponentially with distance, is immersed in a liquid, the electric conductance G varies depending on the immersion depth. The experiments carried out using a thickness-extensional-mode vibrator operating at the resonance frequency of 2.01 MHz have shown that the G-value varies almost linearly with the immersion depth. It has also been found that the use of thickness-shear-mode vibrators is effective for liquids having high viscosity.
4. Equivalent network representation has been derived for length-extensional vibration modes in a side-plated piezoelectric bar with a varying parameter along it. The network model is applicable to the simulation of the operation of vibrators that have a special electrode form devised for suppressing overtone modes. The model is also effective for modeling the operation of interdigital transducers (IDTs) for excitation and detection of surface acoustic waves (SAWs). Less

Report

(3 results)
  • 2007 Annual Research Report   Final Research Report Summary
  • 2006 Annual Research Report
  • Research Products

    (24 results)

All 2008 2007 2006

All Journal Article (17 results) (of which Peer Reviewed: 3 results) Presentation (7 results)

  • [Journal Article] Basic Study o Proximity sensors Utilizing Air-Film Damping Effect Caused by Longitudinal-Mode Piezoelectric Vibrator2008

    • Author(s)
      Ken YAMADA
    • Journal Title

      Japanese Journal of Applied Physics Vol.47 5B(印刷中)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Basic Study o Proximity sensors Utilizing Air-Film Damping Effect Caused by Longitudinal-Mode Piezoelectric Vibrator2008

    • Author(s)
      Ken, YAMADA, Shou, KANEKO, Tatsuya, NAGASAWA
    • Journal Title

      Japanese Journal of Applied Physics Vol. 47 5B(to be published)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Equivalent Network Representation for Length-Extensional VibrationMode s in Side-Plated Piezoelectric Bar with Varying Parameter Operating through Transverse Piezoelectric Effect2007

    • Author(s)
      Ken YAMADA
    • Journal Title

      I Japanese Journal of Applied Physics Vol.46 7B

      Pages: 4675-4678

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Basic Study on Proximity Sensors Utilizing Air-Film Damping Effect Caused by Longitudinal-Mode Piezoelectric Vibrator2007

    • Author(s)
      Ken YAMADA
    • Journal Title

      Proceedings of the 28th Symposium on Ultrasonic Electronics Vol.28

      Pages: 361-362

    • NAID

      210000064864

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] 圧電定数に分布を持つ圧電板の横効果振動モードに対する分布定数等価回路表示2007

    • Author(s)
      山田 顕
    • Journal Title

      超音波テクノ Vol.19 No.6

      Pages: 70-73

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Journal Article] Equivalent Network Representation for Length-Extensional Vibration Modes in Side-Plated Piezoelectric Bar with Varying Parameter Operating through Transverse Piezoelectric Effect2007

    • Author(s)
      Ken, YAMADA
    • Journal Title

      Japanese Journal of Applied Physics Vol. 46 7B

      Pages: 4675-4678

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Basic Study on Proximity Sensors Utilizing Air-Film Damping Effect Caused by Longitudinal-Mode Piezoelectric Vibrator2007

    • Author(s)
      Ken, Yamada, Shou, Kaneko, Tatsuya, Nagasawa
    • Journal Title

      Proceedings of the 28th Symposium on Ultrasonic Electronics Vol. 28

      Pages: 361-362

    • NAID

      210000064864

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Equivalent Network Representation for Length-Extensional Vibration Ken YAMADA(Modes in Side-Plated Piezoelectric Bar with Varying Parameter Operating through Transverse Piezoelectric Effect2007

    • Author(s)
      Ken YAMADA
    • Journal Title

      Japanese Journal of Applied Physics Vol.46 7B

      Pages: 4675-4678

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Basic Study on Proximity Sensors Utilizing Air-Film Damping Effect Caused by Longitudinal-Mode Piezoelectric Vibrator2007

    • Author(s)
      Ken YAMADA
    • Journal Title

      Proc.of Symposium on Ultrasonic Electronics Vol.28

      Pages: 361-362

    • NAID

      210000064864

    • Related Report
      2007 Annual Research Report
  • [Journal Article] 圧電定数に面内分布を持つ圧電板における横効果伸び振動モードの等価回路表示について2007

    • Author(s)
      山田 顕
    • Journal Title

      圧電材料・デバイスシンポジウム2007

      Pages: 27-30

    • Related Report
      2006 Annual Research Report
  • [Journal Article] 圧電定数に分布を持つ圧電板における横効果伸び振動の等価回路表示2007

    • Author(s)
      山田 顕
    • Journal Title

      日本音響学会講演論文集

      Pages: 1111-1112

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Equivalent Network Representation for Length-Extensional Vibration Modes in a Side-Plated Piezoelectric Bar with a Varying Parameter Operating through the Transverse Piezoelectric Effect2006

    • Author(s)
      Ken YAMADA
    • Journal Title

      Proceedings of the 27th Symposium on Ultrasonic Electronics Vol.27

      Pages: 83-84

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Equivalent network representation for length-extensional vibration modes in a side-plated piezoelectric bar with a varying parameter2006

    • Author(s)
      Ken Yamada
    • Journal Title

      The Journal of the Acoustical Society of America Vol.120,No.5,Pt.2

      Pages: 3113-3113

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Equivalent Network Representation for Length-Extensional Vibration Modes in a Side-Plated Piezoelectric Bar with a Varying Parameter Operating through the Transverse Piezoelectric Effect2006

    • Author(s)
      Ken, YAMADA
    • Journal Title

      Proceedings of the 27th Symposium on Ultrasonic Electronics Vol. 27

      Pages: 83-84

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Equivalent network representation for length-extensional vibration modes in a side-plated piezoelectric bar with a varying parameter2006

    • Author(s)
      Ken, Yamada
    • Journal Title

      Journal of the Acoustical Society of America Vol. 120, No. 5, Pt. 2

      Pages: 3113-3113

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Equivalent Network Representation for Length-Extensional Vibration Modes in a Side-Plated Piezoelectric Bar with a Varying Parameter Operating through the Transverse Piezoelectric Effect.2006

    • Author(s)
      Ken YAMADA
    • Journal Title

      Proceedings of the 27th Symposium on Ultrasonic Electronics Vol.27

      Pages: 83-84

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Equivalent network representation for length-extensional vibration modes in a side-plated piezoelectric bar with a varying parameter.2006

    • Author(s)
      Ken Yamada
    • Journal Title

      The Journal of the Acoustical Society of America Vol.120, No.5, Pt.2

      Pages: 3113-3113

    • Related Report
      2006 Annual Research Report
  • [Presentation] Basic study on proximity sensing utilizing air-film damping effect caused by longitudinal-mode piezoelectric vibrator2008

    • Author(s)
      Ken, YAMADA, Shou, KANEKO, Tatsuya, NAGASAWA
    • Organizer
      Spring Meeting of the Acoustical Society of Japan
    • Place of Presentation
      Chiba, Japan
    • Year and Date
      2008-03-18
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] エアフィルム・ダンピング効果を用いた近接度センシングの基礎実験-圧電伸び振動モードの利用2008

    • Author(s)
      山田 顕
    • Organizer
      日本音響学会春季研究発表会
    • Place of Presentation
      千葉工業大学(津田沼)
    • Year and Date
      2008-03-18
    • Related Report
      2007 Annual Research Report
  • [Presentation] Basic Study on Proximity Sensors Utilizing Air-Film Damping Effect Caused by Longitudinal-Mode Piezoelectric Vibrator2007

    • Author(s)
      Ken, Yamada, Shou, Kaneko, Tatsuya, Nagasawa
    • Organizer
      28th Symposium on Ultrasonic Electronics
    • Place of Presentation
      Tsukuba, Japan
    • Year and Date
      2007-11-16
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Equivalent network representation for length-extensional vibration modes in a side-plated piezoelectric bar with a varying parameter operating through the transverse piezoelectric effect2007

    • Author(s)
      KEN, YAMADA
    • Organizer
      Spring Meeting of the Acoustical Society of Japan
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2007-03-14
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Equivalent Network Representation for Length-Extensional Vibration Modes in a Side-Plated Piezoelectric Bar with a Varying Parameter Operating through the Transverse Piezoelectric Effect2007

    • Author(s)
      KEN, YAMADA
    • Organizer
      Piezoelectric Materials and Devices Symposium 2007
    • Place of Presentation
      Sendai, Japan
    • Year and Date
      2007-01-29
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Equivalent network representation for length-extensional vibration modes in a side-plated piezoelectric bar with a varying parameter2006

    • Author(s)
      Ken, Yamada
    • Organizer
      4th Joint Meeting of the Acoustical Society of America and the Acoustical Society of Japan
    • Place of Presentation
      Honolulu, USA
    • Year and Date
      2006-11-29
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Equivalent Network Representation for Length-Extensional Vibration Modes in a Side-Plated Piezoelectric Bar with a Varying Parameter Operating through the Transverse Piezoelectric Effect2006

    • Author(s)
      Ken, YAMADA
    • Organizer
      27th Symposium on Ultrasonic Electronics
    • Place of Presentation
      Nagoya, Japan
    • Year and Date
      2006-11-15
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary

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Published: 2006-04-01   Modified: 2016-04-21  

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